Abstract: A method is disclosed for measuring the dose and energy level of ion implants forming a shallow junction in a semiconductor sample. In the method, two independent measurements of the sample are made. The first measurement monitors the response of the sample to periodic excitation. In the illustrated embodiment, the modulated optical reflectivity of a reflected probe beam is monitored to provide information related to the generation of thermal and/or plasma waves in the sample. A second spectroscopic measurement is also performed. This measurement could be either a spectroscopic reflectometry measurement or a spectroscopic ellipsometry measurement. The data from the two measurements are combined in a manner to yield information about both the dose (concentration) of the dopants as well as the energy used to inject the dopants in the semiconductor lattice. The method will useful in controlling the formation of shallow junctions.

Abstract: A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The plate depolarizer varies polarization with wavelength, and may be a Lyot depolarizer with two plates, or a depolarizer with more than two plates (such as a three-plate depolarizer). Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, the perturbation may be narrower than the wavelength resolution of the instrument.

Abstract: Described herein is a positioning tool having an elongate portion for carrying a medical implant. Also described is a method of positioning a medical implant using an elongate positioning tool. One form of the method includes positioning a medical implant on a distal portion of an elongate positioning tool, inserting the positioning tool with the implant thereon into a body cavity, manipulating the positioning tool to position the implant into contact with tissue at an attachment location, attaching the implant to surrounding tissue at the attachment location, separating the implant from the positioning tool, and withdrawing the positioning tool from the body. In a preferred embodiment, the position of the implant is visually confirmed using an endoscope before the implant is attached to surrounding tissue. In one embodiment, the implant is a satiation device and the body cavity is the esophagus and/or stomach.

Abstract: A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependant quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. Free of position-dependent variations and other information pertaining to the measurement system, the accuracy of the resulting wafer measurement more closely matches the precision of the tool than existing techniques. In particular embodiments, a portion of the characterization of the optical system is accomplished by using tilted black glass to provide a non-reflective reference.

Abstract: A switching transistor is placed between a serial port of a RS232 device and a parallel port of a TTL microcontroller. Selective activation of the switching transistor permits a high voltage signal to be transmitted from the power supply rail of the TTL microcontroller to the RXD pin of the RS232 device, where the signal is interpreted as a logical low. This step takes advantage of the fact that the RS232 standard interprets any voltage received at the RXD pin greater than a receiver threshold value to be a logical low. Selective deactivation of the switching transistor isolates the RS232 port from the non-RS232 device, permitting negative voltage signal output by the TXD pin of the idling RS232 port to be conveyed back to the RS232 port at the RXD pin. This negative voltage signal is interpreted by the RS232 port as a logical high signal.

Abstract: The total running time of an original multi-channel program signal is altered to generate a time-shortened (or time-lengthened) program signal. The original program signal may be thought of subdividable into a sequence of program signal portions, each program signal portion being further subdividable into a sequence of signal windows. Differencing circuitry determines, for each program siganl portion, a difference value indicative of a best differnce match between an initial signal window in that signal portion and subsequent signal windows in that signal portion in accordance with a predefined criterion. Removal circuitry then deletes from the original multi-channel program signal a multi-window segment of that signal portion, the deleted segment beginning with the initial signal window and ending with the subsequent signal window that generated the best difference match.

Abstract: Disclosed is an ablation method and apparatus used to close veins for treatment of venous insufficiency disease. The apparatus includes a catheter proportioned for insertion into a vein, a pair of inflatable balloons spaced apart on the catheter body, and an ablation electrode array disposed between the balloons. According to the disclosed method, the catheter is introduced into the vein to be treated and the balloons are distended. Blood is flushed and aspirated from the site between the balloons. RF power is applied to the electrode array, causing scarring of the vessel walls and eventual sealing of the vein.

Abstract: A method for measuring amplified spontaneous emission (ASE) content in a beam of laser radiation emitted by a laser master oscillator power-amplifier system comprises directing the beam of light into a two-beam interferometer having unequal beam path lengths. The two beams interfering in the interferometer have equal amplitude and form a pattern of interference fringes. The beam-path difference is arranged to be greater than the coherence length of the ASE so that the ASE content of the beam does not form interference fringes but provides a background level of light in the interference pattern. This enables the ASE content of the beam to be determined from measurements of the maximum intensity of a bright fringe and the minimum energy of a dark fringe in the interference pattern.

Abstract: Systems and methodologies are disclosed for generating setup information for use measuring process parameters associated with semiconductor devices. A system comprises an off-line measurement instrument to measure an unpatterned wafer and a setup information generator to generate setup information according to the unpatterned wafer measurement. The system then provides the setup information to a process measurement system for use in measuring production wafers in a semiconductor manufacturing process.

Abstract: A process and structure for forming electrical devices. The process and structure provide for forming an insulating layer on a substrate. A conductive region is then formed in the insulating layer by implanting silicon atoms into the insulating layer. Further, a plurality of different conductive regions can be formed in the insulating layer. An electrical device such as a transistor or a diode can then be formed in each of the conductive regions. Because the conductive regions are formed in a conductive region which is largely electrically isolated from other conductive regions there is little possibility for adjacent devices to cause interference.

Abstract: Feed forward techniques can be used to improve optical metrology measurements for microelectronic devices. Metrology tools can be used to measure parameters such as critical dimension, profile, index of refraction, and thickness, as well as various material properties. Three-dimensional feature characterizations can be performed, from which parameters can be extracted and correlations executed. Process fingerprints on a wafer can be tracked after each process step, such that correlation between profile and structure parameters can be established and deviations from specification can be detected instantaneously. A “feed forward” approach allows information relating to dimensions, profiles, and layer thicknesses to be passed on to subsequent process steps. By retaining information from previous process steps, calculations such as profile determinations can be simplified by reducing the number of variables and degrees of freedom used in the calculation.

Abstract: An aperture for reducing tilt sensitivity in normal incidence optical metrology is formed to include one or more holes. The aperture is positioned to partially occlude one-half of the pupil of a normal incidence objective. A probe beam is projected to fill the pupil of the objective. The portion of the incident probe beam that passes through the aperture is reduced in cross-sectional profile. As a result, after reflection by the sample, that portion of the probe beam underfills the non-occluded portion of the pupil. The portion of the incident probe beam that passes through the non-occluded portion of the pupil overfills the occluded pupil upon reflect by the sample. The combination of underfilling and overfilling reduces the sensitivity of the objective to tilting of the sample.

Abstract: The present application describes an intravascular implantable pacing and/or defibrillation system. The described system includes a pulse generator that is implantable within a blood vessel and proportioned to blood flow through the blood vessel, and at least one lead attachable to the pulse generator. During implantation, the pulse generator is introduced into a patient's vasculature, advanced to a desired vessel and anchored in place within the vessel. The lead or leads are placed within the heart or surrounding vessels as needed to deliver electrical pulses to the appropriate location.

Abstract: Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An insulating ceramic spoiler can reduce the effective area over which arcing can occur, and can reduce the likelihood of arcing by improving the flow of gas between the electrodes, such as by allowing for design flexibility and reducing the necessary height of a nose portion used to control the discharge area of the electrode. An improved blower design, which can utilize improved bearings and a dry film lubricant, can help to circulate the laser gas between the electrode structures, such as at a speed of at least 30 m/s in order to operate the laser at repetition rates of 4 kHz or higher.

Abstract: A modulated reflectance measurement system includes two diode-based lasers for generating a probe beam and an intensity modulated pump beam. The pump and probe beams are joined into a collinear beam using a laser diode power combiner. One or more optical fibers are used to transport the beams either before and/or after they are combined. The collinear beam is focused through one or more lenses or other optical components for collimation. The collinear beam is then focused by an objective lens onto a sample. Reflected energy returns through an objective and is redirected by a beam splitter to a detector. A lock-in amplifier converts the output of the detector to produce quadrature (Q) and in-phase (I) signals for analysis. A processor uses the Q and/or I signals to analyze the sample.

Abstract: A laser power meter and associated method are disclosed. The laser power meter has an absorber that is placed in a path of a laser beam during a power measurement, a temperature sensor for measuring the temperature of the absorber, a differentiator for determining a rate of change of the temperature of the absorber, and a processor that computes an estimated power of the laser beam based on the temperature and its rate of change without considering power related loss effects and then computes the power of the laser beam based on the estimated power and the temperature and its rate of change.

Abstract: A linear time-driver circuit is provided that consumes low space on-chip. The time-driver circuit is based upon the small capacitor charge of the merged region of a 5V tolerant cascaded NMOS device, a single gate device and a zener diode.

Abstract: A line-narrowing module for a laser includes a prism beam expander and a grating preferably attached to a heat sink. A pressure-controlled enclosure filled with an inert gas seals the grating and/or other elements of the line-narrowing module. The pressure in the enclosure is adjusted for tuning the wavelength. Preferably, the pressure is controlled by controlling the flow of an inert gas through the enclosure. A pump may be used, or an overpressure flow may be used. Alternatively, a prism of the beam expander or an etalon may be rotatable for tuning the wavelength.

Abstract: An apparatus and method for use in performing ablation of organs and other tissues includes a radio frequency generator which provides a radio frequency signal to ablation electrodes. The power level of the radio frequency signal is determined based on the subject area of ablation. The radio frequency signal is coupled with the ablation electrodes through a transformation circuit. The transformation circuit includes a high impedance transformation circuit and a low impedance transformation circuit. The high or low impedance transformation circuit is selected based on the impedance of the ablation electrodes in contact with the subject tissue. Vacuum level, impedance level, resistance level, and time are measured during ablation. If these parameters exceed determinable limits the ablation procedure is terminated.

Abstract: A method of adjusting focus and/or other image parameters in a remotely-operated image capturing system, such as a scanning electron microscope (SEM), is provided. The method minimizes transmission bandwidth and allows a remote user to perform adjustment quickly without requiring real-time feedback. In accordance with the method, rather than adjusting a knob or slider while viewing a real-time image as is done in prior art systems, the user selects among several still images representing a wide range of values of the adjustment in question. The user then selects from another set of images which represent a small subrange of values determined by the first choice. The process is repeated until the adjustment resolution of the instrument is reached or the user is satisfied. Adjustments, like objective lens alignment, which require “focus wobble” can also be made using this method. Since focus wobble is a periodic motion, it can be represented using a short loop of animation.