Patents Assigned to Brooks Automation, Inc.
  • Volumetric measurement
    Patent number: 9134161
    Abstract: Disclosed is a method of determining a volume of liquid in a sample tube, comprising the steps of capturing an image of the sample tube, determining a first region of interest within the sample tube based upon pre-stored information concerning dimensional properties of the sample tube, scanning the first region of interest to detect the position of a meniscus indicative of an upper extent of the liquid, and using said meniscus position together with certain pre-stored properties of the sample tube to determine a volume of liquid in the tube, and outputting said volume. Also disclosed is an apparatus for performing the method.
    Type: Grant
    Filed: February 25, 2013
    Date of Patent: September 15, 2015
    Assignee: Brooks Automation, Inc.
    Inventors: Christopher Walsh, David Charles Lee, Martin Geoffrey Short
  • LOAD STATION
    Publication number: 20150249029
    Abstract: A substrate loading station including a frame forming a chamber configured to hold a controlled environment, a transfer robot connected to the frame and one or more substrate cassette holding locations each capable of having a substrate cassette holder disposed within the frame. Each of the one or more substrate cassette holding locations being configured to removably support a respective substrate cassette in a predetermined position for communication with the transfer robot to effect substrate transfer between a respective cassette and the transfer robot where the one or more substrate cassette holding locations are configured to effect the interchangeability of one or more substrate cassette holders with other substrate cassette holders for changing a substrate cassette holding capacity of the substrate loading station.
    Type: Application
    Filed: September 14, 2012
    Publication date: September 3, 2015
    Applicant: Brooks Automation, Inc.
    Inventors: Leigh F. Sharrock, Tsepa Bayul, Christopher J. Dancewicz, Wayne A. Lasante
  • Compact processing apparatus
    Patent number: 9117859
    Abstract: A substrate processing apparatus including a chamber capable of holding an isolated atmosphere and having a front and rear disposed along a longitudinal axis and a transport apparatus located in the chamber, and having twin scara arms and a drive section with a coaxial drive shaft assembly, each shaft of which being operably connected to at least one rotatable link of both scara arms to move the twin scara arms, wherein movement of one of the twin scara arms mirrors movement of another of the twin scara arms across the longitudinal axis.
    Type: Grant
    Filed: August 31, 2007
    Date of Patent: August 25, 2015
    Assignee: Brooks Automation, Inc.
    Inventors: Alexander G. Krupyshev, Mitchell Drew
  • Intelligent condition monitoring and fault diagnostic system for preventative maintenance
    Patent number: 9104650
    Abstract: A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses.
    Type: Grant
    Filed: January 11, 2013
    Date of Patent: August 11, 2015
    Assignee: Brooks Automation, Inc.
    Inventors: Martin Hosek, Jayaraman Krishnasmy, Jan Prochazka
  • Side opening unified pod
    Patent number: 9105673
    Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.
    Type: Grant
    Filed: May 19, 2008
    Date of Patent: August 11, 2015
    Assignee: Brooks Automation, Inc.
    Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
  • Transfer chamber between workstations
    Patent number: 9099506
    Abstract: A bridging chamber is constructed between adjacent substrate processing workstation systems and connected by ports constructed in the adjacent substrate processing workstation systems. Transport mechanisms are used to move the substrates into and out of the bridging chamber to bypass primary transport systems.
    Type: Grant
    Filed: March 30, 2005
    Date of Patent: August 4, 2015
    Assignee: Brooks Automation, Inc.
    Inventor: Clinton M. Haris
  • SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION
    Publication number: 20150147148
    Abstract: A system for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one station to a destination station, and an end-effector connected to an end of the robotic arm for receiving the wafer. The end-effector includes a mechanism for gripping the wafer, a direct drive motor for rotating the wafer gripping mechanism, and at least one sensor for sensing the location and orientation of the wafer. A control processor calculates the location of the center and the notch of the wafer based on measurements by the sensor(s) and generates an alignment signal for rotating the wafer gripping mechanism so that the wafer is oriented at a predetermined position on the end-effector while the robotic arm is moving to another station.
    Type: Application
    Filed: November 25, 2013
    Publication date: May 28, 2015
    Applicant: Brooks Automation, Inc.
    Inventor: Matthew W. Coady
  • Substrate alignment system
    Patent number: 9033647
    Abstract: A system for aligning an end effector with a substrate in a substrate transport apparatus. The system comprises a first sensor connected to the end effector and a controller for moving the substrate transport apparatus. The sensor has a sensing path pointed in an outward direction. The sensing path does not intersect the substrate when the substrate is located on the end effector. The controller for moving the substrate transport apparatus moves the substrate transport apparatus, based at least partially upon input from the sensor, to position the end effector at a predetermined position relative to the substrate to pick up the substrate onto the end effector.
    Type: Grant
    Filed: July 8, 2009
    Date of Patent: May 19, 2015
    Assignee: Brooks Automation, Inc.
    Inventors: Christopher A. Hofmeister, Mark Saunders
  • Robot drive with magnetic spindle bearings
    Patent number: 9024488
    Abstract: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.
    Type: Grant
    Filed: October 5, 2012
    Date of Patent: May 5, 2015
    Assignee: Brooks Automation, Inc.
    Inventors: Ulysses Gilchrist, Martin Hosek, Jairo Terra Moura, Jay Krishnasamy, Christopher Hofmeister
  • Scalable motion control system
    Patent number: 9020617
    Abstract: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
    Type: Grant
    Filed: January 24, 2011
    Date of Patent: April 28, 2015
    Assignee: Brooks Automation, Inc.
    Inventors: Martin Hosek, Stuart Beale, Roumen Botev, Matthew Coady, Christopher Hofmeister, Mark Ives, Jairo Moura, Robert Caveney
  • Methods and systems for controlling a semiconductor fabrication process
    Patent number: 8972029
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Grant
    Filed: October 23, 2007
    Date of Patent: March 3, 2015
    Assignee: Brooks Automation, Inc.
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • Substrate processing apparatus
    Patent number: 8960099
    Abstract: A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of the plurality of permanent magnets, a control system for energizing the stationary windings to provide magnetic force on the transport apparatus, and an arrangement of ferromagnetic components proximate at least one side of the transport apparatus for providing passive stabilization of lift, pitch, and roll of the transport apparatus.
    Type: Grant
    Filed: December 9, 2008
    Date of Patent: February 24, 2015
    Assignee: Brooks Automation, Inc
    Inventors: Martin Hosek, Christopher Hofmeister, Alexander Krupyshev
  • Dual arm robot
    Patent number: 8951002
    Abstract: A dual arm robot assembly has two arms each having a set of joint/link pairs that, in conjunction with an actuator assembly. Define at least three degrees of freedom to provide independent horizontal translation and rotation of a distalmost link. A vertical motion mechanism is also provided.
    Type: Grant
    Filed: February 18, 2011
    Date of Patent: February 10, 2015
    Assignee: Brooks Automation, Inc.
    Inventor: Izya Kremerman
  • Batch substrate handling
    Patent number: 8950998
    Abstract: A substrate-handling vacuum robot includes a first robotic arm with a single-substrate end effector and a second robotic arm with a batch end effector. The single-substrate end effector permits single-substrate pick-and-place operations while the batch end effector permits batch handling of substrates within a vacuum environment.
    Type: Grant
    Filed: April 21, 2008
    Date of Patent: February 10, 2015
    Assignee: Brooks Automation, Inc.
    Inventor: Peter van der Meulen
  • Stacked process modules for a semiconductor handling system
    Patent number: 8944738
    Abstract: Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The system may include one or more vertically stacked load locks or vertically stacked process modules.
    Type: Grant
    Filed: September 29, 2011
    Date of Patent: February 3, 2015
    Assignee: Brooks Automation, Inc.
    Inventor: Peter van der Meulen
  • Wafer center finding with kalman filter
    Patent number: 8934706
    Abstract: A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.
    Type: Grant
    Filed: January 20, 2014
    Date of Patent: January 13, 2015
    Assignee: Brooks Automation, Inc.
    Inventors: Christopher C. Kiley, Peter van der Meulen, Forrest T. Buzan, Paul E. Fogel
  • Substrate processing apparatus
    Patent number: 8918203
    Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
    Type: Grant
    Filed: March 12, 2012
    Date of Patent: December 23, 2014
    Assignee: Brooks Automation, Inc.
    Inventors: Ulysses Gilchrist, Robert T. Caveney, Jayaraman Krishnasamy, Mitchell Drew, Jairo T. Moura
  • Gripper apparatus and method for containers of different sizes
    Patent number: 8910985
    Abstract: A gripper apparatus for removing and replacing objects such as containers or vials in an array of containers has a gripper head which extends downward from a support arm, a planetary gear assembly mounted in the gripper head including at least three planet gears, and at least one gripping grip extending downward from each planet gear and projecting beyond a lower end of the gripper head. A drive motor drives the planetary gear assembly to rotate the planet gears in opposite directions, moving the grips inward and outward along predetermined paths to grip and carry an object and release the object when in a desired location.
    Type: Grant
    Filed: May 13, 2013
    Date of Patent: December 16, 2014
    Assignee: Brooks Automation, Inc.
    Inventor: Robert K. Neeper
  • ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM
    Publication number: 20140341679
    Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.
    Type: Application
    Filed: March 24, 2014
    Publication date: November 20, 2014
    Applicant: Brooks Automation, Inc.
    Inventors: Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist, William Fosnight
  • Reduced capacity carrier and method of use
    Patent number: 8888433
    Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.
    Type: Grant
    Filed: August 19, 2005
    Date of Patent: November 18, 2014
    Assignee: Brooks Automation, Inc.
    Inventors: Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Gerald M. Friedman, Michael L. Bufano