Patents Assigned to Ernst Leitz Wetzlar GmbH
  • Patent number: 5025147
    Abstract: In an apparatus for sensing a distance between a sensor and a surface of a body being measured, a sensor body of the sensor is formed as a light waveguide for laser light. A light exit site for light diffracted within the sensor body is located at a surface thereof which faces away from the measured body. A detection particle is located at the surface of the sensor body, which faces the measured body. The detection particle has a substantially convex and rounded off form and a major dimension which is smaller than the wavelength of the light. The measured body is located in the optical near field of the detection particle. A detector device converts the optical energy of the diffracted light into an electrical detector signal. A continuous thin film is provided as a coating on the sensor. It substantially covers the detection particle and at least a part of the surface of the sensor body in the vicinity of the detection particle.
    Type: Grant
    Filed: September 22, 1988
    Date of Patent: June 18, 1991
    Assignees: Ernst Leitz Wetzlar, GmbH, International Business Machines Company
    Inventors: Urs T. Durig, Ulrich C. Fischer, Wolfgang D. Pohl
  • Patent number: 4961636
    Abstract: A description is given of a rotating turret device, which has a number of optical components, for example, lenses, condensors, filters and stops, which may be brought into operating position individually in each case. Apart from a motor drive device (1-4), an encoding device (12a-12c; 24a-24c) for the indexing or pre-selection of a specific optical component to be brought into operating position, and locating means (7, 7a; 8) for positioning the optical component in operating position, the rotating device has, in additiion, marking and control means (13; 13a), with the aid of which the speed of the turret can be controlled as a function of its particular relative position. In particular, it is possible with the device described to bring a high-speed motor-driven turret (5) into a set location, there taking place shortly before attainment of this operating position a controlled braking of the rotational speed of the turret (5).
    Type: Grant
    Filed: November 9, 1988
    Date of Patent: October 9, 1990
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Norbert Gaul, Guenter Reinheimer, Peter Weimar
  • Patent number: 4946266
    Abstract: An object holder for use on a microscope exhibits a frame having a shaped-on, deeper-lying contact surface, in which air suction openings are disposed for the fixing of the respective object. An adjustable abutment strip with a shaped-on bearing surface is provided, in order to retain plate-shaped objects, especially wafers or masks of the most widely varying shapes and sizes.
    Type: Grant
    Filed: September 16, 1988
    Date of Patent: August 7, 1990
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Winfried Kraft, Volker Wuerfel, Wolfram Stebel, Heinz Maerzhaeuser
  • Patent number: 4930882
    Abstract: In an electromotively adjustable focusing system for a microscope, a rotatable and axially moveable knob controls both the coarse and fine adjustments of the object stage. The knob is mechanically connected to a tacho-generator producing an output voltage responsive to the direction and amount of rotation of the knob. The knob is also mechanically joined to a switch, which is opened or closed by axial movement of the knob in opposite directions. The closing of the switch causes a focus control circuit to provide to the focusing motor a signal that causes coarse (rapid) focusing. When the switch is opened, however, the motor provides fine adjustment of the object stage.
    Type: Grant
    Filed: November 30, 1988
    Date of Patent: June 5, 1990
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Herbert Koch, Peter Weimar
  • Patent number: 4915721
    Abstract: Optical fluorophosphate glasses based on Ba(PO.sub.3).sub.2, Al(PO.sub.3).sub.3, alkaline earth metal fluorides and AlF.sub.3 are described which have a refractive index n.sub.e between 1.47 and 1.50, an Abbe-value .nu..sub.e between 85 and 80 and a positive anomalous partial dispersion value .DELTA..nu..sub.e between +17 and +22. They comprise (in wt.-%) 0.5-3 Mg, 8-10 Ca, 12-20 Sr, 9-12 Ba, 7-9 Al, 5-9 P, 8-12 O and 35-38 F. Ti, Na, K and H may additionally be present. The improved physico-chemical parameters (expansion coefficient, glass transition temperature, density, Knoop-hardness) and the transmission characteristics are given, and a process for producing these optical glasses is described.
    Type: Grant
    Filed: July 5, 1989
    Date of Patent: April 10, 1990
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Heinz Broemer, Werner Huber, Norbert Meinert
  • Patent number: 4889548
    Abstract: The use is described of oxide ceramic materials for compression molds for shaping elements made from glass or a glass-containing ceramic and having high surface quality and tight tolerances. The materials are polycrystalline, monophasal or polyphasal materials which are contact-inert towards the optical elements to be pressed and which, in addition, have significantly better mechanical and thermal properties than monocrystalline substances, which, in principle, exhibit an anisotropic behavior as a consequence of their geometrical anisotropy. The material intended for use according to the invention can comprise a Al.sub.2 O.sub.3 ceramic or a ZrO.sub.2 -- and/or HfO.sub.2 -containing ceramic. The material can also be built up in several phases, i.e. can contain a matrix component and at least one particle component dispersed discretely in it. They are preferably ZrO.sub.
    Type: Grant
    Filed: January 6, 1988
    Date of Patent: December 26, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Jochen Kriegesmann, Henning Franek, Waldemar Bluethgen
  • Patent number: 4881897
    Abstract: A tooth-root implant of high fatigue strength, intended for a two-stage implantation technique, comprises a sleeve (1) which, in its inner region, has retention means (6b), on which a pressure plate (2a) rests loosely. An insertable superstructure bearing (3) is arranged on the pressure plate (2a) and is surrounded, at least partially, by a plastic casing (4). A screw plug (5) is also provided which closes off the upper part of the sleeve (1) in such a way that positive contact is made.
    Type: Grant
    Filed: January 7, 1988
    Date of Patent: November 21, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Henning Franek, Klaus-Konrad Deutscher, deceased, Heinz Broemer, Volker Strunz, Wolfgang Rosenkranz
  • Patent number: 4881802
    Abstract: A combined bright field-dark field incident light apparatus 10 for a microscope instrument is described, in which in the dark field illumination the plane of the field diaphragm LF is projected into the object plane 25 via at least one intermediate image LF'. This comprises providing in the beam path at least three annular optical elements (19, 28, 29), arranged so that illuminating rays incident from a skew direction are also projected into the object plane 25. The form of the annular optical elements 19, 27 allows them to be assigned different optical properties at the same time.
    Type: Grant
    Filed: May 3, 1988
    Date of Patent: November 21, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventor: H. W. Stankewitz
  • Patent number: 4871290
    Abstract: An automatic handling apparatus for plate-shaped objects, including a height-adjustable magazine having compartments lying horizontally, one above the other, and a manipulator which can be moved in a linear manner and is swivelable. The manipulator is equipped with interchangeable gripping arms. The gripping arms and the plate-shaped objects are deposited in compartments of the magazine. The compartments include a coding for the size and shape of the plate-shaped objected and the associated gripping arms. A control device controls the manipulator as a function of the coding of the plate-shaped object or gripping arm to be handled.
    Type: Grant
    Filed: May 16, 1988
    Date of Patent: October 3, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Ulrich Kaczynski, Peter Schmidt, Hans-Helmut Paul
  • Patent number: 4868128
    Abstract: A process of dry dispersal of fine-grained particles on a specimen slide for the purpose of macroscopic or microscopic analysis, and a corresponding instrument for carrying out this process are described. The process permits random, homogeneous distribution of dry particles on a specimen slide in a unilayered, planar distribution, the particles not touching one another at all or only doing so to a negligible extent, i.e. being positioned on the speciment slide without agglomeration. The process steps are: metered input of the fine-grained substance into a sample container; aspiration of the substance by means of a defined partial vacuum, produced in a turbulence chamber, the substance reaching the turbulence chamber via an accelerator tube and then via a distributor tube, and deposition of the accelerated particles on a transparent speciment slide.
    Type: Grant
    Filed: August 20, 1987
    Date of Patent: September 19, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Karl Sommer, Rolf Fath, Walter Peschke, Ulrich Bohnaus
  • Patent number: 4859896
    Abstract: A piezoelectric precision positioning device for moving an object in three coordinate directions is described, comprising(a) an at least approximately plane-parallel cut piezoelectric disk (5),(b) an electrode arrangement (6, 7, 8, 17), provided with electrical connections (9, 10, 11, 18), on the surfaces parallel to each other, with which three independently controllable electrical fields in the piezoelectric disk (5) can be adjusted,(c) a fork-shaped clamping device (1, 2) which embraces the piezoelectric disk (5), in an electrically insulated manner with respect to the electrode arrangement (6, 7, 8, 17), at at least three pressure points (13, 14, 15, 16), which are situated symmetrically with respect to each other, on the circumferential surface such that(d) one of the electrodes (8) is situated in the open part of the fork-shaped clamping device (1, 2), in which case(e) the object (19) to be positioned is arranged in an electrically insulated manner on an electrode surface (17) in the field region of thi
    Type: Grant
    Filed: March 4, 1988
    Date of Patent: August 22, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Michael Anders, Christoph Heiden
  • Patent number: 4859635
    Abstract: Optical fluorophosphate glass which is based on Mg(PO.sub.3).sub.2, Ca(PO.sub.3).sub.2, Ba(PO.sub.3).sub.2, Al(PO.sub.3).sub.3, MgF.sub.2, CaF.sub.2, SrF.sub.2, AlF.sub.3, BaO and SrO and has a refractive index n.sub.e between 1.515 and 1.546, an Abbe value .nu..sub.e between 75.8 and 77.4 and a positive anomalous partial dispersion value .DELTA..nu..sub.e between 14.85 and 15.15.The glass comprises (in weight-%) 2.4-2.7 Mg; 4.5-4.9 Ca; 15.9-17.6 Sr; 20.2-22.3 Ba; 5.6-6.2 Al; 8.8-9.7 P; 22.0-24.3 F and 15.7-17.4 O. The improved physico-chemical parameters, such as linear expansion coefficient, glass transition temperature T.sub.g, density .zeta., Knoop-hardness HK, etc., are stated. Finally, a production process for this optical glass is described.
    Type: Grant
    Filed: November 8, 1988
    Date of Patent: August 22, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Norbert Meinert, Werner Huber, Rainer Dreuth, Henning Franek
  • Patent number: 4857487
    Abstract: Optical fluorophosphate glasses based on Ba(PO.sub.3).sub.2, Al(PO.sub.3).sub.3, alkaline earth metal fluorides and AlF.sub.3 are described which have a refactive index n.sub.e between 1.47 and 1.50, an Abbe-value .nu..sub.e between 85 and 80 and a positive anomalous partial dispersion value .DELTA..nu..sub.e between +17 and +22. They comprise (in wt.-%) 0.5-3 Mg, 8-10 Ca, 12-20 Sr, 9-12 Ba, 7-9 Al, 5-9 P, 8-12 O and 35-38 F. Ti, Na, K and H may additionally be present. The improved physico-chemical parameters (expansion coefficient, glass transition temperature, density, Knoop-hardness) and the transmission characteristics are given, and a process for producing these optical glasses is described.
    Type: Grant
    Filed: November 8, 1988
    Date of Patent: August 15, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Heinz Broemer, Werner Huber, Norbert Meinert
  • Patent number: 4837595
    Abstract: A process for photographing microscopic objects with consideration of exposure time values to be determined and for making visible a spatially variable measurement spot and an exposure format making before and after the exposure is indicated, which process proceeds according to the process steps which are prescribed in accordance with the claims.
    Type: Grant
    Filed: March 9, 1988
    Date of Patent: June 6, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Herbert Leiter, Herbert Koch, Andreas Hund, Guenter Reinheimer
  • Patent number: 4830655
    Abstract: Inorganic material resisting to high temperatures for installations intended to form structural glass elements which, owing to the precision and the quality of the forming surface, do not require after forming any other surface treatment. The material is comprised of at least one forming surface based on at least one from the groups of a metal oxide a double metal oxide, and a crystalline solid solution. It has a monocrystalline structure. Preferred materials are Al.sub.2 O.sub.3, Cr.sub.2 O.sub.3, MgAl.sub.2 O.sub.4 and/or ZrO.sub.2.
    Type: Grant
    Filed: June 9, 1987
    Date of Patent: May 16, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Henning Franek, Heinz Broemer, Klaus Deutscher
  • Patent number: 4816664
    Abstract: A scanning grating for a focusing detector and a focusing detector are described. The scanning grating serves as an image scanner and spatial frequency filter and includes at least two surface elements splitting up an incident luminous flux into two spatially separate light fluxes and by means of which, in conjunction with a field lens, two images of the exit pupil, or parts thereof, of an associated optical system are generated in a plane in which at least two photo-receiver systems are mounted. Means acting optically as complementary plane-parallel plates are provided to split up the luminous flux from the optical system into two spatially separate light fluxes.
    Type: Grant
    Filed: October 22, 1986
    Date of Patent: March 28, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventor: Klaus-Dieter Schaefer
  • Patent number: 4814814
    Abstract: Processes for the introduction, visualization and/or recording of a variable detail metering field stop into part ray paths of a camera for optical instruments, for example microscopes, are described. In addition, appropriate devices are specified. They contain a reversibly illuminable multifield matrix (4), which is provided, at a fixed location, in a plane which is conjugated with the eyepiece intermediate image plane of the optical instrument.
    Type: Grant
    Filed: June 1, 1988
    Date of Patent: March 21, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventor: Herbert Leiter
  • Patent number: 4798948
    Abstract: An optical component is described which can be introduced into a finite or an infinite beam path and which is provided with a spectrally selective filtering characteristic and thus as the same time compensates the thereby generated geometric-optical negative influence by appropriate image-relevant compensation measures. The optical component exhibits at least one optically effective, non-planar surface. It has, for example, the property of completely absorbing visible light and of being completely transparent to shorter- or longer-wavelength light. In addition to this, a laser autofocus arrangement known per se is described, which is equipped with the optical component according to the invention, whereby a dark field illumination with an incident light microscope can be achieved while maintaining the autofocus function.
    Type: Grant
    Filed: April 17, 1987
    Date of Patent: January 17, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Burkhard Neumann, Hans-Werner Stankewitz
  • Patent number: 4796999
    Abstract: In a device for automatically determining the deviation between the structures of a pattern and those of a reference object, the structures to be compared are imaged, in a superposed condition, on a measurement gap, a polarization characteristic being imparted to the individual image channels. By relative movement between the superposed object image and the measurement gap and the subsequent separation of the image channels in dependence upon their polarization characteristic, photometric signal curves are obtained, from which errors in the superposition of the structures are quantitatively determined. A measurement in two coordinate directions is possible by insertion of an image-rotating prism. In an observation beam path which is branched off, the polarization characteristic is converted into a color characteristic, so that an additional double-image presentation of the structure superposition is produced.
    Type: Grant
    Filed: January 16, 1987
    Date of Patent: January 10, 1989
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Erich Schuster, Manfred Kartzow
  • Patent number: 4786934
    Abstract: A photographic camera having an interchangeable lens and an automatic exposure control and focusing device comprising a computing circuit for the determination of the front and rear depth-of-field planes. The computing circuit is connected to a data memory on the camera side, a control unit, an autofocus central unit and an exposure control device. At a given stored sharpness and open aperture, the front and rear depth-of-field planes are automatically controlled by means of a setting element and can be assessed in the viewfinder. A predetermined depth-of-field range can be set and the required aperture can be displayed in the viewfinder and set, if this aperture is present on the interchangeable lens. The controlled depth-of-field planes remain visible in the viewfinder for a predetermined period of time.
    Type: Grant
    Filed: October 30, 1987
    Date of Patent: November 22, 1988
    Assignee: Ernst Leitz Wetzlar GmbH
    Inventors: Heinz Kunze, Dirk Tautenhahn