Patents Assigned to Anelva Corporation
  • Publication number: 20250063648
    Abstract: An X-ray generating apparatus comprises a storage housing, an insulating housing arranged in the storage housing, an X-ray generating tube arranged at least partly in the insulating housing, and a plurality of electrical components arranged in the insulating housing. In the X-ray generating apparatus, the plurality of electrical components include a mold transformer, the mold transformer includes a core, an insulator covering the core, and a heat-dissipating path configured to move heat from the core to an external space of the insulator, and the heat-dissipating path includes a hole provided in the insulator to extend from the external space toward the core.
    Type: Application
    Filed: November 7, 2024
    Publication date: February 20, 2025
    Applicant: Canon Anelva Corporation
    Inventors: Junya KAWASE, Hiroshi Saito
  • Patent number: 12211735
    Abstract: A load lock device includes a load lock chamber, and a substrate holding structure configured to hold a substrate in the load lock chamber, wherein the substrate holding structure includes a facing surface facing the substrate, and is configured to allow a gas to flow through a space between the substrate and the facing surface, and in a state in which the substrate is held by the substrate holding structure, a distance between the substrate and a portion located inside an outer edge of the facing surface is larger than a distance between the substrate and the outer edge of the facing surface.
    Type: Grant
    Filed: January 14, 2022
    Date of Patent: January 28, 2025
    Assignee: Canon Anelva Corporation
    Inventors: Jun Miura, Naoya Fukuda, Shinji Takagi, Hidetoshi Shimokawa
  • Patent number: 12193134
    Abstract: X-ray generating apparatus includes X-ray generating unit having first and second bottom surfaces and side surface; driving circuit; accommodation housing accommodating the X-ray generating unit and the driving circuit; and insulating component arranged in the accommodation housing and having first insulating member arranged between the driving circuit and the accommodation housing and second insulating member arranged between the X-ray generating unit and the accommodation housing. First space is defined between the first insulating member and the accommodation housing, second space is defined between the second insulating member and the accommodation housing, third space is defined between the side surface and the second insulating member, fourth space is defined by the second bottom surface and internal surface of the first insulating member. The second space communicates with the third space, the first space communicates with the fourth space.
    Type: Grant
    Filed: July 24, 2024
    Date of Patent: January 7, 2025
    Assignee: Canon Anelva Corporation
    Inventors: Junya Kawase, Hiroshi Saito
  • Patent number: 12177958
    Abstract: An X-ray generating apparatus comprises a storage housing, an insulating housing arranged in the storage housing, an X-ray generating tube arranged at least partly in the insulating housing, and a plurality of electrical components arranged in the insulating housing. In the X-ray generating apparatus, the plurality of electrical components include a mold transformer, the mold transformer includes a core, an insulator covering the core, and a heat-dissipating path configured to move heat from the core to an external space of the insulator, and the heat-dissipating path includes a hole provided in the insulator to extend from the external space toward the core.
    Type: Grant
    Filed: April 30, 2024
    Date of Patent: December 24, 2024
    Assignee: Canon Anelva Corporation
    Inventors: Junya Kawase, Hiroshi Saito
  • Publication number: 20240381514
    Abstract: X-ray generating apparatus includes X-ray generating unit having first and second bottom surfaces and side surface; driving circuit; accommodation housing accommodating the X-ray generating unit and the driving circuit; and insulating component arranged in the accommodation housing and having first insulating member arranged between the driving circuit and the accommodation housing and second insulating member arranged between the X-ray generating unit and the accommodation housing. First space is defined between the first insulating member and the accommodation housing, second space is defined between the second insulating member and the accommodation housing, third space is defined between the side surface and the second insulating member, fourth space is defined by the second bottom surface and internal surface of the first insulating member. The second space communicates with the third space, the first space communicates with the fourth space.
    Type: Application
    Filed: July 24, 2024
    Publication date: November 14, 2024
    Applicant: Canon Anelva Corporation
    Inventors: Junya KAWASE, Hiroshi Saito
  • Publication number: 20240369502
    Abstract: An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane, and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector includes a long X-ray receiver.
    Type: Application
    Filed: July 18, 2024
    Publication date: November 7, 2024
    Applicant: Canon Anelva Corporation
    Inventor: Takeo TSUKAMOTO
  • Patent number: 12106927
    Abstract: An X-ray imaging apparatus includes an X-ray generation apparatus including an X-ray generation tube having an electron gun and a target configured to receive an electron beam from the electron gun to generate X-rays, a support structure supporting the tube, and a deflector configured to deflect the electron beam, an X-ray detector configured to detect the X-rays from the X-ray generation apparatus, and a control apparatus configured to control the X-ray generation apparatus. The support structure supports the tube to permit at least the target to be pivoted in a state in which the deflector is fixed, and the control apparatus determines, based on use amount of the X-ray generation apparatus and/or change of the X-rays generated by the X-ray generation apparatus, whether it is necessary to pivot the target.
    Type: Grant
    Filed: November 15, 2023
    Date of Patent: October 1, 2024
    Assignee: Canon Anelva Corporation
    Inventor: Yoichi Ando
  • Patent number: 12080509
    Abstract: An X-ray generating apparatus includes an X-ray generating tube including an electron gun and a target configured to generate X-rays upon receiving an electron beam emitted from the electron gun, a deflector configured to deflect the electron beam, a driving circuit configured to apply an accelerating voltage between a cathode of the electron gun and the target, and an adjuster configured to adjust deflection of the electron beam by the deflector in accordance with the accelerating voltage or an amount of change in the accelerating voltage so as to reduce a change in incident position of the electron beam onto the target due to a change in the accelerating voltage.
    Type: Grant
    Filed: March 26, 2024
    Date of Patent: September 3, 2024
    Assignee: Canon Anelva Corporation
    Inventor: Yoichi Ando
  • Publication number: 20240080962
    Abstract: An electric component includes an electric circuit and a metal container covering the electric circuit. The metal container includes a side wall portion surrounding the electric circuit, and a closing portion forming an end surface of the metal container while covering an end portion of the side wall portion. An exposed surface of an outer peripheral portion of the closing portion exposed to an outside of the metal container has a roundness in a section perpendicular to the end surface.
    Type: Application
    Filed: November 10, 2023
    Publication date: March 7, 2024
    Applicant: Canon Anelva Corporation
    Inventor: Junya KAWASE
  • Publication number: 20240063003
    Abstract: A sputtering apparatus includes a first target holder configured to hold a first target such that a first surface of the first target faces the processing space, and a second target holder configured to hold a second target such that a second surface of the second target faces the processing space, wherein the first target holder holds the first target such that an orthogonal projection vector of a first normal vector, which is a normal vector of the first surface, with respect to a virtual plane including the substrate holding surface is directed to a direction away from the substrate, and the second target holder holds the second target such that an orthogonal projection vector of a second normal vector, which is a normal vector of the second surface, with respect to the virtual plane is directed to a direction away from the substrate.
    Type: Application
    Filed: October 31, 2023
    Publication date: February 22, 2024
    Applicant: Canon Anelva Corporation
    Inventors: Susumu KARINO, Tetsuro TODA, Tooru FUJIHARA
  • Publication number: 20240052477
    Abstract: A deposition apparatus, which forms a film on a substrate, includes a rotation unit configured to rotate a target about a rotating axis; a striker configured to generate an arc discharge; a driving unit configured to drive the striker so as to make a close state which the striker closes to a side surface around the rotating axis of the target to generate the arc discharge; and a control unit configured to control rotation of the target by the rotation unit so as to change a facing position on the side surface of the target facing the striker in the close state.
    Type: Application
    Filed: October 11, 2023
    Publication date: February 15, 2024
    Applicant: Canon Anelva Corporation
    Inventor: Masahiro ATSUMI
  • Publication number: 20230349845
    Abstract: An inspection apparatus for inspecting an inspection target object, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection target object, and a plurality of X-ray detectors, wherein each of the plurality of X-ray detectors detects X-rays emitted from a foreign substance existing on an inspection target surface of the inspection target object irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.
    Type: Application
    Filed: July 11, 2023
    Publication date: November 2, 2023
    Applicant: Canon Anelva Corporation
    Inventor: Takeo TSUKAMOTO
  • Publication number: 20230349843
    Abstract: An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.
    Type: Application
    Filed: July 11, 2023
    Publication date: November 2, 2023
    Applicant: Canon Anelva Corporation
    Inventor: Takeo TSUKAMOTO
  • Publication number: 20230083722
    Abstract: Atomic diffusion bonding is carried out using a bonding film comprising a nitride formed at a bonding surface. Operating in a vacuum chamber, a bonding film comprising a nitride is formed on each of flat surfaces of two substrates that each have the flat surface, and, by overlapping the two substrates so the bonding films formed on the two substrates are in contact with each other, the two substrates are joined by the generation of atomic diffusion at a bonding interface between the bonding films.
    Type: Application
    Filed: October 14, 2022
    Publication date: March 16, 2023
    Applicants: TOHOKU UNIVERSITY, Canon Anelva Corporation
    Inventors: Takehito SHIMATSU, Miyuki UOMOTO, Kazuo MIYAMOTO, Yoshikazu MIYAMOTO, Nobuhiko KATOH, Takayuki MORIWAKI, Takayuki SAITOH
  • Publication number: 20230005721
    Abstract: A plasma processing apparatus includes a balun having a first unbalanced terminal, a second unbalanced terminal, a first balanced terminal, and a second balanced terminal, a grounded vacuum container, a first electrode electrically connected to the first balanced terminal, a second electrode electrically connected to the second balanced terminal, and a ground electrode arranged in the vacuum container and grounded.
    Type: Application
    Filed: September 15, 2022
    Publication date: January 5, 2023
    Applicant: Canon Anelva Corporation
    Inventors: Atsushi TAKEDA, Takayuki MORIWAKI, Tadashi INOUE, Masaharu TANABE, Kazunari SEKIYA, Hiroshi SASAMOTO, Tatsunori SATO, Nobuaki TSUCHIYA
  • Publication number: 20220139686
    Abstract: A substrate processing apparatus that processes a substrate using particles, includes a conveyance mechanism configured to convey the substrate along a conveyance surface, a particle source configured to emit particles, a rotation mechanism configured to make the particle source pivot about a rotation axis, and a movement mechanism configured to move the particle source such that a distance between the particle source and the conveyance surface is changed.
    Type: Application
    Filed: January 21, 2022
    Publication date: May 5, 2022
    Applicant: Canon Anelva Corporation
    Inventors: Yuji TAKANAMI, Kento NOROTA, Naoyuki OKAMOTO, Yasuo KATO, Yasushi YASUMATSU
  • Publication number: 20220139729
    Abstract: A load lock device includes a load lock chamber including a first conveyance port connected to a transfer chamber connected to a reduced-pressure processing device, and a second conveyance port connected to a loader chamber; a substrate holder configured to hold a substrate in the load lock chamber; a driving mechanism arranged below the load lock chamber to move the substrate holder up and down and connected to the substrate holder via a connecting member; an extension chamber extended from a lower portion of the load lock chamber to a side; and a pump arranged below the extension chamber and configured to discharge a gas in the load lock chamber via the extension chamber. The extension chamber includes a bottom surface with an opening at a position deviated from a vertically lower position of the substrate holder, and the pump is connected to the opening.
    Type: Application
    Filed: January 14, 2022
    Publication date: May 5, 2022
    Applicant: Canon Anelva Corporation
    Inventors: Jun MIURA, Naoya FUKUDA, Shuji KUMAGAI, Shinji TAKAGI, Tetsuro TODA, Hidetoshi SHIMOKAWA, Satoshi NEGISHI, Satoshi NOMURA, Junya SOEDA
  • Publication number: 20220139761
    Abstract: A load lock device includes a load lock chamber, and a substrate holding structure configured to hold a substrate in the load lock chamber, wherein the substrate holding structure includes a facing surface facing the substrate, and is configured to allow a gas to flow through a space between the substrate and the facing surface, and in a state in which the substrate is held by the substrate holding structure, a distance between the substrate and a portion located inside an outer edge of the facing surface is larger than a distance between the substrate and the outer edge of the facing surface.
    Type: Application
    Filed: January 14, 2022
    Publication date: May 5, 2022
    Applicant: Canon Anelva Corporation
    Inventors: Jun MIURA, Naoya FUKUDA, Shinji TAKAGI, Hidetoshi SHIMOKAWA
  • Publication number: 20220051878
    Abstract: A plasma processing apparatus includes a balun having a first input terminal, a second input terminal, a first output terminal, and a second output terminal, a vacuum container, a first electrode electrically connected to the first output terminal, a second electrode electrically connected to the second output terminal, and a connection unit configured to electrically connect the vacuum container and ground, the connection unit including an inductor.
    Type: Application
    Filed: October 28, 2021
    Publication date: February 17, 2022
    Applicant: Canon Anelva Corporation
    Inventors: Kazunari SEKIYA, Masaharu TANABE, Tadashi INOUE, Hiroshi SASAMOTO, Tatsunori SATO, Nobuaki TSUCHIYA
  • Publication number: 20210212188
    Abstract: An X-ray generation apparatus includes an X-ray generation unit, a storage container configured to store the X-ray generation unit, and an insulating component arranged between an inner surface of the storage container and at least a part of the X-ray generation unit. The insulating component includes a first insulating member and a second insulating member, the first insulating member includes a first portion having a first surface, and a second portion having a second surface, a step difference is formed by the first surface and the second surface, and the second portion has a thickness smaller than that of the first portion, an adhesive surface of the second insulating member and the second surface of the first insulating member are connected by an adhesive material, and a flatness of the second surface is better than a flatness of the first surface.
    Type: Application
    Filed: March 8, 2021
    Publication date: July 8, 2021
    Applicant: Canon Anelva Corporation
    Inventor: Junya KAWASE