Abstract: A solid-state laser has a rod-shaped laser medium with planar end faces and a pumping radiation source whose pumping radiation reaches the laser medium by means of an optical element arranged in a longitudinal configuration adjacent to a planar end face of the laser medium. The optical element is arranged in thermal contact with a cooling element and is optically dimensioned so as to result in a minimum diameter of the transverse mode profile within the laser resonator.
Type:
Grant
Filed:
March 4, 1996
Date of Patent:
November 25, 1997
Assignee:
Carl-Zeiss-Stiftung
Inventors:
Robert Maag, Heinz Abramowsky, Peter Reimer, Martin Wiechmann
Abstract: Before the exposure of a film, the brightness of the miscroscope image is determined with a sensor by multiple constant (.tau.) which characterizes the dependence of the microscope image with time is determined. The film is subsequently exposed for a single exposure time (D.sub.c) which takes into account the dependence with time of the microscope image. The process is particularly suitable for microphotography of fluorescence pictures with fluorescence which bleaches out (fading). By the display of both the time constant (.tau.) and also the required exposure time, it can be estimated in advance, before exposure of the film, whether the dependence of the fluorescence on time permits microphotography with a sufficient exposure of the film, in the microscope conditions which have been set. A multiple exposure of the film is not required.
Abstract: The invention relates to an ancillary module 7 for making spatially resolved measurements of the focus volume of a light beam focussed by a microscope objective 4. The light beam is especially a laser beam. The invention includes a carrier assembly having a glass plate 8 and sleeves (9, 10) mounted thereon. A piezoelectric scanning tube 12 is held on the sleeves (9, 10) essentially perpendicularly to the glass plate 8. The scanning tube 12 operates to move an optical near-field probe 13a in three mutually perpendicular directions. The optical near-field sensor is preferably a glass fiber 13 which has a tip 13a at one end thereof. This tip 13a scans the laser focus volume. At the other end of the glass fiber 13, either a photodiode 14 is provided with which the light coupled into the glass fiber is detected or a corresponding light detector can be adapted by means of an interface. The two sleeves (9, 10) are displaceable relative to each other for coarsely positioning the scanning tube 12.
Type:
Grant
Filed:
February 23, 1996
Date of Patent:
October 14, 1997
Assignee:
Carl-Zeiss-Stiftung
Inventors:
Martin Volcker, Robert Grub, Wolfgang Wormann, Martin Gluch
Abstract: An apparatus for laser machining by creating a plurality of discrete and separate beams which are sent to a deflecting device including a support and a plurality of individual elements that act independently and are individually controlled to machine different points on the workpiece simultaneously.
Inventors:
Joachim Schulte in den Baumen, Robert Grub, Herbert Gross, Jurgen Schweizer, Hans-Jurgen Kahlert, Siegfrid Dippon, Wilhelm Tamm, Si-Ty Lam, Heinrich Endert
Abstract: An illumination system for an optical system such as a microlithographic projection exposure system includes a zoom lens 2 for varying the degree of coherence .sigma. and two axicons (22, 23) with an adjustable distance therebetween. The distance can preferably be reduced to zero. The illumination system provides continuous, conventional illumination with a variable degree of coherence .sigma. and annular illumination or multipole illumination with different geometries with low losses of light.
Abstract: A method and apparatus for irradiating a surface of a workpiece utilizing several discrete component beams. The irradiation exposes a photosensitive layer on a surface of a workpiece to be processed. A deflecting device is provided having a plurality of elements assigned to corresponding ones of the component beams. Each component beam is directed individually or in combination with other component beams by the deflecting device. In this way, different points and zones on the surface of the workpiece to be processed can be irradiated simultaneously.
Abstract: A stand is provided for mounting various loads and is balanced at least partially automatically. The stand includes a plurality of interconnected elements defining one or more axes about which the stand is movable. An open-loop or closed-loop control circuit is provided for at least one of the axes and detects the unbalanced state about the one axis. The control circuit allows a torque compensating device to operate on the one axis until a state of equilibrium is obtained.
Type:
Grant
Filed:
June 21, 1994
Date of Patent:
September 16, 1997
Assignee:
Carl-Zeiss-Stiftung
Inventors:
Joachim Luber, Martin Pelzer, Heinz Jakubowski, Arvids Mackevics, Annette Reiss, Jurgen Schweizer
Abstract: The invention relates to a tilt mirror arrangement which has at least one tilt mirror, a base and at least one mirror bearing having at least a virtually fixed pivot point between the tilt mirror and the base. The mirror surface is characterized by a length of less than 40 mm and the size of the entire arrangement of the tilt mirror, bearing and housing is arranged below the mirror surface so that the arrangement does not extend beyond the projection of the mirror plane or extends only insignificantly when the mirror tilts.
Abstract: A defined determination of the field of view observed through a surgical microscope is made. To achieve this determination, the relative current position of the plane of the field of view to the position of an object detail of interest is detected in a sighting method with the aid of a position detection system operating according to the laser triangulation principle. As soon as the plane of the field of view and the object detail are coincident, then with the aid of detected optical system data, the position of the object detail with reference to the surgical microscope is determined and, with the detected coordinates of the surgical microscope, the position of the field of view is determined in space. The position detecting system required for this purpose operates on an optical basis and can be integrated into the optics of the surgical microscope.
Abstract: The invention is directed to a method for calibrating a coordinate measuring apparatus which has a probe 10. The probe 10 is movably guided in a plane (x, y) via two parallel pivot axes (6, 8) which are arranged one behind the other. For calibrating the primary dimensions (R1, R2, .phi.0, .psi.0, dT) of the coordinate measuring apparatus, contours or geometric elements are contact scanned on a calibration body with the probe. The contours or geometric elements are so selected that the diameter dT of the probe ball 12 attached to the probe enters into the measuring result for the geometric elements or their spacing with different weight or sign. Thereafter, the primary dimensions (R1, R2, .phi.0, .psi.0, dT) are determined from the measured values obtained by contact scanning the contours for the position of the probe 10 in the plane (x, y) and from the known dimensions of the geometric elements.
Abstract: The invention is directed to an illuminating arrangement for an optical system such as a microlithographic projection exposure apparatus and includes a glass rod 5 for light integration. The reticle masking unit (REMA) 51 is mounted at the exit face of the glass rod 5.
Abstract: An image display system comprises polarization spectacles having different polarization axes with or without .lambda./4-foils of both polarization lenses forward of the eyes of the person to be tested. The system of the invention further includes an image display device for generating light with a specific direction of polarization or a specific rotational direction of the circularly polarized light. The image display device comprises essentially at least one vectograph film and at least one image screen. This arrangement can so influence the light coming from the image screen that test figures or parts thereof can be seen by only one eye or by both eyes. If the image display system is to be used as a vision testing system and the test figures are to be changed, then there is a corresponding command of a drive circuit via a memory. The drive circuit drives the image screen in a suitable manner. A color display can be provided by making an appropriate modification to the image display device.
Abstract: The invention is directed to a safety filter for an ophthalmic therapeutic and/or diagnostic unit into which a laser beam is coupled for therapeutic purposes. The safety filter is optically dimensioned in such a way that no change in the focal intercept results when the filter is swung into the viewing beam path. The filter largely absorbs the particular laser wavelength.
Type:
Grant
Filed:
March 20, 1995
Date of Patent:
June 3, 1997
Assignee:
Carl-Zeiss-Stiftung
Inventors:
Roland Brenner, Josef Schlosser, Peter Reimer
Abstract: The invention is directed to an arrangement for displacing the parts of an objective with at least one adjusting ring 6. A fine adjusting ring 40 is also provided and there is no switchover device which must be actuated by the operator. The fine adjusting ring 40 is at standstill when it is not actively rotated by the operator. A coarse adjusting ring 6 is rotatably journalled in the housing 10 of an objective. A transmission or gearing for suitably fine adjusting this coarse adjusting ring 6 includes a sun gear wheel 1 mounted fixedly on the objective housing 10, a fine adjusting ring 40 which includes a shaft pin 4 on which planetary gear wheels 2 are journalled and an output gear wheel 3 rotatably mounted on the coarse adjusting ring 6 via a slip clutch 5.
Abstract: The solid-state oscillator, preferably a watch crystal (1/2), is mounted with its direction (S) of vibration at an angle to all three measuring directions (x, y, z) of the coordinate measuring apparatus. The oscillator circuit of the solid-state oscillator is connected to an electronic circuit which generates two different contact signals. Both measures make it possible to reduce the dependency of the contact uncertainty of the measuring direction.
Type:
Grant
Filed:
May 15, 1995
Date of Patent:
May 6, 1997
Assignee:
Carl-Zeiss-Stiftung
Inventors:
Karl H. Breyer, Helmut Heier, Gerhard Meyer
Abstract: The invention is directed to a probe head of the measuring type equipped with measuring force generators (15 to 17) for the generation of measuring forces of pregiven magnitude and direction. The probe head further includes a system for arresting or clamping the displaceable part 10 of the probe head in preselectable directions. The measuring force generators are arranged directly on the displaceable parts (4, 9, 10) of the guide units for the different deflection directions (x, y, z). The arresting or clamping system is implemented in the form of an electronic control circuit which applies a signal to the force generators (15 to 17) which is opposite to the deflection of the displaceable part 10. In addition, the probe head includes a system for damping the displaceable part. This damping system operates also on an electromagnetic basis with the aid of the measuring force generators configured as plunger coils.
Abstract: Phase-contrasting elements are arranged in the viewing beam paths of a stereomicroscope to make transparent media visible with rich contrast such as in the area of ophthalmologic surgery. The phase-contrasting elements make the transparent media visible as phase objects in the amplitude contrast. The phase-contrasting elements are selected in dependence upon the light source diaphragm which is used.
Type:
Grant
Filed:
August 10, 1994
Date of Patent:
April 8, 1997
Assignee:
Carl-Zeiss-Stiftung
Inventors:
Thomas Hellmuth, Peter Seidel, Peter Schaffer
Abstract: A coordinate measuring apparatus carries a video camera 6 and a mechanical probe head 7 having a probe element 8 for contact-measuring the workpiece surface. With the aid of the coordinate measuring apparatus, the locations on the workpiece 9 to be mechanically contacted are driven to under visual control with the aid of the monitor 10 connected to the video camera. For this purpose, the probe element 8 is located in the viewing field of the video camera 6.
Type:
Grant
Filed:
May 25, 1994
Date of Patent:
April 1, 1997
Assignee:
Carl-Zeiss-Stiftung
Inventors:
Karl-Hermann Breyer, Klaus-Peter Koch, Helmut Heier, Hans-Gerd Pressel
Abstract: A binocular telescope includes adjustable optical components. The telescope has at least two telescope halves, respectively having an optical axis passing through an ocular and an objective. The adjustable optical components lie between the ocular and objective in a respective housing tube. The telescope has, between the two telescope halves, an axis that is essentially aligned parallel to the two optical axes, and in which a shaft body is arranged. The shaft body has a longitudinal slot in which an adjusting body, displaceable in the longitudinal axis of the shaft body, is arranged. This adjusting body is adjustable in the longitudinal direction from outside the telescope, its axial movement being coupled with the movable optical components for common focusing. A separate drive knob is arranged to change the axial position of one optical component in one telescope half to compensate for visual defects.
Abstract: The invention is directed to a stereoscopic endoscope wherein an intermediate image is generated in a rod-shaped endoscope attachment. The intermediate image is imaged into the focal plane of an objective. The objective can be the main objective of a surgical microscope with the objective having a long focal length or the main objective of a stereoscopic recording system. The main objective and an in-coupling optic conjointly define an inverted telescope.