Patents Assigned to Carl Zeiss NTS GmbH
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Patent number: 9190242Abstract: A particle beam device and a sample receptacle apparatus, which has a sample holder, are disclosed. The sample holder is arranged in a movable fashion along at least a first axis and along at least a second axis. Furthermore, the sample holder is arranged in a rotatable fashion about a first axis of rotation and about a second axis of rotation. A first sample holding device is arranged relative to the sample holder in a rotatable fashion about a third axis of rotation, in which the third axis of rotation and the second axis of rotation are at least in part arranged laterally offset with respect to one another. Furthermore, a control apparatus is provided, in which the first sample holding device is rotatable about the third axis of rotation into an analysis position and/or treating position using the control apparatus.Type: GrantFiled: September 22, 2011Date of Patent: November 17, 2015Assignee: Carl Zeiss NTS GmbHInventors: Josef Biberger, Ralph Pulwey
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Patent number: 8779381Abstract: An aperture unit for a particle beam device, in particular an electron beam device, is disclosed. Deposit supporting units are arranged at the aperture unit, with which deposit supporting units contaminations can be bound in such a way that the contaminations can no longer deposit at an aperture opening of the aperture unit. Coatings which can be arranged on the aperture unit make it possible to reduce interactions which cause contaminations to deposit at the aperture opening.Type: GrantFiled: September 19, 2011Date of Patent: July 15, 2014Assignee: Carl Zeiss NTS GmbHInventors: Matthias Lang, Ulrike Zeile, Michael Albiez, Wolfram Bühler
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Patent number: 8487252Abstract: A method for operating a particle beam microscope comprising detecting light rays or particles which emanate from a structure, wherein the structure comprises at least one of: at least a portion of a surface of an object and at least a portion of a surface of an object holder of the particle beam microscope; generating a surface model of the structure depending on the at least one of the detected light rays and the particles; determining a position and an orientation of the surface model of the structure relative to the object region; determining a measurement location relative to the surface model of the structure; and positioning the object depending on the generated surface model of the structure, depending on the determined position and orientation of the surface model of the structure, and depending on the determined measurement location.Type: GrantFiled: September 29, 2011Date of Patent: July 16, 2013Assignee: Carl Zeiss NTS GmbHInventors: Simon Diemer, Hubert Mantz, Jaroslaw Paluszynski
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Publication number: 20130098292Abstract: A processing system for processing an object (3) is provided, wherein the processing system is adapted, to focus a first energy beam, in particular an electron beam (11), and a second energy beam, in particular an ion beam (21), on a focusing region (29) in which a object (3) to be processed is arrangeable. A processing chamber wall (35) having two openings (38, 39) for traversal of both energy beams and a connector (37) for supplying process gas delimits a processing chamber (45) from a vacuum chamber (2) of the processing system. Processing the object by activating the process gas through one of the energy beams and inspecting the object via one of the energy beams is enabled for different orientations of the object relative to a propagation direction of one of the energy beams.Type: ApplicationFiled: December 8, 2012Publication date: April 25, 2013Applicant: Carl Zeiss NTS GmbHInventors: Emmerich Bertagnolli, Heinz Wanzenboeck, Wolfram Buehler, Camille Stebler, Ulrike Zeile, Alexander Rosenthal
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Publication number: 20130092836Abstract: A transmission electron microscope comprises a high-voltage source for outputting a high voltage at two high-voltage outputs and outputting a control signal at a controller output; a focusing lens for focusing a beam; a monochromator which allows only those particles of the particle beam to pass whose kinetic energy is within an adjustable energy interval; an energy-dispersive component which deflects particles of different kinetic energies differently; a detector; and a controller connected to the controller output, which controls a beam deflector, arranged between the energy-dispersive component and the detector, the monochromator, or the energy-dispersive component in dependence on the control signal, or superposes plural of intensity distributions detected by the detector with an offset relative to one another, which offset is set in dependence on the control signal.Type: ApplicationFiled: December 23, 2011Publication date: April 18, 2013Applicant: CARL ZEISS NTS GMBHInventor: Joerg Fober
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Patent number: 8421028Abstract: A device for deflecting a particle beam out of a beam axis, or for guiding a particle beam into the beam axis, has a simple design, requires little space, and additionally ensures that no area of an object that is not to be struck is struck by a particle beam. The device may include components in the following sequence along the beam axis: first deflection element, a magnetic apparatus for providing a magnetic field axially to the beam axis, and a second deflection element. A particle beam apparatus may have a device of this type.Type: GrantFiled: September 26, 2008Date of Patent: April 16, 2013Assignee: Carl Zeiss NTS GmbHInventor: Dirk Preikszas
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Patent number: 8405045Abstract: A particle beam device includes a particle beam generator, an objective lens, and first and second deflection systems for deflecting the particle beam in an object plane defined by the objective lens. In a first operating mode, the first deflection system generates a first deflection field and the second deflection system generates a second deflection field. In a second operating mode, the first deflection system generates a third deflection field and the second deflection system generates a fourth deflection field.Type: GrantFiled: November 29, 2011Date of Patent: March 26, 2013Assignees: Carl Zeiss NTS GmbH, Carl Zeiss NTS Ltd.Inventors: Dirk Preikszas, Armin Heinz Hayn
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Patent number: 8390152Abstract: A device is disclosed for generating a stable high voltage, namely a high-voltage DC generator for a particle beam apparatus. A method is also disclosed for generating a stable high voltage for a particle beam apparatus. The high-voltage DC generator has a controllable voltage source, which is connected to an amplifier. The high-voltage DC generator ensures that fluctuations of the smoothed high voltage are detected by a capacitive divider and supplied to the amplifier. The amplifier controls the controllable voltage source in counterphase. The voltage of the controllable voltage source is superimposed on the smoothed high voltage. The sum of the voltage of the controllable voltage source and the smoothed high voltage forms the generated and stable high voltage, which is supplied to a particle beam apparatus.Type: GrantFiled: March 2, 2010Date of Patent: March 5, 2013Assignee: Carl Zeiss NTS GmbHInventor: Jorg Fober
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Publication number: 20120326030Abstract: A particle beam microscope comprises a magnetic lens 3 having an optical axis 53 and a pole piece 21. An object 5 to be examined is mounted at a point of intersection 51 between an optical axis 53 and the object plane 19. First and second X-ray detectors 33 have first and second radiation-sensitive substrates 35 arranged such that a first elevation angle ?1 between a first straight line 551 extending through the point of intersection 51 and a centre of the first substrate 351 and the object plane 19 differs from a second elevation angle ?2 between a second straight line 552 extending through the point of intersection 51 and a centre of the second substrate 352 and the object plane 19 by more than 14°.Type: ApplicationFiled: December 26, 2011Publication date: December 27, 2012Applicant: CARL ZEISS NTS GMBHInventors: Gerd Benner, Stefan Meyer, Steffen Niederberger, Dirk Preikszas
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Patent number: 8330105Abstract: A phase contrast electron microscope has an objective with a back focal plane, a first diffraction lens, which images the back focal plane of the objective magnified into a diffraction intermediate image plane, a second diffraction lens whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective having a back focal plane, a first diffraction lens, a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane of the objective.Type: GrantFiled: October 14, 2011Date of Patent: December 11, 2012Assignee: Carl Zeiss NTS GmbHInventors: Gerd Benner, Marko Matijevic
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Patent number: 8304745Abstract: For the microscopy of an object or a specimen with a combination of optical microscopy and particle beam microscopy, an electrically conducting specimen carrier (1) is used which is configured for use in a particle beam microscope as well as in an optical microscope and has at least one alignment mark (2). The alignment mark is configured as a pass-through structure and is detectable from the top and from the bottom of the specimen carrier.Type: GrantFiled: May 31, 2011Date of Patent: November 6, 2012Assignees: Carl Zeiss MicroImaging GmbH, Carl Zeiss AG, Carl Zeiss NTS GmbHInventors: Heino Heise, Andreas Nolte, Christian Thomas, Martin Edelmann, Uwe Wolf, Ulrich Kohlhaas, Dmitry Lysenkov
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Patent number: 8304750Abstract: Methods are disclosed that include exposing, in direct succession, portions of a surface of a sample to a charged particle beam, the portions of the surface of the sample forming a row in a first direction, the charged particle beam having an average spot size f at the surface of the sample, each portion being spaced from its neighboring portions by a distance of at least d in the first direction, and a ratio d/f being 2 or more.Type: GrantFiled: December 12, 2008Date of Patent: November 6, 2012Assignee: Carl Zeiss NTS GmbHInventors: Dirk Preikszas, Michael Steigerwald, Joerg Ackermann
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Patent number: 8299442Abstract: A particle beam apparatus has an optical axis (OA), an illuminating system (1, 2, 3, 4) for illuminating an object, which is positioned in an object plane (7), with a beam of charged particles and an objective (6) for imaging the illuminated object. The beam of charged particles is split at the object into a null beam and higher diffraction orders. The illuminating system is so configured that it generates an annularly-shaped illuminating aperture in a plane Fourier transformed to the object plane (7). A phase-shifting element (9) is mounted in a focal plane (15) of the objective (6) or in a plane conjugated thereto. The focal plane (15) faces away from the object plane (7). The phase-shifting element can be an einzel lens having two outer electrodes and one or several inner electrodes disposed therebetween when seen in the direction of the optical axis. The phase-shifting element can have an additional electrode at or near the optical axis.Type: GrantFiled: August 13, 2009Date of Patent: October 30, 2012Assignee: Carl Zeiss NTS GmbHInventor: Gerd Benner
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Publication number: 20120267545Abstract: A processing system includes a piping which extends annularly, such as in the form of a circular annular shape, around a beam path between a focusing lens and an interaction region. The piping includes, on a side which faces the interaction region, a plurality of exit openings for the gas towards the interaction region. The piping also includes a holder configured to pivot the piping about a pivot axis. The holder is parallel to the tilt axis of the object holder.Type: ApplicationFiled: April 20, 2012Publication date: October 25, 2012Applicant: CARL ZEISS NTS GMBHInventor: Fabian Perez-Willard
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Publication number: 20120256098Abstract: An ion beam system comprises a voltage supply system 7 and at least one beam deflector 39 having at least one first deflection electrode 51a, 51b, 51c and plural second deflection electrodes 52a, 52b, 52c, wherein the voltage supply system is configured to supply different adjustable deflection voltages to the plural second deflection electrodes such that electric deflection fields between the plural second deflection electrodes and the opposite at least one first deflection electrode have a common orientation. The system has a high kinetic energy mode in which a distribution of the electric deflection field has a greater width, a low kinetic energy mode in which a distribution of the electric deflection field has a smaller width.Type: ApplicationFiled: September 30, 2011Publication date: October 11, 2012Applicant: CARL ZEISS NTS GMBHInventors: Josef Biberger, Ralph Pulwey, Andreas Adolf
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Patent number: 8283641Abstract: A positioning device and a particle beam apparatus including a positioning device ensure reliable positioning of a holder for holding an object at any working distance. The positioning device includes a positionable holder for holding the object. A light source generates a light beam which is guided in the direction of the positionable holder. A detector detects the light beam. An injection area injects particles of a particle beam such that they are guided in the direction of the positionable holder. The light beam passes the injection area. The injection area has an output side for the light beam and the particle beam, which is directed toward the holder. The detector includes a detector element situated in an area between the output side and the holder. The light source includes a light source element situated in an area which extends away from the holder, starting from the output side.Type: GrantFiled: May 14, 2009Date of Patent: October 9, 2012Assignee: Carl Zeiss NTS GmbHInventors: Dietmar Dönitz, Dirk Preixszas, Michael Steigerwald
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Publication number: 20120248959Abstract: An electron beam source includes a base and a tip fixed to the base and extending from the base. The tip includes a core and a coating applied to the core. The core has a surface that includes a first material. The coating includes a second material which is different from the first material. The second material forms a surface of the tip, and the second coating includes more than 30% by weight of a lanthanide element.Type: ApplicationFiled: March 30, 2011Publication date: October 4, 2012Applicant: CARL ZEISS NTS GMBHInventors: Wolfram Buehler, Volker Drexel
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Patent number: 8263933Abstract: A device and method for analyzing an organic sample provide high spatial resolution. A focused ion beam is directed onto the organic sample. Fragments detached from the sample are examined using mass spectroscopy.Type: GrantFiled: September 2, 2009Date of Patent: September 11, 2012Assignee: Carl Zeiss NTS GmbHInventor: Ulrike Zeile
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Patent number: 8247785Abstract: A particle beam device includes a movable carrier element with at least one receiving element for receiving a specimen and in which the receiving element is situated on the carrier element. In various embodiments, the receiving element may be situated removably on the carrier element and/or multiple receiving elements may be situated on the carrier element in such a way that a movement of the carrier element causes a movement of the multiple receiving elements in the same spatial direction or around the same axis. The carrier element may be movable in three spatial directions situated perpendicular to one another and rotatable around a first axis which is parallel to an optical axis of the particle beam device and around a second axis which is situated perpendicular to the optical axis. A method for using the particle beam device in connection with specimen study and preparation is also disclosed.Type: GrantFiled: June 5, 2008Date of Patent: August 21, 2012Assignee: Carl Zeiss NTS GmbHInventors: Ulrike Zeile, Andreas Schertel
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Publication number: 20120205550Abstract: An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of the magnetic lens exhibits a diameter Da which is larger than a diameter Di of the bore of the inner pole piece of the magnetic lens. The following relationship is satisfied: 1.5·Di?Da?3·Di. The lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis.Type: ApplicationFiled: April 18, 2012Publication date: August 16, 2012Applicant: CARL ZEISS NTS GMBHInventor: Volker Drexel