Patents Assigned to GLOBALFOUNDRIES Inc.
  • Patent number: 11908917
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to gate structures and methods of manufacture. The method includes: forming a first gate structure and a second gate structure with gate materials; etching the gate materials within the second gate structure to form a trench; and depositing a conductive material within the trench so that the second gate structure has a metal composition different than the first gate structure.
    Type: Grant
    Filed: August 17, 2021
    Date of Patent: February 20, 2024
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Jiehui Shu, Sipeng Gu, Haiting Wang
  • Patent number: 11749599
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to dual thickness fuse structures and methods of manufacture. The structure includes a continuous wiring structure on a single wiring level and composed of conductive material having a fuse portion and a thicker wiring structure.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: September 5, 2023
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: John J. Pekarik, Anthony K. Stamper, Vibhor Jain
  • Patent number: 11562906
    Abstract: Techniques for forming a metastable phosphorous P-doped silicon Si source drain contacts are provided. In one aspect, a method for forming n-type source and drain contacts includes the steps of: forming a transistor on a substrate; depositing a dielectric over the transistor; forming contact trenches in the dielectric that extend down to source and drain regions of the transistor; forming an epitaxial material in the contact trenches on the source and drain regions; implanting P into the epitaxial material to form an amorphous P-doped layer; and annealing the amorphous P-doped layer under conditions sufficient to form a crystalline P-doped layer having a homogenous phosphorous concentration that is greater than about 1.5×1021 atoms per cubic centimeter (at./cm3). Transistor devices are also provided utilizing the present P-doped Si source and drain contacts.
    Type: Grant
    Filed: February 1, 2019
    Date of Patent: January 24, 2023
    Assignees: International Business Machines Corporation, GLOBALFOUNDRIES Inc.
    Inventors: Oleg Gluschenkov, Zuoguang Liu, Shogo Mochizuki, Hiroaki Niimi, Tenko Yamashita, Chun-Chen Yeh
  • Patent number: 11557420
    Abstract: Methods of coupling inductors in an IC device using interconnecting elements with solder caps and the resulting device are disclosed. Embodiments include forming a top inductor structure, in a top inductor area on a lower surface of a top substrate, the top inductor structure having first and second top terminals at its opposite ends; forming a bottom inductor structure, in a bottom inductor area on an upper surface of a bottom substrate, the bottom inductor structure having first and second bottom terminals at its opposite ends; forming top interconnecting elements on the lower surface of the top substrate around the top inductor area; forming bottom interconnecting elements on the upper surface of the bottom substrate around the bottom inductor area; forming solder bumps on lower and upper surfaces, respectively, of the top and bottom interconnecting elements; and connecting the top and bottom interconnecting elements to each other.
    Type: Grant
    Filed: February 13, 2017
    Date of Patent: January 17, 2023
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Tak Ming Mak, Ajit M. Dubey
  • Patent number: 11508810
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to high voltage diode structures and methods of manufacture. The structure includes: a diode structure composed of first well of a first dopant type in a substrate; and a well ring structure of the first dopant type in the substrate which completely surrounds the first well of the first dopant type, and spaced a distance “x” from the first well to cut a leakage path to a shallower second well of a second dopant type.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: November 22, 2022
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Jagar Singh, Shiv Kumar Mishra
  • Publication number: 20220238386
    Abstract: A method, apparatus, and manufacturing system are disclosed herein for a vertical field effect transistor patterned in a self-aligned process. A plurality of fins is formed. A gate structure is formed on at least a first side and a second side of a lower portion of each fin. A spacer is formed on at least a first side and a second side of an upper portion of each fin. At least one layer is formed above the substrate and between the fins. An opening is formed in the at least one layer between the fins by an etching process. The spacer protects the gate structure during the etching process.
    Type: Application
    Filed: April 18, 2022
    Publication date: July 28, 2022
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Chanro Park, Ruilong Xie, Min Gyu Sung
  • Patent number: 11398378
    Abstract: The present disclosure relates to a structure which includes a first metal layer patterned as a mandrel, a dielectric spacer on the first metal layer, and a second metal layer on the dielectric spacer.
    Type: Grant
    Filed: September 17, 2020
    Date of Patent: July 26, 2022
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Hsueh-Chung Chen, Ravi P. Srivastava, Somnath Ghosh, Nicholas V. Licausi, Terry A. Spooner, Sean Reidy
  • Patent number: 11380615
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to tight pitch wirings and capacitors and methods of manufacture. The structure includes: a capacitor including: a bottom plate of a first conductive material; an insulator material on the bottom plate; and a top plate of a second conductive material on the insulator material; and a plurality of wirings on a same level as the bottom plate and composed of the second conductive material.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: July 5, 2022
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Anthony K. Stamper, Daisy A. Vaughn, Stephen R. Bosley, Zhong-Xiang He
  • Patent number: 11374111
    Abstract: A semiconductor device that a fin structure, and a gate structure present on a channel region of the fin structure. A composite spacer is present on a sidewall of the gate structure including an upper portion having a first dielectric constant, a lower portion having a second dielectric constant that is less than the first dielectric constant, and an etch barrier layer between sidewalls of the first and second portion of the composite spacer and the gate structure. The etch barrier layer may include an alloy including at least one of silicon, boron and carbon.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: June 28, 2022
    Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, GLOBALFOUNDRIES INC., STMICROELECTRONICS, INC.
    Inventors: Xiuyu Cai, Chun-Chen Yeh, Qing Liu, Ruilong Xie
  • Publication number: 20220200636
    Abstract: We disclose multiband receivers for millimeter-wave devices, which may have reduced size and/or reduced power consumption. One multiband receiver comprises a first band path comprising a first passive mixer configured to receive a first input RF signal having a first frequency and to be driven by a first local oscillator signal having a frequency about ? the first frequency; a second band path comprising a second passive mixer configured to receive a second input RF signal having a second frequency and to be driven by a second local oscillator signal having a frequency about ? the second frequency; and a base band path comprising a third passive mixer configured to receive intermediate RF signals during a duty cycle and to be driven by a third local oscillator signal having a frequency about ? the first frequency or about ? the second frequency during the duty cycle.
    Type: Application
    Filed: December 20, 2021
    Publication date: June 23, 2022
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Abdellatif Bellaouar, Sher Jiun Fang, Frank Zhang
  • Patent number: 11309220
    Abstract: A method, apparatus, and manufacturing system are disclosed herein for a vertical field effect transistor patterned in a self-aligned process. A plurality of fins is formed. A gate structure is formed on at least a first side and a second side of a lower portion of each fin. A spacer is formed on at least a first side and a second side of an upper portion of each fin. At least one layer is formed above the substrate and between the fins. An opening is formed in the at least one layer between the fins by an etching process. The spacer protects the gate structure during the etching process.
    Type: Grant
    Filed: August 14, 2017
    Date of Patent: April 19, 2022
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Chanro Park, Ruilong Xie, Min Gyu Sung
  • Patent number: 11300948
    Abstract: A process control method for manufacturing semiconductor devices, including determining a quality metric of a production semiconductor wafer by comparing production scatterometric spectra of a production structure of the production wafer with reference scatterometric spectra of a reference structure of reference semiconductor wafers, the production structure corresponding to the reference structure, the reference spectra linked by machine learning to a reference measurement value of the reference structure, determining a process control parameter value (PCPV) of a wafer processing step, the PCPV determined based on measurement of the production wafer and whose contribution to the PCPV is weighted with a first predefined weight based on the quality metric, and based on a measurement of a different wafer and whose contribution to the PCPV is weighted with a second predefined weight based on the quality metric, and controlling, with the PCPV, the processing step during fabrication.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: April 12, 2022
    Assignees: NOVA LTD, GLOBALFOUNDRIES INC.
    Inventors: Taher Kagalwala, Alok Vaid, Shay Yogev, Matthew Sendelbach, Paul Isbester, Yoav Etzioni
  • Publication number: 20220085994
    Abstract: Methods and systems generate seeds for public-private key pairs by determining a timestamp value associated with a process design kit (PDK) when a user of the PDK triggers a tool of the PDK while designing an integrated circuit device to have a physical unclonable function device (PUF). The methods and systems generate a first value by mapping the timestamp value to data of the user, generate a second value by mapping the timestamp value to configuration data of the PDK, and generate a third value by mapping the timestamp value to layout data of the PDK. A random number is then generated by applying a function to the first value, the second value, and the third value. A public-private encryption key pair is generated using the random number as a first seed number and using a second number generated by the number generation device as a second seed number.
    Type: Application
    Filed: September 15, 2020
    Publication date: March 17, 2022
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Romain H. A. Feuillette, David C. Pritchard, Bernhard J. Wunder, Elizabeth Strehlow
  • Patent number: 11264463
    Abstract: Embodiments of the present invention provide a multiple fin field effect transistor (finFET) with low-resistance gate structure. A metallization line is formed in parallel with the gate, and multiple contacts are formed over the fins which connect the metallization line to the gate. The metallization line provides reduced gate resistance, which allows fewer transistors to be used for providing In-Out (IO) functionality, thereby providing space savings that enable an increase in circuit density.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: March 1, 2022
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Guillaume Bouche, Andy Chih-Hung Wei
  • Patent number: 11228325
    Abstract: We disclose multiband receivers for millimeter-wave devices, which may have reduced size and/or reduced power consumption. One multiband receiver comprises a first band path comprising a first passive mixer configured to receive a first input RF signal having a first frequency and to be driven by a first local oscillator signal having a frequency about ? the first frequency; a second band path comprising a second passive mixer configured to receive a second input RF signal having a second frequency and to be driven by a second local oscillator signal having a frequency about ? the second frequency; and a base band path comprising a third passive mixer configured to receive intermediate RF signals during a duty cycle and to be driven by a third local oscillator signal having a frequency about ? the first frequency or about ? the second frequency during the duty cycle.
    Type: Grant
    Filed: March 30, 2020
    Date of Patent: January 18, 2022
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Abdellatif Bellaouar, Sher Jiun Fang, Frank Zhang
  • Patent number: 11205033
    Abstract: At least one method, apparatus and system disclosed involves a circuit layout for an integrated circuit device comprising a plurality of wider-than-default metal formations for a functional cell. A design for an integrated circuit device is received. The design comprises at least one functional cell. A first pair of wide metal formations are provided. The first pair of wide metal formations comprise a first metal formation and a second metal placed about a first cell boundary of the functional cell for providing additional space for routing, for high-drive routing, and/or for power routing.
    Type: Grant
    Filed: October 14, 2020
    Date of Patent: December 21, 2021
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Lei Yuan, Juhan Kim
  • Patent number: 11201152
    Abstract: A semiconductor device at least one first transistor of a first type disposed above a substrate and comprising a channel wider in one cross-section than tall, wherein the first type is a PFET transistor or an NFET transistor; and at least one second transistor of a second type disposed above the at least one first transistor and comprising a channel taller in the one cross-section than wide, wherein the second type is a PFET transistor or an NFET transistor, and the second type is different from the first type. Methods and systems for forming the semiconductor structure.
    Type: Grant
    Filed: April 20, 2018
    Date of Patent: December 14, 2021
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ruilong Xie, Steven Soss, Steven Bentley, Daniel Chanemougame, Julien Frougier, Bipul Paul, Lars Liebmann
  • Patent number: 11114736
    Abstract: Power combiners having increased output power, such as may be useful in millimeter-wave devices. The power combiner comprise at least two channels, wherein each channel comprises a phase alignment circuit, wherein the phase alignment circuit comprises a first differential input subcircuit comprising a first inverter and a second inverter, and a second differential input subcircuit comprising a third inverter and a fourth inverter, wherein the first inverter, the second inverter, the third inverter, and the fourth inverter each comprise a PMOS transistor and an NMOS transistor each having an adjustable back gate bias voltage. By adjusting the back gate bias voltage, the phases of the signal through each channel may be aligned, which may increase the output power of the power combiner. Methods of increasing output power of such power combiners. Systems for manufacturing devices comprising such power combiners.
    Type: Grant
    Filed: March 31, 2020
    Date of Patent: September 7, 2021
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: See Taur Lee, Sher Jiung Fang, Abdellatif Bellaouar
  • Patent number: 11069677
    Abstract: We report a semiconductor device, containing a semiconductor substrate; an isolation feature on the substrate; a plurality of gates on the isolation feature, wherein each gate comprises a gate electrode and a high-k dielectric layer disposed between the gate electrode and the isolation feature and disposed on and in contact with at least one side of the gate electrode; and a fill metal between the plurality of gates on the isolation feature. We also report methods of forming such a device, and a system for manufacturing such a device.
    Type: Grant
    Filed: July 28, 2020
    Date of Patent: July 20, 2021
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Chanro Park, Ruilong Xie, Kangguo Cheng, Juntao Li
  • Publication number: 20210193204
    Abstract: Disclosed is a reference circuit having an even number m of groups of m parallel-connected magnetic tunnel junctions (MTJs). The MTJs in half of the groups are programmed to have parallel resistances (RP) and the MTJs in the other half are programmed to have anti-parallel resistances (RAP). Switches connect the groups in series, creating a series-parallel resistor network. The total resistance (RT) of the network has low variability and is essentially equal to half the sum of a nominal RP plus a nominal RAP and can be employed as a reference resistance (RREF). Under specific biasing conditions the series-parallel resistor network can generate a low variability reference parameter (XREF) that is dependent on this RREF. Also disclosed are an integrated circuit (IC) that includes the reference circuit and a magnetic random access memory (MRAM) structure, which uses XREF to determine stored data values in MRAM cells and associated methods.
    Type: Application
    Filed: December 19, 2019
    Publication date: June 24, 2021
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Akhilesh Jaiswal, Bipul C. Paul