Abstract: [Problems to be Solved] To confirm whether a physical quantity sensor operates normally or not with a simple structure. [Means to Solve the Problems] A physical quantity sensor includes a vibration element having drive arm sections and a detection arm section a driving circuit generating a driving signal for driving the drive arm sections with a first driving line and a second driving line, and a detection circuit detecting a detected signal from the detection arm section with a first detection line and a second detection line. At least one of the first driving line and the second driving line is wired so that a static coupling is generated with respect to the first detection line and the second detection line.

Abstract: A piezoelectric device includes: a substrate having an electrode terminal portion on an upper surface thereof; an electronic part arranged on an upper side of the substrate; and a piezoelectric resonator arranged on an upper side of the electronic part, wherein a surface of the electronic part opposite to a surface having a pad portion is bonded to a lower surface of the piezoelectric resonator having an external terminal portion and the pad portion of the electronic part and the external terminal portion of the piezoelectric resonator are wire-bonded to each other, and wherein the surface of the electronic part having the pad portion is mounted face down on the upper surface of the substrate.

Abstract: A piezoelectric device includes: a piezoelectric resonator element; a package storing the piezoelectric resonator element therein in a manner to mount the piezoelectric resonator element on a base portion thereof composed of at least three layers that are layered; and a through hole penetrating through the base portion. In the device, the through hole includes a first hole formed on a first layer which is positioned to face the piezoelectric resonator element among the three layers; a second hole formed on a second layer contacting with the first layer; a third hole formed larger than the second hole on a third layer contacting with the second layer; and a metal coat formed on an inner wall surface of the second hole, and a sealing part for sealing the package is formed with a sealant in at least the second hole.

Abstract: An objective is to provide an acceleration sensor element that has a high detection sensitivity and that realizes an accurate measurement of acceleration; and an acceleration sensor including this acceleration sensor element to realize a smaller size and a thinner thickness. An acceleration sensor element comprises a quartz, has a thickness in a Z axis direction, and is formed in a quartz substrate developed in an orthogonal XY plane. A thin-walled section of a bottom section of a concave section of the quartz substrate has a double-ended vibrating reed in which a pair of vibration arms extend in a Y axis direction. When acceleration in a Z axis direction is applied while this double-ended vibrating reed having bending vibration, the acceleration is detected based on a change in a resonance frequency caused when the double-ended vibrating reed deflects in the Z axis direction.

Abstract: A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.

Abstract: An oscillation circuit, including: a complementary metal oxide semiconductor (CMOS) inverter coupled between a first potential and a second potential; a first element unit whose one terminal is coupled to an input terminal of the CMOS inverter; a second element unit whose one terminal is coupled to the input terminal of the CMOS inverter and whose other terminal is coupled to an output terminal of the CMOS inverter; a third element unit whose one terminal is coupled to the output terminal of the CMOS inverter; and a fourth element unit whose one terminal is coupled to the other terminal of the first element unit and to the other terminal of the third element unit, and whose other terminal is coupled to either the first potential or the second potential; in that: the first, second, third, and fourth element units are any of a quartz crystal resonator, a resistor, an inductor, and a capacitor; the oscillation circuit oscillating at a frequency determined by the first, second, and third element units.

Abstract: A package for electronic component includes: a rectangular package body, a lid hermetically sealing the package body, an electrode pad provided in the package body, a mounting terminal provided at least near four corners of a bottom surface of the package body and having a bump on a mounting surface, and a plurality of coupling electrodes electrically coupling the pad to the mounting terminal.

Abstract: An atomic oscillator that controls an oscillation frequency by using an optical absorption property derived from a quantum interference effect occurring when two kinds of resonance light are made incident as coherent light having different wavelengths from each other, includes an optical system that includes: a gas cell sealing metal atoms in a gas state therein; a coherent light source for supplying the resonance light to the metal atoms being in the gas cell; and a light detector for detecting light transmitted through the gas cell. In the atomic oscillator, a first refraction unit is formed at a light incident side, on which coherent light is made incident, of the gas cell.

Abstract: A quartz crystal resonator element includes an AT-cut quartz crystal substrate, the substrate having edges parallel to each of a Z? axis obtained by rotating a Z? axis in a range of ?120° to +60° about a Y axis and an X? axis perpendicular to the Z? axis when an angle formed by rotating a +Z? axis in a direction of a +X axis about the Y? axis is a positive rotation angle; a thin section that forms a resonating section; and a thick section adjacent to the resonating section, the thin section and the thick section being formed on the quartz crystal substrate by wet etching. The thin section is formed either on a main surface of the substrate corresponding to a +Y?-axis side or on a main surface of the substrate corresponding to a ?Y?-axis side.

Abstract: An objective is to provide an SH wave type SAW device which is a surface acoustic wave device using a quartz substrate and which is small in size and has a large Q value and excellent frequency aging characteristics. An SH wave type surface acoustic wave device includes a piezoelectric substrate and an IDT electrode provided on the piezoelectric substrate and constituted of Al or an alloy mainly containing Al and that uses a SH wave as an excitation wave. The piezoelectric substrate is a crystal plate in which a cut angle ? of a rotary Y cut quartz substrate is set in a range of ?64.0°<?<?49.3° in a counter-clockwise direction from a crystal axis Z and in which a surface acoustic wave propagation direction is set at 90°±5° with respect to a crystal axis X. In the SH wave type surface acoustic wave device, an electrode film thickness H/? standardized by a wavelength of the IDT electrode is 0.04<H/?<0.

Abstract: To provide a double-ended tuning fork type piezoelectric resonator that includes: a piezoelectric element having two arm portions disposed in parallel, a first supporting portion that support one ends of each of the arm portions, a second supporting portion that support the other ends of each of the arm portions; and an exciting electrode formed on a surface of each of the arm portions, and has a structure suitable for being built into a pressure sensor as a pressure sensitive element. A double-ended tuning fork type piezoelectric resonator includes: a piezoelectric element 3 having two arm portions 4 disposed in parallel and apart from each other, and a first supporting portion 5 and a second supporting portion 6 that respectively support one ends and the other ends of each of the arm portions; and an exciting electrode 7 formed on a surface of each arm portion.

Abstract: A piezoelectric oscillator includes: a piezoelectric resonator including a container, the container containing a piezoelectric resonator element: and a semiconductor device including an oscillation circuit for vibrating the piezoelectric resonator. The semiconductor device is bonded to a surface of the container. The container has an external coupling terminal and a cut-off part, the external coupling terminal being coupled to the semiconductor device, the cut-off part being disposed on a side surface of the container. The external coupling terminal is disposed in an area of the container, the area being opposed to the semiconductor device, and in the cut-off part. The semiconductor device has a coupling terminal on a surface thereof, the surface being opposed to the container. The coupling terminal of the semiconductor device and the external coupling terminal of the container are coupled with a conductive material.

Abstract: A small-sized electronic security system superior in emergent response and capable of obtaining power from other electronic apparatuses even in the case in which a portable electronic key suffers from battery exhaustion, and a remote-operating portable electronic key therefor are obtained. The electronic security system is applied to a remote-operating system for in-vehicle equipment. The electronic key is composed of an electronic key housing on which a power supply is mounted and an electronic key module arranged to be able to be detachably attached to the electronic key housing and provided with a transmission/reception antenna, signal verification means, and operation control means for the in-vehicle equipment.

Abstract: A piezoelectric device includes a piezoelectric resonator including a piezoelectric resonator element, a package for accommodating the piezoelectric resonator in a cavity thereinside, a lid for airtightly sealing the cavity inside the package, a package base included in the package, and an external terminal formed on a bottom surface of the package base; a circuit element stacked together with the piezoelectric resonator to be electrically connected thereto; a wiring substrate having the circuit element mounted on a first surface thereof and a mounting external terminal provided on a second surface thereof, a connecting member arranged in a periphery of the circuit element mounted on the first surface of the wiring substrate to electrically and mechanically connect the wiring substrate to the external terminal of the piezoelectric resonator; and a molded portion made of a molding member that is formed from the first surface of the wiring substrate up to at least a position higher than an upper end surface of

Abstract: An acceleration sensor, including: an oscillator unit for outputting an oscillator signal, the oscillator unit including a first piezoelectric vibrating reed having a vibrating arm that performs bending vibration, as well as an oscillator circuit for oscillating the first piezoelectric vibrating reed; a phase shifting unit for shifting and outputting a given phase angle of an output signal of the oscillator unit; a phase shift circuit unit provided with a second piezoelectric vibrating reed having a vibrating arm that performs bending vibration, arranged at an output side of the phase shifting unit; a multiplier for multiplying the output signal of the phase shift circuit unit by the output signal of the oscillator circuit; and a phase shift modification output unit which receives an output from the multiplier and outputs a value corresponding to a change in a phase shift angle of an input-output signal of the phase shift circuit unit; a resonant frequency of the second piezoelectric vibrating reed being equa

Abstract: A tuning fork type piezoelectric resonator element includes: a base including a pair of cuts provided opposite from each other and a constricted part located between the pair of cuts, a pair of resonator arms extending from the base, and an excitation electrode provided to each of the pair of resonator arms. When the pair of resonator arms vibrate at an inherent resonance frequency fcom of a common mode at which the pair of resonator arms swing in a same direction, a node of the vibration of the common mode is located at the constricted part.

Abstract: An optical system of an atomic oscillator includes: a coherent light source emitting two resonant light components each having a p-polarized light component and an s-polarized light component, the tow resonant light components being coherent light and having a different frequency each other; a polarization splitter arranged at an output side of the coherent light source, the polarization splitter transmitting one of the p-polarized light component and the s-polarized light component and changes an optical path of the other of the p-polarized light component and the s-polarized light component to be outputted; a quarter-wave plate arranged at an output side of the polarization splitter so as to convert one of circularly polarized light and linearly polarized light to the other of circularly polarized light and linearly polarized light; a gas cell in which metal atom vapor is enclosed; a light guide that guides light after passing through the gas cell back to the gas cell as a turned-back light; and a photodete

Abstract: An optical multilayer filter having an inorganic thin film composed of a plurality of layers on a substrate includes a fluorinated organic silicon compound film formed on a surface of the inorganic thin film, a low-density formation section forming a part of the inorganic thin film, having one or more layers including the most superficial layer of the inorganic thin film, the one or more layers being formed of at least one of a low-density titanium oxide layer and a low-density silicon oxide layer, and a high-density formation section forming another part of the inorganic thin film, disposed between the low-density formation section and the substrate, having silicon oxide layers with a density higher than the low-density silicon oxide layer and titanium oxide layers with a density higher than the low-density titanium oxide layer in a stacked manner. A total thickness of the low-density formation section is equal to or smaller than 280 nm.

Abstract: A stress sensitive element includes a vibrating arm having an electrode, a beam portion integrated with the vibrating arm at both ends of the vibration arm, and a connecting portion interposed between the beam portion and the vibrating arm. The element is placed by providing a fixing portion to one of the connecting portion and the beam portion, and an extending direction of the vibrating arm is orthogonal to a stress direction to be detected.

Abstract: A piezoelectric oscillator includes: a piezoelectric resonator; an oscillation circuit including a variable resistance circuit and a transistor for oscillation; a constant current circuit, the constant current circuit including a first current mirror circuit, and a current control circuit having an output terminal and controlling a current flowing in the first current circuit so as to enable an output current of the constant current circuit to be adjusted, the output terminal of the first current mirror circuit being coupled to at least one of a collector and a base of the transistor for oscillation with the variable resistance circuit; and a control circuit coupled to the current control circuit and the variable resistance circuit, the control circuit controlling the current control circuit and a resistance value of the variable resistance circuit.