Patents Assigned to Alta Devices, Inc.
  • Patent number: 10008628
    Abstract: A method for providing a textured layer in an optoelectronic device is disclosed. The method includes depositing a template layer on a first layer. The template layer has significant inhomogeneity either in thickness or in composition, or both, including the possibility of forming one or more islands to provide at least one textured surface of the island layer. The method also includes exposing the template layer and the first layer to an etching process to create or alter at least one textured surface. The altered at least one textured surface is operative to cause scattering of light.
    Type: Grant
    Filed: November 1, 2016
    Date of Patent: June 26, 2018
    Assignee: ALTA DEVICES, INC.
    Inventors: I-Kang Ding, Brendan M. Kayes, Rose Twist, Sylvia Spruytte, Feng Liu, Gregg Higashi, Melissa J. Archer, Gang He
  • Patent number: 9994936
    Abstract: Embodiments described herein provide processes for forming and removing epitaxial films and materials from growth wafers by epitaxial lift off (ELO) processes. In some embodiments, the growth wafer has edge surfaces with an off-axis orientation which is utilized during the ELO process. The off-axis orientation of the edge surface provides an additional variable for controlling the etch rate during the ELO process- and therefore the etch front may be modulated to prevent the formation of high stress points which reduces or prevents stressing and cracking the epitaxial film stack. In one embodiment, the growth wafer is rectangular and has an edge surface with an off-axis orientation rotated by an angle greater than 0° and up to 90° relative to an edge orientation of <110> at 0°.
    Type: Grant
    Filed: August 15, 2011
    Date of Patent: June 12, 2018
    Assignee: Alta Devices, Inc.
    Inventors: Thomas Gmitter, Gang He, Melissa Archer, Siew Neo
  • Patent number: 9982346
    Abstract: A chemical vapor deposition (CVD) reactor comprises a deposition zone, a substrate carrier and a liner assembly. The deposition zone is constructed so as to have a positive pressure reactant gases fixed showerhead introducing reactant gas supporting thin film CVD deposition. The substrate carrier movably supports a substrate and the liner assembly within the deposition zone and is heated so as to be subjected to a CVD process. The liner assembly partly encloses selected portions of the deposition zone, particularly portions of the substrate carrier and thereby enclose a hot zone surrounding a substrate to be processed so as to retain heat in that zone but allows gas flow radially outwardly toward walls of a surrounding cold-wall reactor with exhaust ports surrounding the deposition zone that exhaust spent reactant gases. The liner assembly is a sink for solid reaction byproducts while gaseous reaction byproducts are pumped out at the exhaust ports.
    Type: Grant
    Filed: August 31, 2011
    Date of Patent: May 29, 2018
    Assignee: ALTA DEVICES, INC.
    Inventors: Gregg Higashi, Khurshed Sorabji, Lori D. Washington
  • Patent number: 9950404
    Abstract: A method and system for polishing a plurality of workpieces is disclosed. The method and system comprises providing a polishing tool with multiple polishing heads; and providing a substrate tray that can hold the plurality of work pieces in a fixed position on a tray underneath the polishing heads. The system and method includes moving the tray within the polisher. Finally, the method and system includes configuring the multiple polishing heads with the appropriate pad/slurry combinations to polish the workpieces and to create a finished polished surface on the plurality of work pieces.
    Type: Grant
    Filed: March 29, 2012
    Date of Patent: April 24, 2018
    Assignee: ALTA DEVICES, INC.
    Inventors: Stephen M. Fisher, Robindranath Banerjee, Christopher L. Beaudry, Brian J. Brown
  • Patent number: 9954131
    Abstract: Embodiments generally relate to optoelectronic semiconductor devices such as solar cells. In one aspect, a device includes an absorber layer made of gallium arsenide (GaAs) and having only one type of doping. An emitter layer is located closer than the absorber layer to a back side of the device and is made of a different material and having a higher bandgap than the absorber layer. A heterojunction is formed between the emitter layer and the absorber layer, and a p-n junction is formed between the emitter layer and the absorber layer and at least partially within the different material at a location offset from the heterojunction. An intermediate layer is located between the absorber layer and the emitter layer and provides the offset of the p-n junction from the heterojunction, and includes a graded layer and an ungraded back window layer.
    Type: Grant
    Filed: April 21, 2015
    Date of Patent: April 24, 2018
    Assignee: ALTA DEVICES, INC.
    Inventors: Brendan M. Kayes, Hui Nie, Isik C. Kizilyalli
  • Patent number: 9859162
    Abstract: A method for separation of semiconductor device cell units from fabricated large-area cell units, together with a corresponding tile unit structure, are provided in which the tile unit is cut along cell unit boundaries while leaving intact a set of specified tab sections distributed along the cell unit boundaries. The tile unit may be a multi-layer composite of a semiconductor layer with a conductive metallic base supported upon a polymer layer and adhered thereto by an adhesive film, wherein tab sections are cut completely through the semiconductor layer and its metallic base from above and may also be cut partially through the polymer layer from below, leaving at least a portion of the polymer layer in place at tab sections. Tile units can be handled such that component cell units are held together by the tab sections, until a physical final separation of selected cell units.
    Type: Grant
    Filed: March 20, 2015
    Date of Patent: January 2, 2018
    Assignee: ALTA DEVICES, INC.
    Inventors: Khurshed Sorabji, Daniel G. Patterson
  • Patent number: 9853489
    Abstract: A charging device configured to charge a mobile device through the solar cells integrated on the mobile device. The charging device converts wall power to light energy which can be absorbed by the solar cells and then converted to electricity for storage in the rechargeable battery of the mobile device. The charging device includes a light source configured to emit a light beam having a spectrum tuned to the spectral response of the solar cells. The charging device includes a proximity sensor for detecting the presence of a mobile device within the charging device housing and responsively signaling the activation of the light source. The charging device includes logic for wirelessly communicating with the mobile device as well as controlling the charging process in various stages and aspects. The light source may be LEDs that also serve to transmit light communication signals to the mobile device.
    Type: Grant
    Filed: January 6, 2016
    Date of Patent: December 26, 2017
    Assignee: Alta Devices, Inc.
    Inventors: Gang He, Brendan Kayes, Christopher France
  • Patent number: 9834860
    Abstract: Embodiments of the invention generally relate processes for epitaxial growing Group III/V materials at high growth rates, such as about 30 ?m/hr or greater, for example, about 40 ?m/hr, about 50 ?m/hr, about 55 ?m/hr, about 60 ?m/hr, or greater. The deposited Group III/V materials or films may be utilized in solar, semiconductor, or other electronic device applications. In some embodiments, the Group III/V materials may be formed or grown on a sacrificial layer disposed on or over the support substrate during a vapor deposition process. Subsequently, the Group III/V materials may be removed from the support substrate during an epitaxial lift off (ELO) process. The Group III/V materials are thin films of epitaxially grown layers which contain gallium arsenide, gallium aluminum arsenide, gallium indium arsenide, gallium indium arsenide nitride, gallium aluminum indium phosphide, phosphides thereof, nitrides thereof, derivatives thereof, alloys thereof, or combinations thereof.
    Type: Grant
    Filed: October 13, 2010
    Date of Patent: December 5, 2017
    Assignee: ALTA DEVICES, INC.
    Inventors: Lori D. Washington, David P. Bour, Gregg Higashi, Gang He
  • Patent number: 9768329
    Abstract: An optoelectronic semiconductor device is disclosed. The optoelectronic device comprises a plurality of stacked p-n junctions. The optoelectronic semiconductor device includes a n-doped layer disposed below the p-doped layer to form a p-n layer such that electric energy is created when photons are absorbed by the p-n layer. Recesses are formed on top of the p-doped layer at the top of the plurality of stacked p-n junctions. The junctions create an offset and an interface layer is formed on top of the p-doped layer at the top of the plurality stacked p-n junctions. The optoelectronic semiconductor device also includes a window layer disposed below the plurality stacked p-n junctions. In another aspect, one or more optical filters are inserted into a multi-junction photovoltaic device to enhance its efficiency through photon recycling.
    Type: Grant
    Filed: December 4, 2012
    Date of Patent: September 19, 2017
    Assignee: ALTA DEVICES, INC.
    Inventors: Brendan M. Kayes, Gang He, Sylvia Spruytte, I-Kang Ding, Gregg Higashi
  • Patent number: 9716196
    Abstract: Embodiments of the invention generally relate to photovoltaic devices. In one embodiment, a method for forming a gallium arsenide based photovoltaic device includes providing a semiconductor structure, the structure including an absorber layer comprising gallium arsenide. A bypass function is provided in a p-n junction of the semiconductor structure, where under reverse-bias conditions the p-n junction breaks down in a controlled manner by a Zener breakdown effect.
    Type: Grant
    Filed: February 9, 2011
    Date of Patent: July 25, 2017
    Assignee: ALTA DEVICES, INC.
    Inventors: Hui Nie, Brendan M. Kayes, Isik C. Kizilyalli
  • Patent number: 9711671
    Abstract: System and method of providing a photovoltaic (PV) cell with a complex via structure in the substrate that has a primary via for containing a conductive material and an overflow capture region for capturing an overflow of the conductive material from the primary via. The conductive filling in the primary via may serve as an electrical contact between the PV cell and another PV cell. The overflow capture region includes one or more recesses formed on the substrate back surface. When the conductive material overflows from the primary via, the one or more recesses can capture and confine the overflow within the boundary of the complex via structure. A recess may be a rectangular or circular trench proximate to or overlaying the primary via. The recesses may also be depressions formed by roughening the substrate back surface.
    Type: Grant
    Filed: September 18, 2015
    Date of Patent: July 18, 2017
    Assignee: ALTA DEVICES, INC.
    Inventors: Linlin Yang, Gang He, Dan Patterson, Paul Goddu, Liguang Lan, Gregg Higashi
  • Patent number: 9698284
    Abstract: An optoelectronic device including at least one of a solar device, a semiconductor device, and an electronic device. The device includes a semiconductor unit. A plurality of metal fingers is disposed on a surface of the semiconductor unit for electrical conduction. Each of the metal fingers corresponds to a section of the optoelectronic device. A plurality of pad areas is available for connection to a bus bar, wherein each of the metal fingers is connected to a corresponding pad area for forming an electrical contact. The optoelectronic device includes a bad section, wherein the bad section is associated with a compromised metal finger and a compromised pad area. A dielectric spot coating is disposed above the compromised pad area to electrically isolate the bad section.
    Type: Grant
    Filed: August 31, 2011
    Date of Patent: July 4, 2017
    Assignee: ALTA DEVICES, INC.
    Inventor: Andreas Hegedus
  • Patent number: 9691921
    Abstract: Embodiments of the invention generally relate to device fabrication of thin films used as solar devices or other electronic devices, and include textured back reflectors utilized in solar applications. In one embodiment, a method for forming a textured metallic back reflector which includes depositing a metallic layer on a gallium arsenide material within a thin film stack, forming an array of metallic islands from the metallic layer during an annealing process, removing or etching material from the gallium arsenide material to form apertures between the metallic islands, and depositing a metallic reflector layer to fill the apertures and cover the metallic islands.
    Type: Grant
    Filed: October 13, 2010
    Date of Patent: June 27, 2017
    Assignee: ALTA DEVICES, INC.
    Inventors: Harry Atwater, Brendan Kayes, Isik C. Kizilyalli, Hui Nie
  • Patent number: 9679814
    Abstract: Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming an ELO thin film is provided which includes depositing an epitaxial material over a sacrificial layer on a substrate, adhering a flattened, pre-curved support handle onto the epitaxial material, and removing the sacrificial layer during an etching process. The etching process includes bending the pre-curved support handle to have substantial curvature while peeling the epitaxial material from the substrate and forming an etch crevice therebetween. Compression is maintained within the epitaxial material during the etching process. The flattened, pre-curved support handle may be formed by flattening a pre-curved support material.
    Type: Grant
    Filed: May 27, 2015
    Date of Patent: June 13, 2017
    Assignee: ALTA DEVICES, INC.
    Inventors: Melissa Archer, Harry Atwater, Thomas Gmitter, Gang He, Andreas Hegedus, Gregg Higashi, Stewart Sonnenfeldt
  • Patent number: 9644268
    Abstract: A thermal bridge connecting first and second processing zones and a method for transferring a work piece from a first to a second processing zone by way of the thermal bridge are disclosed. A work piece, transportable from the first to the second processing zone on or above the thermal bridge, is maintained at a temperature between the temperatures of the processing zones. The thermal bridge member features a thermally conductive transport member for the work piece supported over an infrared transmissive member that is insulative to heat conduction and convection. The bridge insulative member extends between the first and second processing zones or between reactors. An infrared radiation beam source emits infrared radiation which passes through the bridge insulative member to the transport member, heating the member. In an alternate embodiment, the transport member may be heated directly. A liner member may be mounted above the bridge member to retain heat.
    Type: Grant
    Filed: August 31, 2011
    Date of Patent: May 9, 2017
    Assignee: ALTA DEVICES, INC.
    Inventors: Gregg Higashi, Khurshed Sorabji, Andreas Hegedus
  • Patent number: 9647148
    Abstract: An optoelectronic device including at least one of a solar device, a semiconductor device, and an electronic device. The device includes a semiconductor unit. A plurality of metal fingers is disposed on a surface of the semiconductor unit for electrical conduction. Each of the metal fingers includes a pad area for forming an electrical contact. The optoelectronic device includes a plurality of pad areas that is available for connection to a bus bar, wherein each of the metal fingers is connected to a corresponding pad area for forming an electrical contact.
    Type: Grant
    Filed: September 8, 2014
    Date of Patent: May 9, 2017
    Assignee: ALTA DEVICES, INC.
    Inventor: Andreas Hegedus
  • Publication number: 20170037515
    Abstract: A reactor for chemical vapor deposition is equipped with an IR radiation compensating susceptor assembly that supports one or more semiconductor substrates above linear IR heater lamps arranged in a parallel array. A set of primary IR radiation reflectors beneath the lamps directs IR radiation back toward the susceptor in a pattern selected to provide uniform IR irradiation of the susceptor assembly to thereby uniformly heat the substrates. Secondary IR shield reflectors may be provided in selected patterns on the underside of the susceptor assembly as a fine tuning measure to direct IR radiation away from the assembly in a controlled pattern. The combined IR radiation reflectors have an IR signature that compensates for any non-uniform heating profile created by the linear IR heater lamp array. The heating profile of the lamp array might also be tailored in order to reduce the amount of compensation required to be supplied by the IR reflectors.
    Type: Application
    Filed: August 3, 2015
    Publication date: February 9, 2017
    Applicant: ALTA DEVICES, INC.
    Inventors: Brian Burrows, Abril Cabreros, David M. Ishikawa, Brian Brown, Alexander Lerner
  • Patent number: 9537025
    Abstract: Embodiments generally relate to optoelectronic devices and more specifically, to textured layers in optoelectronic devices. In one embodiment, a method for providing a textured layer in an optoelectronic device includes depositing a first layer of a first material and depositing an island layer of a second material on the first layer. Depositing the island layer includes forming one or more islands of the second material to provide at least one textured surface of the island layer, where the textured surface is operative to cause scattering of light.
    Type: Grant
    Filed: April 24, 2015
    Date of Patent: January 3, 2017
    Assignee: ALTA DEVICES, INC.
    Inventors: Brendan M. Kayes, Gregg S. Higashi, Frank Reinhardt, Sylvia Spruytte
  • Patent number: 9502594
    Abstract: A method for providing a textured layer in an optoelectronic device is disclosed. The method includes depositing a template layer on a first layer. The template layer has significant inhomogeneity either in thickness or in composition, or both, including the possibility of forming one or more islands to provide at least one textured surface of the island layer. The method also includes exposing the template layer and the first layer to an etching process to create or alter at least one textured surface. The altered at least one textured surface is operative to cause scattering of light.
    Type: Grant
    Filed: August 5, 2014
    Date of Patent: November 22, 2016
    Assignee: Alta Devices, Inc.
    Inventors: I-Kang Ding, Brendan M. Kayes, Rose Twist, Sylvia Spruytte, Feng Liu, Gregg Higashi, Melissa J. Archer, Gang He
  • Publication number: 20160281236
    Abstract: A substrate processing system having a hot reactor with two load locks and two associated load/unload units, and a related method of operating the system, are disclosed. Substrates are concurrently moved from the reactor into one of two load locks and from the other of the two load locks into the reactor. A bidirectional transfer mechanism is used for the concurrent transfers, such that successive transfers in opposite directions are interleaved. Substrates are heated in the load locks prior to processing in the reactor. The reactor applies processing to substrates, to form processed substrates. Processed substrates are cooled in the load locks after processing in the reactor. Respective load and unload units load substrates into the load locks and unload processed substrates from the load locks. The interleaved concurrent transfers minimize or make zero the idle time of the reactor.
    Type: Application
    Filed: March 26, 2015
    Publication date: September 29, 2016
    Applicant: Alta Devices, Inc.
    Inventors: Alexander Lerner, Brian Brown, Teresa Ann Trowbridge, Joseph Foster