Abstract: A microscope including an objective having a focal plane in a sample space, and an autofocus device comprising a light modulator for generating a luminous modulation object that is intensity-modulated periodically along one direction, an autofocus illumination optical unit that images the modulation object such that its image arises in the sample space, an autofocus camera, an autofocus imaging optical unit that images the image of the modulation object in the sample space onto the autofocus camera, a control device, which receives signals of the autofocus camera and determines an intensity distribution of the image of the modulation object and generates a focus control signal therefrom. The control device determines an intensity distribution of the image of a luminous comparison object imaged by the optical unit to correct the intensity distribution of the image of the modulation object with regard to reflectivity variations in the sample space.
Abstract: The invention relates to an optical inspecting system designed to image an object to be inspected with a variable imaging scale, comprising a variation system for imaging the object into infinity, a lens group downstream of the variation system for imaging the object from infinity into the image plane of the whole system, and a light source for generating light in order to illuminate the object, means for imaging the illuminating light into the exit pupil of the variation system being provided in the airspace between the fifth lens group and the subsequent lens group. Of the five lens groups of the variation system, the first, second, and fourth lens groups, when seen in the imaging direction, are arranged in a movable manner in the direction of the optical axis, whereas the third and fifth lens groups are not movable.
Abstract: A method of operating a particle beam microscope includes: directing a particle beam onto a sample and detecting particles emanating from the sample during a first period for generating an image of the sample; generating electrons having a first distribution of kinetic energies and directing these electrons onto the sample during a second period for reducing a charge of the sample being generated while the directing the particle beam onto the sample; and generating electrons having a second distribution of their kinetic energies and directing these electrons onto the sample during a third period for further reducing the charge of the sample being generated while the directing of the particle beam onto the sample. An average value of the kinetic energy of the first distribution of the kinetic energy is greater than an average value of the kinetic energy of the second distribution of kinetic energies.
Abstract: A method of scanning a surface of an object using a particle beam comprises: determining a surface portion of the surface of the object, wherein the surface portion is to be scanned; determining initial positions of a set of raster points within the surface portion; changing the positions of at least some raster points of the set of raster points; and then scanning the surface portion by directing the particle beam to the positions of the raster points.
Abstract: A microscope including an imaging optical unit, a sample stage for supporting a sample to be examined, a movement unit, by which the distance between sample stage and imaging optical unit can be altered, a focus measuring unit, which measures the present focus position and outputs a focus measurement signal, a control unit for maintaining a predetermined focus position for examinations of the sample that are separated from one another in time. The control unit receives the focus measurement signal and derives a deviation of the present focus position from the predetermined focus position. Dependent on the deviation derived the movement unit, changes the distance between sample stage and imaging optical unit so that the predetermined focus position is maintained. The control unit drives the movement unit (9) for maintaining the predetermined focus position only before and/or after at least one of the examinations, but never during the examinations.
Type:
Grant
Filed:
April 4, 2009
Date of Patent:
September 8, 2015
Assignee:
Carl Zeiss Microscopy GmbH
Inventors:
Stefan Steinborn, Eugen Wehner, Reiner Mitzkus, Gleb Milinovici, Steffen Leidenbach, Peter Westphal
Abstract: The invention provides a method for the magnified depiction of samples, wherein at least two sections from a sample, which are present on at least one sample carrier, are depicted in magnified form using an apparatus for the magnified depiction of samples, wherein the sample carrier is connected to the apparatus via a sample carrier holder, wherein the position of the depicted sample carrier regions in relation to the apparatus and the magnification stage used are recorded, at least one selected feature contained in the image information from the sections depicted in magnified form, particularly at least one suitable contour and/or structure, is/are used to define local coordinate systems, which are specific to the respective section, for the at least two sections depicted in magnified form, at least one region within at least one of the sections depicted in magnified form is/are selected (selection region) and the relative position of this at least one selection region in relation to the local coordinate sys
Type:
Grant
Filed:
May 15, 2013
Date of Patent:
August 25, 2015
Assignees:
Carl Zeiss Microscopy GmbH, Carl Zeiss AG
Inventors:
Christian Thomas, Martin Edelmann, Thomas Albrecht, Christian Wojek
Abstract: An illuminating system for transmitted-light microscopes has a illuminator unit seated on a bracket. A condenser is mounted on the bracket by way of a condenser holder and is rotatable with respect to the bracket. The condenser has an integrated modulator slider that slidably extends through the condenser. The bracket has an upright portion with a window through which the modulator slider may be fed in the direction facing away from the operator. the bracket may be provided with a stand mount.
Type:
Grant
Filed:
July 20, 2012
Date of Patent:
August 25, 2015
Assignee:
Carl Zeiss Microscopy GmbH
Inventors:
Leander Dietzsch, Matthias Gonschor, Angela Higgs, Alexander Scheps
Abstract: A family of microscopes with illumination systems directing a sheet of light having an approximately planar extension in an illumination axis of an illumination beam path and in a transverse axis orthogonally oriented to the illumination axis. The microscopes have detection devices used to detect light that is emitted by a sample region. The detection devices including a detection lens system disposed in the detection beam path and an optical detection element spaced from a front lens of the detection lens system and independently adjustable thereof. The optical detection element continuously varies the size of a detection image field and/or continuously displaces a focal plane of detection in the P-region.
Type:
Grant
Filed:
September 17, 2010
Date of Patent:
August 18, 2015
Assignee:
Carl Zeiss Microscopy GmbH
Inventors:
Helmut Lippert, Christopher Power, Robert Hauschild, Matthias Wald
Abstract: A process for manufacturing a TEM-lamella includes mounting (51) a plate shaped substrate having a thickness in a support, manufacturing (53) a first, strip-shaped recess on a first side of the substrate under a first angle to the support by means of a particle beam, and manufacturing (55) a second strip-shaped recess on a second side of the substrate under a second angle to the support by means of a particle beam, such that the first and the second strip-shaped recess mutually form an acute or right angle, and between them form an overlap region of lesser thickness. The lamella has a thicker rim region and a thinner central region, with a first strip-shaped, recess on a first side of the lamella and a second strip-shaped recess on a second side of the lamella, wherein the first and the second strip-shaped recess mutually form an acute or right angle, and between them form an overlap region having a thickness of below 100 nm.
Type:
Grant
Filed:
July 28, 2011
Date of Patent:
August 11, 2015
Assignee:
Carl Zeiss Microscopy GmbH
Inventors:
Lorenz Lechner, Ute Kaiser, Johannes Biskupek
Abstract: The invention relates to a high aperture immersion objective particularly for uses in confocal microscopes where oil is the immersion fluid, which objective is composed of three lenses and/or subsystems comprising lens groups. An apochromatic correction in a range from 365 to 900 nm is achieved at high resolving numeric apertures of 1.3 to 1.4 and an object field from 0.4 to 0.625 mm by the specification of the optical components. Additionally, the immersion objective has sufficiently good transparency up to a wavelength of 340 nm.
Abstract: A method for determining roughness data and/or topography data of surfaces in material microscopy, particularly from flat samples, based on a shearing polarization interferometrical sequence with a microscopic “TIC” module (“Total Interference Contrast Module”) of a microscope, wherein the method can be carried out both polychromatically and monochromatically. At least two tilted wave fronts are generated, which after reflection or transmission on a sample generate two images of said sample in the form of fringe patterns, said images being offset relative to one another and interfering with one another, from which roughness values and height topographies of the surface of the sample are determined by application of image evaluation.
Abstract: Microscope and method for detecting sample light, having at least one illuminating beam which is partially phase-modulated with a modulation frequency along the cross section thereof and a microscope objective for intensity-modulated focusing of the illuminating beam into a sample. The microscope has a detection beam path that has at least one demodulator. At least one electro-optical modulator (EOM) is used for phase modulation of at least a part, preferably half, of the illuminating beam, or different portions or halves of the illuminating beam are modulated differently, preferably anti-phase, by anti-phase control of piezoelectric elements, or acousto-optical modulators for splitting into a plurality of partial beam paths. Optic elements are provided for partial phase modulation of the excitation beam.
Abstract: A method for wavelength-selective and high spatial resolving fluorescence microscopy. In a specimen fluorescence emitters are repeatedly excited and specimen frames are produced with a microscope. The fluorescence emitters are excited to emit fluorescence radiation such that at least a sub-set is isolated in each frame and the positions of the isolated fluorescence emitters are localized with a localization precision exceeding the optical resolution and a high-resolution complete image is produced.
Abstract: A microscope or use of a microscope with at least one illumination beam that is phase-modulated along its cross section partially with a modulation frequency, in which an advantageously local excitation of a transition, advantageously a fluorescence excitation in a sample, is performed by means of a pump beam of a first wavelength and the transition is induced and detected advantageously by means of a second beam, advantageously of a second wavelength, or a local heating is generated that is read out from the detection signals by means of a detection unit, advantageously an infrared camera.
Abstract: The present invention is directed to a fast, nondestructive measurement method for determining the contents of solid, liquid and/or suspended flowing organic compounds. The arrangement according to the invention comprises a sample vessel, a pump, and a measurement cell which form a unit together with a spectroscopic measurement head. The measurement cell is connected to the pump, which can be regulated to vary the flow rate, and to the sample vessel by a pipe, and the spectroscopic measurement head and the regulatable pump have electrical connections to a controlling and evaluating unit. Due to its compact construction, the solution which makes use of the principle of transflection is also particularly suited to mobile use, for example, to determine the components of liquid manure while the latter is being dispensed. In principle, the solution can be transferred to any applications with suspensions or pumpable, homogeneous and inhomogeneous materials.
Type:
Grant
Filed:
September 21, 2012
Date of Patent:
September 29, 2015
Assignees:
Carl Zeiss Microscopy GmbH, Christian-Albrechs-Universitaet Zu Kiel
Inventors:
Michael Rode, Helga Andree, Diane F Malley