Abstract: An apparatus designed to be positioned in the projection chamber of an electron microscope to detect electron images and/or diffraction patterns from a sample and convert those electron images into light images is provided. The apparatus transfers light images to an imaging sensor for recording while enhancing resolution of the light images by absorbing substantially all laterally scattered light before it reaches the imaging sensor.

Abstract: An apparatus for recording electron images and diffraction patterns which can be automatically controlled via a computer, has improved precision, and has greater flexibility in acquiring and displaying specimen images is provided. The apparatus includes an electron microscope having a projection chamber, an electron scintillator in the projection chamber for converting a projected electron image into a light image, and a camera positioned adjacent to the projection chamber for acquiring the light image. The camera is rotatable about its optical (horizontal) axis so that desired features of the acquired image may be brought into alignment with the display device used to view them, such as for example, a CRT screen. By positioning the camera outside of the vacuum of the electron microscope projection chamber, problems associated with prior internally-mounted devices are avoided and the camera may be readily manually or automatically adjusted.

Abstract: An apparatus for improving the resolution of images produced by an electron microscope is provided and includes an electron beam forming an electron image, a support structure mounted in the path of the electron beam, with the support structure transmitting the electron image. Scintillating material is coated onto the side of the support structure opposite that on which the electron image is incident, the scintillating material converting the electron image into a light image. A mirror is provided for deflecting the optical path of the light image into a CCD camera positioned to receive and record the light image.

Abstract: An apparatus and a specimen holder adapted to permit simultaneous two-sided ion beam milling at very low angles of beam incidence, down to 0.degree., from both sides of the specimen is provided and includes a specimen holder for two-sided ion beam milling and a pedestal having at least one extending specimen support arm adapted to engage a peripheral edge of a specimen. The specimen is secured to the at least one specimen support arm, preferably, so as to permit ion beams to be directed at the first and second major surfaces of the specimen simultaneously at very low angles of incidence down to 0.degree.. Both rapid milling as well as a reduction in artifacts provide high quality specimens for transmission electron microscopy analysis.

Abstract: A method and an apparatus comprising a transmission electron microscope, an electron camera, a computer, and microscope control electronics. The electron camera captures an image produced by the electron microscope, the computer transforms the image into a digital diffractogram, and determines the microscope defocus and astigmatism by analyzing the diffractogram. The computer uses the determined astigmatism and defocus values to stigmate the microscope, and to set the defocus to a user-selected value. The computer also changes the direction of electron illumination to different values, and works out the true location of the optic axis of the microscope from the changes in the diffractograms recorded for the different illumination directions.

Abstract: A method and an apparatus comprising an electron gun, two energy analyzers, an energy-selecting slit with intensity sensors, a feedback circuit, a sample, and an electron detector. The beam produced by the electron gun is dispersed according to the energies of the electrons by the first energy analyzer. The dispersed beam impinges on a slit which monochromates the beam by selecting a narrow pass-band of energies. The two halves of the slit are equipped with electron intensity sensors whose output is used by a feedback circuit to stabilize the position of the dispersed beam on the slit so as to counteract instabilities in the power supplies of the electron gun and of the analyzer. The monochromated electron beam then passes through a sample, and the transmitted beam is dispersed according to the energies of the electrons by the second energy analyzer. The power supplies of the two analyzers are linked so that the energy selected by the second analyzer tracks the energy selected by the first analyzer.

Abstract: An apparatus comprising a cooled slow-scan charge-coupled device camera mounted in a chamber attached to a projection or specimen chamber of an electron microscope, and a vacuum valve separating the camera chamber from the microscope chamber. The operation of the vacuum valve is linked to the microscope vacuum system such that the valve remains open while the microscope chamber is under vacuum, but closes if the microscope chamber is about to be let up to atmospheric pressure, and stays closed until the microscope chamber is evacuated again. In an alternate embodiment of the invention, the camera is inserted by a pneumatically operated piston to the microscope chamber, and is withdrawn and sealed off in a separate vacuum chamber in the microscope chamber is about to be let up to air.

Abstract: A specimen heating holder for side entry transmission electron microscopes is described. The holder permits specimen tilt about two orthogonal axes and has the capability of raising the specimen temperature to .about.1000.degree. C. A novel hinged electrical connection, resistant to fatigue, supplies, supplies power to a heater within the specimen cradle. Special low thermal conductivity cradle bearings minimize the required heater current and promote ease of assembly yet are sufficiently strong to make specimen loading easy.

Abstract: Quadruple lenses 30, 31 and 32 and sextupole lenses 40, 41, 42, and 43 are interposed between a energy-dispersing device 17 and an electron imaging device 50 in an energy-selected electron imaging filter. The energy-dispersing device produces a focussed spectrum 21 of electron energies in the plane of an energy-selecting slit 20, and the quadrupole and sextupole lenses transform the spectrum into an energy-selecting slit may also be either removed or opened wide, and the quadrupole lenses may be refocussed, so that the electron imaging device directly observes a magnified spectrum of the electron energies.

Abstract: An improved electron microscope anticontaminator having a conduction rod enclosed within an independent vacuum system and micropositioning capability is described. The micropositioning facility allows the use of unusually small apertures in the cold anticontaminator block with a consequent improvement in efficiency of function. A self-contained contact sensor provides immediate audible warning of contact between a specimen holder and the cold anticontaminator block, permitting the removal of the usual mechanical end-stops for the specimen tilt mechanism and allowing the maximum specimen movement possible at any time. The independent vacuum system in combination with a heater positioned close to the anitcontaminator block allows the microscopist to vent the microscope column without removing the anticontaminator from the microscope.

Abstract: An electron beam attenuator decreases the intensity of an electron beam incident on a parallel electron detector by alternately deflecting the electron beam onto and away from the detector. A power supply controlling the attenuator is synchronized with the operation of the detector such that the electron beam only strikes the detector when the detector is not being read-out. The ratio of the time that the electron beam is incident on the detector to the time that the beam is off the detector is varied to give an adjustable attenuation of the detected electron signal. The intensity of the electron beam incident on the detector is monitored by a sensor separate from the parallel detector. When the beam intensity exceeds a pre-determined threshold, the attenuator is automatically activated, in order to prevent damage to the detector.

Abstract: An electron microscope cryotransfer holder capable of simultaneously transferring several specimens is described. A cryo-shield protects the specimens from warming or frosting during the transfer from the specimen-loading workstation into the microscope.

Abstract: Quadrupole electron lenses 21, 22, 23 and 24 are disposed between an energy-dispersing device 15 and a parallel detector 50 in an electron energy-loss spectrometer. The power and polarity of the quadrupole lenses may be adjusted to simultaneously provide the desired energy dispersion of the spectrum, and a precise match between the width of the spectrum and the width of the parallel detector. Additional quadrupole lenses may be interposed between quadrupole lens 24 and the detector 50 to further increase the energy dispersion.

Abstract: A device comprising a television camera mounted inside the projection chamber of a transmission electron microscope with the imaging surface perpendicular to the optical axis of the microscope. The electron image is converted to a light image by high efficiency YAG transmission scintillator and transferred by a low loss fiber optic plate to a CCD imaging device. The camera is moved by a pneumatic piston between the operating position where it intercepts the electron beam and a position where the electron beam can pass unobstructed to the main microscope viewing screen.

Abstract: A device interposed between an electron microscope specimen holder and a microscope translation stage constructed of a special combination of materials arranged in such a manner that little or no specimen drift occurs when the temperature of the complete assembly is changed. In the first and more common arrangement, the device is placed in the nose of the standard microscope specimen holder and consists of a silica rod inside a metal tube, the material of the tube having a larger coefficient of thermal expansion than the material of the specimen rod. In the second, and less common arrangement the device is placed on the opposite side of the specimen away from the nose of the holder and consists of one tube, the material of which must have a larger coefficient of thermal expansion than the material of the specimen holder.

Abstract: An apparatus (10) for use in securing a specimen (S) in a folding specimen holder (58) having an arm blade (12). A spring clip (26) releasably secures the grid (58) to the arm blade (12) so that one or more specimens may be loaded into the holder (58). A slider (22) mounted on the arm blade (12) operates to fold the holder (58) upon itself in order to secure the specimens (S) in the holder (58). The spring clip (26) is thereafter operated to release the holder (58) after the holder (58) has been transferred from a first workstation (48) to a second workstation (62).

Abstract: An ion milling machine specimen elevator comprising a vertically oriented piston which supports a specimen holder at its top and is movable between a lowered operating position and a raised viewing position. When the piston is in the lowered operating position, it is slowly rotated about its vertical axis by a suitable drive. The elongated piston passes through an O-ring seal into an evacuated ion milling or work chamber. At the bottom of the work chamber is disposed a pneumatic control cylinder into which the piston extends. The piston can be moved up or down by altering the pressure in the pneumatic cylinder. During ion milling the piston is at its lowest position in the evacuated work chamber and is held there by pressurized gas in the pneumatic control cylinder. A second small chamber is provided above the work chamber for specimen viewing and specimen exchange.