Patents Assigned to Edwards Limited
  • Scroll pump including drive shaft extending through fixed scroll
    Patent number: 9097252
    Abstract: A scroll pump includes a pump housing, a drive shaft having a concentric shaft portion and an eccentric shaft portion connected to an orbiting scroll. The shaft is driven by a motor so that rotation of the shaft imparts an orbiting motion to the orbiting scroll relative to a fixed scroll for pumping fluid between a pump inlet and a pump outlet of the compressor. The fixed scroll has an opening through which the shaft extends and is connected to the orbiting scroll on an opposing side of the fixed scroll to the motor. An anti-rotation device is located in the high vacuum region for resisting rotation of the orbiting scroll and allowing said orbiting motion, and a bearing arrangement for supporting rotation of the concentric shaft portion and eccentric shaft portion is located in tile low vacuum region.
    Type: Grant
    Filed: April 7, 2011
    Date of Patent: August 4, 2015
    Assignee: Edwards Limited
    Inventors: Nigel Paul Schofield, Michael Chung Kau Liu
  • Side-channel pump with axial gas bearing
    Patent number: 9086071
    Abstract: A pump comprises a regenerative pumping mechanism. A rotor of the pump has a generally disc-shaped pump rotor mounted on an axial driveshaft for rotation relative to a stator, the pump rotor having rotor formations disposed in a surface and defining at least a portion of a flow path for pumping gas from an inlet to an outlet. The rotor formations are formed between the pump rotor and the stator of the pumping mechanism. The pump rotor and the stator comprise an axial gas bearing arrangement for controlling axial clearance between the rotor and the stator during pump operation. The gas bearing is located at a radially outward position on the rotor.
    Type: Grant
    Filed: May 18, 2010
    Date of Patent: July 21, 2015
    Assignee: Edwards Limited
    Inventor: Nigel Paul Schofield
  • Pump enveloped with thermally conductive material
    Patent number: 9080571
    Abstract: A pump comprises a rotor arrangement and a stator arrangement. The stator arrangement comprises a first part made from a corrosive resistant material which defines a volume which in use is swept by the rotor arrangement for pumping fluid from an inlet to an outlet of the stator arrangement. A second part of the stator arrangement is made from a thermally conductive material which envelopes the first part so that heat generated in the first part can be transferred to the second part at the interface surface between the two parts. The second part has formed therein at least one duct for conveying a liquid coolant through the second part so that heat can be transferred from the second part to the liquid coolant for cooling the stator arrangement.
    Type: Grant
    Filed: January 17, 2012
    Date of Patent: July 14, 2015
    Assignee: Edwards Limited
    Inventors: Stephen Edward Downham, David Paul Manson, Huw David Powell
  • Evacuation system alerts based on process tool systems bus monitoring
    Patent number: 9081379
    Abstract: In a method of controlling operation of a processing system, a host computer, a process tool and a component of an evacuation system, for example an abatement tool, are connected to a system bus. The abatement tool monitors signals transmitted on the system bus between the host computer and the process tool, and signals received directly from the process tool. The abatement tool uses information contained within the monitored signals to generate a signal for the process tool regarding an operating characteristic of the abatement tool. This signal is transmitted either directly or over the system bus to the process tool, which uses the generated signal to control an operating state of the process tool.
    Type: Grant
    Filed: June 13, 2012
    Date of Patent: July 14, 2015
    Assignee: Edwards Limited
    Inventors: James Robert Smith, Michael Roger Czerniak, Nigel James Gibbins
  • Scroll compressor having adjustable spacers
    Patent number: 9074599
    Abstract: A scroll compressor 40 comprises: housing 12, orbiting scroll 26 and fixed scroll 41. The drive shaft 14 has an eccentric shaft portion 18 so that rotation of the eccentric shaft portion imparts an orbiting motion to the orbiting scroll relative to the fixed scroll. Axial spacers 42 are located between the fixed scroll and the housing for spacing the fixed scroll relative to the orbiting scroll. When the scroll compressor 40 is assembled and tested and it is desired to perform shimming, the fixed scroll can be removed and a selected spacer placed in position prior to re-assembling the fixed scroll.
    Type: Grant
    Filed: October 23, 2013
    Date of Patent: July 7, 2015
    Assignee: Edwards Limited
    Inventor: Clive Frederick Collie
  • Apparatus for treating a gas stream
    Patent number: 9061242
    Abstract: Apparatus for treating a gas stream comprises a plurality of cylindrical proton conducting membranes. The gas stream is conveyed through the bore of each cylindrical membrane, and a hydrogen-containing gas is conveyed about the external surface of each cylindrical membrane. A catalyst provided on the inner side of each membrane catalyses a reaction between a halogen-containing component of the gas stream, such as CF4, adsorbed on the surface of the catalyst and protons conducted through the membrane.
    Type: Grant
    Filed: September 28, 2010
    Date of Patent: June 23, 2015
    Assignee: Edwards Limited
    Inventor: Robert Bruce Grant
  • Method of operating a pumping system
    Patent number: 9062684
    Abstract: A pumping system for evacuating an enclosure comprises a pumping mechanism (30), a motor (32) for driving the pumping mechanism, and a controller (36) for controlling the motor. The controller sets a maximum value for a rotational frequency of the motor and a maximum value for a current in the motor, and, to optimize the performance of the pumping system, independently adjusts the maximum values during evacuation of the enclosure.
    Type: Grant
    Filed: January 23, 2006
    Date of Patent: June 23, 2015
    Assignee: Edwards Limited
    Inventor: Simon Harold Bruce
  • Microwave plasma abatement apparatus
    Patent number: 9044707
    Abstract: In a method of operating a microwave plasma abatement apparatus comprising a microwave generator, and a gas chamber for receiving microwave energy from the microwave generator and within which a plasma is generated using the microwave energy, the amount of microwave energy that is not absorbed within the gas chamber is monitored, and the power of the microwave energy generated by the microwave generator is adjusted in dependence on the monitored microwave energy.
    Type: Grant
    Filed: September 25, 2006
    Date of Patent: June 2, 2015
    Assignee: Edwards Limited
    Inventors: Marilena Radoiu, James Robert Smith, Andrew James Seeley
  • Vacuum pump
    Patent number: 9046103
    Abstract: A vacuum pump (50) comprises a casing and a rotor located in the casing, the rotor comprising a shaft (52) supported by a bearing arrangement (64, 66) for rotation relative to the casing. A lubricant reservoir (82) is provided for storing lubricant for lubricating a rolling bearing (64) of the bearing arrangement, and a brush (84) comprising a set of bristles (86) held by the reservoir transfers lubricant from the reservoir to the rotor.
    Type: Grant
    Filed: June 30, 2008
    Date of Patent: June 2, 2015
    Assignee: Edwards Limited
    Inventors: Andrew Waye, Mark Spitteler
  • Method of pumping gas
    Patent number: 9023133
    Abstract: A vacuum pumping arrangement is described for pumping a gas stream containing hydrogen or other hydrogen-containing gas. The arrangement comprises a pumping mechanism for receiving the gas stream and exhausting a pumped gas stream at a sub-atmospheric pressure, and, downstream from the pumping mechanism, an ionic conducting membrane having one side exposed to the pumped gas stream and another side exposed to oxygen or other source of oxygen. In one example, the membrane is permeable to hydrogen, which permeates across the membrane to react with oxygen adsorbed on the other surface of the membrane. In another example, the membrane is permeable to oxygen anions, which permeate across the membrane to react with hydrogen within the gas stream.
    Type: Grant
    Filed: August 2, 2007
    Date of Patent: May 5, 2015
    Assignee: Edwards Limited
    Inventor: Robert Bruce Grant
  • DEPOSIT DETECTION DEVICE FOR EXHAUST PUMP AND EXHAUST PUMP
    Publication number: 20150114101
    Abstract: A deposit detection device for an exhaust pump is provided, which can be easily put into operation without the burdens of, for example, installing equipment for flowing a gas, or adding or changing operation modes in apparatuses.
    Type: Application
    Filed: March 7, 2013
    Publication date: April 30, 2015
    Applicant: Edwards Limited Japan
    Inventor: Yoshihiro Enomoto
  • Vacuum pump
    Patent number: 9004891
    Abstract: A pair of Northey rotors for a vacuum pump, in which each rotor comprises two opposing, substantially parallel faces, and a peripheral surface located between the opposing faces. In order to reduce damage caused by pumping a gas stream containing liquid or solid particulates, a plurality of grooves is located on the peripheral surface for accommodating the particulates.
    Type: Grant
    Filed: April 16, 2008
    Date of Patent: April 14, 2015
    Assignee: Edwards Limited
    Inventors: Neil Turner, Malcolm William Gray, Jack Raymond Tattersall
  • CONTROLLER FOR A VOLTAGE CONVERTER
    Publication number: 20150078043
    Abstract: In some examples, a control module for a voltage converter may have an input for connection to an AC supply having an operating voltage range. A first detector is provided for detecting the operating voltage range of the AC supply and generating a first control signal to identify the detected operating voltage range. A second detector is also provided for detecting the operating voltage range of the AC supply and generating a second control signal to identify the detected operating voltage range. The control module has one or more switches for selectively enabling and/or disabling a voltage multiplier in response to said first and second control signals. The present disclosure also relates to a method of controlling a voltage converter.
    Type: Application
    Filed: August 3, 2012
    Publication date: March 19, 2015
    Applicant: EDWARDS LIMITED
    Inventor: Richard Lee Harkin
  • APPARATUS FOR TREATING A GAS STREAM
    Publication number: 20150027373
    Abstract: An apparatus for treating a gas stream. A plasma generator generates a plasma flare. A first inlet conveys the gas stream into the apparatus. A reaction chamber is located downstream of the plasma generator in which gas is treated. A second inlet receives a liquid into the apparatus for establishing a liquid weir over an interior surface of the reaction chamber for resisting accumulation of solid deposits on the interior surface. A weir guide has an outer annular surface for directing liquid over the interior surface and an inner annular surface in flow communication with the outer surface so that liquid flows form the outer surface to the inner surface to resist depositing on the inner surface.
    Type: Application
    Filed: July 11, 2012
    Publication date: January 29, 2015
    Applicant: Edwards Limited
    Inventor: Joanne WALSH
  • Apparatus for Treating a Gas Stream
    Publication number: 20150027369
    Abstract: In an apparatus for treating a gas stream, a plasma generator comprises an electrode for energising a source gas to generate a plasma flare by application of a high voltage. An inlet allows the gas stream into the apparatus and directs it into the generated plasma. A scraper is fitted for reciprocating movement from a first position to a second position for scraping a surface to remove solid deposits accumulated on the surface.
    Type: Application
    Filed: July 11, 2012
    Publication date: January 29, 2015
    Applicant: Edwards Limited
    Inventor: Joanne WALSH
  • Apparatus for treating gas
    Patent number: 8888900
    Abstract: Apparatus for treating gas comprises a casing (100) containing a gas scrubber section (118) and an electrostatic precipitator section (120) located above the scrubber section. A partition (136) may be located within the casing (100) to separate the precipitator section (120) from the scrubber section (118). The casing has a gas inlet (102) for supplying gas to the scrubber section, a gas outlet (104) for exhausting gas from the precipitator section, a scrubbing liquid inlet (106) for supplying scrubbing liquid to the precipitator section, and a scrubbing liquid outlet (126) for draining scrubbing liquid from the scrubber section. In one embodiment the partition comprises a set of apertures (138) through which scrubbing liquid drains from the precipitator section into the scrubber section, and a set of gas passages (140) for conveying gas from the scrubber section to the precipitator section.
    Type: Grant
    Filed: May 15, 2008
    Date of Patent: November 18, 2014
    Assignee: Edwards Limited
    Inventors: Andrew James Seeley, Andrew James Wakefield
  • Apparatus for Treating a Gas Stream
    Publication number: 20140334982
    Abstract: An apparatus for treating a gas stream includes a plasma abatement device that has a reaction chamber and a plasma torch for generating a plasma stream for injection into the chamber for treating the gas stream. A first inlet conveys a gas stream into the plasma abatement device for treatment, and a second inlet, in a normal condition of the apparatus, is in flow communication with a source of reagent for conveying a reagent into the plasma device for improving the efficiency of the treatment. In a back-up condition of the apparatus, the second inlet is in flow communication with a gas stream source for conveying a gas stream into the device for treatment.
    Type: Application
    Filed: October 3, 2012
    Publication date: November 13, 2014
    Applicant: EDWARDS LIMITED
    Inventors: Sergey Alexandrovich Voronin, John Leslie Bidder, Andrew Arthur Chambers
  • Scroll compressor including flow path with differing axial extents
    Patent number: 8851868
    Abstract: A scroll compressor includes two scrolls 40, 46 having respective scroll plates 42, 48 and respective scroll walls 44, 50. The scroll walls intermesh so that on relative orbital movement of the scrolls, a volume 52, 54 of gas is trapped between the scrolls and pumped from an inlet 31 to an outlet 33. The axial extent ‘A’ of the trapped volume between the scroll plates is less along a first portion 62 of a flow path 56 between the inlet and the outlet than the axial extent ‘B’ of the trapped volume along a second portion 64 of the flow path, and the first portion is closer to the inlet than the second portion along the flow path.
    Type: Grant
    Filed: June 23, 2010
    Date of Patent: October 7, 2014
    Assignee: Edwards Limited
    Inventors: Ian David Stones, Alan Ernest Kinnaird Holbrook
  • Vacuum pump
    Patent number: 8851829
    Abstract: A pump insert (50) for supporting a rotor (14) of a pump comprises an annular resilient support (52) for engaging the body (26) of the pump, the support (52) extending about a rolling bearing (10) having an inner race (12) for engaging the rotor (14), an axially preloaded outer race (16) fixed to the support (52), and a plurality of rolling elements (18) located between the races. During assembly, the rolling bearing (10) can be accurately positioned within the support (52) so that there is a very low tolerance stack-up when the insert (50) is fitted to the rotor (14). Consequently, the position of the rotor (14) will hardly change, if at all, when the rolling bearing (10) is replaced during servicing of the pump.
    Type: Grant
    Filed: January 9, 2008
    Date of Patent: October 7, 2014
    Assignee: Edwards Limited
    Inventors: Barrie Dudley Brewster, Martin Ernst Tollner, Paul David Flower
  • Vacuum pump
    Patent number: 8851865
    Abstract: A vacuum pump comprises a molecular drag pumping mechanism and a regenerative pumping mechanism. A rotor element of the molecular drag pumping mechanism surrounds rotor elements of the regenerative pumping mechanism.
    Type: Grant
    Filed: September 23, 2004
    Date of Patent: October 7, 2014
    Assignee: Edwards Limited
    Inventors: Ian David Stones, Nigel Paul Schofield, Martin Nicholas Stuart