Abstract: A waveguide gas laser includes an enclosure filled with a lasing gas. A ceramic block is provided with one or more waveguide channels. At least one of the waveguide channels includes an open region which is in fluid communication with a waveguide channel. Lasing gas in the enclosure fills the waveguide channels and the lateral extension. An electric field is applied across the lateral extension of the waveguide channel while simultaneously applying a smaller electric field across the waveguide channel. The electric field across the lateral extension ignites a discharge in the lateral extension that spreads into the lasing gas in the waveguide channel. The electric field across the waveguide channel is sufficient to sustain the discharge in the lasing in the waveguide channel.

Abstract: A detector for use with an EUV photon source emitting around 11-15 nm includes at least one multilayer mirror for reflecting the beam along an optical path include a detector element, a filter for reducing the bandwidth of the beam, and the detector element. The detector element preferably comprises a Si pn diodes with doped dead region and zero surface recombination or PtSi-nSi barrier for increasing the long term stability of the detector.

Abstract: An apparatus is disclosed for obtaining ellipsometric measurements from a sample. A probe beam is focused onto the sample to create a spread of angles of incidence. The beam is passed through a quarter waveplate retarder and a polarizer. The reflected beam is measured by a detector. In one preferred embodiment, the detector includes eight radially arranged segments, each segment generating an output which represents an integration of multiple angle of incidence. A processor manipulates the output from the various segments to derive ellipsometric information.

Abstract: Method and system provide a variable delay between the external trigger pulse for a laser system and the light pulse such that the total delay is controlled. The method and system utilize a digital time measuring circuit which measure a time interval which corresponds to a time between the generation of the trigger pulse and generation or a laser light pulse. Based on the measurement by the digital time measuring circuit a processor controls a delay circuit which thereby controls the time between the trigger pulse and the generation of the laser light pulse.

Abstract: Apparatus for reducing spacing between a plurality of parallel, spaced apart plane-polarized laser-radiation beams delivered by a stack of laser-diode bars includes a ninety degree polarization rotator, and a compound prism including a total reflecting surface an internal polarization-selective surface parallel to each other. The polarization-selective surface is highly transmissive for radiation plane-polarized in one polarization orientation and highly reflective for radiation plane-polarized at ninety degrees to that orientation. The polarization rotator rotates the polarization of a portion of the beams. The beams are transmitted through the compound prism with the portion of polarization-rotated beams following a different path through the prism from that of the beams that are not polarization rotated. The beams exit the prism with spacing therebetween one-half of the spacing between beams entering the prism.

Abstract: The invention comprises a system and method for treating an exposed tissue of a patient with a light energy. A plurality of light emitting devices are optically coupled with a patients tissue, and apply light treatments to the tissue. A driver circuit and a controller operate to drive the light emitting devices to output different intensities of light treatment to different sub-areas of the tissue being treated.

Abstract: An efficient tapered optical fiber bundle along with the method of manufacturing is presented. The tapered fiber bundle is fully fused to an induced shape with no interstitial space between fibers. To minimize fiber deformation and hence the tapered bundle's loss, the individual fibers are minimally deformed by positioning them in a fixture with predetermined geometry prior to fusion. The bundle could be optionally reshaped after fusion. The tapered bundle could then be used in its original form as a star coupler, or it could be cleaved and coupled to a multimode fiber, a multi-clad fiber, a cladding-pumped fiber, or an optical system to form an optical device. The resulting optical device has improved efficiency and lower loss compared with prior art devices.

Abstract: A system for the in vivo detection of the effects of AD in the interior of an eye. A scanning polarimeter, including a residual retardance canceling system and an improved anterior segment retardance compensator, produces an optical analysis signal representing the birefringence of the retinal nerve fiber layer (RNFL) structures of the eye. The birefringence data is more accurate because of compensation for anterior segment birefringence and residual birefringence of optical components, such as, for example, the beam splitters, lenses, scanners and retarders. An electrical analysis signal representing a large (20 by 40 degrees) retardance map is produced and evaluated by an artificial neural network to produce an analysis classification signal representing the contribution of Alzheimer's disease to the birefringence of the retinal layer corresponding to the relationship of the electrical analysis signal to an analysis signal database.

Abstract: A method for simultaneously monitoring ion implantation dose, damage and/or dopant depth profiles in ion-implanted semiconductors includes a calibration step where the photo-modulated reflectance of a known damage profile is identified in I-Q space. In a following measurement step, the photo-modulated reflectance of a subject is empirically measured to obtain in-phase and quadrature values. The in-phase and quadrature values are then compared, in I-Q space, to the known damage profile to characterize the damage profile of the subject.

Abstract: A standardized sample for scatterometry includes four quadrants each including an inner block surrounded by four outer blocks. A pattern of gratings is repeated within each of the blocks using different resolutions and orientations. Each grating within an outer block has a matching grating within the block's pair. A grating and its matching grating are negative images of each other—the pitch and line-size of a grating are equal, respectively to the line size and pitch of the matching grating. The inner block also includes a series of background patterns positioned behind the gratings. These patterns include repeating patterns of hole and repeating line structures. This series of structures cover a large die area, helping to simulate the conditions faced by real-world scatterometers. The various structures feature a high-degree of alignment, allowing rapid verification using SEM or other techniques.

Abstract: Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control the timing of the emission or amplification of an optical pulse using the discharge of the main electrodes, the timing of which can only be controlled to within about 10 ns, a trigger ionization pulse applied subsequent to the charging of the main electrodes can be used to control the timing of the discharge, thereby decreasing the timing variations to about 1 ns. Since ionization of the laser gas can consume relatively small amounts of energy, such a circuit can be based on a fast, high-voltage, solid state switch that is virtually free of jitter. Trigger ionization also can be used to synchronize the timing of dual chambers in a MOPA configuration. In one such approach, ionization trigger can include at least a portion of the optical pulse from the oscillator in a MOPA configuration.

Abstract: An ellipsometric apparatus provides two impinging focused probe beams directed to reflect off the sample along two mutually distinct and preferably substantially perpendicular directions. A rotating stage rotates sections of the wafer into the travel area defined by two linear axes of two perpendicularly oriented linear stages. As a result, an entire wafer is accessed for measurement with the linear stages having a travel range of only half the wafer diameter. The reduced linear travel results in a small travel envelope occupied by the wafer and consequently in a small footprint of the apparatus. The use of two perpendicularly directed probe beams permits measurement of periodic structures along a preferred direction while permitting the use of a reduced motion stage.

Abstract: A phase-sensitive interferometeric broadband reflectometer includes an illumination source for generating an optical beam. A beam splitter or other optical element splits the optical beam into probe beam and reference beam portions. The probe beam is reflected by a subject under test and then rejoined with the reference beam. The combination of the two beams creates an interference pattern that may be modulated by changing the length of the path traveled by the probe or reference beams. The combined beam is received and analyzed by a spectrometer.

Abstract: A combination metrology tool is disclosed for analyzing samples, and in particular semiconductor samples. The device includes a first measurement module for determining electrical characteristics of the sample. In general, such a measurement module will monitor electrical characteristics to derive information such as carrier lifetimes, diffusion lengths and surface doping. The device also includes a second measurement module for determining compositional characteristics such as layer thickness, index of refraction and extinction coefficient. The second measurement module will include a light source for generating a probe beam which interacts with the sample. A detection system is provided for monitoring either the change in magnitude or polarization state of the probe beam. The output signals from both measurement modules are combined by a processor to more accurately evaluate the sample.

Abstract: A programming technique for a one-time-programmable non-volatile memory (NVM) utilizes a repeated programming cycle with an interval between cycles that is long enough to redistribute charge in the layers surrounding the floating gate of the cell. Each cycle programs the floating gate and also the surrounding layers. The cycling saturates in an equilibrium state when the electric field form outside to the floating gate equals zero. This technique eliminates the first stage of conventional VT drop in NVM cells and, thus, improves retention.

Abstract: A wafer scale semiconductor integrated circuit packaging technique provides a hermetic seal for the individual integrated circuit die formed as part of the wafer scale structure. A semiconductor wafer is manufactured to include a number of individual semiconductor die. Each individual die formed on the wafer includes a number of bond pads that are exposed on the die surface in various locations to provide electrical connections to the circuitry created on the die. The wafer further includes a planar glass sheet that is substantially the same size as the wafer, the glass sheet being adhered to the wafer using a suitable adhesive. The glass sheet has a number of pre-formed holes in it, the arrangement of the pre-formed holes corresponding to the location of the bond pads at each of the individual semiconductor die formed as part of the wafer structure.

Abstract: An ellipsometer includes a light source for generating a probe beam of polychromatic light for interacting with a sample. A polarizer is used to impart a known polarization state to the probe beam and the polarized probe beam is directed against the sample at a shallow angle of incidence. A rotating compensator is used to impart phase retardations to the polarization state of the reflected probe beam. After passing through the compensator, the probe beam passes through a second polarizer (analyzer). After leaving the analyzer, the probe beam is received by a detector. The detector translates the received probe beam into a signal that includes DC, 2? and 4? signal components (where ? is the angular velocity of the rotating compensator). A processor analyzes the signal using the DC, 2? and 4? components allowing simultaneous evaluation of both critical dimensions and film parameters.

Abstract: A truncated triangular prism has an entrance and an exit face perpendicular to each other and a reflecting face inclined at an angle ? to the entrance face where ? is about 135°??B, and where ?B is the external Brewster angle for the material of the prism at the wavelength of radiation to be reflected by the prism. A beam of p-polarized radiation directed into the prism through the entrance face at the Brewster angle is totally internally reflected from the reflecting face and leaves the exit face at the Brewster angle and at an angle of ninety degrees to the direction at which the radiation enters the prism.

Abstract: A method and apparatus are disclosed for evaluating relatively small periodic structures formed on semiconductor samples. In this approach, a light source generates a probe beam which is directed to the sample. In one preferred embodiment, an incoherent light source is used. A lens is used to focus the probe beam on the sample in a manner so that rays within the probe beam create a spread of angles of incidence. The size of the probe beam spot on the sample is larger than the spacing between the features of the periodic structure so some of the light is scattered from the structure. A detector is provided for monitoring the reflected and scattered light. The detector includes multiple detector elements arranged so that multiple output signals are generated simultaneously and correspond to multiple angles of incidence. The output signals are supplied to a processor which analyzes the signals according to a scattering model which permits evaluation of the geometry of the periodic structure.

Abstract: A beam parameter monitoring unit for coupling with an excimer or molecular fluorine (F2) laser resonator that produces an output beam having a wavelength below 200 nm includes an on-line laser pulse energy detector. This, in turn, allows output pulse energy stabilization to the same degree of accuracy, which is crucial for stability of exposure dose and other process parameters in microlithography and industrial applications.