Abstract: A projection objective formed from six mirrors arranged in a light path between an object plane and an image plane is provided. The projection objective, in some examples, is characterized by having a physical distance between the vertexes of adjacent mirrors that is large enough to allow for the six mirrors to have sufficient thickness and stability properties to prevent surface deformations due to high layer tensions. In some embodiments, mirror thickness are such that surface deformations are prevented with mirrors having layer tensions lower than 350 MPa. Mirror surfaces may comprise multilayer systems of Mo/Be or Mo/Si layer pairs. In some examples, the physical distance between a vertex of the third mirror and a vertex of the sixth mirror (S3S6) satisfies the following relationship: 0.3×(a used diameter of the third mirror S3+a used diameter of the sixth mirror S6)<S3S6.

Abstract: A carrier system (10) for a medical apparatus (11) is disclosed. The carrier system includes rotation joints (17, 18, 20). A supply line harness runs in the carrier system (10) and is run so that it is covered. The rotation joint (18) includes a tube-shaped holding member on which fingers are formed which hold a rotation joint. A joint element, which is rotatably journalled in a joint receptacle, is provided in the rotation joint (20). The joint element has a wave-shaped section which is connected via a connecting section to an annularly-shaped section functioning to accommodate a connecting arm.

Abstract: A diffraction-optical component for providing a radiation-diffracting grating structure is proposed, comprising a surface wave device including a substrate 43, a surface wave source 47 excitable with an adjustable frequency for producing surface waves on a surface 45 of the substrate 43 and an interaction region 17 of the substrate surface 45 which is provided for the radiation to interact with a grating structure provided by the surface waves produced.

Abstract: An optical arrangement is disclosed wherein an entering beam is converted into an exiting beam having a total cross section of light which is linearly polarized essentially in the radial direction by rotation. For this purpose, rasters of half-wave plates (41, 42, 4i), a combination of birefringent quarter-wave plate 420 and a circular plate 430 is suggested in combination with a conical polarizer 21?. This arrangement is preferably utilized in the illumination portion of a microlithographic projection exposure system. It is important that the arrangement be mounted behind all asymmetric or polarizing component elements 103a.

Abstract: A method and an arrangement for microlithographic projection exposure at high aperture achieve a contrast increase by the polarization of the light perpendicular to the plane of incidence on the resist. Arrangements are provided which influence the tangential polarization or the linear polarization adapted to the dipole illumination in the illuminating system and in the reduction objective.

Abstract: A method and an arrangement for microlithographic projection exposure at high aperture achieve a contrast increase by the polarization of the light perpendicular to the plane of incidence on the resist. Arrangements are provided which influence the tangential polarization or the linear polarization adapted to the dipole illumination in the illuminating system and in the reduction objective.

Abstract: The invention concerns a microlithographic reduction projection catadioptric objective having an even number greater than two of curved mirrors, being devoid of planar folding mirrors and featuring an unobscured aperture. The objective has a plurality of optical elements, and no more than two optical elements deviate substantially from disk form. The objective has an object side and an image side, and has in sequence from the object side to the image side a catadioptric group providing a real intermediate image, a catoptric or catadioptric group providing a virtual image, and a dioptric group providing a real image.

Abstract: The present invention relates to a surgical microscopy system, comprising a surgical microscope, a stand comprising a base and a plurality of pivotally connected arms, the surgical microscope being mounted to one of the arms, wherein the pivotally connected arms are arranged to be movable with respect to each other such that the surgical microscope is movable relative to the base, and wherein a conventionally provided lead is replaced by one or more leads fulfilling the function of the single lead together. The present invention also relates to a surgical microscopy system, wherein data or/and energy is transmitted to the surgical microscope by wireless transmission.

Abstract: There is provided an illumination system for light having wavelengths ?193 nm. The system includes (a) a first raster element for receiving a first diverging portion of the light and directing a first beam of the light, (b) a second raster element for receiving a second diverging portion of the light and directing a second beam of the light, where the first raster element is oriented at an angle with respect to the second raster element to cause a center ray of the first beam to intersect with a center ray of the second beam at an image plane, and (c) an optical element for imaging secondary sources of the light in an exit pupil, where the optical element is situated in a path of the light after the first and second raster elements and before the image plane.

Abstract: The invention relates to the determination of correction parameters of a rotating swivel unit. An optical sensor (9) measuring in at least one dimension is fixed to the unit. The sensor is calibrated on a calibration body in at least three rotational positions of a rotating joint of the rotating swivel unit. At least parameters of a first parameter field are calculated, the field describing the transformation (rotation) of a sensor coordinate system (u,v,w) in the machine coordinate system (XM, YM, ZM) , and parameters of another parameter field are determined, the other field describing the shift (vector) of the sensor coordinate system in relation to the point (AB) (in the measuring arm) in the machine coordinate system.

Abstract: A joint arrangement for guiding a cable therethrough with a holding body (201) and a leg (204) which is rotatably journalled on the holding body (201) is disclosed. In the joint arrangement, a mechanism for limiting the rotation of the leg relative to the holding body is provided in order to protect a cable passed through the leg and holding body against excessive twisting. The leg (204) is journalled on the holding body (201) with a ball joint (205). Alternatively or additionally, the joint arrangement includes a swivel joint having a sleeve wherein means for limiting rotation are provided in the form of a stop pin and a stop formed on the sleeve or in a sleeve. Electric operator-controlled elements can be movably mounted on a surgical microscope with the joint arrangement.

Abstract: A displaceable support stand (1) includes a support stand base (5) with a support surface (6) which is adapted to rest on the ground, a lifting device for lifting the support stand base (5) and therewith the support stand (1) above the ground and a displacement device which permits displacement of the support stand (1). The lifting and the displacement devices can be embodied by a device for producing an air cushion. A device of that kind can include for example a compressor (18), an accumulator (20) for the power supply for the compressor (18) and air nozzles (16).

Abstract: A device for mounting an optical element (1), for example for a lens element in a lens, especially in an exposure lens (2) in micro lithography, is provided with the following features: the optical element (1) is provided in its edge zone with support points (8, 9, 10). Counterbearing points (11) are disposed opposite the support points (8, 9, 10) of the optical element (1) in an outer mounting (3). Bearing members (12) are disposed between the support points (8, 9, 10) and the counterbearing points (11). The bearing members (12) are provided with spherical surfaces directed toward the support points (8, 9, 10).

Abstract: A projection objective has at least five lens groups (G1 to G5) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere (21) is mounted at a minimum distance from an image plane (0′) which is greater than the maximum lens diameter (D2) of the objective.

Abstract: A method and an arrangement for microlithographic projection exposure at high aperture achieve a contrast increase by the polarization of the light perpendicular to the plane of incidence on the resist. Arrangements are provided which influence the tangential polarization or the linear polarization adapted to the dipole illumination in the illuminating system and in the reduction objective.

Abstract: An apparatus for treating body tissue includes a treatment instrument 1 for treating the body tissue and a measuring unit 3 for measuring the actual value of a parameter of the body tissue at at least one measuring point. An identifier 4 is connected to the measuring unit 3 for identifying the body tissue to be treated on the basis of the actual value and for outputting a coordinate signal containing the coordinates of the body tissue to be treated. A positioning device 2 receives the coordinate signal and moves the treatment instrument 1 to the body tissue to be treated. An updating device 8 is connected to the measuring unit 3 and the identifier 4 and outputs an updating signal for triggering renewed measurement of the actual value and renewed identification of body tissue to be treated.

Abstract: A microscopy system for eye surgery with an objective lens is suggested, which provides a retroillumination system to generate a so-called red reflex illumination during an eye-surgical treatment, in particular during a cataract operation.

Abstract: The invention concerns a method of carrying out a televisit which comprises the steps: acquiring the data of a patient, which are relevant for the televisit, recording an image of at least one body zone of the patient, which is relevant for the televisit, and transmitting the data and the image to a medical institution. The method according to the invention is distinguished in that a 3D-image is recorded as the image of the body zone of the patient, which is relevant for the televisit.

Abstract: A medical instrument arrangement includes an operation microscope system (100) and a carrier unit (101) carrying the operation microscope (102). The medical instrument arrangement is at least partially covered by a drape (110). The air inside the drape (110) is removed by a suction unit. The drape (110) is fixed to a portion of the carrier unit (101) at a collar (115). By operating the suction unit at different suction rates, disturbing vibrations of the system during a surgical procedure can be minimized.

Abstract: The invention is directed to an apparatus for measuring a workpiece and includes a coordinate measuring apparatus or a machine tool. The invention further relates to a method for measuring the workpiece using such an apparatus. The apparatus includes a control and evaluation unit (26) and at least one measuring sensor (6) which functions independently of the control and evaluation unit and which can be displaced by a mechanism (27) of the coordinate measuring device in the three coordinate directions (x, y, z) in relation to the workpiece. The apparatus includes timers which are provided both in the measuring sensor (6) and in the control and evaluation unit (28) in order to synchronize the measuring sensor (6) and the control and evaluation unit (28). The timers function independently from each other and are adjusted to a common starting time.