Abstract: Methods are disclosed for correcting vertical line streaks in an interline or full-frame CCD. The method includes the step of subtracting an overscan row from each row of a previous image or from each row of a next image, such that each row of the final image contains the same readout smear effect and such that readout overscan rows contain the same smear information as each row of the final image. The method is also described for use with frame transfer CCDs.

Abstract: Methods for creating reference images of fiber optic sensor plates for use in electron microscopes. The methods include taking of reference images of stripe or dot patterns. The spatial frequency of the stripe or dot patterns is such that image artifacts of the fiber optic stacks is recorded. The reference images can then be used to correct for these artifacts.

Abstract: An improved short-wavelength microscope is described in which a specimen sample is placed between a condenser zone plate lens and an objective zone plate lens so that the specimen is aligned with a diffraction order of the condenser zone plate lens that is greater than one and proximal to the condenser zone plate.

Abstract: Disclosed are radiation-resistant zone plates for use in laser-produced plasma (LPP) devices, and methods of manufacturing such zone plates. In one aspect, a method of manufacturing a zone plate provides for forming a masking layer over a supporting membrane, and creating openings through the masking layer in a diffractive grating pattern. Such a method also provides depositing radiation absorbent material in the openings in the masking layer and on the supporting membrane, and then stripping the remaining portions of the masking layer. Then, portions of the supporting membrane not covered by the absorbent material are removed, wherein the remaining portions of the supporting membrane covered by the absorbent material form separate grates. Also in such methods, cross-members are coupled to the grates for holding positions of the grates with respect to each other.

Abstract: A laser produced plasma device comprises a shutter assembly for mitigating the contaminating effects of debris generated by the plasma. In one embodiment, the shutter assembly includes a rotatable shutter having at least one aperture that provides a line-of-sight between a radiation source and an exit of the device during a first period of rotation of the shutter, and obstructs the line-of-sight between the radiation source and the exit during a second period of rotation. The shutter assembly in this embodiment also includes a motor configured to rotate the shutter to permit passage of the X-rays through the at least one aperture during the first period of rotation, and to thereafter rotate the shutter to obstruct passage of the debris through the at least one aperture during the second period of rotation.

Abstract: A device comprising an energy selecting slit assembly is provided. The slit assembly comprising a slit assembly chassis, opposing slit mechanisms, and an actuator assembly. One of the terminal ends of the actuator arm comprises a relatively fixed terminus, while the other terminal end of the arm comprises a relatively mobile terminus coupled to the rotational slit mechanism via a mechanical coupling configured to translate movement of the mobile terminus into rotational of the rotational slit mechanism. In one embodiment of the present invention, the slit assembly chassis defines a plurality of fixturing datums configured to establish alignment of respective aperture-defining edges of the opposing slit mechanisms along orthogonal X, Y, and Z axes defined by the chassis. Additional embodiments are disclosed.

Abstract: An ion beam milling system and method for electron microscopy specimen preparation is provided and is useful for the preparation for analysis by either TEM or SEM of semiconductors, metals, alloys, ceramics, and other inorganic materials. In one embodiment, a system and process are provided for the preparation of specimens for analysis by transmission electron microscopy including a specimen processing chamber, at least two ion beam generators, and a specimen support or holder. An ion beam masking member is secured to a surface of the specimen and the specimen is milled. Preferably, the system also includes the ability to view the progress of the milling operation and may include an imaging device such as a light microscope which permits monitoring of the area of interest on a specimen as the specimen is milled.

Abstract: A resolution enhancement device is provided which utilizes either high extra-mural absorbent optical fibers in the transfer optic, and/or which uses a transfer optic which is bonded to the scintillator without the use of any glues or adhesives. The device provides improved resolution of electron images from electron microscopes while not reducing the sensitivity of the apparatus.

Abstract: A resolution enhancement device is provided which utilizes either high extra mural absorbent optical fibers in the transfer optic, and/or which uses a transfer optic which is bonded to the scintillator without the use of any glues or adhesives. The device provides improved resolution of electron images from electron microscopes while not reducing the sensitivity of the apparatus.

Abstract: Methods and apparatus are provided which improve the performance of electron imaging detectors by reducing the total interaction volume of the detector and/or reducing the energy converting volume of the detector. In one embodiment, a method for improving resolution and reducing noise in an imaging electron detector for an electron microscope is provided and includes the step of decelerating the energetic electrons either before the electrons interact with, or as the electrons interact with, the energy converting volume of an imaging electron detector. In other embodiments, the lateral spatial travel of energetic electrons is limited as they traverse the imaging electron detector, or, the extent of electron back scatter from the energetic electrons is limited.

Abstract: A cryotransfer holder for side entry transmission electron microscopes is provided. The cryotransfer holder design permits a specimen to be rotated about its axis as well as tilted while being maintained at a low temperature. The holder allows two sets of tilt data, preferably perpendicular to one another, to be collected from a single frozen specimen.

Abstract: A side-entry specimen holder for transmission electron microscopy is provided. The specimen holder is capable of rotating a specimen and tilting it in two axes. The specimen, when mounted in the holder, can be tilted in the plus/minus direction of the X-axis, the plus/minus direction of the Y-axis, and simultaneously have the ability of 360° rotation in the axis of the electron beam to permit alignment of microstructural features of the specimen for optimal viewing and analysis.

Abstract: Methods and apparatus are provided which improve the performance of electron imaging detectors by reducing the total interaction volume of the detector and/or reducing the energy converting volume of the detector. In one embodiment, a method for improving resolution and reducing noise in an imaging electron detector for an electron microscope is provided and includes the step of decelerating the energetic electrons either before the electrons interact with, or as the electrons interact with, the energy converting volume of an imaging electron detector. In other embodiments, the lateral spatial travel of energetic electrons is limited as they traverse the imaging electron detector, or, the extent of electron back scatter from the energetic electrons is limited.

Abstract: Electron optical aberrations of an energy filtering system of an energy filtering transmission electron microscope (EFTEM) are automatically corrected under computer control to set up the EFTEM for use. Optics of the electron microscope preceding an energy filter are used to scan the beam at the entrance to the filter in a pattern corresponding to a defined geometry. The beam can either be finely focused to yield a spot at each position visited during the pattern scan, or the beam can be spread out and imprinted with a well-defined intensity distribution, such as normally occurs due to passage of the beam through a specimen, so that its relative scanned displacements can be assessed using cross-correlation techniques. In the case of the finely focused beam, electron images of the scanned pattern directly yield a spot pattern image. Deviations of the recorded spot pattern image from the defined scan geometry reflect the imaging aberrations introduced by the energy filter.

Abstract: A method and apparatus are provided for CTD imaging device multiple read-out speeds with optimized operation at all of the available speeds. Image signals from a CTD imaging device are digitally sampled at a defined frequency with the read-out electronics being matched to the defined frequency for optimum operation at that frequency. Digital samples taken during both a first (reset reference) portion of each image signal and a second (image voltage) portion of each image signal are then discarded if taken during a noisy/unstable part of the image signal or accumulated and averaged if taken during a stable part of the image signal. The accumulated and averaged digital samples are then algebraically combined to produce signals representative of an image generated by the CTD imaging device. The read-out speed of the CTD imaging device is a fraction of the sampling speed and can be selected by setting an integer divisor for the defined sampling frequency.

Abstract: An apparatus and process for the etching and coating of samples in a single vacuum chamber, thus minimizing handling and transfer of the samples is provided. The apparatus includes a sealed chamber and a vacuum pump for forming and maintaining a vacuum in the chamber, a first ion gun positioned in the chamber to etch a sample, a sputtering target in the chamber, and at least one additional ion gun positioned in the chamber to cause material from the target to be directed onto the sample.

Abstract: A large-format solid state imaging device which can detect optical images without loss of sharpness or resolution is provided and includes a solid state imaging device supported by and secured to a frame. To ensure that the imaging device does not deviate from its desired surface configuration, the device is pressed between an optical coupling plate and a support plate each having at least one matching surface whose curvature matches the other with a precision which permits the solid state imaging device to detect optical images without loss of sharpness or resolution and which conforms the imaging device into a desired configuration. Preferably, the frame is annular and the edges of the imaging device are secured to the frame by at least two spaced bonds.

Abstract: An energy filtering system of an EFTEM is automatically adjusted using a computer. The computer inserts an energy-selecting slit into the beam path and begins monitoring the position of the electron beam through a combination of the current sensors integral to the slit and the readout of an electron camera. The beam is centered within the slit by adjusting an energy dispersing element while monitoring beam sensors. After initial alignment, the slit is retracted and a reference aperture is inserted at the entrance to the energy filter. The electron camera captures an image of the reference aperture and the computer analyzes the deviations of the aperture image from its known physical dimensions in order to evaluate the electron optical distortions and aberrations of the filter. The computer uses the determined optical parameters to adjust the distortion and aberration correcting optical elements of the filter, whose effects are known due to previous calibration.

Abstract: An ultra-high tilt cryotransfer holder is provided which is capable of rotating a specimen through a full 360.degree. tilt angle (180.degree. from horizontal in both clockwise and counterclockwise directions) without spillage of cryogenic liquid, and while maintaining proper protection and cooling of the specimen. The cryotransfer holder includes a holder body having a specimen tip and a source of cooling for the specimen tip. The specimen tip includes a specimen grid of a thermally conductive material which has a plurality of grid openings between crossing grid bars. The grid may be extended from the holder into a forward viewing position or retracted into a protected position within a cryoshield.

Abstract: A precision-controlled slit mechanism having an adjustable width which is both accurate and reproducible is provided for apparatuses which are designed to exclude portions of an energy spectrum prior to analysis such as energy-selected imaging filters in electron microscopes. The slit mechanism includes a pair of slit halves, a light source for directing light between the slit halves, a detector for measuring the intensity of light passing from the light source through the slit halves, and an actuator for adjusting the width of the opening between the slit halves in response to the intensity of light measured by the detector.