Abstract: According to one embodiment of the invention, a chemical mechanical polishing monitoring system includes a pump delivering a slurry to a polishing pad and a rotation sensing device coupled to the pump. The rotation sensing device senses a rotation of the pump and generates a signal indicative of the rotation of the pump.

Abstract: An optical projection and capture system includes an image sensor integrated with an optical projection device. Additionally, the integrated device may be coupled with a laser pointer to deliver interactive presentations. The laser pointer may be pulsed to improve identifying and tracking a laser light spot on a projected image. These applications may be extended to rear projection systems for gaming and interactive graphics.

Abstract: A micromirror array 110 fabricated on a semiconductor substrate 11. The array 110 is comprised of four operating layers 12, 13, 14, 15. An addressing layer 12 is fabricated on the substrate. A raised electrode layer 13 is spaced above the addressing layer by an air gap. A hinge layer 14 is spaced above the raised electrode layer 13 by another air gap. A mirror layer 15 is spaced over the hinge layer 14 by a third air gap.

Abstract: Phosphonate surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirror devices. The surfactants are adsorbed from vapor or solution to form self-assembled monolayers at the device surface. The higher binding energy of the phosphonate end groups (as compared to carboxylate surfactants) improves the thermal stability of the resulting layer.

Abstract: In accordance with a particular embodiment of the present invention, a method for manufacturing strained silicon is provided. In one embodiment, the method for manufacturing strained silicon includes inducing a curvature in a silicon wafer, depositing an epitaxial layer of silicon upon an upper surface of the silicon water while the silicon wafer is under the induced curvature, and releasing the silicon wafer from the induced curvature, after depositing the epitaxial layer, such that a strain is induced in the epitaxial layer.

Abstract: The micromirror-based projection system of the present invention uses polarized illumination light in producing desired images on a display target. The display target has coated thereon a polarization film that absorbs most of the ambient light that would be incident onto the display target otherwise. Polarized illumination light is provided incident to the reflective surfaces of the spatial light modulator. The polarization direction of the illumination light can be associated with the rotation axes of the micromirrors and the polarization direction of the polarized film on the display target.

Abstract: A microstructure is packaged with a device substrate of the microstructure being attached to a package substrate. For dissipating possible deformation of the microstructure, which may result in device failure or quality degradation of the microstructure, an adhesive material comprising a compliant adhesive component is applied and positioned between the device substrate and package substrate.

Abstract: Disclosed is a system and method for aligning a free-space optical signal in an optical system having a light modulator having an array of pixels. In this system and method, certain pixels of the light modulator array are initially assigned for the modulation of the free-space optical signal. An alignment optical signal is generated and monitored, to determine whether the optical system components are properly aligned. The alignment optical signal is generated and propagated along a path that is substantially aligned with the path of the free-space optical signal. Detector elements are used to monitor the position (and shifts in the position) of the free-space optical signal. By reassigning the pixels of the array of the light modulator at the direction of a control system, it is possible for the light modulator to compensate for shifts in the alignment of the optical components within the system.

Abstract: A method and system providing boundary dispersion to pixel values displayed on a binary spatial light modulator to reduce temporal contouring artifacts. Pixel code values are offset from a nominal value when displayed on the SLM to disperse a large bit transition for a pulse width modulation (PWM) system. The offset value varies as a function of the pixel digital code, the pixel spatial location on the screen, and pixel temporal location in time. The set of offsets applied to pixels is varied over a repeating sequence of 2 displayed frames.

Abstract: A system and method for the modulation of light propagating along an optical path, for example the optical path in a projection display system. As light in the optical path travels from a light source to a display screen, it is shaped and modulated by the various components of the optical path so that the intended visual image appears on the display screen. In accordance with the present invention, a mirror disposed proximate the optical path is operable to be selectively inserted and removed from the optical path to alternately direct the light from one portion of the optical path to another, or to a light dump where it can be absorbed such that the associated heat energy may be properly dissipated. In a preferred embodiment, the mirror is a fold mirror mounted at a stop of the system to fold the light beam approximately 90 degrees when the mirror is inserted in the optical path.

Abstract: An apparatus for and method of extending the dynamic range of a RF communications receiver. The invention provides a mechanism for controlling the gain of both the LNA and down conversion mixer in the front end portion of an RF receiver. Both the LNA and the mixer are adapted to have both low and high gain modes of operation. The control mechanism typically comprises a two bit gain control that places both the LNA and mixer in one of four operating gain mode states. The selection of the most appropriate operating gain mode state, is preferably determined in accordance with various metrics such as the received levels of the desired signal, levels of interference signals, bit error rate and receiver RSSI.

Abstract: Disclosed herein is a method of operating display systems with reduction of the warm-up time of an arc lamp in the event of an accidental or unintentional turn-off.

Abstract: The invention provides a method for matching micromirror wafers and electrode wafers so as to form micromirror array devices while the production yield is maximized. Each micromirror wafer and/or electrode wafer may have one or more non-passing dies and a plurality of good dies. A set of matching schemes are defined for matching each micromirror wafer with an electrode wafer. For each matching scheme, a cost is calculated with the cost being defined as a total number of unmatched die assemblies resulted from the matching scheme, wherein the unmatched die assembly is defined as an assembly consisting of a passing and non-passing die. Then a matching scheme is selected from the defined matching scheme such that the calculated cost is the minimum among the calculated costs of the defined matching schemes.

Abstract: A digital keystone correction process locates image points in a corrected image from image points in a distorted image that was produced by misalignment of the axis of a sensor such as a camera. The correction process locates corrected image points by constructing intercept points that are the intersections of the extended sides of a quadrilateral in the distorted image plane that is constructed from a known rectangular feature in the subject plane. Reference points are located by drawing a line through each intercept point and the distorted image point. Distances are found from the intercept points to the image points and the reference points. The distances are scaled and corrected with an offset to locate the coordinates of the image points in the corrected image plane. This process can correct alignment errors of pitch, yaw, and roll between the subject plane and an image plane such as photographic film.

Abstract: Methods for improving video images by making real-time gamma correction adjustments to such images are described. More particularly, gamma correction adjustments may be optimized for each individual frame of a video image by first segregating the pixels of an image according to brightness. The segregated pixels may then be used in computing weighting calculations, which modify the transfer functions used for image display. In some embodiments, the video signal may be conditioned between the standard gamma curve and the S-shaped gamma curve used in mapping video signal input to intensity output. In this manner, frame-to-frame gamma correction adjustments can be made, thereby optimizing the resulting image. Related systems for making frame-to-frame gamma correction adjustments are also described.

Abstract: A method of tilting a micromirror includes forming a substrate, a micromirror outwardly from the substrate, and at least one electrode inwardly from the micromirror. The method further includes applying, by the at least one electrode, electrostatic forces sufficient to pivot the micromirror about a pivot point. In addition, the method includes providing the at least one electrode with a sloped outer surface. The sloped outer surface has a first end and a second end. The second end is closer to the pivot point than the first end, and the first end is closer to the substrate than the second end. The method also includes providing at least a portion of the at least one electrode with material properties that at least partially contribute to the sloped profile of the sloped outer surface.

Abstract: A method for transmitting light in an image display system includes generating a first cone of light from a first light source. The first cone of light includes a plurality of light beams. A first portion of the first cone is projected in an illumination path. A second portion of the first cone is projected at a surface of a reflector. The second portion of the first cone is reflected to project the second portion of the first cone in the illumination path. The first and second portions of the first cone are received at an entrance of an integrator rod. The second portion of the first cone increases the intensity of light received by the integrator rod.

Abstract: A MEMS device includes a hinge that is disposed outwardly from a substrate and capable of at least partially supporting a conductor that is disposed outwardly from the hinge. The conductor being capable of pivoting about a first axis. The device also includes one or more electrostatic fins that are disposed inwardly from and in contact with the conductor. The one or more electrostatic fins being disposed substantially along a second axis that is different than the first axis. The MEMS device further includes one or more electrodes that are formed outwardly from the substrate and inwardly from the conductor. The one or more electrodes being separated from the conductor by a first air gap. The one or more electrodes also being separated from the one or more electrostatic fins by a second air gap that is different than the first air gap.

Abstract: According to various illustrative embodiments of the present invention, a device for a light projection system includes a single light emitting diode array comprising at least one green die, at least one blue die, and at least one red die, a single light collection, integration, and etendue-matching optic element comprising a tapered light pipe capable of collecting substantially all light emitted by the single light emitting diode array and spatially integrating the substantially all the light emitted by the single light emitting diode array, and a telecentric relay using at least one of spherical and aspherical refractive and reflective components. The device also includes an illumination wedge prism, a digital micromirror device capable of modulating the substantially all the light emitted by the single light emitting diode array, and a projection total internal reflection prism, the projection total internal reflection prism disposed between the illumination wedge prism and the digital micromirror device.

Abstract: In one embodiment, a method for modulating light in an image display system includes generating a plurality of light beams. The amount of light beams that are received by a modulator is selectively varied, and the modulated light beams are received at the modulator.