Abstract: An adaptable handling system featuring a boundary subsystem and one or more robots. Each robot typically includes a chassis, a container lift mechanism moveable with respect to the robot chassis for transporting at least one container, a drive subsystem for maneuvering the chassis, a boundary sensing subsystem, a container detection subsystem, and a controller. The controller is responsive to the boundary sensing subsystem and the container detection subsystem and is configured to control the drive subsystem to follow a boundary once intercepted until a container is detected and turn until another container is detected. The controller then controls the container lift mechanism to place a transported container proximate the second detected container.

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

Abstract: A gripper apparatus for removing and replacing objects such as containers or vials in an array of containers has a gripper head which extends downward from a support arm, a planetary gear assembly mounted in the gripper head including at least three planet gears, and at least one gripping grip extending downward from each planet gear and projecting beyond a lower end of the gripper head. A drive motor drives the planetary gear assembly to rotate the planet gears in opposite directions, moving the grips inward and outward along predetermined paths to grip and carry an object and release the object when in a desired location.

Abstract: A gripper assembly is provided for use in an autonomous mobile robot for grabbing and holding an object to be transported by the robot. The gripper assembly includes two rotatable shafts and two counter-rotating flippers, each fixedly connected to a different one of the rotatable shafts for engaging the object on opposite sides thereof. The gripper assembly also includes two drive elements, each engaging a different one of the rotatable shafts. Two drive arms engage the two drive elements to transfer torque and rotation from each drive arm to a respective drive element and rotatable shaft to open or close a respective flipper around the object. Each drive element can be disengaged from a respective drive arm and then rotated in order to adjust a radial position of a respective rotatable shaft and flipper relative to the drive arm so that objects of different sizes can be accommodated.

Abstract: A force transfer apparatus includes a housing, a shaft, a plunger, a retention plate, and a force sensor. The housing defines a cavity and a sidewall with an aperture. The shaft is supported in the cavity for rotation about a first axis that is a longitudinal axis of the shaft. The plunger is disposed in the aperture and has a first and second ends. The first end is operably coupled to the shaft such that the plunger can slide along a second axis that is transverse to the first axis in response to rotation of the shaft. The retention plate is fixed to the sidewall outside of the cavity adjacent to the aperture. The force sensor is disposed between the second end of the plunger and the retention plate. As such, the force sensor can detect the amount of force applied to the plunger by the rotation of the shaft.

Abstract: In embodiments, one or more targets, each comprising one or more dots, may be permanently or removably affixed to one or more components of a mechanical system such as a bicycle. A computing device may capture a two-dimensional image of the one or more targets. The two-dimensional image may be processed and the location of the targets in three-dimensional space may be determined based at least in part on the processing. Based at least in part on the location of the targets in three-dimensional space, one or more adjustments to one or more of the components of the mechanical system may be identified, and instructions related to those adjustments may be provided to the user. In embodiments, the computing device may be a smartphone. In embodiments, the one or more components may be one or more of a bicycle frame, derailleur, and/or cassette.

Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.

Abstract: A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first processing device reference point in a known relationship with the at least one target, at least one transmitter located within the housing and configured to transmit an identification signal identifying the at least one transmitter to the at least one target and a controller operably connected to the at least one target and the at least one transmitter, the controller being configured to receive data signals, based on the identification signal, from one of the at least one target and the at least one transmitter and control an operational characteristic of the processing device, based on the data signals.

Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.

Abstract: An integrated circuit includes a substrate having a plurality of electronic devices, a plurality of interconnect layers disposed on one or both sides of the substrate, and a plurality of active electrically conductive interconnect layer structures. The plurality of interconnect layers include horizontal interconnect and vertical-interconnect-access (VIA) layers. The plurality of active electrically conductive interconnect layer structures are disposed on at least one of the plurality of interconnect layers and electrically coupled with at least one of the plurality of electronic devices. The integrated circuit also includes a plurality of spare electrically conductive interconnect layer structures disposed on at least one of the plurality of interconnect layers and electrically isolated from the plurality of active electrically conductive interconnect layer structures.

Abstract: A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop.

Abstract: Methods and apparatus for changing actuator output torques are disclosed. An example method includes decoupling a first end cap from a body of an actuator. A first spring assembly is positioned within a first outer chamber defined by the first end cap and the body. A first end of the first spring assembly is positioned adjacent a surface of a first piston. A second end of the first spring assembly is positioned adjacent the first end cap when the first end cap is coupled to the body. The method includes positioning a first spacer within the first outer chamber and coupling the first end cap to the body. The first spacer changes a distance between the first and second ends of the first spring assembly when the first end cap is coupled to the body to change an output torque of the actuator.

Abstract: An access arbitration module includes a plurality of active component communication ports for communicating with a plurality of active components, and includes a passive component communication port for communicating with a passive component. The access arbitration module also includes switching logic defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port, such that an authorized one of the plurality of active component communication ports is connected in communication with the passive component communication port at a given time, and such that non-authorized ones of the plurality of active component communication ports are prevented from communication with the passive component communication port at the given time.

Abstract: A method of generating graphical models for providing security analysis in computer networks that in one embodiment includes the steps of generating a type abstract graph independent of particular networks that models abstract dependency relationships among attributes and exploits; generating network-specific attack graphs by combining the type abstract graph with specific network information; monitoring an intruder alert; and generating a real-time attack graph by correlating the intruder alert with the network-specific attack graph. The real-time attack graph can be generated using reachability checking, bridging, and exploit prediction based on consequence alerts and may further include the step of calculating the likelihood of queries using a Bayesian network model. The method may also include the steps of inferring unobserved attacks that may have been missed by intrusion detection sensors, and projecting on which hosts and using what exploits additional intruder attacks may occur.

Abstract: A scanning system has a collimated light source and a movable reflective surface. The surface receives light from the light source, reflects the received light to a target surface, receives light reflected from the target surface, and reflects this light to a detector. An aperture disposed between the reflective surface and the target surface has a non-transmissive portion with a width in a direction perpendicular to the laser scan direction that varies over the scan direction.

Abstract: An apparatus and method for calibrating a barcode scanning tunnel has a conveyor structure and a scanning system. The scanning system has a laser light source, an optics system, and a processor. In a calibration mode, the processor locates a central area of the conveyor structure and identifies a first location at which there is a height above the level of the central area according to a predetermined criteria. The processor identifies a second location that is offset, by a predetermined distance in a direction transverse to the direction of travel of the conveyor structure, from the first location.

Abstract: A semiconductor handling system including a vacuum workpiece handling system having a vacuum environment therein, the vacuum workpiece handling system including at least two workpiece handling robotic facilities, a mid-entry station positioned between the at least two workpiece handling robotic facilities, the mid-entry station including vertically stacked load locks, where the at least two workpiece handling robotic facilities are configured to transfer workpieces between the vertically stacked load locks, at least one workpiece loading station connected to the vacuum handling system, and a workpiece delivery system having an internal environment different from the vacuum environment, the workpiece delivery system being configured to transport the workpieces between each of the vertically stacked load locks of the mid-entry station and the at least one workpiece loading station.

Abstract: A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.

Abstract: A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.

Abstract: A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly.