Abstract: A carbon nanotube (CNT) array is patterned on a substrate. The substrate can be a microelectronic die, an interposer-type structure for a flip-chip, a mounting substrate, or a board. The CNT array is patterned by using a patterned metallic seed layer on the substrate to form the CNT array by chemical vapor deposition. The patterned CNT array can also be patterned by using a patterned mask on the substrate to form the CNT array by growing. A computing system that uses the CNT array for heat transfer from the die is also used.
Abstract: Techniques are disclosed for fabricating FinFET transistors (e.g., double-gate, trigate, etc). A sacrificial gate material (such as polysilicon or other suitable material) is deposited on fin structure, and polished to remove topography in the sacrificial gate material layer prior to gate patterning. A flat, topography-free surface (e.g., flatness of 50 nm or better, depending on size of minimum feature being formed) enables subsequent gate patterning and sacrificial gate material opening (via polishing) in a FinFET process flow. Use of the techniques described herein may manifest in structural ways. For instance, a top gate surface is relatively flat (e.g., flatness of 5 to 50 nm, depending on minimum gate height or other minimum feature size) as the gate travels over the fin. Also, a top down inspection of gate lines will generally show no or minimal line edge deviation or perturbation as the line runs over a fin.
Type:
Grant
Filed:
December 23, 2009
Date of Patent:
December 18, 2012
Assignee:
Intel Corporation
Inventors:
Joseph M. Steigerwald, Uday Shah, Seiichi Morimoto, Nancy Zelick
Abstract: A chip package includes a radio-frequency identification (RFID) tag disposed as a spacer structure on a surface of a die in a chip package. A method includes assembling an RFID spacer structure, to at least one chip such as memory or logic. A computing system includes an RFID spacer structure in a chip package.
Abstract: Methods of forming a microelectronic packaging structure and associated structures formed thereby are described. Those methods may include forming a cavity in a carrier material, attaching a die in the cavity, wherein a backside of the die comprises a metal filled DBF, forming a dielectric material adjacent the die and on a bottom side of the carrier material, forming a coreless substrate by building up layers on the dielectric material, and removing the carrier material from the coreless substrate.
Abstract: A multiple-gate field-effect transistor includes a fluid in a top gate, two lateral gates, and a bottom gate. The multiple-gate field-effect transistor also includes a patterned depletion zone and a virtual depletion zone that has a lesser width than the patterned depletion zone. The virtual depletion zone width creates a virtual semiconductor nanowire that is lesser in width than the patterned depletion zone.
Abstract: The present disclosure relates to the field of fabricating microelectronic packages, wherein microelectronic devices of the microelectronic packages may have magnetic attachment structures comprising a magnetic material formed on an attachment structure. The microelectronic device may be aligned on a substrate with a magnetic field and then held in place therewith while being attached to the substrate. The microelectronic device may also be aligned with an alignment plate which magnetically aligns and holds the component in place while being packaged.
Type:
Grant
Filed:
May 12, 2010
Date of Patent:
November 20, 2012
Assignee:
Intel Corporation
Inventors:
Rajasekaran Swaminathan, Ravindranath Mahajan, John S. Guzek
Abstract: Embodiments of IC manufacture resulting in improved electromigration and gap-fill performance of interconnect conductors are described in this application. Reflow agent materials such as Sn, Al, Mn, Mg, Ag, Au, Zn, Zr, and In may be deposited on an IC substrate, allowing PVD depositing of a Cu layer for gap-fill of interconnect channels in the IC substrate. The Cu layer, along with reflow agent layer, may then be reflowed into the interconnect channels, forming a Cu alloy with improved gap-fill and electromigration performance. Other embodiments are also described.
Abstract: Methods of forming a microelectronic packaging structure and associated structures formed thereby are described. Those methods may include a die embedded in a coreless substrate, wherein a mold compound surrounds the die, and wherein the die comprises TSV connections on a first side and C4 pads on a second side of the die, a dielectric material on a first side and on a second side of the mold compound; and interconnect structures coupled to the C4 pads and to the TSV pads. Embodiments further include forming packaging structures wherein multiple dies are fully embedded within a BBUL package without PoP lands.
Type:
Grant
Filed:
September 24, 2010
Date of Patent:
November 6, 2012
Assignee:
Intel Corporation
Inventors:
Ravi K Nalla, Pramod Malatkar, Mathew J Manusharow
Abstract: Embodiments of the present invention describe a waveguide-based photodetector device and its methods of fabrication. The waveguide photodetector device comprises a substrate having a cladding structure formed thereon. A waveguide element for receiving optical signals is disposed within the cladding structure. A portion of the waveguide element is encapsulated by a photodetector element that detects the optical signal received by the waveguide element and generates an electrical signal based on the optical signal. Encapsulating the waveguide element in the photodetector element improves coupling efficiency and enables a waveguide photodetector device with higher speeds and higher responsivity.
Abstract: A microelectronic device mounting substrate includes a bond pad with a side wall and an upper surface. A dielectric first layer is disposed on the mounting substrate and a solder mask second layer is disposed on the dielectric first layer. A uniform recess is disposed through the solder mask second layer and the dielectric first layer that exposes the portion of the bond pad upper surface.
Abstract: Aspects of the present disclosure may include an apparatus for enclosing a thin wafer to prevent damage during an on-going manufacture of integrated circuit chip(s) on or in the thin wafer, and methods of utilizing the apparatus. The apparatus may include a lower support assembly and an upper retainer assembly which retains a thin wafer therebetween, wherein the lower support assembly and the upper retainer assembly may be coupled together by a magnetic attractive force.
Abstract: The present disclosure relates to the field of fabricating microelectronic devices. In at least one embodiment, the present disclosure relates to forming isolation structures in strained semiconductor bodies of non-planar transistors while maintaining strain in the semiconductor bodies.
Type:
Grant
Filed:
December 21, 2009
Date of Patent:
September 18, 2012
Assignee:
Intel Corporation
Inventors:
Stephen M. Cea, Martin D. Giles, Kelin Kuhn, Jack T. Kavalieros, Markus Kuhn
Abstract: The present disclosure relates to the field of fabricating microelectronic devices. In at least one embodiment, the present disclosure relates to forming an isolated nanowire, wherein isolation structure adjacent the nanowire provides a substantially level surface for the formation of microelectronic structures thereon.
Type:
Grant
Filed:
December 18, 2009
Date of Patent:
September 18, 2012
Assignee:
Intel Corporation
Inventors:
Uday Shah, Benjamin Chu-Kung, Been Y. Jin, Ravi Pillarisetty, Marko Radosavljevic, Willy Rachmady
Abstract: An apparatus includes a coreless substrate with an embedded die that is integral to the coreless substrate, and at least one device assembled on a surface that is opposite to a ball-grid array disposed on the coreless substrate. The apparatus include an at least one stiffener layer that is integral to the coreless substrate and the stiffener layer is made of overmold material, underfill material, or prepreg material.
Abstract: Embodiments of an apparatus and methods of providing a quantum well device for improved parallel conduction are generally described herein. Other embodiments may be described and claimed.
Type:
Grant
Filed:
October 17, 2011
Date of Patent:
August 14, 2012
Assignee:
Intel Corporation
Inventors:
Ravi Pillarisetty, Mantu Hudait, Been-Yih Jin, Benjamin Chu-Kung, Robert Chau
Abstract: A multiple-gate field-effect transistor includes a fluid in a top gate, two lateral gates, and a bottom gate. The multiple-gate field-effect transistor also includes a patterned depletion zone and a virtual depletion zone that has a lesser width than the patterned depletion zone. The virtual depletion zone width creates a virtual semiconductor nanowire that is lesser in width than the patterned depletion zone.
Abstract: A non-volatile microelectronic memory device that includes a depletion mode circuit protection device that prevents high voltages, which are applied to bitlines during an erase operation, from being applied to and damaging low voltage circuits which are electrically coupled to the bitlines.
Type:
Grant
Filed:
December 14, 2009
Date of Patent:
August 14, 2012
Assignee:
Intel Corporation
Inventors:
Michael Smith, Vladimir Mikhalev, Kenneth Marr, Haitao Liu
Abstract: A transient voltage compensation system is provided. The transient voltage compensation system includes a processor and a first voltage regulator coupled to the processor, wherein the first voltage regulator is to deliver a load current to the processor at an output voltage. The transient voltage compensation system also includes a second voltage regulator coupled to the first voltage regulator, wherein the second voltage regulator is to regulate the output voltage in response to transient loads of the processor.
Type:
Grant
Filed:
May 7, 2008
Date of Patent:
August 14, 2012
Assignee:
Intel Corporation
Inventors:
Rajapandian Ayyanar, William J. Lambert, Shamala A. Chickamenahalli
Abstract: A method for dynamically operating a multi-core processor system is provided. The method involves ascertaining currently active processor cores, identifying a currently active processor core having a lowest operating frequency, and adjusting at least one operational parameter according to voltage-frequency characteristics corresponding to the identified processor core to fulfill a predefined functional mode, e.g. power optimization mode, performance optimization mode and mixed mode.
Abstract: Embodiments of systems and methods for providing a hybrid illumination aperture in optical lithography are generally described herein. Other embodiments may be described and claimed.
Type:
Grant
Filed:
December 30, 2008
Date of Patent:
July 31, 2012
Assignee:
Intel Corporation
Inventors:
Charles Wallace, Matthew Tingey, Swaminathan Sivakumar