Abstract: A shock and vibration isolation system having a plurality of isolators supporting a utilization device is disclosed. Each isolator has two gas driven pistons, pivotally mounted in a frame and is connected to an accumulator/controller that supplies controlled amounts of pressurized gas. A sensor in each isolator senses the position of the utilization device with respect to a base sitting on the ground, and the accumulator/controller adds gas to or exhausts gas from the pistons to counteract changes in position detected by the sensor. An electronic control circuit is connected between the sensor and the accumulator/controller to supply a properly compensated signal from the sensor to control the accumulator/controller.

Abstract: A projection lens is mounted between a movable stage and a stationary holder to project an image of a reticle held by the holder onto a semiconductive wafer held by a chuck mounted on the stage. The stage is movable along orthogonal X and Y axes in a horizontal plane to align different regions of the semiconductive wafer with the projected image of the reticle. First and second movable plane mirrors fixedly mounted on the stage for movement therewith are symmetrically disposed relative to the Y axis in first and second vertical planes intersecting one another at the Y axis. Similarly, first and second stationary plane mirrors fixedly mounted on a housing of the projection lens are disposed parallel to the first and second movable mirrors, respectively.

Abstract: A programmable electronic calculator for numerical evaluation of mathematical problems operates through the application of one or more basic mathematical operators, properly grouped, to each input numerical operand of a mathematical problem according to the accepted rules of mathematical combinations. One may select any numerical operand, any of the four basic arithmetic operators, left parenthesis and right parenthesis to denote groupings, a storage register for receiving a numerical operand to be used in computation or a numerical operand representing a result of a partial or final computation, or a storage register whose contents it is desired to print. Entry of each numerical operand and mathematical operator is accompanied by a printed record of that numerical operand and that mathematical operator so that the mathematical problem may be continually monitored as it is being entered. Depression of an equals key is followed by evaluation of previously designated operations and printing of the result.

Abstract: An apparatus for automatically aligning a semiconductor wafer with a mask in the manufacture of integrated circuit devices is disclosed. The mask and wafer are each provided with alignment patterns, the alignment pattern on the wafer cooperating with the alignment pattern on the mask in a unique visual manner to signify alignment. A scanning mechanism is provided for automatically scanning the alignment pattern areas and producing output signals indicative of the relative positions of the alignment patterns on the wafer and mask. Logic circuitry is provided for operating in response to any misalignment represented by the scan outout signals to compute formulae which are utilized to produce control signals for driving motor drive mechanisms to produce relative movement between the mask and wafer to bring them into alignment. Several separate alignment cycles are provided, if needed, for zeroing in on finalized alignment.

Abstract: A multiple apparent source optical imaging system is provided having a paraboloidal assembly of plane mirrors uniformly distributed in a ring about an anisotropic light source. The assembly compensates for source anisotropy and for diffraction effects by providing uniform distribution of light, as if the light originated from multiple apparent sources uniformly distributed in a selected annular fashion in a common apparent source plane. The assembly also includes a variable focus projection lens which, in conjunction with a selected source beam divergence angle, serves to minimize line-width error when objects, such as a mask and a semiconductor substrate, with a finite separation are illuminated. Substantially no loss in image intensity is occasioned by the system.

Abstract: Systems for handling discs, such as semiconductor wafers and the like, using both stationary and movable air track assemblies include an elongate track member, a flat surface formed to extend along the underside of the track member, ports disposed along the flat undersurface for the discharge of air at an angle to the vertical, and provision for discharging a sufficient flow of air from the ports to create a differential in the air pressure above and below the discs so as to lift the discs toward the flat undersurface as a result of the air flow. The angle has a sufficient horizontal vectorial component to urge the discs along the flat undersurface of the track member in the direction of such component. In one embodiment, the air track member extends between a pair of holders which respectively supply and receive discs carried by the track member. The discs may be carried to a predetermined fixed point, released, and subsequently retrieved from the same position.

Abstract: A calculator apparatus is provided for computing minimum principal amounts for deposit into demand (passbook) accounts and into term (certificate-of-deposit) accounts paying interest at differing rates. The computed minimum principal amounts not only satisfy the minimum deposit requirements of the term accounts but, when deposited, provide both maximum interest earnings and payments from principal, without interest penalty ordinarily associated with early withdrawals. The apparatus comprises a keyboard, a read-write memory, a logic unit, a printer, and a display unit. The logic unit includes an arithmetic unit having a plurality of data storage registers and a read-only-memory with a stored program. The apparatus computes the minimum principal amounts in accordance with the stored program and in response to entered data.

Abstract: A carrier having a plurality of transport channels arranged in stacked parallel relationship for receiving semiconductive wafers is provided with a pair of oppositely facing recessed regions extending partially into the transport channels. In each of these recessed regions a stop member is pivotally mounted and spring-loaded for automatic movement between an inoperative position out of the transport channels to permit passage of the semiconductive wafers therethrough, when the carrier is set down, and an operative position protruding into the transport channels and blocking passage of the semiconductive wafers therethrough to impede spillage of any semiconductive wafers contained in the carrier, when the carrier is picked up.

Abstract: An algebraic electronic calculator is provided having a keyboard input unit with digit keys for entering numbers into the calculator and control keys for entering add, subtract, multiply, divide, left parenthesis, right parenthesis, storage register designating, square root, equals, and other operators into the calculator. A record of each number and operator entered into the calculator is printed out by an output printer so that a mathematical problem may be continuously monitored as it is being entered into the calculator. Depression of the square root control key initiates computation of the square root of a number stored in the calculator and printout of the result. The calculator also includes provision for computation of another such unary function such as cube root if desired. Depression of the equals control key is accompanied by evaluation of all the previously entered numbers and operators and printout of the results.

Abstract: A pair of matching side panels of indoor-outdoor carpet material and a strip of nylon edge reinforcing tape are stitched together along two sides and one end of the side panels to form an elongated bag for transporting skis, ski poles, and the like. Oppositely facing strips of hook- and loop-type fastening tape are stitched in place along adjoining inner portions of these side panels at the other end thereof to permit opening and closing of the bag. A nylon webbing handle is stitched to both side panels along one side thereof to facilitate transporting the bag, and a metal ring is secured to one of the side panels at the same end as the corresponding strip of fastening tape to permit hanging the bag for drying or storage.

Abstract: An apparatus is provided for transferring semiconductor wafers from one conveying or transport mechanism to another in a manner that substantially reduces wafer damage. The apparatus comprises first and second sensors; first, second and third rollers; a motor with a drive shaft coupled to the first and second rollers for applying a rotational force thereto; and a pneumatic unit coupled to a movable platform on which the rollers are mounted and operable for applying a lifting force to or removing a lifting force from the movable platform. The rollers are mounted parallel to and coplanar with each other and are positionable above or below the belts of a two-belt conveyor mechanism, the first roller being disposed for vertical movement between the belts of the conveyor mechanism, and the second and third rollers being coupled by two belts forming a transport mechanism for transporting wafers to or from the conveyor mechanism.

Abstract: A programmable electronic calculator is provided having an LED display device and a single-step key for causing display and execution of individual steps of a program stored in the calculator, and for causing display of the results of said execution by means of a single actuation of the single-step key. As the key is depressed, the next program step that is to be executed is displayed, together with the number of that step in the program. When the key is released, the program step is executed and the result is displayed.

Abstract: A carrier having a plurality of transport channels arranged in stacked parallel relationship for receiving semiconductive wafers is provided with a pair of oppositely facing recessed regions extending partially into the transport channels. In each of these recessed regions a separate spring-loaded stop member is pivotally mounted for automatic movement to a raised inoperative position, where itis pivoted out of the transport channels to permit passage of the semiconductive wafers therethrough, when the carrier is set down, and for automatic movement to a lowered operative position, where it is pivoted into the transport channels to block passage of the semiconductive wafers therethrough and thereby impede spillage of any semiconductive wafers contained in the carrier, when the carrier is picked up.

Abstract: An apparatus for automatically aligning a semiconductor wafer with a mask in the manufacture of integrated circuit devices is disclosed. The mask and wafer are each provided with alignment patterns, the alignment pattern on the wafer cooperating with the alignment pattern on the mask in a unique visual manner to signify alignment. A scanning mechanism is provided for automatically scanning the alignment pattern areas and producing output signals indicative of the relative positions of the alignment patterns on the wafer and mask. Logic circuitry is provided for operating in response to any misalignment represented by the scan output signals to compute formulae which are utilized to produce control signals for driving motor drive mechanisms to produce relative movement between the mask and wafer to bring them into alignment. Several separate alignment cycles are provided, if needed, for zeroing in on finalized alignment.

Abstract: A modular read-write and read-only memory unit capable of employing both direct and indirect decimal and symbolic addressing, a central processing unit capable of performing both serial binary and parallel binary-coded-decimal direct and indirect memory register arithmetic, and an input-output control unit capable of bidirectionally transferring information between the central processing unit a number of input and output units are controlled by a microprocessor included in the central processing unit. The input and output units include a keyboard input unit with a section capable of being defined by plug-in read-only memory modules and stored programs added by the user, a magnetic card reading and recording unit capable of bidirectionally transferring information between an external magnetic card and the calculator, and a solid state output display unit capable of displaying three lines of numeric information.

Abstract: An adaptable programmable calculator is provided by employing a modular read-write and read-only memory unit capable of being expanded to provide the calculator with additional program and data storage functions oriented towards the environment of the user, a central processing unit capable of performing both serial binary and parallel binary-coded-decimal arithmetic, and an input-output control unit capable of bidirectionally transferring information between the memory or central processing units and a number of input and output units. The memory, central processor, and input-output control units are controlled by a microprocessor included in the central processing unit. A keyboard input unit with a plurality of sections capable of being defined by plug-in read-only memory modules and stored programs added by the user, a magnetic card reading and recording unit, a solid state output display unit, and an output printer unit are included among the input and output units.

Abstract: A method and apparatus for accurately measuring the transfer function of a linear system or the linear part of a non-linear system. This is accomplished by using a spectrum estimation technique which utilizes a "transient random" stimulus consisting of a short burst of random signals applied to a system under test for a period of time that is shorter than the time used to measure a single spectrum. Thus the measurement period includes the time for the "transient random" burst and for the response of the system to substantially decya to zero. The spectrum measured over this period is used to form a first estimate of the transfer function. Other "transient random" stimuli, uncorrelated with the prior records, are then generated and the above procedure is repeated to achieve an average value for the transfer function estimate of the desired accuracy.

Abstract: An adaptable programmable calculator is provided by employing a modular read-write and read-only memory unit capable of being expanded to provide the calculator with additional program and data storage functions oriented towards the environment of the user, a central processing unit capable of performing both serial binary and parallel binary-coded-decimal arithmetic, and an input-output control unit capable of bidirectionally transferring information between the memory or central processing units and a number of input and output units. The memory, central processor, and input-output control units are controlled by a microprocessor included in the central processing unit.

Abstract: A glass material is deposited upon a ceramic substrate and then fired at an elevated temperature in air. Screen printed resistor elements formed on the glass material are fired, lapped, and annealed.