Patents Assigned to Enthone Inc.
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Publication number: 20190003068Abstract: A method for metallizing a through silicon via feature in a semiconductor integrated circuit device substrate. The method comprises immersing the semiconductor integrated circuit device substrate into an electrolytic copper deposition composition, wherein the through silicon via feature has an entry dimension between 1 micrometers and 100 micrometers, a depth dimension between 20 micrometers and 750 micrometers, and an aspect ratio greater than about 2:1; and supplying electrical current to the electrolytic deposition composition to deposit copper metal onto the bottom and sidewall for bottom-up filling to thereby yield a copper filled via feature.Type: ApplicationFiled: May 24, 2011Publication date: January 3, 2019Applicant: ENTHONE INC.Inventors: Thomas B. Richardson, Wenbo Shao, Xuan Lin, Cai Wang, Vincent Paneccasio, JR., Joseph A. Abys, Yun Zhang, Richard Hurtubise, Chen Wang
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Publication number: 20160122890Abstract: The invention relates to a cyanide-free electrolyte composition for depositing a silver or silver alloy layer on a substrate as well as a method for depositing such layers with the help of said cyanide-free electrolyte composition. The electrolyte composition according to the invention comprises at least one silver ion source, a sulfonic acid and/or a sulfonic acid derivative, a wetting agent and a hydantoin. The silver or silver alloy layers deposited from such an electrolyte composition by means of the method according to the invention are dull and ductile.Type: ApplicationFiled: December 8, 2015Publication date: May 5, 2016Applicant: ENTHONE INC.Inventors: Stefan Schäfer, Thomas B. Richardson
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Publication number: 20160108260Abstract: The invention relates to an aqueous stripping composition for the removal of polymeric surface sealants on metal surfaces, said stripping composition comprising an alkalizing agent, a polymer splitting agent, a swelling agent, and a cloud point booster, wherein said polymer splitting agent is at least one gluconate wherein said swelling agent is at least one compound selected from the group consisting of glycol ethers and aliphatic alcohols having 3 to 9 carbon atoms. The inventive aqueous stripping composition is capable to remove polymeric sealants like e.g. polyurethane sealants, polyethylene sealants, polyethylene waxes, polyacrylic sealants, polysilicate sealants, and the like.Type: ApplicationFiled: May 27, 2014Publication date: April 21, 2016Applicant: ENTHONE INC.Inventor: Frank Noffke
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Publication number: 20160076160Abstract: A composition for electrolytic plating in microelectronics which contains a leveler that comprises the reaction product of an aliphatic di(t-amine) with an alkylating agent. Electrolytic plating methods employing the leveler, a method for making the leveler, and the leveler compound.Type: ApplicationFiled: September 15, 2015Publication date: March 17, 2016Applicant: ENTHONE INC.Inventors: Kyle Whitten, Vincent Paneccasio, JR., Thomas Richardson, Eric Rouya
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Publication number: 20160032479Abstract: Electrolytic plating compositions and electrolytic plating processes for the co-deposition of silver or silver alloy with fluoropolymer nanoparticles are provided. The silver or silver alloy composite coating containing fluoropolymer nanoparticles has enhanced functional properties such as a reduced coefficient of friction. The electrolytic plating composition comprises: (a) a silver ion source comprising silver methane sulfonate (Ag-MSA); (b) a complexing agent comprising a compound comprising a nitrogen-containing heterocyclic ring; (c) a pre-mix dispersion comprising fluoropolymer nanoparticles particles having a mean particle size of from about 10 nm and about 500 nm and a surfactant; and (d) an auxiliary surfactant comprising a cationic fluorosurfactant, wherein the composition has a pH of from about 8 to about 14.Type: ApplicationFiled: March 14, 2014Publication date: February 4, 2016Applicant: ENTHONE INC.Inventors: Jingye Li, Joseph A. Abys, Edward J. Kudrak, JR.
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Patent number: 9249513Abstract: A plating formulation for the electroless deposition of a metal layer on a substrate, wherein a ?-amino acid and/or ?-amino acid derivative is used as a stabilizer. The ?-amino acid is present within a range of 1 mg/L to 2 g/L. Typically, the electrolyte is free of heavy metal stabilizers, cyanides, selenium compounds and sulfur compounds comprising sulfur in an oxidation state between ?2 and +5. The inventive plating formulation can comprise 3-aminopropionic acid, 3-aminobutyric acid, 3-amino-4-methylvaleric acid, and 2-aminoethane-sulfonic acid.Type: GrantFiled: February 24, 2015Date of Patent: February 2, 2016Assignee: Enthone Inc.Inventors: Franz-Josef Stark, Christoph Werner
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Publication number: 20160024381Abstract: A pickling solution for the surface pre-treatment of plastic surfaces in preparation for metallization, the solution comprising a source of Mn(VII) ions; and an inorganic acid; wherein the pickling solution is substantially free of chromium (VI) ions, alkali ions, and alkaline-earth ions.Type: ApplicationFiled: May 1, 2015Publication date: January 28, 2016Applicant: ENTHONE INC.Inventors: Mark Peter Schildmann, Ulrich Prinz, Christoph Werner
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Patent number: 9222189Abstract: A process for treating the surface of a metal substrate comprising a constituent metal selected from the group consisting of Cr, Cu, Mn, Mo, Ag, Au, Pt, Pd, Rh, Pb, Sn, Ni, Zn, in some cases Fe, and alloys of these metals. An anodic potential is applied to the metal surface in an electrolytic circuit comprising the metal surface, a cathode, and an electrolytic solution that is in contact with the metal surface and in electrically conductive communication with the cathode. The electrolytic solution may contain an electrolyte comprising anions of phosphate, phosphonate, phosphite, phosphinate, nitrate, borate, silicate, molybdate, tungstate, carboxylate, oxalate and combinations thereof. The anion may comprise a polymer having a pendent moiety selected from the group consisting of phosphate, phosphonate, phosphite, phosphinate, sulfate, sulfonate, carboxylate and combinations thereof.Type: GrantFiled: November 13, 2009Date of Patent: December 29, 2015Assignee: Enthone Inc.Inventors: Danica Elbick, Ulrich Prinz, Andreas Konigshofen, Markus Dahlhaus
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Patent number: 9222188Abstract: A method for electroplating a copper deposit onto a semiconductor integrated circuit device substrate having submicron-sized features, and a concentrate for forming a corresponding electroplating bath. A substrate is immersed into an electroplating bath formed from the concentrate including ionic copper and an effective amount of a defect reducing agent, and electroplating the copper deposit from the bath onto the substrate to fill the submicron-sized reliefs. The occurrence of protrusion defects from superfilling, surface roughness, and voiding due to uneven growth are reduced, and macro-scale planarity across the wafer is improved.Type: GrantFiled: January 8, 2008Date of Patent: December 29, 2015Assignee: Enthone Inc.Inventors: John Commander, Richard Hurtubise, Vincent Paneccasio, Xuan Lin, Kshama Jirage
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Patent number: 9217205Abstract: A method is provided for imparting corrosion resistance onto a surface of a substrate. The method comprises contacting the surface of the substrate with an electrolytic plating solution comprising (a) a source of deposition metal ions of a deposition metal selected from the group consisting of zinc, palladium, silver, nickel, copper, gold, platinum, rhodium, ruthenium, chrome, and alloys thereof, (b) a pre-mixed dispersion of non-metallic nano-particles, wherein the non-metallic particles have a pre-mix coating of surfactant molecules thereon; and applying an external source of electrons to the electrolytic plating solution to thereby electrolytically deposit a metal-based composite coating comprising the deposition metal and non-metallic nano-particles onto the surface.Type: GrantFiled: December 10, 2008Date of Patent: December 22, 2015Assignee: Enthone Inc.Inventors: Joseph A. Abys, Edward J. Kudrak, Jr., Jingye Li, Chen Xu, Chonglun Fan
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Patent number: 9212427Abstract: The invention relates to a cyanide-free electrolyte composition for depositing a silver or silver alloy layer on a substrate as well as a method for depositing such layers with the help of said cyanide-free electrolyte composition. The electrolyte composition according to the invention comprises at least one silver ion source, a sulfonic acid and/or a sulfonic acid derivative, a wetting agent and a hydantoin. The silver or silver alloy layers deposited from such an electrolyte composition by means of the method according to the invention are dull and ductile.Type: GrantFiled: October 9, 2007Date of Patent: December 15, 2015Assignee: Enthone Inc.Inventors: Stefan Schäfer, Thomas B. Richardson
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Patent number: 9175400Abstract: A method is provided for depositing a whisker resistant tin-based coating layer on a surface of a copper substrate. The method is useful for preparing an article comprising a copper substrate having a surface; and a tin-based coating layer on the surface of the substrate, wherein the tin-based coating layer has a thickness between 0.5 micrometers and 1.5 micrometers and has a resistance to formation of copper-tin intermetallics, wherein said resistance to formation of copper-tin intermetallics is characterized in that, upon exposure of the article to at least seven heating and cooling cycles in which each cycle comprises subjecting the article to a temperature of at least 217° C. followed by cooling to a temperature between about 20° C. and about 28° C., there remains a region of the tin coating layer that is free of copper that is at least 0.25 micrometers thick.Type: GrantFiled: October 28, 2009Date of Patent: November 3, 2015Assignee: Enthone Inc.Inventors: Yung-Herng Yau, Xingping Wang, Cai Wang, Robert Farrell, Pingping Ye, Edward J. Kudrak, Jr., Karl F. Wengenroth, Joseph A. Abys
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Publication number: 20150257264Abstract: Compositions and methods for silver plating onto metal surfaces such as PWBs in electronics manufacture to produce a silver plating which is greater than 80 atomic % silver, tarnish resistant, and has good solderability.Type: ApplicationFiled: March 24, 2015Publication date: September 10, 2015Applicant: Enthone Inc.Inventors: Yung-Herng Yau, Thomas B. Richardson, Joseph A. Abys, Karl F. Wengenroth, Anthony Fiore, Chen Xu, Chonglun Fan, John Fudala
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Patent number: 9072203Abstract: A process used during manufacture of printed circuit boards comprises protecting metal pads and/or through-holes to provide a tarnish-resistant and solderable coating. In the method, the pads and/or through-holes are bright-etched, metal plated, preferably by an immersion process, and treated with a tarnish inhibitor. The tarnish inhibitor may be incorporated into the immersion plating bath. The metal plating is usually with silver or bismuth and the pads and/or through-holes comprise copper.Type: GrantFiled: March 13, 2002Date of Patent: June 30, 2015Assignee: Enthone Inc.Inventors: Andrew McIntosh Soutar, Peter Thomas McGrath
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Publication number: 20150167175Abstract: A plating formulation for the electroless deposition of a metal layer on a substrate, wherein a ?-amino acid and/or ?-amino acid derivative is used as a stabilizer. The ?-amino acid is present within a range of 1 mg/L to 2 g/L. Typically, the electrolyte is free of heavy metal stabilizers, cyanides, selenium compounds and sulfur compounds comprising sulfur in an oxidation state between ?2 and +5. The inventive plating formulation can comprise 3-aminopropionic acid, 3-aminobutyric acid, 3-amino-4-methylvaleric acid, and 2-aminoethane-sulfonic acid.Type: ApplicationFiled: February 24, 2015Publication date: June 18, 2015Applicant: ENTHONE INC.Inventors: Franz-Josef Stark, Christoph Werner
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Patent number: 9040117Abstract: An adhesion promotion process and composition for enhancing adhesion between a copper conducting layer and a dielectric material during manufacture of a printed circuit board. The composition contains a corrosion inhibitor, an inorganic acid, and an alcohol which is effective to increase copper-loading in the composition.Type: GrantFiled: March 27, 2012Date of Patent: May 26, 2015Assignee: Enthone Inc.Inventors: Abayomi I. Owei, Hiep X. Nguyen, Eric Yakobson
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Patent number: 9023228Abstract: A pickling solution for the surface pre-treatment of plastic surfaces in preparation for metallization, the solution comprising a source of Mn(VII) ions; and an inorganic acid; wherein the pickling solution is substantially free of chromium (VI) ions, alkali ions, and alkaline-earth ions.Type: GrantFiled: August 11, 2008Date of Patent: May 5, 2015Assignee: Enthone Inc.Inventors: Mark Peter Schildmann, Ulrich Prinz, Christoph Werner
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Patent number: 8986434Abstract: Compositions and methods for silver plating onto metal surfaces such as PWBs in electronics manufacture to produce a silver plating which is greater than 80 atomic % silver, tarnish resistant, and has good solderability.Type: GrantFiled: January 7, 2013Date of Patent: March 24, 2015Assignee: Enthone Inc.Inventors: Yung-Herng Yau, Thomas B. Richardson, Joseph A. Abys, Karl F. Wengenroth, Anthony Fiore, Chen Xu, Chonglun Fan, John Fudala
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Patent number: 8962070Abstract: The present invention relates to an electrolyte for the electroless deposition of a metal layer on a substrate, wherein the electrolyte is free of heavy metal stabilizers, cyanides, selenium compounds and sulfur compounds comprising sulfur in an oxidation state between ?2 and +5, and in which instead a ?-amino acid is used as stabilizer. In particular, the inventive electrolyte can comprise 3-aminopropionic acid, 3-aminobutyric acid, 3-amino-4-methylvaleric acid, and 2-aminoethane-sulfonic acid. Furthermore, the invention is directed to a method for the electroless deposition of metal layers utilizing an inventive electrolyte as well as the use of ?-amino acids as stabilizer in electrolytes for the electroless deposition of metal layers in general.Type: GrantFiled: July 6, 2010Date of Patent: February 24, 2015Assignee: Enthone Inc.Inventors: Franz-Josef Stark, Christoph Werner
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Patent number: 8906217Abstract: There is provided a method and composition for applying a wear resistant composite coating onto a metal surface of an electrical component. The method comprises contacting the metal surface with an electrolytic plating composition comprising (a) a source of tin ions and (b) non-metallic particles, and applying an external source of electrons to the electrolytic plating composition to thereby electrolytically deposit the composite coating onto the metal surface, wherein the composite coating comprises tin metal and the non-metallic particles.Type: GrantFiled: July 24, 2012Date of Patent: December 9, 2014Assignee: Enthone Inc.Inventors: Joseph A. Abys, Jingye Li, Edward J. Kudrak, Jr., Chen Xu