Patents Assigned to Crossbar, Inc.
  • Patent number: 8912523
    Abstract: A non-volatile memory device structure. The device structure includes a first electrode, a second electrode, a resistive switching material comprising an amorphous silicon material overlying the first electrode, and a thickness of dielectric material having a thickness ranging from 5 nm to 10 nm disposed between the second electrode and the resistive switching layer. The thickness of dielectric material is configured to electrically breakdown in a region upon application of an electroforming voltage to the second electrode. The electrical breakdown allows for a metal region having a dimension of less than about 10 nm by 10 nm to form in a portion of the resistive switching material.
    Type: Grant
    Filed: April 25, 2013
    Date of Patent: December 16, 2014
    Assignee: Crossbar, Inc.
    Inventor: Sung Hyun Jo
  • Patent number: 8889521
    Abstract: A method of depositing a silver layer includes forming a plurality of openings in a dielectric layer to expose a top surface of a structure comprising a resistive memory layer on top of a p-doped silicon-containing layer on top of a conductive structure, depositing a first metal layer comprising a tungsten layer overlying the top surface of the structure, wherein a first metal material of the first metal layer contacts a resistive memory material of the resistive memory layer and exposing the first metal layer in a bath comprising a solution of silver species having an alkaline pH for a predetermined time to form a silver metal layer from the silver species from the solution overlying the resistive memory material, wherein the silver species is reduced by the first metal material, and wherein the first metal material is solubilized while forming the silver metal layer.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: November 18, 2014
    Assignee: Crossbar, Inc.
    Inventors: Steven Patrick Maxwell, Sung-Hyun Jo
  • Patent number: 8883603
    Abstract: A method for forming a silver structure for a non-volatile memory device includes providing a silver layer material upon a underlying substrate, forming a diffusion barrier material overlying the silver layer material, forming a dielectric hard mask material overlying the diffusion barrier material, subjecting the dielectric hard mask material to a patterning and etching process to form a hard mask and to expose a portion of the diffusion barrier material, subjecting the portion of the diffusion barrier material to an etching process using one or more chlorine bearing species as an etchant material, wherein one or more chloride contaminant species is formed overlying at least a portion of the silver layer material, and reacting the one or more chloride contaminant species with a solution comprising an ammonia species to form a water soluble species, wherein the ammonia species is free from an oxidizing species.
    Type: Grant
    Filed: August 1, 2012
    Date of Patent: November 11, 2014
    Assignee: Crossbar, Inc.
    Inventor: Steven Patrick Maxwell
  • Patent number: 8884261
    Abstract: A resistive switching device. The device includes a first electrode comprising a first metal material overlying the first dielectric material and a switching material comprising an amorphous silicon material. The device includes a second electrode comprising at least a second metal material. In a specific embodiment, the device includes a buffer material disposed between the first electrode and the switching material. The buffer material provides a blocking region between the switching material and the first electrode so that the blocking region is substantially free from metal particles from the second metal material when a first voltage is applied to the second electrode.
    Type: Grant
    Filed: August 23, 2010
    Date of Patent: November 11, 2014
    Assignee: Crossbar, Inc.
    Inventors: Sung Hyun Jo, Wei Lu
  • Publication number: 20140320166
    Abstract: Providing for a field programmable gate array (FPGA) utilizing resistive random access memory (RRAM) technology is described herein. By way of example, the FPGA can comprise a switching block interconnect having parallel signal input lines crossed by perpendicular signal output lines. RRAM memory cells can be formed at respective intersections of the signal input lines and signal output lines. The RRAM memory cell can include a voltage divider comprising multiple programmable resistive elements arranged electrically in series across a VCC and VSS of the FPGA. A common node of the voltage divider drives a gate of a pass gate transistor configured to activate or deactivate the intersection. The disclosed RRAM memory can provide high transistor density, high logic utilization, fast programming speed, radiation immunity, fast power up and significant benefits for FPGA technology.
    Type: Application
    Filed: January 28, 2014
    Publication date: October 30, 2014
    Applicant: Crossbar, Inc.
    Inventors: Hagop NAZARIAN, Sang Thanh NGUYEN, Tanmay KUMAR
  • Publication number: 20140312296
    Abstract: Providing for three-dimensional memory cells having enhanced electric field characteristics is described herein. By way of example, a two-terminal memory cell can be constructed from a layered stack of materials, where respective layers are arranged along a direction that forms a non-zero angle to a normal direction of a substrate surface upon which the layered stack of materials is constructed. In some aspects, the direction can be orthogonal to or substantially orthogonal to the normal direction. In other aspects, the direction can be less than orthogonal to the normal direction. Where an internal angle of the memory cell forms a non-orthogonal angle, an enhanced electric field or current density can result, providing improved switching times and memory performance.
    Type: Application
    Filed: February 28, 2014
    Publication date: October 23, 2014
    Applicant: Crossbar, Inc.
    Inventors: Sung Hyun JO, Joanna BETTINGER, Xianliang LIU
  • Patent number: 8841196
    Abstract: A method of forming a non-volatile memory device includes providing a semiconductor substrate having a surface region, thereafter forming a first dielectric layer overlying, thereafter forming a first wiring material, thereafter forming amorphous silicon layer, and patterning and etching these layers to form first structures extending in a first direction and having a switching element. Thereafter, a method may include depositing a second dielectric layer overlying the first structures and having a dielectric surface region, forming an opening region in the second dielectric material to exposing part of the switching element, and depositing a silver material in the opening region, but not on the dielectric surface region.
    Type: Grant
    Filed: September 29, 2011
    Date of Patent: September 23, 2014
    Assignee: Crossbar, Inc.
    Inventor: Scott Brad Harold
  • Publication number: 20140268998
    Abstract: A two-terminal memory cell comprises a dual mode of operation in a unipolar mode and bipolar mode for a programming or On-state and for an erase or Off-state of the cell. The two-terminal memory cell is field programmable and can be flexibly designed or integrated into existing architecture. The two-terminal memory comprises a first electrode layer and a second electrode layer with a switching layer disposed between that has an electrical insulator material. A semiconductor layer is disposed between the switching layer and at least one of the first electrode or the second electrode. The switching layer generates a conductive path that is configured to be in a program state and an erase state, based on a bipolar mode and a unipolar mode.
    Type: Application
    Filed: August 16, 2013
    Publication date: September 18, 2014
    Applicant: Crossbar, Inc.
    Inventor: Sung Hyun JO
  • Publication number: 20140264238
    Abstract: A solid state memory comprises a top electrode, a bottom electrode and an insulating switching medium that is disposed at a thickness based on a predetermined function. The insulating switching medium generates a conduction path in response to an electric signal applied to the device. The thickness of the insulating switching medium is a function of a filament width of the conduction path and operates to prevent rupture of a semi-stable region. The semi-stable region maintains filament structure over time and does not degrade into retention failure. The solid state memory can comprise one or more conducting layers that can operate to control the conductance at an on-state of the memory and offer oxygen vacancies or metal ions to the switching medium. The function of the thickness of the insulating switching medium can vary depending upon the number of conduction layers disposed at the insulating switching medium.
    Type: Application
    Filed: August 2, 2013
    Publication date: September 18, 2014
    Applicant: Crossbar, Inc.
    Inventor: Sung Hyun JO
  • Publication number: 20140264242
    Abstract: A disturb-resistant nonvolatile memory device includes a substrate, a dielectric material overlying the semiconductor substrate, a first cell comprising a first wiring structure extending in a first direction overlying the dielectric material, a first contact region, a first resistive switching media, and a second wiring structure extending in a second direction orthogonal to the first direction, a second cell comprising the first wiring structure, a second contact region, a second resistive switching media, and a third wiring structure separated from the second wiring structure and parallel to the second wiring structure, and a dielectric material disposed at least in a region between the first switching region and the second switching region to electrically and physically isolate the first switching region and the second switching region.
    Type: Application
    Filed: December 17, 2013
    Publication date: September 18, 2014
    Applicant: Crossbar, Inc.
    Inventors: Scott Brad HERNER, Hagop NAZARIAN
  • Publication number: 20140269002
    Abstract: Providing for two-terminal memory having an inherent rectifying characteristic(s) is described herein. By way of example, the two-terminal memory can be a resistive switching device having one or more “on” states and an “off” state, to facilitate storage of digital information. A conductive filament can be electrically isolated from an electrode of the two-terminal memory by a thin tunneling layer, which permits a tunneling current for voltages greater in magnitude than a positive rectifying voltage or a negative rectifying voltage. The two-terminal memory cell can therefore have high resistance to small voltages, mitigating leakage currents in an array of the two-terminal memory cells. In addition, the memory cell can be conductive above a rectifying voltage, enabling reading of the memory cell in response to a suitable read bias, and erasing of the memory cell in response to a suitable negative erase bias.
    Type: Application
    Filed: December 16, 2013
    Publication date: September 18, 2014
    Applicant: Crossbar, Inc.
    Inventor: Sung Hyun JO
  • Publication number: 20140264250
    Abstract: Providing for two-terminal memory cell structures and fabrication that can be achieved with a relatively low temperature process(es) is described herein. By way of example, disclosed two-terminal memory cells can be formed at least in part as a continuous deposition, potentially yielding improved efficiency in manufacturing. Furthermore, various embodiments can be compatible with some existing complementary metal oxide semiconductor fabrication processes, reducing or avoiding retooling overhead that might be associated with modifying existing fabrication processes in favor of other two-terminal memory cell fabrication techniques.
    Type: Application
    Filed: March 14, 2013
    Publication date: September 18, 2014
    Applicant: Crossbar, Inc.
    Inventor: Crossbar, Inc.
  • Publication number: 20140269001
    Abstract: A non-volatile memory device includes a resistive switching device having a first electrode, a second electrode, and a resistive switching element, wherein the resistive switching element comprises a silicon material disposed in an overlapping region between the first electrode and the second electrode, wherein the second electrode comprises at least a metal material physically and electrically in contact with the resistive switching material, wherein the resistive switching element is characterized by a resistance depending on an electric field in the resistive switching element, and a non-linear device coupled between the first electrode and the resistive switching element , wherein the non-linear device is configured to conduct electric current when a voltage greater than a first voltage is applied to the second electrode, wherein the resistive switching device is configured to change from a first state to a second state in response to the first voltage.
    Type: Application
    Filed: December 13, 2013
    Publication date: September 18, 2014
    Applicant: Crossbar, Inc.
    Inventor: Tanmay KUMAR
  • Publication number: 20140268997
    Abstract: Providing for programming a two-terminal memory cell array with low sneak path current is described herein. Groups of two-terminal memory cells can be arranged into blocks or sub-blocks, along sets of bitlines and local wordlines. Further, groups of local wordlines within a given sub-block can be electrically isolated from bitlines outside the sub-block. A programming signal can be applied to the two-terminal memory cells from an associated local wordline thereof. Sneak path currents can be mitigated or avoided with respect to bitlines outside a particular sub-block, or on non-selected wordlines of the sub-block. This can significantly reduce a magnitude of combined sneak path current within the sub-block in response to the programming operation.
    Type: Application
    Filed: July 30, 2013
    Publication date: September 18, 2014
    Applicant: Crossbar, Inc.
    Inventors: Hagop NAZARIAN, Sang NGUYEN
  • Publication number: 20140264226
    Abstract: An integrated circuit device. The integrated circuit device includes a semiconductor substrate having a surface region. A gate dielectric layer overlies the surface region of the substrate. The device includes a MOS device having a p+ active region. The p+ active region forms a first electrode for a resistive switching device. The resistive switching device includes an amorphous silicon switching material overlying the p+ active region and a metal electrode overlies the first metal conductor structure. The metal electrode includes a metal material, upon application of a positive bias to the metal electrode, forms a metal region in the amorphous silicon switching material. The MOS device provides for a select transistor for the integrated circuit device.
    Type: Application
    Filed: April 25, 2014
    Publication date: September 18, 2014
    Applicant: Crossbar, Inc.
    Inventors: Sung Hyun JO, Hagop NAZARIAN
  • Patent number: 8815696
    Abstract: A method of forming a disturb-resistant non volatile memory device includes providing a substrate and forming a first dielectric thereon, forming a first strip of material separated from a second strip of material from a first wiring material, and forming a second dielectric thereon to fill a gap between the first and second strips of material. Openings are formed in the second dielectric exposing portions of the first wiring material. Filing the openings by p+ polysilicon contact material, and then an undoped amorphous silicon material, and then a metal material. A second wiring structure is formed thereon to contact the metal material in the openings. Resistive switching cells are formed from the first wiring structure, the second wiring structure, the contact material, the undoped amorphous silicon material, and the metal material.
    Type: Grant
    Filed: December 29, 2011
    Date of Patent: August 26, 2014
    Assignee: Crossbar, Inc.
    Inventor: Scott Brad Herner
  • Patent number: 8809831
    Abstract: A switching device includes a first dielectric material formed overlying a substrate. A bottom wiring material and a switching material are sequentially formed overlying the first dielectric material. The bottom wiring material and the switching material are patterned and etched to form a first structure having a top surface region and a side region. The first structure includes a bottom wiring structure and a switching element having the top surface region including an exposed region. A second dielectric material is formed overlying the first structure. A first opening region is formed in a portion of the second dielectric layer to expose a portion of the top surface region. A dielectric side wall structure is formed overlying a side region of the first opening region. A top wiring material including a conductive material is formed overlying the top surface region to be directly contact with the switching element.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: August 19, 2014
    Assignee: Crossbar, Inc.
    Inventor: Scott Brad Herner
  • Publication number: 20140225055
    Abstract: A method for forming a non-volatile memory device configured with a resistive switching element includes providing a substrate having a surface region, depositing a first dielectric material overlying the surface region, forming a first wiring structure overlying the first dielectric material, forming a contact layer of doped polycrystalline silicon containing material overlying the first wiring structure, forming a switching layer of resistive switching material over the contact layer, removing native oxide formed on a top surface of the switching layer, if any, depositing a metal layer of an active metal directly upon the top surface of the switching layer, and depositing a second wiring structure overlying the metal layer, wherein the top surface of the switching layer is cleaned of the native oxide, if any, to reduce agglomeration of the active metal.
    Type: Application
    Filed: April 15, 2014
    Publication date: August 14, 2014
    Applicant: Crossbar, Inc.
    Inventors: Scott Brad HERNER, Sung Hyun JO
  • Publication number: 20140217353
    Abstract: A memory device includes a first plurality of memory cells arranged in a first crossbar array, a first thickness of dielectric material overlying the first plurality of memory cells, and a second plurality of memory cells arranged in a second crossbar array overlying the first thickness of dielectric material. The memory device further includes a second thickness of dielectric material overlying the second plurality of memory cells. In a specific embodiment, the memory device further includes a Nth thickness of dielectric material overlying an Nth plurality of memory cells, where N is an integer ranging from 3 to 8.
    Type: Application
    Filed: February 7, 2014
    Publication date: August 7, 2014
    Applicant: Crossbar, Inc.
    Inventor: Scott Brad HERNER
  • Patent number: 8796102
    Abstract: A method of forming a resistive device includes forming a first wiring layer overlying a first dielectric on top of a substrate, forming a junction material, patterning the first wiring layer and junction material to expose a portion of the first dielectric, forming a second dielectric over the patterned first wiring layer, forming an opening in the second dielectric to expose a portion of the junction material, forming a resistive switching material over the portion of the junction material in the opening, the resistive switching material having an intrinsic semiconductor characteristic, forming a conductive material over the resistive switching material, etching the conductive material and the resistive switching material to expose respective sidewalls of the resistive switching material and the conductive material, and the second dielectric, and forming a second wiring layer over the conductive material in contact with the respective sidewalls and the second dielectric.
    Type: Grant
    Filed: August 29, 2012
    Date of Patent: August 5, 2014
    Assignee: Crossbar, Inc.
    Inventor: Mark Harold Clark