Patents Assigned to Fujimi Incorporated
  • Patent number: 11638681
    Abstract: Provided is a white pigment for cosmetics capable of giving a cosmetic that gives a coating film having less stickiness and higher long-lasting properties. A white pigment for cosmetics of the present invention includes a titanium phosphate powder, the titanium phosphate powder includes crystal particles of titanium phosphate, and a ratio (oil absorption value/specific surface area) of an oil absorption value (ml/100 g) to a specific surface area (m2/g) of the crystal particles is 2.0 or more.
    Type: Grant
    Filed: March 28, 2019
    Date of Patent: May 2, 2023
    Assignee: FUJIMI INCORPORATED
    Inventors: Mayumi Iwakuni, Keiji Ashitaka, Naoya Miwa
  • Publication number: 20230106868
    Abstract: Provided is a polishing composition that can achieve haze reduction and wettability enhancement of a polished surface of a silicon wafer. This polishing composition contains silica particles, a cellulose derivative, a basic compound, and water. Here, the silica particles have an average primary particle diameter of 30 nm or less and an average secondary particle diameter of 60 nm or less. The cellulose derivative has a weight average molecular weight of more than 120×104.
    Type: Application
    Filed: March 4, 2021
    Publication date: April 6, 2023
    Applicant: FUJIMI INCORPORATED
    Inventor: Kohsuke TSUCHIYA
  • Publication number: 20230109597
    Abstract: Polishing compositions are disclosed for simultaneously removing particles from a surface that has been polished using a CMP slurry comprising a polishing rate accelerator and removing a pad stain from a polishing pad that has been contacted with a CMP slurry comprising a polishing rate accelerator. Cleaning compositions for post-CMP cleaning of semiconductor surfaces, comprise one or more reducing agents, a particle removal agent, a surfactant, and a base. When one or more reducing agents yields a standard reduction potential of less than 1.224 V, the cleaning composition of the present disclosure is able to remove a MnO2 pad stain from a polishing pad and reduce defects on a polished surface (by removing particles).
    Type: Application
    Filed: September 23, 2022
    Publication date: April 6, 2023
    Applicant: FUJIMI INCORPORATED
    Inventor: Brandon Crockett
  • Publication number: 20230090620
    Abstract: A polishing composition according to the present invention contains zirconia particles, a selectivity improver for improving a ratio of a polishing speed for an organic material (b) to a polishing speed for a material (a) having a metal-nitrogen bond, and a dispersing medium, wherein in a particle size distribution of the zirconia particles obtained by a laser diffraction/scattering method, a diameter (D50) of the particles when a cumulative volume of the particles from a fine particle side reaches 50% of a total volume of the particles is 5 nm or more and 150 nm or less, and a pH of the polishing composition is less than 7.
    Type: Application
    Filed: September 12, 2022
    Publication date: March 23, 2023
    Applicant: FUJIMI INCORPORATED
    Inventor: Ryota MAE
  • Publication number: 20230081442
    Abstract: Provided herein are CMP compositions, and methods for polishing surfaces comprising amorphous carbon, spin-on carbon (SoC), and/or diamond like carbon (DLC) films. The CMP compositions of the present disclosure contain at least one abrasive having zirconia particles and may also contain at least one metal-containing oxidizer.
    Type: Application
    Filed: February 25, 2021
    Publication date: March 16, 2023
    Applicant: Fujimi Incorporated
    Inventor: Jie LIN
  • Publication number: 20230073290
    Abstract: Provided is a polishing composition which contains a water-soluble polymer and is suitable for reducing LPDs. The polishing composition provided in this application includes an abrasive, a water-soluble polymer, and a basic compound. In the polishing composition, the content of a reaction product of a polymerization initiator and a polymerization inhibitor is 0.1 ppb or less of the polishing composition on a weight basis.
    Type: Application
    Filed: July 21, 2022
    Publication date: March 9, 2023
    Applicant: FUJIMI INCORPORATED
    Inventors: Kohsuke TSUCHIYA, Hisanori TANSHO, Yusuke SUGA, Taiki ICHITSUBO, Takayuki TAKEMOTO, Naohiko SAITO, Michihiro KAAI
  • Publication number: 20230056027
    Abstract: The present invention provides a means capable of suppressing the formation of fine particles in a method for producing a silica sol.
    Type: Application
    Filed: September 22, 2022
    Publication date: February 23, 2023
    Applicant: FUJIMI INCORPORATED
    Inventors: Yusuke KAWASAKI, Shogo TSUBOTA, Masaaki ITO, Jun SHINODA, Keiji ASHITAKA
  • Publication number: 20230053210
    Abstract: The present invention provides a means capable of sufficiently removing a residue containing inorganic oxide abrasive grains present on the surface of a polished object to be polished containing silicon nitride. One aspect of the present invention relates to a surface treatment method for reducing a residue containing inorganic oxide abrasive grains on a surface of a polished object to be polished containing silicon nitride using a composition for surface treatment, wherein the composition for surface treatment contains a zeta potential adjusting agent having a negatively charged functional group and having a viscosity of an aqueous solution having a concentration of 20% by mass at 25° C. of 10 mPa·s or more and a dispersing medium, and the surface treatment method includes controlling a zeta potential of the silicon nitride and a zeta potential of the inorganic oxide abrasive grains each to ?30 mV or less using the composition for surface treatment.
    Type: Application
    Filed: August 4, 2022
    Publication date: February 16, 2023
    Applicant: Fujimi Incorporated
    Inventors: Tsutomu YOSHINO, Yasuto ISHIDA
  • Publication number: 20230048722
    Abstract: The present invention provides a unit that can sufficiently remove a residue containing inorganic oxide abrasive grains present on the surface of a polished object to be polished containing silicon oxide. One aspect of the present invention relates to a surface treatment method for reducing a residue containing inorganic oxide abrasive grains on a surface of a polished object to be polished containing silicon oxide using a composition for surface treatment, wherein the composition for surface treatment contains a zeta potential adjusting agent having an sp value of more than 9 and 11 or less and having a negatively charged functional group and a dispersing medium, and the surface treatment method includes negatively controlling a zeta potential of the silicon oxide and controlling a zeta potential of the inorganic oxide abrasive grains to ?30 mV or less using the surface treatment composition.
    Type: Application
    Filed: August 4, 2022
    Publication date: February 16, 2023
    Applicant: Fujimi Incorporated
    Inventors: Tsutomu YOSHINO, Yasuto ISHIDA
  • Publication number: 20230027432
    Abstract: To provide a means capable of sufficiently removing organic residues present on the surface of a polishing object after polishing containing silicon oxide or polysilicon. A surface treatment composition contains a polymer having a constituent unit represented by Formula (1) below and water and is used for treating the surface of a polishing object after polishing, in which, in Formula (1) above, R1 is a hydrocarbon group having 1 to 5 carbon atoms and R2 is a hydrogen atom or a hydrocarbon group having 1 to 3 carbon atoms.
    Type: Application
    Filed: September 7, 2022
    Publication date: January 26, 2023
    Applicant: FUJIMI INCORPORATED
    Inventors: Tsutomu YOSHINO, Shogo ONISHI, Yasuto ISHIDA
  • Publication number: 20230016801
    Abstract: The surface-modified colloidal silica according to an aspect of the present invention contains colloidal silica, and a surface-modifying group for modifying a surface of the colloidal silica, which has a polyoxyalkylene chain having a weight average molecular weight of 20,000 or more.
    Type: Application
    Filed: June 23, 2022
    Publication date: January 19, 2023
    Applicant: Fujimi Incorporated
    Inventors: Shogo Tsubota, Masaaki Ito, Keiji Ashitaka, Jun Shinoda, Yusuke Kawasaki
  • Patent number: 11554967
    Abstract: Provided is a method for producing a porous metal oxide. The method includes: preparing a slurry by mixing a metal source, a pore forming agent and an aqueous solvent; drying the slurry to obtain a metal oxide precursor; and sintering the metal oxide precursor to generate a porous metal oxide. The metal source is an organometallic compound or hydrolyzate thereof containing a metal that makes up the porous metal oxide; the pore forming agent is an inorganic compound that generates a gas by decomposing at a temperature equal to or lower than a temperature at which the metal oxide precursor is sintered; and the slurry is prepared using 50 parts by weight or more of the pore forming agent with respect to 100 parts by weight of the metal source.
    Type: Grant
    Filed: January 19, 2017
    Date of Patent: January 17, 2023
    Assignee: FUJIMI INCORPORATED
    Inventors: Shogo Tsubota, Robert Hepburn
  • Publication number: 20220415669
    Abstract: A polishing method according to the present invention, includes polishing a polishing object containing a silicon material by using a polishing composition containing abrasive grains, a tri- or more polyvalent hydroxy compound and a dispersing medium and having pH of less than 6.0.
    Type: Application
    Filed: September 2, 2022
    Publication date: December 29, 2022
    Applicant: FUJIMI INCORPORATED
    Inventors: Yoshihiro IZAWA, Kenta IDE
  • Publication number: 20220403178
    Abstract: A method for increasing the specific surface area of titanium phosphate plate-shaped particles of this invention includes: obtaining a liquid in a state where a powder containing titanium phosphate plate-shaped particles is dispersed in an aqueous alkaline solution.
    Type: Application
    Filed: May 15, 2020
    Publication date: December 22, 2022
    Applicant: FUJIMI INCORPORATED
    Inventors: Tomomi AKIYAMA, Takashi HAYAKAWA, Keiji ASHITAKA, Naoya MIWA
  • Patent number: 11530335
    Abstract: To provide modified colloidal silica capable of improving the stability of the polishing speed with time when used as abrasive grains in a polishing composition for polishing a polishing object that contains a material to which charged modified colloidal silica easily adheres, such as a SiN wafer, and to provide a method for producing the modified colloidal silica. Modified colloidal silica, being obtained by modifying raw colloidal silica, wherein the raw colloidal silica has a number distribution ratio of 10% or less of microparticles having a particle size of 40% or less relative to a volume average particle size based on Heywood diameter (equivalent circle diameter) as determined by image analysis using a scanning electron microscope.
    Type: Grant
    Filed: June 21, 2019
    Date of Patent: December 20, 2022
    Assignee: FUJIMI INCORPORATED
    Inventors: Keiji Ashitaka, Shogo Tsubota
  • Patent number: 11525071
    Abstract: Provided herein are compositions comprising a first colloidal silica particle that is not surface-modified and a second colloidal silica particle that is surface modified to carry a negative charge. Also provided herein are methods for selectively removing HfO2 or SiO2 from a surface.
    Type: Grant
    Filed: March 30, 2020
    Date of Patent: December 13, 2022
    Assignee: FUJIMI INCORPORATED
    Inventor: Jie Lin
  • Patent number: 11518682
    Abstract: The present invention provides a means capable of suppressing the formation of fine particles in a method for producing a silica sol.
    Type: Grant
    Filed: March 13, 2020
    Date of Patent: December 6, 2022
    Assignee: FUJIMI INCORPORATED
    Inventors: Yusuke Kawasaki, Shogo Tsubota, Masaaki Ito, Jun Shinoda, Keiji Ashitaka
  • Patent number: 11498876
    Abstract: The present disclosure provides a ceramic powder having low bulkiness and good dispersibility. In the ceramic powder, the volume ratio of aggregated particles having a particle diameter larger than a reference particle diameter is 35 vol. % or more and the volume ratio when ultrasonic dispersion treatment for 10 minutes at an oscillation frequency of 19.5 kHz and an output power of 10 W is applied is 4 vol. % or less. The reference particle diameter is a particle diameter equivalent to a cumulative 0.1 vol. % diameter from the large diameter side when the ceramic powder is subjected to ultrasonic dispersion treatment for 3 minutes at an oscillation frequency of 19.5 kHz and an output power of 150 W.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: November 15, 2022
    Assignee: FUJIMI INCORPORATED
    Inventors: Naoki Ushida, Yuji Masuda, Hirokazu Kumazawa, Mina Sato
  • Patent number: 11498182
    Abstract: A disc-shaped polishing pad (1) is used for a polishing method of the present invention. The polishing pad (1) has a peripheral surface (111) on a polishing surface (10) side in an axial direction of the disc of a tapered surface whose diameter is reduced to the polishing surface (10). An angle formed by the peripheral surface (111) and the polishing surface (10) is 125° or more and less than 180°. The polishing pad (1) has a hardness immediately after a pressing surface is in close contact of 40 or more by a testing method specified in an appendix 2 of JIS K7312: 1996, “Spring Hardness Test Type C Testing Method”. A slurry containing abrasives is supplied to a polished surface larger than the polishing surface (10). The polishing surface (10) is pressed against the polished surface and the polishing pad (1) is moved to polish the polished surface.
    Type: Grant
    Filed: February 20, 2017
    Date of Patent: November 15, 2022
    Assignee: FUJIMI INCORPORATED
    Inventors: Toru Kamada, Koji Katayama, Hitoshi Morinaga, Takashi Horibe
  • Patent number: 11499070
    Abstract: To provide modified colloidal silica capable of improving the stability of the polishing speed with time when used as abrasive grains in a polishing composition for polishing a polishing object that contains a material to which charged modified colloidal silica easily adheres, such as a SiN wafer, and to provide a method for producing the modified colloidal silica. Modified colloidal silica, being obtained by modifying raw colloidal silica, wherein the raw colloidal silica has a number distribution ratio of 10% or less of microparticles having a particle size of 40% or less relative to a volume average particle size based on Heywood diameter (equivalent circle diameter) as determined by image analysis using a scanning electron microscope.
    Type: Grant
    Filed: January 19, 2016
    Date of Patent: November 15, 2022
    Assignee: FUJIMI INCORPORATED
    Inventors: Keiji Ashitaka, Shogo Tsubota