Patents Represented by Attorney Martine Penilla Group, LLP
  • Patent number: 8309470
    Abstract: Methods, apparatus, and systems are provided for efficiently reclaiming solvents used to clean surfaces of semiconductor wafers, etc. More particularly, embodiments of the present invention provide an in-situ reclaim approach that utilizes condensing mechanisms to reclaim evaporated solvent components. In these embodiments, the condensing can occur within a proximity head itself and/or along a vacuum line running from the proximity head to a vacuum tank. Other embodiments of the present invention provide an in-situ reclaim approach that prevents the evaporation of solvents at the onset by maintaining appropriate equilibrium gas phase concentrations between the liquid chemistries and gases used to process wafer surfaces.
    Type: Grant
    Filed: December 18, 2006
    Date of Patent: November 13, 2012
    Assignee: Lam Research Corporation
    Inventor: Robert O'Donnell
  • Patent number: 8312473
    Abstract: Provided is a method and an apparatus for selectively returning parameters from an invoked object. Specifically, a requestor can invoke an object by transmitting a message. The message can include specified return parameters from an interface, such as an interface definition language (IDL). Alternatively, an object stub locally accessible by the requester can be invoked. The object stub, similar to the IDL, can specify the parameters to return. After the execution of a method in the invoked object, the requestor receives the return parameters or a subset of the return parameters previously selected.
    Type: Grant
    Filed: April 26, 2004
    Date of Patent: November 13, 2012
    Assignee: Sony Computer Entertainment Inc.
    Inventors: John Paul Bates, Payton R. White
  • Patent number: 8303763
    Abstract: Apparatus and methods are provided for monitoring a pulsed RF bias signal applied to a chuck in a processing chamber. One method includes operations for detecting voltage values of individual pulses of the pulsed RF bias voltage, and for determining the time for sampling the value of each individual detected pulse. At the sampling time for each pulse, a particular voltage value of the respective individual detected pulse is sampled and the particular voltage value is held. Each particular voltage value represents a characteristic peak-to-peak voltage value of each individual detected pulse. A feedback signal representing the characteristic peak-to-peak voltage value for a voltage envelope of one of the individual detected pulses is generated, and the voltage of the pulsed RF bias voltage signal applied to the chuck is adjusted according to a difference between the feedback signal and a desired voltage value of the pulsed RF bias voltage signal.
    Type: Grant
    Filed: April 25, 2012
    Date of Patent: November 6, 2012
    Assignee: Lam Research Corporation
    Inventors: Andras Kuthi, Stephen Hwang, James C. Vetter, Greg Eilenstine, Rongping Wang, Tuan Ngo
  • Patent number: 8298614
    Abstract: An improved vapor-phase deposition method and apparatus for the application of multilayered films/coatings on substrates is described. The method is used to deposit multilayered coatings where the thickness of an oxide-based layer in direct contact with a substrate is controlled as a function of the chemical composition of the substrate, whereby a subsequently deposited layer bonds better to the oxide-based layer. The improved method is used to deposit multilayered coatings where an oxide-based layer is deposited directly over a substrate and a SAM organic-based layer is directly deposited over the oxide-based layer. Typically a series of alternating layers of oxide-based layer and organic-based layer are applied.
    Type: Grant
    Filed: November 4, 2010
    Date of Patent: October 30, 2012
    Assignee: Applied MicroStructures, Inc.
    Inventors: Boris Kobrin, Jeffrey D. Chinn, Romuald Nowak, Richard C. Yi
  • Patent number: 8299390
    Abstract: A number of RF power transmission paths are defined to extend from an RF power source through a matching network, through a transmit electrode, through a plasma to a number of return electrodes. A number of tuning elements are respectively disposed within the number of RF power transmission paths. Each tuning element is defined to adjust an amount of RF power to be transmitted through the RF power transmission path within which the tuning element is disposed. A plasma density within a vicinity of a particular RF power transmission path is directly proportional to the amount of RF power transmitted through the particular RF power transmission path. Therefore, adjustment of RF power transmitted through the RF power transmission paths, as afforded by the tuning element, enables control of a plasma density profile across a substrate.
    Type: Grant
    Filed: January 29, 2010
    Date of Patent: October 30, 2012
    Assignee: Lam Research Corporation
    Inventors: Rajinder Dhindsa, Felix Kozakevich, Lumin Li, Dave Trussell
  • Patent number: 8298325
    Abstract: A non-aqueous electroless copper plating solution that includes an anhydrous copper salt component, an anhydrous cobalt salt component, a non-aqueous complexing agent, and a non-aqueous solvent is provided.
    Type: Grant
    Filed: February 8, 2010
    Date of Patent: October 30, 2012
    Assignee: Lam Research Corporation
    Inventors: Eugenijus Norkus, Jane Jaciauskiene, Yezdi Dordi
  • Patent number: 8292697
    Abstract: A carrier structure for supporting a substrate when being processed by passing the carrier through a meniscus formed by upper and lower proximity heads is described. A method of manufacturing the carrier further described. The method includes forming a composite frame having a carbon fiber core, a top sheet, a bottom sheet, a layer of aramid fabric between the top sheet and the core and a second layer of aramid fabric between the bottom sheet and the core. The top sheet and the bottom are each formed from a polymer material. The method further includes forming an opening sized for receiving a substrate and providing a plurality of support pins extending into the opening for supporting the substrate within the opening. The opening is formed slightly larger than the substrate such that a gap exists between the substrate and the opening.
    Type: Grant
    Filed: February 23, 2012
    Date of Patent: October 23, 2012
    Assignee: Lam Research Corporation
    Inventors: Wing Lau Cheng, Helen Cheng, legal representative, Arnold Kholodenko
  • Patent number: 8296509
    Abstract: A method of executing an erasing instruction to erase host data from a flash memory device is provided. The method initiates with receiving from a host device an erase instruction to erase host data from an array of NAND flash memory cells grouped into separately-erasable device blocks, each device block including multiple device pages, the host data being a portion of device data that is stored in a device block. The host data is marked as erased, and a message is sent to the host device indicating that the host data has been erased.
    Type: Grant
    Filed: July 12, 2011
    Date of Patent: October 23, 2012
    Assignee: SanDisk IL Ltd.
    Inventors: Shahar Bar-Or, Alon Marcu, Ori Stern, Dan Inbar
  • Patent number: 8296261
    Abstract: A file synchronization system that includes a non-volatile memory for storing at least one bookmark respective to a file; a telecommunication mechanism for receiving a new bookmark value respective to this file; and a controller operative to update the respective bookmark according to the new bookmark value; and to control presentation of the file in accordance with the updated bookmark value. A plurality of bookmarks that associate to a single file are stored in the file synchronization system, each such bookmark respective to a different user.
    Type: Grant
    Filed: February 27, 2007
    Date of Patent: October 23, 2012
    Assignee: Sandisk IL Ltd.
    Inventor: Itzhak Pomerantz
  • Patent number: 8295549
    Abstract: A peripheral device for communicating with a computer gaming system having an image capture device associated therewith is provided. The image capture device is configured to capture image data of the peripheral device and the computer system is configured to exchange wireless communication data with the peripheral device. The peripheral device includes a body having a first location and a second location, where the first location is defined for a first light emitting object and the second location is defined for a second light emitting object. The first and second illuminating objects having a size that is identifiable in captured image data. The first location on the body is at a fixed predetermined distance from the second location. The peripheral device includes one or more buttons, and circuitry interfaced with the first and second light emitting objects.
    Type: Grant
    Filed: August 12, 2011
    Date of Patent: October 23, 2012
    Assignee: Sony Computer Entertainment Inc.
    Inventors: Richard L. Marks, Xiadong Mao, Gary M. Zalewski
  • Patent number: 8291921
    Abstract: In an example embodiment, a top proximity head for depositing fluids on a semiconductor wafer includes a delivery bore which receives fluid. The top proximity head includes a plenum that is connected to the delivery bore by numerous input channels into which fluid flows from the delivery bore. Each input channel has an inverted V-shaped opening which urges the upward flow of any air bubbles. From the plenum, the fluid flows through output channels out of the top proximity head to form a meniscus. The fluid is suctioned from the meniscus back into the top proximity head through return channels that lead to a return bore. A passage connects the delivery bore with the return bore, allowing air bubbles to escape from the delivery bore into the return bore. The passage allows a negligible amount of fluid to flow directly between the two bores rather than through the plenum.
    Type: Grant
    Filed: August 19, 2008
    Date of Patent: October 23, 2012
    Assignee: Lam Research Corporation
    Inventors: Encrico Magni, Russell Martin
  • Patent number: 8290920
    Abstract: In one embodiment, accessing, using a computing device, a batch file comprising a plurality of events generated by a remote game client application executing an instance of a computer-implemented game; accessing, in response to the batch file, a game state data object associated with the instance of the computer-implemented game, wherein the game state data object includes one or more game state parameters formatted as serialized unstructured data; parsing the game state data object to identify the one or more game state parameters; processing the plurality of events in the batch file against game logic to update one or more of the game state parameters; re-serializing the one or more game state parameters into an updated game state data object; and storing the game state data object in a memory cache.
    Type: Grant
    Filed: September 9, 2010
    Date of Patent: October 16, 2012
    Assignee: Zynga Inc.
    Inventors: Amitt Mahajan, Sifang Lu, Luke Thomas Rajlich, Timothy D. Wang
  • Patent number: 8287729
    Abstract: A lightweight water treatment system which can be easily distributed and employed by disaster survivors for treating locally available freshwater sources. The water treatment system includes an internal storage volume for maintaining a predetermined volume of water, a water fill port in communication with the internal storage volume provided at a first end of the elongated container for receiving the predetermined volume of water, a sealing member disposed at about the first end of the elongated container for maintaining the volume of water within the internal storage volume, a second end of the elongated container for receiving sediment settling out of the predetermined volume of water and a discharge port disposed superjacent to the second conically-shaped end for controllably releasing at least a portion of the water maintained within the internal storage volume of the elongated container.
    Type: Grant
    Filed: April 5, 2009
    Date of Patent: October 16, 2012
    Assignee: California Polytechnic Corporation
    Inventors: Trygrve J Lundquist, Patricia M. Compas
  • Patent number: 8290145
    Abstract: In a method for the transition from a first masked representation of a value to be kept secret to a second masked representation of the value, according to a first aspect of the invention at least one previously calculated table with a plurality of entries is used, and the calculation is carried out depending on at least one veiling parameter, in order to prevent the value to be kept secret from being spied out. According to a second aspect of the invention, at least one comparison table is used, which, for each table index, provides the result of a comparison between a value dependent on the table index and a value dependent on at least one masking value. A computer program product and a device have corresponding features. The invention provides a technique for protecting the transition between masked representations of a value from being spied out, wherein the masked representations are based on different masking rules.
    Type: Grant
    Filed: September 3, 2004
    Date of Patent: October 16, 2012
    Assignee: Giesecke & Devrient GmbH
    Inventors: Olaf Neisse, Jürgen Pulkus
  • Patent number: 8287373
    Abstract: Methods and systems for interfacing a control device with a computer program executing at a base computing device are presented. The method generates a visual cue at a spherical section of the control device and captures an image of the visual cue using an image capture device connected to the base computing device. Further, the method determines whether the visual cue is user feedback or input for the computer program, and processes the visual cue at the base computing device when the visual cue is an input. Additionally, a state of an object being processed is updated by the computer program in response to the input to drive interactivity with the computer program via the control device.
    Type: Grant
    Filed: April 17, 2009
    Date of Patent: October 16, 2012
    Assignee: Sony Computer Entertainment Inc.
    Inventors: Richard Marks, Anton Mikhailov, Ennin Huang, Gary M. Zalewski
  • Patent number: 8287656
    Abstract: Methods for monitoring meniscus processing of a wafer surface to stabilize a meniscus are provided. In one example, the processing is in response to a current recipe that defines a desired gap between the wafer surface and a proximity head. The method includes the operations of monitoring current meniscus processing to determine that a current gap is other than the desired gap, and identifying a calibration recipe that specifies the current gap. The method then continues the meniscus processing of the wafer surface using process parameters specified by the identified calibration recipe.
    Type: Grant
    Filed: September 22, 2011
    Date of Patent: October 16, 2012
    Assignee: Lam Research Corporation
    Inventors: G. Grant Peng, Cristian Paduraru, Katrina Mikhaylich
  • Patent number: 8290982
    Abstract: Computer-implemented methods for defining access to brand related assets are provided. One method includes generating a website that relates to a specific brand, where the specific brand is associated with a plurality of assets that are integrated with the website, and the plurality of assets are obtained from a number of disparate sources. The method also includes assigning each asset an identifier, where the identifier defines a relation of each asset to the specific brand and defining a dashboard access to the specific brand. The dashboard access is configured to identify a user privilege for accessing specific ones of the plurality of assets of the specific brand, the user privilege enabling one or more of viewing details of an existing asset, adding a new asset, and modifying an existing asset.
    Type: Grant
    Filed: September 27, 2007
    Date of Patent: October 16, 2012
    Assignee: Yahoo! Inc.
    Inventors: Ankarino Lara, Scott Bedard, Anthony D. Chen, Shravan K. Goli, Alexei Stoliartchouk
  • Patent number: 8287647
    Abstract: The embodiments provide apparatus and methods of depositing conformal thin film on interconnect structures by providing processes and systems using an atomic layer deposition (ALD). More specifically, each of the ALD systems includes a proximity head that has a small reaction volume right above an active process region of the substrate surface. The proximity head dispenses small amount of reactants and purging gas to be distributed and pumped away from the small reaction volume between the proximity head and the substrate in relatively short periods, which increases the through-put. In an exemplary embodiment, a proximity head for dispensing reactants and purging gas to deposit a thin film by atomic layer deposition (ALD) is provided. The proximity head is configured to sequentially dispensing a reactant gas and a purging gas to deposit a thin ALD film under the proximity head. The proximity head covers an active process region of a substrate surface.
    Type: Grant
    Filed: April 17, 2007
    Date of Patent: October 16, 2012
    Assignee: Lam Research Corporation
    Inventors: Hyungsuk Alexander Yoon, Mikhail Korolik, Fritz C. Redeker, John M. Boyd, Yezdi Dordi
  • Patent number: 8290717
    Abstract: In a plasma processing chamber, a method and an arrangement to stabilize pressure are provided. The method includes providing coarse pressure adjustments in an open-loop manner and thereafter providing fine pressure adjustments in a closed-loop manner. The coarse pressure adjustments are performed by rapidly re-position confinement rings employing an assumed linear relationship between the conductance and the confinement rings position to bring the pressure in the plasma generating region quickly to roughly a desired set point. The fine pressure adjustments are performed by at least employing mechanical vacuum pump(s), turbo pump(s), confinement ring positioning and/or combinations thereof to achieve a derive pressure set point.
    Type: Grant
    Filed: February 6, 2009
    Date of Patent: October 16, 2012
    Assignee: Lam Research Corporation
    Inventors: Rajinder Dhindsa, James H. Rogers
  • Patent number: 8289700
    Abstract: Apparatuses, methods, and systems directed to efficient cooling of data centers. Some embodiments of the invention allow encapsulation of cold rows through an enclosure and allow server fans to draw cold air from the cold row encapsulation structure to cool servers installed on the server racks. In other particular embodiments, the systems disclosed can be used to mix outside cool air into the cold row encapsulation structure to cool the servers. In some embodiments, the present invention involves using multiple cold row encapsulation structures to cool the servers installed on the racks.
    Type: Grant
    Filed: August 18, 2008
    Date of Patent: October 16, 2012
    Assignee: Yahoo! Inc.
    Inventors: Scott Noteboom, Albert Dell Robison, Jesus Suarez, Norman Holt