Abstract: A decomposition reaction apparatus for the decomposition treatment of a thermosetting resin, which comprises a reaction apparatus comprising an introduction section for introducing a resin composition containing the thermosetting resin and a solvent containing a monomer component of the thermosetting resin or a component similar to the monomer component, a decomposition reaction section for heating and pressuring the resin composition and the above solvent so as for the solvent to have a supercritical state or a subcritical state, to thereby prepare a treated and recovered product containing a recycled resin formed by the reduction of the molecular weight of the above thermosetting resin, and a discharge section for discharging the treated and recovered product.

Abstract: A disclosed heating apparatus for heating a substrate on which a film is coated includes a process chamber having a gas supply opening for supplying a first gas to the process chamber and a gas evacuation opening for evacuating the first gas from the process chamber; a heating plate that is arranged in the process chamber and includes a heating element for heating the substrate; plural protrusions arranged on the heating plate so as to support the substrate; plural suction holes formed in the heating plate so as to attract by suction the substrate toward the heating plate; and a gas inlet adapted to supply a second gas to a gap between the heating plate and the substrate supported by the plural protrusions.

Abstract: The present invention relates to novel transition metal complexes of the formula (I) to a process for preparing these transition metal complexes and to the use of the transition metal complexes as catalysts in metathesis reactions.

Abstract: A workpiece transfer mechanism 76 transfers workpieces W to a workpiece boat 40 having ringlike tables 86. The transfer mechanism 76 includes a fork main body 78 being movable forward and rearward with the workpiece W placed thereon; stopper members 94 provided at the end portion of the fork main body 78; clamp means 96 provided on the proximal end side of the fork main body 78 and having a pressing portion 102 coming into contact with the circumferential edge of the workpiece W and pressing the workpiece W toward the stopper member 94 for clamping; and fork elevating means 80 for lifting and lowering the fork main body 78. When the workpieces W are transferred to a workpiece boat 40, the pressing portion 102 of the clamp means 96 is controlled so as not to be inserted into a gap between tables 86. Thus, although the pitch between the tables 86 is small, the pressing portion 102 of the clamp means 96 does not interfere with the workpiece boat 40.

Abstract: To a lower part of a housing 20 of a development unit 3a, a cover 21 is detachably fitted by using snap fittings 40. To a fitting surface 41a of the housing 20 and a fitting surface 41b of the cover 21, sponges 43a and 43b, respectively, are attached and fixed all around them. In a state in which the snap fittings 40 are engaged and thereby the housing 20 and the cover 21 are fixed to each other, the sponges 43a and 43b are in contact with each other and compressed, whereby air-tightness of a fitting part 45 is secured.

Abstract: A condensate pump for an HVAC system includes a reservoir, a solenoid pump assembly with a solenoid pump, and a solenoid pump electronic control module for limiting the amount of energy delivered to the solenoid pump during one half cycle from an AC current source. The solenoid pump is mounted in the solenoid pump assembly by means of shock absorbing material, and the solenoid pump assembly is mounted on a support member with shock absorbing material interposed between the solenoid pump assembly and the support member.

Abstract: A method for using a semiconductor processing apparatus includes supplying an oxidizing gas and a reducing gas into a process container of the processing apparatus accommodating no product target substrate therein; causing the oxidizing gas and the reducing gas to react with each other within a first atmosphere that activates the oxidizing gas and the reducing gas inside the process container, thereby generating radicals; and removing a contaminant from an inner surface of the process container by use of the radicals.

Abstract: Disclosed is a method for using a film formation apparatus to form a silicon nitride film by CVD on target substrates while suppressing particle generation. The apparatus includes a process container and an exciting mechanism attached on the process container. The method includes conducting a pre-coating process by performing pre-cycles and conducting a film formation process by performing main cycles. Each of the pre-cycles and main cycles alternately includes a step of supplying a silicon source gas and a step of supplying a nitriding gas with steps of exhausting gas from inside the process container interposed therebetween. The pre-coating process includes no period of exciting the nitriding gas by the exciting mechanism. The film formation process repeats a first cycle set that excites the nitriding gas by the exciting mechanism and a second cycle that does not excite the nitriding gas by the exciting mechanism.

Abstract: Disclosed is a method of etching a substrate having a layered structure in which a photoresist mask with a pattern, a coating film made of silicon oxide, and an organic film are laminated in that order from the top. Before etching the coating film of silicon oxide, a deposit is deposited on the photoresist mask by using plasma generated from a hydrocarbon gas such as CH4 gas so as to narrow the size of openings in the pattern of the photoresist mask. The pattern of the photoresist mask is well transferred to the organic film through the coating film, and a pattern with openings having a high aspect ratio can be formed in the organic film and toppling of the pattern in the organic film can be prevented. The organic film with the transferred pattern is used as an etch mask for etching the underlying layer.

Abstract: Disclosed is a resin composition comprising a benzoxazole resin precursor having a first repeating unit obtained by reacting a bisaminophenol compound and a dicarboxylic acid compound, and a cross-linking agent wherein at least one of the bisaminophenol compound and the dicarboxylic acid compound has a diamondoid structure. The benzoxazole resin precursor further comprises a second repeating unit obtained by reacting a bisaminophenol compound not having a diamondoid structure and a dicarboxylic acid compound not having a diamondoid structure. Also disclosed is a resin film comprising the resin composition.

Abstract: The invention relates to a soft starting method and system thereof in the way of wave-skipping with stepped frequency and stepless voltage regulating for a motor which can be applied to the large torque starting of AC motor under the condition of a power supply of a industrial frequency supply source and the safe starting of higher load. Trigger signals generated by a control system, in the soft starting method of the invention, act on five sets of anti-parallel thyristor valves connected between the power supply and the motor to conduct a pair of thyristors thereof according to a set frequency and sequence, and the motor is started from a standstill status to full speed in the way of wave-skipping by controlling the sets of the thyristor valves. The method may improve the starting torque for more than 10 times of the traditional motor soft starting of the voltage reduction and control the starting current for about two times of the rated current.

Abstract: A vertical heat treatment apparatus includes: at least one loading and unloading part 3 and 4 for loading and unloading a carrying container 2 containing a plurality of process objects W into and from said vertical heat treatment apparatus; a first storage part 5 that stores a plurality of carrying containers loaded into said vertical heat treatment apparatus via the loading and unloading part; a heat treatment furnace 7 that accommodates a holder 6 holding a plurality of process objects at multiple levels to perform a predetermined heat treatment to the process objects; and a transfer 8 part that supports thereon a carrying container for transferring process objects between the holder and the carrying container, wherein an upper loading and unloading part 3 and a lower loading and unloading part 4 are provided as said at least one loading and unloading part, and a second storage part 20 that stores a carrying container is disposed between the upper and lower loading and unloading parts.

Abstract: The object of the present invention is to provide an epoxy resin composition which is excellent in flash characteristics and thermal conductivity, and gives an area mounting type semiconductor apparatus having little warpage and excellent temperature cycle properties. According to the present invention, there is provided an epoxy resin composition for semiconductor encapsulation which comprises, as essential components, (A) a spherical alumina, (B) an ultrafine silica having a specific surface area of 120-280 m2/g, (C) a silicone compound, (D) an epoxy resin, (E) a phenolic resin as a curing agent, and (F) a curing accelerator, in which said ultrafine silica is contained in an amount of 0.2-0.8% by weight based on the total weight of the resin composition, and said silicone compound is a polyorganosiloxane and is contained in an amount of 0.3-2.0% by weight based on the total weight of the resin composition.

Abstract: A meandering detection device capable of detecting meandering of a subject with high accuracy includes: a contact which has an open end making contact with and following a subject body and which is supported by a support part; a reflection part integrally provided to the contact and reflecting light; an emission part emitting light toward the reflection part; and a first and a second light receiving parts which are disposed in front of the reflection part, which receive the light reflected by the reflection part and then outputs signals in accordance with respective amounts of light received, and which detect meandering of the subject based on a difference in the amount of light received.

Abstract: The present invention relates to the technical field of electrochemistry and describes a method and an apparatus for producing fuel cell components, in particular membrane electrode units (“MEUs”) for membrane fuel cells. In the case of the method according to the invention, anode and cathode electrodes are applied to two neighboring heated rollers that are subjected to a vacuum. The applied vacuum has the effect that they are introduced exactly in position into a roller nip and then laminated with an ion-conducting membrane. Due to the extended heat influencing zone, high production rates are achieved with the method according to the invention. The apparatus according to the invention comprises a rolling mill with heatable vacuum rollers. It has advantages due to the simple construction and the absence of transfer locations.

Abstract: The present invention a cylinder liner which controls gap formation at the interface between the cylinder liner and a cylinder block main body for accepting the cylinder liner therein, and serves to acquire closely contacting state and enhanced bonding strength between the cylinder liner and the cylinder block main body, and to provide a cylinder block, and further to provide a process for the preparation of the cylinder liner. A plurality of circumferential grooves 15 extending in the circumferential direction is formed from a first circumferential groove 16 having a shape of “J” of the alphabet in sectional view and extending in a circumferential direction formed on an outer surface 12 of an cast iron cylinder liner 10, and a second circumferential groove 18 having a shape of “J” of the alphabet in sectional view and linking to the first circumferential groove 16.

Abstract: An automatic landing apparatus for an aircraft includes: an altitude sensor; an airspeed sensor; an attitude angle sensor; a direction sensor; a position sensor; a landing command inputting section; and a control device, including: an approaching flight control section for realizing an approaching flight along a predetermined path by controlling a propulsion device and a control surface, in response to a landing command; a flare control section for controlling the propulsion device to provide a minimum output and controlling the control surface to perform a flare when the altitude of the aircraft becomes less than a predetermined landing altitude; and a landing run control section for realizing a landing run by controlling the propulsion device to maintain the minimum output and controlling the control surface to maintain the attitude angle and the traveling direction of the aircraft when the airspeed of the aircraft becomes less than a predetermined landing speed.

Abstract: A form of a travel path of an oncoming vehicle is recognized based on white-line data. A speed component of the oncoming vehicle with respect to the travel path (route) is calculated by weighting a lateral speed component orthogonal to the route and a lateral speed component following the route, with a speed correction coefficient which is set in accordance with a relative distance between a subject vehicle and the oncoming vehicle. A change in behavior of the oncoming vehicle is predicted, and a possibility of collision against the subject vehicle is determined. If it is determined that there is a possibility of collision, an alarm is output to alert a driver to the possibility of collision.

Abstract: An object detecting system includes stereo-image taking means for taking images of an object and outputting the images as a reference image and a comparative image, stereo matching means for calculating parallaxes by stereo matching, and determination means for setting regions of objects in the reference image on the basis of the parallaxes grouped by grouping means, and performing stereo matching again for an area on the left side of a comparative pixel block specified on an epipolar line in the comparative image corresponding to a reference pixel block in a left end portion of each region. When a comparative pixel block that is different from the specified comparative pixel block and provides the local minimum SAD value less than or equal to a threshold value is detected, the determination means determines that the object in the region is mismatched.

Abstract: A vehicle environment recognition apparatus includes stereo-image taking means for outputting a reference image of the surroundings of a subject vehicle, stereo matching means for correlating a parallax with each pixel block in the reference image by stereo matching, preceding-vehicle detecting means for detecting a preceding vehicle from the reference image on the basis of the parallax or the like, and smear determining means for searching a pixel column vertically extending in the reference image for brightnesses of pixels, the pixel column including a pixel block having a parallax less than or equal to a long-distance parallax threshold value corresponding to the long distance including infinity, and determining that a smear occurs when a ratio of the number of pixels having brightnesses more than or equal to a predetermined brightness to the total number of pixels in the pixel column is more than or equal to a predetermined ratio.