Abstract: An auto-focusing alignment and measurement system for use in precisely positioning a semiconductor substrate with respect to an integrated circuit mask is herein disclosed. This system includes a moveable convergent lens operable with another pair of convergent lenses for alternately focusing images of the mask and the substrate onto a photodiode array. The photodiode array serves as a focus detector and, together with associated signal processing circuitry, provides a feedback signal for controlling displacement of the moveable lens to equal the separation between the mask and the substrate with an accuracy better than the depth of field of the optics. An illumination source and viewing optics provide a magnified view of images of both the mask and the substrate superimposed and in focus, thereby facilitating alignment of the substrate with respect to the mask prior to photolithographic printing.

Abstract: A programmable electronic calculator is provided for numerical evaluation of mathematical problems through application of one or more mathematical operators to each input numerical operand of a mathematical problem according to accepted rules of mathematical combinations. Entry of each numerical operand and mathematical operator is accompanied by a printed record of that numerical operand and that mathematical operator so that the mathematical problem may be continually monitored as it is being entered. Depression of an equals key is followed by evaluation of previously designated operations and printing of the result. One may select a learn mode in which steps are entered in a learn memory by working out a mathematical problem, each selected operation corresponding to a step in the learn memory.

Abstract: X-Y position measurement apparatus is employed with feedback controlled X-Y positioning apparatus for positioning a workpiece stage at a desired X-Y coordinate position in response to signals indicative of the actual position and the desired position of the workpiece stage. A normalization circuit is employed for gain correction of the signals indicative of the actual position of the workpiece stage.

Abstract: A step-and-repeat alignment and exposure system is provided with an adjustable holder for holding a main reticle, a main optical unit including a projection lens for producing an image of the main reticle at an image plane, a stage movable along coordinate axes adjacent to the image plane, and a holder rotatably mounted on the stage for holding a semiconductive wafer to be aligned with respect to the image of the main reticle. The system is further provided with an adjustable holder for holding an auxiliary reticle, a single channel auxiliary optical unit including a main objective lens for producing an image of the auxiliary reticle at the image plane, and a reference mark disposed on the stage and aligned with respect to the coordinate axes.

Abstract: A safety device for a light signal generator only activates a laser beam emerging from an optical fiber connector when an optical fiber is connected. By inserting a plug of the optical fiber into the connector of the light signal generator a photodetecting circuit is caused to provide a control signal, which activates the laser.

Abstract: A computing system for detecting movement of a user's touch on a touchscreen and to operate an intelligent programmable device is provided. The system includes a touchscreen for detecting information of an initial touch by a user on a display surface, a change of touch on the display surface, and disengagement of the user's touch from the display surface. The detected touch information is then used to determine system operations in response to the touch information.

Abstract: An auto-focusing alignment and measurement system for use in precisely positioning a semiconductor substrate with respect to an integrated circuit mask is herein disclosed. This system includes a moveable convergent lens operable with another pair of convergent lenses for alternately focusing images of the mask and the substrate onto a photodiode array. The photodiode array serves as a focus detector and, together with associated signal processing circuitry, provides a feedback signal for controlling displacement of the moveable lens to equal the separation between the mask and the substrate with an accuracy better than the depth of field of the optics. An illumination source and viewing optics provide a magnified view of images of both the mask and the substrate superimposed and in focus, thereby facilitating alignment of the substrate with respect to the mask prior to photolithographic printing.

Abstract: A projection lens and a source of exposure light are employed for projecting an image of a reticle onto a first reference mark or a semiconductive wafer, both of which are movably supported in the image plane of the projection lens. Optical apparatus, including a source of nonexposure light and the projection lens, is provided for imaging a second adjustable reference mark onto the first reference mark or the semiconductive wafer to facilitate use of the projection lens in aligning a semiconductive wafer covered with a photoresist opaque to exposure light.

Abstract: A projection lens and a source of illumination and exposure light are employed for projecting an image of a reticle onto a first reference mark or a semiconductive wafer, both of which are movably supported in the image plane of the projection lens. Optical apparatus, including an objective lens unit and an imaging lens, is provided for imaging light from the source of illumination and exposure light at the reticle and for reimaging reflected light from the semiconductive wafer at the objective lens unit. Additional optical apparatus, including a source of nonexposure light, is provided and is operable with the projection lens for imaging a second adjustable reference mark onto the first reference mark or the semiconductive wafer to facilitate use of the projection lens in aligning a semiconductive wafer covered with a photoresist opaque to exposure light.

Abstract: An alignment and exposure system is provided with a main stage movable along orthogonal axes to position either a reference mark, aligned with one of those axes, or a semiconductive wafer directly beneath a projection lens. Another stage is disposed above the projection lens to position a reticle, selectively illuminated by a light source unit, with respect to the reference mark. The light source unit includes a lamp for directing illumination and exposure light along an optical path extending through the reticle and projection lens, a pair of filters for selectively controlling whether illumination or exposure light passes along that optical path to the reticle, a pair of shutters for selectively controlling passage of the selected light along that optical path to the reticle, and a plurality of different mask plates for selectively controlling the portions of the reticle illuminated by the selected light when one of the shutters is opened.

Abstract: An optical focusing system is provided for accurately focusing a wafer surface, thereby enabling the production of sharp microcircuit images. Accurate focusing is achieved despite non-parallel and non-flat wafer surfaces, despite differences in reflectivity of different portions of the wafer surface, and despite changes in environmental conditions such as temperature during system operation.The system comprises a full aperture focus detection apparatus, a kinematic lens positioning apparatus, and a kinematic wafer chuck differential leveling or positioning apparatus. The full aperture focus detection apparatus detects the extent to which a wafer surface is out of focus with respect to the image plane of a projection lens, and produces an amplified differential signal having magnitude and polarity indicative of the extent and direction, relative to the image plane, that the wafer surface is out of focus.

Abstract: An automatic system for forming custon-made shoe inserts for a person's feet from a pair of blanks is provided with a foot impression mechanism including a pair of pin arrays for simultaneously forming an impression of the contour of the undersurface of each of the person's feet and for releasably retaining each impression formed. Each of the pin arrays is arranged in orthogonal rows and columns with adjoining pins in each column having asymmetric contacting surfaces.

Abstract: An automatic system for forming custom-made shoe inserts for a person's feet from a pair of blanks is provided with a foot impression mechanism for simultaneously forming an impression of the contour of the undersurface of each of the person's feet and for releasably retaining each impression formed. The system is also provided with a blank holding assembly for holding the blanks in lateral alignment with the impressions, a blank shaping mechanism for successively sensing each impression and for concomitantly successively cutting material away from each blank in conformance with the corresponding sensed impression, and a drive mechanism for automatically driving the blank shaping mechanism both laterally and to-and-fro over the impressions and the blanks in response to a single drive motor so as to automatically form the custom-made shoe inserts from the blanks in conformance with the impressions.

Abstract: A gas bearing is provided which has a spherically contoured pocket with a gas supply passage which opens in the center of the pocket. The gas bearing is coupled to the load and is supported by a stem and a ball joint through which the gas is supplied to the bearing. An additional passage allows gas to flow between the pocket and a closed chamber in the bearing.

Abstract: An alignment and exposure system is provided with a main stage movable along orthogonal axes to position either a reference mark, aligned with one of those axes, or a semiconductive wafer directly beneath a projection lens. Another stage is disposed above the projection lens to position a reticle, selectively illuminated by a light source unit, with respect to the reference mark. The light source unit includes a lamp for directing illumination and exposure light along an optical path extending through the reticle and projection lens, a pair of filters for selectively controlling whether illumination or exposure light passes along that optical path to the reticle, a pair of shutters for selectively controlling passage of the selected light along that optical path to the reticle, and a plurality of different mask plates for selectively controlling the portions of the reticle illuminated by the selected light when one of the shutters is opened.

Abstract: A circuit which prevents the flow of excess spikes of magnetization current in the primary windings of a transformer used in a switch mode power supply is disclosed. The circuit comprises an AC coupled, peak detecting, negative feedback path from a current sensing resistor in the primary windings of the transformer to the input of the voltage regulator so that as excess primary winding current spikes begins to flow the driving switches on the transformer primary are rapidly turned off thereby preventing any further rise in transformer primary current.

Abstract: A programmable calculator having modular read-write and read-only memory units, a central processing unit, a keyboard input unit, and an output display unit, includes keys on the keyboard input unit for performing angular measurement unit conversion.

Abstract: A step-and-repeat alignment and exposure system is provided with an adjustable holder for holding a main reticle, a main optical unit including a projection lens for producing an image of the main reticle at an image plane, a stage movable along coordinate axes adjacent to the image plane, and a holder rotatably mounted on the stage for holding a semiconductive wafer to be aligned with respect to the image of the main reticle. The system is further provided with an adjustable holder for holding an auxiliary reticle, a single channel auxiliary optical unit including a main objective lens for producing an image of the auxiliary reticle at the image plane, and a reference mark disposed on the stage and aligned with respect to the coordinate axes.

Abstract: An automatic system for forming custom-made shoe inserts for a person's feet from a pair of blanks is provided with a foot impression mechanism including a pair of pin arrays for simultaneously forming an impression of the contour of the undersurface of each of the person's feet and for releasably retaining each impression formed. Each of the pin arrays is arranged in orthogonal rows and columns with adjoining pins in each column having asymmetric contacting surfaces.