Abstract: In accordance to an aspect of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a frame defining a chamber, at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation. The substrate transport apparatus further includes at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber. The substrate transport apparatus further includes at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.

Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.

Abstract: A measurement instrument having a processor, a first sensor and a second sensor. The processor is adapted to output a measurement signal embodying a measurement of a physical quantity. The first sensor and second sensor are connected to the processor and are operable to generate respectively first and second measurements of the physical quantity. The processor defines a first measurement range within which the measurement signal is dependent on the first measurement and not the second measurement. The processor defines a second measurement range within which the measurement signal is dependent on the second measurement and not the first measurement. The first and second ranges meet at a predetermined transition. The first and second measurements are different at the transition and the measurement embodied in the measurement signal crosses the transition without an abrupt change.

Abstract: A system is provided for processing container-grown plants positioned in a given area. The system includes a processing station positioned in the area for processing the container-grown plants. It also includes one or more autonomous mobile container handling robots configured to: (i) travel to a source location in the area and pick up a container-grown plant, (ii) transport the container-grown plant to the processing station where a process is performed on the container-grown plant, (iii) transport the container-grown plant from the processing station to a destination location in the area, (iv) deposit the container-grown plant at the destination location, and (v) repeat (i) through (iv) for a set of container-grown plants in the source location.

Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.

Abstract: Systems and methods for interfacing a portable control system (PCS) with a machine tool are provided. In some aspects, a computer numerical controlled (CNC) machine tool includes a machine tool having a motor, a machine control system (MCS), and a motor controller. The MCS is configured to generate program status data associated with a machining program run by the MCS. The motor controller is configured to generate feedback data associated with the motor. The CNC machine tool also includes a port system configured to couple a PCS to the machine tool. The port system is configured to detect when the PCS is coupled to the machine tool and to provide at least one of the program status data and the feedback data to the PCS in response to the detection of the PCS being coupled to the machine tool.

Abstract: A first signal trace is received including signal values satisfying a target event. A first trace signature is generated describing a portion of the first signal trace that causes the target event to occur. A second signal trace is generated that includes signal values satisfying the target event. A second trace signature is generated describing a portion of the second signal trace that causes the target event to occur. Differential signal events are determined that differentiate the first trace signature from the second trace signature. The differential signal events are events from the first signal trace that cause the target event to occur, but do not appear in the second trace signature. The process can be repeated to receive a plurality of signal traces, and to generate a plurality of signal traces. The differential signal events are indexed in a datastore in association with the signal traces.

Abstract: An access arbitration module includes a plurality of active component communication ports for communicating with a plurality of active components, and includes a passive component communication port for communicating with a passive component. The access arbitration module also includes switching logic defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port, such that an authorized one of the plurality of active component communication ports is connected in communication with the passive component communication port at a given time, and such that non-authorized ones of the plurality of active component communication ports are prevented from communication with the passive component communication port at the given time.

Abstract: A cabinet, a drawer assembly and an associated method are provided for controllably limiting the slideable extension of a drawer relative to a cabinet body. The cabinet is configured to store a plurality of medications and includes a cabinet body and a drawer assembly that, in turn, includes a drawer slideably disposed within the cabinet body and an extension control rod. The drawer may include a plurality of pockets for storing respective medications. The drawer may also include an outwardly extending engagement member. The extension control rod may include a plurality of outwardly extending projections that are arranged helically about the rod. As such, engagement of a projection of the extension control rod with the engagement member of the drawer limits further slideable extension of the drawer relative to the cabinet body.

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

Abstract: A medication bin is provided that includes a bin housing configured to carry medication and other medical supplies, an electronic display, such as a liquid crystal display or electronic paper, carried by the bin housing and a processor carried by the bin housing and configured to control the electronic display. The processor is configured to receive information relating to a destination of the medication or other medical supplies to be carried by the medication bin. The processor is also configured to direct the electronic display to present a representation of the destination. Corresponding methods and computer program products are also provided.

Abstract: A motor includes a stator and a rotor, equipped to be movable in at least a first direction relative to the stator, the rotor operably interfacing the stator so that a motor force is generated in a first direction, where the stator comprises an anti-cogging element configured to generate anti-cogging forces on the rotor in at least the first direction and a second direction at an angle to the first direction.

Abstract: A substrate processing apparatus is presented having a transport chamber defining substantially linear substrate transport paths, a linear array of substrate holding modules, each communicably connected to the chamber. The substrate transport has at least one transporter capable of holding and moving the substrate on more than one substantially linear substrate transport paths. The transport chamber having different transport tubes at least one of which is sealable at both ends of the transport tube and configured to hold an isolated atmosphere different from that of the transport tubes, each of the different transport tubes having one of the substrate transport paths located therein different from another of the transport paths located in another of the transport tubes, and being communicably connected to each other, where at least one of the transport tubes is configured to provide uninterrupted transit of the substrate transport through the transport tubes.

Abstract: A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft being a common drive shaft for the at least two scara arms effecting extension and retraction of the at least two scara arms, wherein the at least two scara arms are coupled to each other so that, with the at least one drive shaft coupled to the at least two scara arms, rotation of the drive shaft effects extension and retraction of one of the at least two scara arms substantially independent of motion of another of the at least two scara arms.

Abstract: Systems, apparatuses and methods are described herein for precision insertion. In various embodiments, a feeder device may be configured to feed an object such as wire from a wire source into a wire path. In various embodiments, a guidance device with a channel that at least partially defines the wire path may receive the wire fed from the feeder device. In various embodiments, a base may be provided for mounting at least one of a first substrate having a first aperture and a second substrate having a second aperture so that the first aperture of the first substrate is aligned with the second aperture of the second substrate. In various embodiments, the base may be configured to be movable relative to the guidance device to position the first substrate or second substrate so that the first or second aperture is aligned with the wire path.

Abstract: A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.

Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

Abstract: An fire monitoring apparatus for large storage tanks of combustible fluids permits wireless communication between a Linear Heat Detector system and a Fire Control system. The system comprises a Communication Unit and a Remote Unit. The Communication Unit relays status and control signals between the Fire Control system and the Remote Unit. The communication between the Communication Unit and the Remote Unit is wireless. The Remote Unit is self-powered using solar cells, batteries, or a combination thereof.

Abstract: A storage apparatus is provided. The storage apparatus defines a storage cavity having an opening at the upper surface of the storage apparatus with a substantially planar flange extending outwardly from the opening of the storage cavity and defines a plurality of support structures, each support structure (a) having an opening at the upper surface of the storage apparatus and (b) adapted to support the storage apparatus.