Patents Assigned to Beneq Oy
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Publication number: 20130047921Abstract: A source for feeding one or more gaseous precursors onto a surface of a substrate and an arrangement for processing the substrate by way of subjecting the surface of the substrate to alternately repetitive surface reactions of the precursors, the source including a gas feed member for feeding at least one or more precursors onto the surface of the substrate. The gas feed member is adapted rotatable about a rotation axis, the rotation axis being arranged to extend substantially parallel to the surface of the substrate.Type: ApplicationFiled: April 29, 2011Publication date: February 28, 2013Applicant: BENEQ OYInventor: Runar Törnqvist
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Patent number: 8367561Abstract: The present invention relates to a method for enhancing uniformity of metal oxide coatings formed by Atomic Layer Deposition (ALD) or ALD-type processes. Layers are formed using alternating pulses of metal halide and oxygen-containing precursors, preferably water, and purging when necessary. An introduction of modificator pulses following the pulses of the oxygen-containing precursor affects positively on layer uniformity, which commonly exhibits gradients, particularly in applications with closely arranged substrates. In particular, improvement in layer thickness uniformity is obtained. According to the invention, alcohols having one to three carbon atoms can be used as the modificator.Type: GrantFiled: July 2, 2008Date of Patent: February 5, 2013Assignee: Beneq OyInventors: Jarmo Maula, Kari Harkonen
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Publication number: 20130009264Abstract: A moisture barrier, device or product having a moisture barrier or a method of fabricating a moisture barrier having at least a polymer layer, and interfacial layer, and a barrier layer. The polymer layer may be fabricated from any suitable polymer including, but not limited to, fluoropolymers such as polyethylene terephthalate (PET) or polyethylene naphthalate (PEN), or ethylene-tetrafluoroethylene (ETFE). The interfacial layer may be formed by atomic layer deposition (ALD). In embodiments featuring an ALD interfacial layer, the deposited interfacial substance may be, but is not limited to, Al2O3, AlSiOx, TiO2, and an Al2O3/TiO2 laminate. The barrier layer associated with the interfacial layer may be deposited by plasma enhanced chemical vapor deposition (PECVD). The barrier layer may be a SiOxNy film.Type: ApplicationFiled: February 17, 2011Publication date: January 10, 2013Applicants: U.S. DEPARTMENT OF ENERGY, BENEQ OYInventors: Joel W. Pankow, Gary J. Jorgensen, Kent M. Terwilliger, Stephen H. Glick, Nora Isomaki, Kari Harkonen, Tommy Turkulainen
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Publication number: 20130000726Abstract: A thin film photovoltaic cell (10) comprises an n-type semiconductor window layer (40), a p-type semiconductor absorption layer (5) and a pn-junction (6) at the interface between these two layers, wherein the p-type semiconductor absorption layer is formed of cadmium telluride CdTe. According to the present invention, the n-type semiconductor window layer (40) comprises zinc oxide/sulfide Zn (O,S).Type: ApplicationFiled: December 22, 2010Publication date: January 3, 2013Applicant: Beneq OyInventor: Jarmo Skarp
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Publication number: 20120315709Abstract: Process for producing a solar cell substrate, where metal particles are deposited on the surface of substrate. Metal particles are produced by liquid flame spraying method in such a way that the mean diameter of the particles to be between 30 nm and 150 nm and the deposition process is controlled in such a way that the average distance between particles is not more than four times the mean diameter of particles. Apparatus for carrying out such process.Type: ApplicationFiled: December 13, 2010Publication date: December 13, 2012Applicant: BENEQ OYInventors: Tommi Vainio, Jarmo Skarp
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Publication number: 20120307193Abstract: A strengthened structural module (2) and a method for fabricating a strengthened structural module(2). The module comprises an essentially planar glass substrate (1), an essentially planar second substrate (3), and at least one spacer element (5) in between the glass substrate (1) and the second substrate (3). The at least one spacer element (5) keeps the glass substrate (1) and the second substrate (3) separated from each other from the edges of the two substrates and defines a space (7) in between the two substrates in the inside of the module. The module comprises a coating (9) surrounding the module around the outside of the module. The coating (9) is arranged conformally on the surfaces facing the outside of the module, for increasing the strength of the module.Type: ApplicationFiled: January 31, 2011Publication date: December 6, 2012Applicant: Beneq OyInventors: Olli Jylhä, Matti Putkonen, Arto Pakkala
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Publication number: 20120258251Abstract: An apparatus and a method for producing a liquid film from one or more liquid precursors onto the surface of a substrate in order to establish a coating, the apparatus being arranged to direct an aerosol flow against the surface of the substrate in a coating chamber. The apparatus includes a homogenizing nozzle for making the aerosol flow homogeneous substantially in the direction of the surface of the substrate prior to passing the flow into the coating chamber.Type: ApplicationFiled: December 29, 2010Publication date: October 11, 2012Applicant: BENEQ OYInventor: Kai Asikkala
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Publication number: 20120218638Abstract: A decorative coating and a method for forming a decorative coating on a substrate (2). The decorative coating comprises an absorbing film (1) to attenuate the transmission of visible light through the coating. The method comprises the steps of bringing the substrate (2) into a reaction space, and depositing the absorbing film (1) on the substrate (2). Depositing the absorbing film (1) on the substrate comprises the steps of forming a preliminary deposit of transition metal oxide on the deposition surface and subsequently purging the reaction space, and treating the deposition surface with an organometallic chemical comprising first metal and subsequently purging the reaction space. The steps of forming the preliminary deposit and treating the deposition surface are alternately repeated to increase absorption of the absorbing film (1).Type: ApplicationFiled: November 2, 2010Publication date: August 30, 2012Applicant: BENEQ OYInventors: Jarmo Maula, Tapani Alasaarela
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Publication number: 20120217454Abstract: A method for forming an electrically conductive oxide film (1) on a substrate (2), the method comprising the steps of, bringing the substrate (2) into a reaction space, forming a preliminary deposit on a deposition surface of the substrate (2) and treating the deposition surface with a chemical. The step of forming the preliminary deposit on the deposition surface of the substrate (2) comprises forming a preliminary deposit of transition metal oxide on the deposition surface and subsequently purging the reaction space. The step of treating the deposition surface with a chemical comprises treating the deposition surface with an organometallic chemical and subsequently purging the reaction space, to form oxide comprising oxygen, first metal and transition metal. The steps of forming the preliminary deposit and treating the deposition surface being alternately repeated such that a film (1) of electrically conductive oxide is formed on the substrate (2).Type: ApplicationFiled: November 2, 2010Publication date: August 30, 2012Applicant: Beneq OyInventor: Jarmo Maula
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Patent number: 8231369Abstract: The invention relates to a device and a method for producing nanoparticles, in which method starting materials for nanoparticles are mixed at least as liquid droplets and optionally also as gases and/or vapors with at least combustion gases in a premixing chamber and the mixture is separated for liquid drops larger than size d, whereafter the mixture is conducted to at least one burner, in which the combustion gases are ignited such that a heavily mixing flame is generated, in which the starting materials react and optional solvents evaporate and generate through nucleation and/or sintering and/or agglomeration particles having a diameter of 1 to 1000 micrometers.Type: GrantFiled: October 24, 2006Date of Patent: July 31, 2012Assignee: Beneq OyInventors: Markku Rajala, Kai Asikkala, Anssi Hovinen
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Publication number: 20120189766Abstract: Method and apparatus for controlling a coating deposition process, where at least at one stage of the coating deposition process at least one of the coating precursors includes a gas, a vapour or an aerosol. The method includes monitoring ultrafine particles and adjusting at least one process parameter based on the monitoring. The apparatus includes means for monitoring ultrafine particles and means for adjusting at least one process parameter based on the monitoring.Type: ApplicationFiled: September 2, 2010Publication date: July 26, 2012Applicant: BENEQ OYInventors: Markku Rajala, Juha Tikkanen
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Publication number: 20120177903Abstract: A multilayer coating and a method for fabricating a multilayer coating on a substrate (3). The coating is arranged to minimize diffusion of atoms through the coating, the method comprising the steps of introducing a substrate (3) to a reaction space, depositing a layer of first material (1) on the substrate (3), and depositing a layer of second material (2) on the layer of first material (1). Depositing the layer of first material (1) and the layer of second material (2) comprises alternately introducing precursors into the reaction space and subsequently purging the reaction space after each introduction of a precursor. The first material being selected from the group of titanium oxide and aluminum oxide, the second material being the other from the group of titanium oxide and aluminum oxide. An interfacial region is formed in between titanium oxide and aluminum oxide.a.Type: ApplicationFiled: September 13, 2010Publication date: July 12, 2012Applicant: Beneq OyInventors: Sami Sneck, Nora Isomäki, Jarmo Maula, Olli Jylhä, Matti Putkonen, Runar Törnqvist, Mikko Söderlund
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Publication number: 20120120514Abstract: A structure comprising at least one reflecting thin-film on a surface of a macroscopic object is disclosed. The surface of the macroscopic object, without the at least one thin-film, reflects less than 50% of incident light in the visible wavelength band and is opaque, and reflection of visible light from the surface of the macroscopic object, with the at least one thin-film on the surface of the macroscopic object, is essentially spectrally uniform and flat over available viewing angles. The at least one thin-film is dielectric and essentially transparent to visible light, and the at least one thin-film is fabricated by exposing the surface of the macroscopic object to alternately repeating, essentially self-limiting, surface reactions of two or more precursors, for increasing the reflectance of specularly reflected visible light in the visible wavelength band from the surface.Type: ApplicationFiled: April 7, 2010Publication date: May 17, 2012Applicant: Beneq OyInventor: Jarmo Maula
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Publication number: 20120067284Abstract: An apparatus for carrying out atomic layer deposition onto a surface of a substrate by exposing the surface of the substrate to alternate starting material surface reactions, the apparatus including two or more low-pressure chambers, two or more separate reaction chambers arranged to be placed inside the low-pressure chambers, and at least one starting material feed system common to two or more low-pressure chambers for carrying out atomic layer deposition. The apparatus includes at least one loading device arranged to load and unload substrates to/from the reaction chamber and further to load and unload the reaction chambers to/from the low-pressure chambers.Type: ApplicationFiled: June 14, 2010Publication date: March 22, 2012Applicant: BENEQ OYInventors: Pekka Soininen, Jarmo Skarp
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Publication number: 20120070579Abstract: A coating process for coating a surface of a glass substrate in normal air pressure, in which coating process at least one liquid starting material is atomized into droplets and the formed droplets are guided towards the surface to be coated. The formed droplets are vaporized substantially close to the surface to be coated before the droplets contact the surface to be coated by bringing to the coating process the thermal energy needed for vaporizing the droplets with the glass substrate.Type: ApplicationFiled: June 8, 2010Publication date: March 22, 2012Applicant: BENEQ OYInventors: Markku Rajala, Sami Kauppinen
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Publication number: 20120060536Abstract: A method and apparatus for tempering material is provided. One or more liquids are atomized by at least one sprayer into droplets which are guided towards a surface of a hot material so that at least some of the droplets collide with the surface of the hot material and evaporate, thus removing thermal energy from the surface layer of the hot material. Impact members may be used to further reduce the size of the droplets. The droplets may be guided to the surface by a separate guiding gas flow.Type: ApplicationFiled: June 15, 2010Publication date: March 15, 2012Applicant: BENEQ OYInventors: Sampo Ahonen, Reijo Karvinen, Tommi Vainio
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Publication number: 20120055407Abstract: The invention relates to an arrangement for processing a substrate in a reaction chamber of a gas deposition apparatus by exposing the substrate to alternate, saturated surface reactions of starting materials, the arrangement comprising loading means for loading the substrate into the reaction chamber on a substrate support. In accordance with the invention, the substrate is arranged for being attached in a detachable manner with an adhesive to the substrate carrier.Type: ApplicationFiled: May 21, 2010Publication date: March 8, 2012Applicant: BENEQ OYInventor: Jarmo Maula
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Publication number: 20120040193Abstract: A coated article is disclosed. The coated article comprises an antibacterial coating on a glass substrate, the substrate having a modified surface layer which essentially reduces the ion exchange between silver in the antibacterial coating and sodium in the glass substrate. Apparatus and method for forming such article are also disclosed.Type: ApplicationFiled: February 4, 2010Publication date: February 16, 2012Applicant: BENEQ OYInventor: Markku Rajala
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Publication number: 20120015106Abstract: The invention relates to a method and an apparatus for coating one or more objects (1) by exposing an object (1) to alternately repeating surface reactions of two or more gaseous precursors. The apparatus comprises a reaction chamber (2, 40), means for forming at least one distinct precursor region inside the reaction chamber, and means for causing translational, essentially mechanically unsupported and unsuspended, motion of an object (1) inside the reaction chamber, relative to the reaction chamber, for bringing the surface of the object (1) into contact with a gaseous precursor, the means for causing the translational motion comprising means for moving the object (1) essentially through the at least one distinct precursor region inside the reaction chamber.Type: ApplicationFiled: March 25, 2010Publication date: January 19, 2012Applicant: Beneq OyInventor: Jarmo Maula
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Publication number: 20110274837Abstract: An ALD reactor for treating one or more substrates is provided. The ALD reactor includes at least one reaction chamber which has a front plate including gas connections for introducing starting materials, flushing gases and the like gases into the reaction chamber. In addition, the front plate is arranged for being placed over the substrate for closing the reaction chamber and at distance from the substrate surface for opening the reaction chamber such that the substrate is arranged for being loaded below, above or in front of the front plate, when the reaction chamber is in the open state, in which the front plate is at a distance from the substrate and such that the substrate is treatable by the ALD method in the closed state of the reaction chamber, in which the front plate is placed onto the substrate.Type: ApplicationFiled: February 8, 2010Publication date: November 10, 2011Applicant: BENEQ OYInventors: Pekka Soininen, Jarmo Skarp