Patents Assigned to Anelva Corporation
  • Patent number: 10388491
    Abstract: To restrict generation of particles or deterioration in process reproducibility caused by a large amount or carbon polymers generated in a plasma generation portion in an ion beam etching apparatus when a magnetic film on a substrate is etched with reactive ion beam etching in manufacturing a magnetic device. In an ion beam etching apparatus, first carbon-containing gas is introduced by a first gas introduction part into a plasma generation portion, and second carbon-containing gas is additionally introduced by a second gas introduction part into a substrate processing space to perform reactive ion beam etching, thereby etching a magnetic material at preferable selection ratio and etching rate while restricting carbon polymers from being formed in the plasma generation portion.
    Type: Grant
    Filed: October 24, 2012
    Date of Patent: August 20, 2019
    Assignee: CANON ANELVA CORPORATION
    Inventors: Yoshimitsu Kodaira, Tomohiko Toyosato
  • Patent number: 10378100
    Abstract: Disclosed is a sputtering apparatus having a target (2) disposed offset with respect to a substrate (7), wherein the uniformity of a deposition amount can be ensured even when a substrate support holder (6) has a low number of rotations of several rotations to several tens of rotations and the amount of deposition is extremely small to provide such a film thickness of 1 nm or less.
    Type: Grant
    Filed: December 18, 2014
    Date of Patent: August 13, 2019
    Assignee: CANON ANELVA CORPORATION
    Inventors: Nobuo Yamaguchi, Koji Tsunekawa, Naoki Watanabe, Motomu Kosuda
  • Patent number: 10359926
    Abstract: An information processing apparatus for processing a plurality of event data generated by a processing apparatus for processing a member, includes a determination unit which determines at least two event data existing at a preset interval in a time-series sequence of the plurality of event data, a specification unit which acquires a scroll request containing designation information for designating a position in the sequence from a scroll function incorporated in the information processing apparatus, and specify, as jump destination event data, event data at a position close to the position designated by the designation information in the sequence, among the at least two event data determined by the determination unit, and a control unit which causes the scroll function to start scrolling from or near the jump destination event data.
    Type: Grant
    Filed: February 5, 2014
    Date of Patent: July 23, 2019
    Assignee: Canon Anelva Corporation
    Inventor: Hiroki Kayoiji
  • Patent number: 10361363
    Abstract: A method includes: a first film formation process forming a film by sputtering a first insulator target when a projection plane of the first insulator target on a plane including a front face of a substrate is in a first state; and a second film formation process forming a film by sputtering a second insulator target when a projection plane of the second insulator target formed on the plane including the front face of the substrate is in a second state different from the first state. The second film formation process provides the insulating film having a second characteristic variation having opposite tendency to a first characteristic variation in the film provided by the first film formation process, the first characteristic variation occurring from a center portion to a peripheral portion of the substrate, the second characteristic variation occurring at least partly from the center portion to the peripheral portion.
    Type: Grant
    Filed: May 31, 2016
    Date of Patent: July 23, 2019
    Assignee: CANON ANELVA CORPORATION
    Inventors: Yuichi Otani, Takuya Seino
  • Patent number: 10236199
    Abstract: A substrate processing method comprises: an execution step of executing the first processing for the plurality of substrates, and executing the second processing for the substrates having undergone the first processing; a recovery step of recovering the plurality of substrates having undergone the first processing and the second processing to the retraction chamber; a conditioning step of, after completion of the first processing for the last substrate among the plurality of substrates, loading a dummy substrate into the first processing chamber, executing the third processing for the dummy substrate, and unloading the dummy substrate from the first processing chamber; and a second execution step of, after the dummy substrate is unloaded from the first processing chamber in the conditioning step, loading the substrates recovered in the recovery step into the first processing chamber, and executing the third processing for the substrates loaded into the first processing chamber.
    Type: Grant
    Filed: June 2, 2016
    Date of Patent: March 19, 2019
    Assignee: CANON ANELVA CORPORATION
    Inventors: Kiyoshi Ehara, Mitsuo Suzuki
  • Patent number: 10222287
    Abstract: Provided are an excellent cold cathode ionization gauge and an excellent cold cathode ionization gauge cartridge. The cold cathode ionization gauge includes: an anode; a cathode, which has a tubular shape, and is arranged to surround the anode; a seal for sealing one opening of the cathode; a first member, which faces the seal inside the cathode, and has a through hole formed therein; a partition for partitioning a space surrounded by the cathode, the seal, and the first member into a first space that the first member faces and a second space that the seal faces; and a light source, which is arranged in the partition or the second space, and is configured to emit an electromagnetic wave, in which a gap is formed between at least part of an outer peripheral portion of the partition and the cathode.
    Type: Grant
    Filed: October 30, 2017
    Date of Patent: March 5, 2019
    Assignee: CANON ANELVA CORPORATION
    Inventors: Yohsuke Kawasaki, Itaru Enomoto, Isao Mochizuki
  • Patent number: 10224463
    Abstract: An object of the present invention is to provide a film formation technique having high productivity by realizing a foundation layer having excellent crystallinity with a small film thickness of about 2 ?m. An embodiment of the present invention relates to a film forming method which includes the step of forming a buffer layer by sputtering on a sapphire substrate held by a substrate holder. The buffer layer includes an epitaxial film having a wurtzite structure prepared by adding at least one substance selected from the group consisting of C, Si, Ge, Mg, Zn, Mn, and Cr to AlxGa1?xN (where 0?x?1).
    Type: Grant
    Filed: July 6, 2015
    Date of Patent: March 5, 2019
    Assignee: CANON ANELVA CORPORATION
    Inventor: Yoshiaki Daigo
  • Patent number: 10224179
    Abstract: Provided is an ion beam processing apparatus including an ion generation chamber, a processing chamber, and electrodes to form an ion beam by extracting ions generated in the ion generation chamber to the processing chamber. The electrodes includes a first electrode disposed close to the ion generation chamber and provided with an ion passage hole to allow passage of the ions, and a second electrode disposed adjacent to the first electrode and closer to the processing chamber than the first electrode is, and provided with an ion passage hole to allow passage of the ions. The apparatus also includes a power unit which applies different electric potentials to the first electrode and the second electrode, respectively, so as to accelerate the ions generated by an ion generator in the ion generation chamber. A material of the first electrode is different from a material of the second electrode.
    Type: Grant
    Filed: October 8, 2015
    Date of Patent: March 5, 2019
    Assignee: CANON ANELVA CORPORATION
    Inventors: Yasushi Yasumatsu, Naoyuki Okamoto, Masashi Tsujiyama, Fumihito Suzuki
  • Patent number: 10157961
    Abstract: Provided are a method of manufacturing a magnetoresistive element and a manufacturing system which are capable of manufacturing a magnetoresistive element achieving further downscaling, i.e., further increase in the degree of integration of the magnetoresistive element while having high magnetic properties. The method includes: preparing a stacked film including one of the two magnetic layers, a layer to form the tunnel barrier layer, and the other of the two magnetic layers, on a substrate; forming multiple separated stacked films on the substrate by separating the stacked film into the multiple stacked films by etching; irradiating side portions of the multiple separated stacked films with ion beams in a pressure-reducible process chamber; and after the irradiation with the ion beams, forming oxide layers or nitride layers on surfaces of the multiple stacked films by introducing an oxidizing gas or a nitriding gas into the process chamber.
    Type: Grant
    Filed: May 15, 2017
    Date of Patent: December 18, 2018
    Assignee: CANON ANELVA CORPORATION
    Inventors: Marie Hayashi, Kiyotaka Sakamoto, Masayoshi Ikeda
  • Patent number: 10153426
    Abstract: This invention provides a manufacturing method of a magnetoresistive effect element having a higher MR ratio than a conventional element. A manufacturing method of a magnetoresistive effect element of an embodiment of the invention includes: a step of forming a tunnel barrier layer on a substrate, on a surface of which one of a magnetization free layer and a magnetization fixed layer is formed; a step of cooling the substrate after the step of forming a tunnel barrier layer; a step of forming an other one of the magnetization free layer and the magnetization fixed layer on the tunnel barrier layer after the step of cooling; and a step of raising a temperature of the substrate after the step of forming the other one of the magnetization free layer and the magnetization fixed layer.
    Type: Grant
    Filed: April 21, 2016
    Date of Patent: December 11, 2018
    Assignee: CANON ANELVA CORPORATION
    Inventors: Takuya Seino, Yuichi Otani, Kazumasa Nishimura
  • Patent number: 10141208
    Abstract: A vacuum processing apparatus includes a tilting unit configured to tilt, in a vacuum vessel, a substrate holder including a refrigerator, and a rotary joint provided in the tilting unit and including a coolant path configured to supply or exhaust a coolant gas to or from the refrigerator. The rotary joint includes a fixed portion fixed to the vacuum vessel, a pivotal portion provided so as to pivot with respect to the fixed portion and fixed to the substrate holder, and a grease supply passage.
    Type: Grant
    Filed: August 20, 2015
    Date of Patent: November 27, 2018
    Assignee: Canon Anelva Corporation
    Inventors: Ryo Ishizaki, Daisuke Kobinata, Naoki Kubota, Kyosuke Sugi
  • Patent number: 10083830
    Abstract: It was found out that when radicals generated by plasma are fed to a treatment chamber via a plurality of holes (111) formed on a partition plate which separates a plasma-forming chamber (108) from the treatment chamber, and the radicals are mixed with a treatment gas which is separately fed to the treatment chamber, the excitation energy of the radicals is suppressed and thereby the substrate surface treatment at high Si-selectivity becomes possible, which makes it possible to conduct the surface treatment of removing native oxide film and organic matter without deteriorating the flatness of the substrate surface. The radicals in the plasma are fed to the treatment chamber via radical-passing holes (111) of a plasma-confinement electrode plate (110) for plasma separation, the treatment gas is fed to the treatment chamber (121) to be mixed with the radicals in the treatment chamber, and then the substrate surface is cleaned by the mixed atmosphere of the radicals and the treatment gas.
    Type: Grant
    Filed: May 23, 2016
    Date of Patent: September 25, 2018
    Assignee: CANON ANELVA CORPORATION
    Inventors: Takuya Seino, Manabu Ikemoto, Kimiko Mashimo
  • Publication number: 20180261440
    Abstract: A sputtering apparatus includes a shutter unit, a plurality of target holders, and a substrate holder which can rotate about an axis perpendicular to a surface on which a substrate is held. The shutter unit includes a first shutter having first and second apertures and a second shutter having third and fourth apertures. The plurality of target holders are arranged on a first virtual circle centered on the axis, with the arrangement intervals between the plurality of target holders on the first virtual circle including at least two types of arrangement intervals.
    Type: Application
    Filed: May 11, 2018
    Publication date: September 13, 2018
    Applicant: CANON ANELVA CORPORATION
    Inventors: Shigenori Ishihara, Hiroyuki Toya, Yasushi Yasumatsu, Toshikazu Nakazawa, Eiji Nakamura, Shintaro Suda, Shin Imai, Yuu Fujimoto
  • Patent number: 10062545
    Abstract: A computer-readable recording medium encoded with a computer program for executing an ion etching method of etching a substrate arranged on a substrate holder using an ion beam etching apparatus. The computer program includes a decremental control program having a command according to which the first step is executed; and an incremental control program having a command according to which the second step is executed.
    Type: Grant
    Filed: March 7, 2016
    Date of Patent: August 28, 2018
    Assignee: CANON ANELVA CORPORATION
    Inventors: Yasushi Kamiya, Einstein Noel Abarra, Yuta Konno
  • Patent number: 10062553
    Abstract: A sputtering apparatus includes a space defining member defining a sputtering space for forming a film on a substrate. The space defining member includes a concave portion, and an opening portion is provided in the bottom portion of the concave portion. The sputtering apparatus includes a shield member configured to shield the opening portion from the sputtering space. The opening portion is formed so that a pressure gauge capable of measuring the pressure in the sputtering space can be attached, and the shield member is arranged so that at least a part of the shield member is buried in the concave portion.
    Type: Grant
    Filed: January 31, 2017
    Date of Patent: August 28, 2018
    Assignee: Canon Anelva Corporation
    Inventors: Taichi Hiromi, Hidetoshi Shimokawa, Atsuyuki Ichikawa
  • Patent number: 10062551
    Abstract: A sputtering apparatus includes a chamber, a substrate holder, first to fourth target holders, a shutter unit, and a gate valve through which the substrate is conveyed. The first to fourth target holders are arranged on vertices of a virtual rectangle having long sides and short sides and inscribed in a virtual circle centered on the axis, the first target holder and the second target holder are respectively arranged on two vertices defining one short side of the virtual rectangle, and a distance to the gate valve is shorter than distances from the third target holder and the fourth target holder to the gate valve.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: August 28, 2018
    Assignee: CANON ANELVA CORPORATION
    Inventors: Shigenori Ishihara, Kazuya Konaga, Hiroyuki Toya, Shintaro Suda, Yasushi Yasumatsu, Yuu Fujimoto, Toshikazu Nakazawa, Eiji Nakamura, Shin Imai
  • Patent number: 10056273
    Abstract: A heating apparatus includes a heater, an electron reflection plate, a filament arranged between the heater and the electron reflection plate, a heating power supply configured to supply an AC voltage between a first terminal and a second terminal of the filament to emit thermoelectrons from the filament, an acceleration power supply configured to supply an acceleration voltage between the filament and the heater, and a resistor arranged so as to form a path which connects the electron reflection plate and the heating power supply.
    Type: Grant
    Filed: September 6, 2017
    Date of Patent: August 21, 2018
    Assignee: Canon Anelva Corporation
    Inventors: Masao Sasaki, Kazutoshi Yoshibayashi, Kenji Sato, Kenzou Murata
  • Patent number: 10026591
    Abstract: An ion beam etching device includes a grid provided between a treatment chamber and a plasma generation chamber, and for forming an ion beam by drawing ions from the plasma generation chamber; a gas introduction unit for introducing discharge gas into the plasma generation chamber; an exhaust for exhausting the treatment chamber; a substrate holder; a control unit to receive a measurement result of an in-plane film thickness distribution before the substrate is processed; and an electromagnetic coil provided outside of the plasma generation chamber in a ceiling portion opposite to the grid of the plasma generation chamber. The electromagnetic coil includes an outer coil provided on an outer circumference of the ceiling portion and an inner coil provided on an inner circumference of the ceiling portion, and the control unit controls the currents applied to the outer coil and the inner coil in accordance with the measurement result.
    Type: Grant
    Filed: July 13, 2017
    Date of Patent: July 17, 2018
    Assignee: Canon Anelva Corporation
    Inventors: Yoshimitsu Kodaira, Yukito Nakagawa, Motozo Kurita
  • Patent number: 10011899
    Abstract: A deposition apparatus comprises a target unit, an anode unit into which electrons emitted from the target unit flow, a striker configured to come into contact with the target unit to render the target unit and the anode unit conductive, so as to cause arc discharge between the target unit and the anode unit, a striker driving unit configured to drive the striker in one of a direction toward the target unit and a direction to retract from the target unit, a power supply unit configured to supply power to the target unit and the anode unit, and a control unit configured to control the striker driving unit and the power supply unit. The control unit supplies the power to the target unit and the anode unit after bringing the striker into contact with the target unit.
    Type: Grant
    Filed: November 11, 2015
    Date of Patent: July 3, 2018
    Assignee: CANON ANELVA CORPORATION
    Inventors: Teruaki Ono, Masahiro Shibamoto
  • Patent number: 9997339
    Abstract: A sputtering apparatus includes a shutter unit, a plurality of target holders, and a substrate holder which can rotate about an axis perpendicular to a surface on which a substrate is held. The shutter unit includes a first shutter having first and second apertures and a second shutter having third and fourth apertures. The plurality of target holders are arranged on a first virtual circle centered on the axis, with the arrangement intervals between the plurality of target holders on the first virtual circle including at least two types of arrangement intervals.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: June 12, 2018
    Assignee: CANON ANELVA CORPORATION
    Inventors: Shigenori Ishihara, Hiroyuki Toya, Yasushi Yasumatsu, Toshikazu Nakazawa, Eiji Nakamura, Shintaro Suda, Shin Imai, Yuu Fujimoto