Abstract: A method of cleaning a substrate without causing damage to the substrate is provided. The method comprises the steps of providing a transmitter made of a material that is a good conductor of megasonic energy, positioning the transmitter so that a lower edge is positioned spaced from but closely adjacent to a substantially flat surface of the substrate so that when liquid is applied to the edge and the substrate, a meniscus of liquid is formed between the edge and the substrate, providing a transducer for producing megasonic vibration, coupling the transducer to the transmitter so that a transmission path is created to transmit the megasonic vibration into the transmitter, and creating a barrier in the transmission path so that the liquid vibration is attenuated directly beneath the lower edge of the transmitter.
Abstract: The present invention relates to a hybrid balun apparatus and a receiver thereof. The hybrid balun apparatus comprises a passive unit, a first active unit, and a second active unit. The passive unit receives an input signal, and outputs an in-phase signal having an identical phase compared to the input signal and an inverse-phase signal having an inverse phase compared to the input signal. The first active unit compensates the in-phase signal of the passive unit corresponding to the input signal. The second active unit compensates the in-phase signal of the passive unit in response to the input signal.
Abstract: A method and system for the megasonic cleaning of one or more substrates that reduces damage to the substrate(s) resulting from the megasonic energy. The substrates are supported in a process chamber and contacted with a cleaning solution comprising a cleaning liquid having carbon dioxide gas dissolved in the cleaning liquid in such amounts that the carbon dioxide gas is at a supersaturated concentration for the conditions within the process chamber. Megasonic energy is then transmitted to the substrate. The cleaning solution provides protection from damage resulting from the application of megasonic/acoustical energy. The invention is not limited to carbon dioxide but can be used in conjunction with any gas that, when so dissolved in a cleaning liquid, protects substrates from being damaged by the application of megasonic/acoustical energy.
Abstract: There is provided a furniture construction having a moveable support structured to support at least one electronic component in a first position that is generally horizontal and in a second position that is at a downwardly inclined angle at least partially within the interior of a housing so that the front and rear of the electronic component can be easily accessed.
Abstract: A system for megasonic processing of an article. In one aspect, the system for megasonic processing comprises a rotary support for supporting an article, a dispenser for applying a fluid to a surface of an article positioned on the rotary support; and a transducer assembly. The transducer assembly comprises (i) a transmitter positioned adjacent to the article on the rotary support so that when the fluid is applied to the surface of the article via the dispenser, a meniscus of the fluid is formed between a portion of the transmitter and the surface of the article and (ii) not more than one transducer coupled to the transmitter, the transducer adapted to oscillate at a frequency for propagating megasonic energy through the transmitter and into the meniscus of the fluid.
Abstract: A digital-to-analog converter comprises a current supplier, a current divider dividing current supplied from the current supplier into certain amounts, an inverter outputting inverted signals of input signals and non-inverted signals, a switch controlling a flow of the current divided into the certain amounts by the current divider according to the inverted signals and the non-inverted signals, and a current output block adding up the current divided into the certain amounts according to the non-inverted signals to output an analog signal. The digital-to-analog converter can be implemented on a small chip area with desired resolution.
May 29, 2007
Date of Patent:
April 7, 2009
Korea Advanced Institute of Science & Technology
Gyu Hyeong Cho, Yong-Joon Jeon, Young-Suk Son, Sang Kyung Kim, Jin Yong Jeon, Gun Ho Lee
Abstract: A system and method for conditioning an alternating current (“AC”) power transmission for supply to a load circuit. In one aspect, the invention is a system comprising: a power conditioning circuit comprising a voltage surge protector for eliminating voltage spikes in the AC power transmission, an inrush current suppressor for limiting the current of the AC power transmission, and a voltage sensing circuit for monitoring a voltage level of the AC power transmission; means for electrically coupling the power conditioning circuit to a source of AC power; outlet means for electrically coupling the power conditioning circuit to a load circuit; and wherein the voltage sensing circuit is adapted so that upon detecting that the voltage level of the AC power transmission exceeds a predetermined upper limit, the AC power transmission is prohibited from reaching the outlet means.