Abstract: An optical fiber feedthrough assembly includes a glass plug disposed in a recess of a feedthrough housing. The glass plug may define a large-diameter, cane-based, waveguide sealed within the recess in the housing and providing optical communication through the housing. Sealing occurs with respect to the housing at or around the glass plug of an optical waveguide element passing through the housing by braze sealing to the glass plug and/or embedding the glass plug in a polymer bonded with the plug to form a molded body that is sealed in the housing by, for example, compression mounting of the molded body or providing a sealing element around the molded body.

Abstract: Embodiments of the present invention provide apparatus and method for processing a substrate with increased uniformity. One embodiment of the present invention provides an apparatus for processing a substrate. The apparatus comprises a chamber body defining a processing volume, a substrate support disposed in the processing volume, a showerhead disposed in the processing volume opposite to the substrate support, and a plasma generation assembly configured to ignite a plasma from the processing gases in the processing gas in the processing volume. The showerhead is configured to provide one or more processing gases to the processing volume. The showerhead has two or more distribution zones each independently controllable.

Abstract: A method of forming a substrate support comprises providing a body having a groove, inserting a heater element into the groove, disposing an insert into the groove, and inserting a cap into the groove. The heater element comprises a resistive element inside a sheath encased in a malleable cladding. The insert is disposed over the cladding, and the cap is substantially flush with an outer surface of the body.

Abstract: A method and apparatus for implanting a semiconductor substrate with boron clusters. A substrate is implanted with octadecaborane by plasma immersion or ion beam implantation. The substrate surface is then melted, resolidified, and annealed to completely dissociate and activate the boron clusters.

Abstract: A method and device for positioning a power tong (2) at the pipe joint (14) of a pipe string (12), where, after the pipe joint (14) has been brought within the working area of the power tong (2), the power tong (2) must be displaced to a position that corresponds with that of the pipe joint (14), and where a camera (16) which may be displaced in parallel with the pipe (12), and which is linked to a display (18), is displaced until the image of the pipe joint (14) coincides with a marker (40) in the display, whereupon a signal is transmitted to a control (26), indicating that the power tong (2) is to be displaced to a position that corresponds with that of the camera (16) and thereby that of the pipe joint (14).

Abstract: Embodiments of the present invention provide a module and process for forming electrical connections on a solar cell substrate in a solar cell production line. The module generally provides a substrate handling system, a substrate positioning system, a cross-buss attachment assembly, and a side-buss attachment assembly. The module may provide adaptations for automatically adjusting the module to receive and process various sizes of solar cell substrates.

Abstract: The present invention includes methods and apparatus for repairing an electrical connection between bipolar electrodes contained within an electrostatic chuck and a conductive mask disposed atop the electrostatic chuck, known as a balancing circuit. Embodiments of the invention are particularly useful after removal of an electrostatic chuck for refurbishment.

Abstract: The present invention generally provides apparatus and method for adjusting plasma density distribution in an inductively coupled plasma chamber. One embodiment of the present invention provides an apparatus configured for processing a substrate. The apparatus comprises a chamber body defining a process volume configured to process the substrate therein, and a coil assembly coupled to the chamber body outside the process volume, wherein the coil assembly comprises a coil mounting plate, a first coil antenna mounted on the coil mounting plate, and a coil adjusting mechanism configured to adjust the alignment of the first coil antenna relative to the process volume.

Abstract: An alignment device to align a plate for electronic circuits comprises transport members able to transport the plate along a transport axis, at least from an entrance position to an alignment position defining an alignment plane. The device also comprises mobile members provided with: first movement members able to move the mobile members in a first direction directed along a first axis substantially perpendicular to the alignment plane so as to associate the mobile members with the plate; second movement members able to rotate the plate, associated with the mobile members, around the first axis; and at least third movement members able to move the plate, associated with the mobile members, in a second direction, directed along a second axis substantially transverse to the first axis and substantially co-planar with the transport axis.

Abstract: Embodiments described herein are directed to an apparatus for generating a precursor for a semiconductor processing system. In one embodiment, an apparatus for generating a precursor gas during a vapor deposition process is described. The apparatus includes a canister containing an interior volume between a lid and a bottom, a gaseous inlet and a gaseous outlet disposed on the lid, a plurality of silos coupled to the bottom and extending from a lower region to an upper region of the interior volume, and a tantalum precursor having a chlorine concentration of about 5 ppm or less contained within the lower region of the canister.

Abstract: Seismic sensor systems and sensor station topologies, as well as corresponding cable and sensor station components, manufacturing and deployment techniques are provided. For some embodiments, networks of optical ocean bottom seismic (OBS) stations are provided, in which sensor stations are efficiently deployed in a modular fashion as series of array cable modules deployed along a multi-fiber cable.

Abstract: Embodiments of the invention include a load lock chamber, a processing system having a load lock chamber and a method for transferring substrates between atmospheric and vacuum environments. In one embodiment, the method includes maintaining a processed substrate within a transfer cavity formed in a chamber body for two venting cycles. In another embodiment, the method includes transferring a substrate from a transfer cavity to a heating cavity formed in the chamber body, and heating the substrate in the heating cavity. In another embodiment, a load lock chamber includes a chamber body having substrate support disposed in a transfer cavity. The substrate support is movable between a first elevation and a second elevation. A plurality of grooves are formed in at least one of a ceiling or floor of the transfer cavity and configured to receive at least a portion of the substrate support when located in the second elevation.

Abstract: An optical device has the structure to perform switching and attenuation of an optical beam with reduced polarization dependent loss (PDL). The optical device includes a birefringent displacer and two liquid crystal (LC) structures. The first LC structure is used to condition s-polarized components of the optical beam and the second LC structure is used to condition p-polarized components of the optical beam. Each LC structure has a separate control electrode so that the s-polarized components of the optical beam and the p-polarized components of the optical beam can be conditioned differently and in such a manner that reduces PDL. The optical device may be configured for processing multiple input light beams, such as the multiple wavelength channels de-multiplexed from a wavelength division multiplexed (WDM) optical signal.

Abstract: An apparatus for providing a return current path for RF current between a chamber wall and a substrate support is provided comprising a low impedance flexible curtain having a first end and a second end, the first end adapted to be electrically connected to the chamber wall and the second end adapted to be connected to the substrate support, wherein the curtain further comprises at least one fold in the curtain material, located an axial distance between the first end and the second end, and at least one perforation cut into the curtain proximate the second end.

Abstract: Embodiments of the invention contemplate a method, apparatus and system that are used to support, position, and rotate a substrate during processing. Embodiments of the invention may also include a method of controlling the transfer of heat between a substrate and substrate support positioned in a processing chamber. The apparatus and methods described herein remove the need for complex, costly and often unreliable components that would be required to accurately position and rotate a substrate during one or more processing steps, such as an rapid thermal processing (RTP) process, a chemical vapor deposition (CVD) process, a physical vapor deposition (PVD) process, atomic layer deposition (ALD) process, dry etching process, wet clean, and/or laser annealing process.

Abstract: An apparatus and method for supporting, positioning and rotating a substrate are provided. In one embodiment, a support assembly for supporting a substrate includes an upper base plate and a lower base plate. The substrate is floated on a thin layer of air over the upper base plate. A positioning assembly includes a plurality of air bearing edge rollers or air flow pockets used to position the substrate in a desired orientation inside above the upper base plate. A plurality of slanted apertures or air flow pockets are configured in the upper base plate for flowing gas therethrough to rotate the substrate to ensure uniform heating during processing.

Abstract: Embodiments of the present invention provide apparatus and method for improving gas distribution during thermal processing. One embodiment of the present invention provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support is configured to support and rotate the substrate, a gas inlet assembly coupled to an inlet of the chamber body and configured to provide a first gas flow to the processing volume, and an exhaust assembly coupled to an outlet of the chamber body, wherein the gas inlet assembly and the exhaust assembly are disposed on opposite sides of the chamber body, and the exhaust assembly defines an exhaust volume configured to extend the processing volume.

Abstract: A torque sub for use with a top drive is disclosed. A method of connecting threaded tubular members for use in a wellbore includes operating a top drive. The top drive rotates a first threaded tubular member relative to a second threaded tubular member. The method further includes measuring a torque exerted on the first tubular member by the top drive. The torque is measured using a torque shaft rotationally coupled to the top drive and the first tubular. The torque shaft has a strain gage disposed thereon. The method further includes wirelessly transmitting the measured torque from the torque shaft to a stationary interface; measuring rotation of the first tubular member; compensating the rotation measurement by subtracting a deflection of the top drive and/or the first tubular member; determining acceptability of the threaded connection; and stopping rotation of the first threaded member when the threaded connection is complete or if the threaded connection is unacceptable.

Abstract: Embodiments of the present invention generally relate to a module that can test and analyze various regions of a solar cell device in an automated or manual fashion after one or more steps have been completed in the solar cell formation process. The module used to perform the automated testing and analysis processes can also be adapted to test a partially formed solar cell at various stages of the solar cell formation process within an automated solar cell production line. The automated solar cell production line is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices.

Abstract: The invention relates to an internal combustion engine comprising a valve drive which is arranged in the region of the cylinder head and is used to actuate a valve. Said internal combustion engine comprises a first drive means that can be rotated about a first rotational axis, a connecting rod that is connected to the first drive means in an articulated manner by means of a first connecting rod articulation, and a guiding element which is used to guide the connecting rod, can be pivoted about a guiding axis, and is connected to a second articulation of the connecting rod in an articulated manner. The position of the first rotational axis can be modified in relation to the cylinder head.