Abstract: A multi-stage vacuum pump may include a sealing arrangement for sealing between the stator components of the pump. The end seals of the arrangement comprise an annular portion for sealing between end stator components and shell components and axial portions which extend from the annular portion and together with separate axial seals seal between the shell components.

Abstract: In order to prevent excessive motor loading or system overheating due to the accumulation of particulate or dust, from SACVD type CVD processes, in the running clearances of the vacuum pump a vacuum pumping arrangement is provided having a plurality of vacuum pumping stages and comprising a first pump inlet through which process fluid from the vacuum chamber can enter the pump and pass through each of the pumping sections towards a pump outlet, and a second pump inlet through which process fluid can enter the pump and pass through only one or more pumping stages downstream of the most upstream pumping stage, wherein the apparatus configured to conveying process fluid from the vacuum chamber to the first pump inlet for pumping during the second processing step and conveying process fluid from the vacuum chamber to the second pump inlet for pumping during the first processing step.

Abstract: A method and apparatus for reducing undesirable noise generated by a vacuum pumping system. The vacuum system operates to reduce the pressure in a chamber to a first pressure value. The system then detects that the pressure at the vacuum pump system's inlet is about to change to a second higher pressure and, in response, the speed of a booster pump in the vacuum pump system is reduced below the rated speed for the pump. When the pressure at the vacuum pump's inlet is above the second pressure, the speed of the booster pump is increased to the rated speed. Thus, the booster pump is slowed down prior the pump system becoming exposed to a rapid increase in inlet pressure.

Abstract: To overcome the problem associated with liquid or solid process debris from a vacuum process system falling into, and contaminating or damaging, a vacuum pumping arrangement used to evacuate the system, the inlet of the vacuum pumping arrangement is located lower than the outlet of the arrangement. This provides a net flow of gas pumped by the arrangement in a generally upwards direction thereby resisting the passage of contaminants into the arrangement.

Abstract: An apparatus includes a foreline for conveying a waste stream which is drawn from a process chamber to a pumping mechanism. The foreline comprises an isolation valve for selectively isolating the pumping mechanism from the process chamber and a bypass positioned around the isolation valve. The apparatus further comprises a controller for actuating the isolation valve. The controller is configured to cause the isolation valve to be closed when the waste stream is initially drawn from the process chamber, during which time the waste stream is conveyed to the pumping mechanism via the bypass. The bypass includes means for inhibiting propagation of a flame front therethrough. The controller is configured to cause the isolation valve to be opened once a pressure within a region upstream of the isolation valve has been reduced below a value at which propagation of a flame front within the waste stream can be sustained.

Abstract: The present invention relates to a pump (10) comprising a shaft (15) supported for rotation by a bearing (38) carried by a bearing carrier (48), said bearing carrier having a generally outer radial portion (52) which is fixed relative to a pump housing (12) and a generally inner radial portion (54) which is fixed relative to the bearing, wherein the carrier is stiff in a radial direction between said inner and outer portions and flexible in an axial direction for restraining radial movement of the bearing and allowing axial movement.

Abstract: The present invention provides a method of treating an exhaust gas stream 12 from a processing chamber 10. The method comprises the steps of: conveying the exhaust gas from the processing chamber using a vacuum pumping arrangement 11, 22 or atmospheric line; abating the exhaust gas in an abatement region 18 of an abatement device 14; and injecting a cooling agent, such as a liquid 26, downstream of the abatement region to cool the abated gases in a cooling region 24 by phase change of the cooling agent.

Abstract: A multi-stage vacuum pump may include first and second half-shell components defining a plurality of pumping chambers and for assembly together along respective longitudinal extending faces; first and second end stator components for assembly at respective longitudinal seals for sealing between the first and second half-shell stator components when assembled together at the longitudinally extending faces; and annular seals for sealing between the first and second end stator components and the first and second half-shell stator components when assembled; wherein the longitudinal seals have end portions which abut against the annular seals for sealing therebetween and the first and second half-shell stator components have formations for resisting movement of the end portions away from the annular seals when the end portions are compressed between the first and second half-shell stator components.

Abstract: A kinetic energy recovery system is provided comprising a flywheel located in a first vacuum enclosure and a second vacuum enclosure comprising an inlet in fluid communication with the exhaust of the first vacuum enclosure and arranged to be maintained at a pressure less than atmosphere for reducing the pressure at the outlet of the first vacuum enclosure, the second vacuum enclosure comprising an exhaust through which gas can be pumped periodically at indeterminate intervals for maintaining the second vacuum enclosure at a pressure less than atmosphere. Thus an improved efficiency Kinetic energy system.

Abstract: The present invention provides an improved kinetic energy recovery and/or storage system for vehicles or other devices employing kinetic energy recovery systems comprising a flywheel supported for rotation in a first vacuum enclosure for receiving energy from and dissipating energy to one or more parts of a vehicle; a scroll vacuum pumping arrangement having an inlet arranged to be in fluid communication with an outlet of the first vacuum enclosure for evacuating the first vacuum enclosure; and a second vacuum enclosure having an inlet in fluid communication with an exhaust of the scroll pumping arrangement and arranged to be maintained at a pressure less than atmosphere for reducing the pressure at the exhaust of the scroll pumping arrangement, wherein the second vacuum enclosure comprising an outlet through which gas can be pumped periodically for maintaining the second vacuum enclosure at a pressure less than atmosphere.

Abstract: A vehicle comprising a kinetic energy recovery system having a flywheel supported for rotation in a vacuum enclosure wherein a first vacuum pumping arrangement evacuates the vacuum enclosure and a second vacuum pumping arrangement of the vehicle evacuates the recovery system. The flywheel is supported for rotation on a common drive shaft with the first vacuum pumping mechanism.

Abstract: An apparatus for treating a gas stream. A plasma generator generates a plasma flare. A first inlet conveys the gas stream into the apparatus. A reaction chamber is located downstream of the plasma generator in which gas is treated. A second inlet receives a liquid into the apparatus for establishing a liquid weir over an interior surface of the reaction chamber for resisting accumulation of solid deposits on the interior surface. A weir guide has an outer annular surface for directing liquid over the interior surface and an inner annular surface in flow communication with the outer surface so that liquid flows form the outer surface to the inner surface to resist depositing on the inner surface.

Abstract: The present invention relates to a vacuum system for evacuating a chamber of a metallurgical processing system. The system comprises a vacuum pumping arrangement for evacuating gas from the chamber, a foreline connecting the vacuum pumping arrangement to the chamber, a filter volume located in the foreline for filtering gas evacuated from the chamber along the foreline, and a by-pass line connecting the vacuum pumping arrangement to the chamber and arranged to by-pass the filter volume selectively dependent on monitored characteristics of the degassing chamber or the vacuum system.

Abstract: Stray magnetic fields created by non-symmetrical magnetisation of the permanent magnets in a rotating magnet array of a magnetic bearing assembly, when used in turbo molecular pumps, can cause significant problems to devices such as scanning electron microscopes. In order to minimise the stray fields, at least the dipole and quadrupole moments of each magnet in the array is first measured. The magnets in the array are then arranged relative to one another such that both the dipole and quadrupole moments are minimised, thus minimising the stray magnetic field when the magnet array rotates in the turbomolecular pump.

Abstract: In order to minimize the amount of contaminants that pass through a pump, or that are allowed to accumulate therein, a sub-atmospheric pressure gas scrubber suitable for use upstream of a vacuum pump is provided. The gas scrubber comprising a vessel and means for forming a spray of cleaning solvent within the vessel, the vessel comprising an inlet and an outlet for the gas to be cleaned at sub atmospheric pressure, the inlet and outlet being arranged to cause the gas to be cleaned to pass through the spray of cleaning solvent, the means for forming a spray comprising a cleaning solvent inlet connected to at least one spray nozzle and a cleaning solvent outlet through which used solvent can be pumped from the vessel using a pump, wherein the pump is arranged to recirculate the used solvent back to the cleaning solvent inlet.

Abstract: A method and apparatus is disclosed for automatically adjusting a recovery time for a processing system to recover from an idle mode to a normal operation mode in order to improve the efficiency of resource utilization, such as energy consumption. The processing system can be one that is used in semiconductor manufacturing, and include a process tool supported by an auxiliary device, such as a vacuum pump or abatement device. A number of parameters can be controlled to adjust the recovery time of the auxiliary device. One or more of those parameters can be increased or decreased based on comparison between a measured, actual recovery time and a predetermined, target recovery time, at the end of each recovery cycle. As such, the actual, measured recovery time can gradually converge with the predetermined, target recovery time, thereby optimizing the resource utilization of the processing system.

Abstract: In an apparatus for treating a gas stream, a plasma generator comprises an electrode for energizing a source gas to generate a plasma flare by application of a high voltage. An inlet allows the gas stream into the apparatus and directs it into the generated plasma. A scraper is fitted for reciprocating movement from a first position to a second position for scraping a surface to remove solid deposits accumulated on the surface.

Abstract: The present invention relates to a scroll pump (10) comprising two scrolls (20, 22) which are co-operable for pumping fluid from an inlet (24) to an outlet (26) on relative orbiting motion of the scrolls. Each scroll comprises a scroll base (30, 36) from which a spiral scroll wall (28, 34) extends generally axially towards the base of the opposing scroll. The pump comprises a tip seal arrangement comprising an axial end portion of one or both of the scroll walls which locates a tip seal (508) for resisting the passage of pumped fluid across the or both scroll walls between the or both scroll walls and the scroll base of the opposing scroll. The tip seal arrangement limits axial movement of the tip seal towards the scroll base of the opposing scroll along a first spiral region (507) of the or both scrolls between the inlet and the outlet.

Abstract: A scroll compressor may include a scroll pumping mechanism which includes an orbiting scroll having an orbiting scroll wall extending axially from an orbiting scroll plate towards a fixed scroll and a fixed scroll having a fixed scroll wall extending axially from a fixed scroll plate towards the orbiting scroll. An axial end portion of one of the scroll walls includes a first sealing arrangement and a second sealing arrangement arranged in series along the scroll wall from the inlet to the outlet for sealing between the axial end portion of the scroll wall and the scroll plate of the opposing scroll. The first sealing arrangement may have first sealing characteristics which are selected according to the sealing requirements local to the first sealing arrangement and the second sealing arrangement may have second, different sealing characteristics which are selected according to sealing requirements local to the second sealing arrangement.

Abstract: An apparatus for treating a gas stream includes a plasma abatement device that has a reaction chamber and a plasma torch for generating a plasma stream for injection into the chamber for treating the gas stream. A first inlet conveys a gas stream into the plasma abatement device for treatment, and a second inlet, in a normal condition of the apparatus, is in flow communication with a source of reagent for conveying a reagent into the plasma device for improving the efficiency of the treatment. In a back-up condition of the apparatus, the second inlet is in flow communication with a gas stream source for conveying a gas stream into the device for treatment.