Patents Assigned to GlobalFoundries
  • Patent number: 11971572
    Abstract: Disclosed is an optical waveguide including a waveguide core and waveguide cladding surrounding the waveguide core. The waveguide cladding includes at least one stack of cladding material layers positioned laterally adjacent to a sidewall of the waveguide core such that each cladding material layer in the stack abuts the sidewall of the waveguide core. Each of the cladding material layers in the stack has a smaller refractive index than the waveguide core and at least two of the cladding material layers in the stack have different refractive indices, thereby tailoring field confinement and reshaping the optical mode. Different embodiments include different numbers of cladding material layers in the stack, different stacking orders of the cladding material layers, different waveguide core types, symmetric or asymmetric cladding structures on opposite sides of the waveguide core, etc. Also disclosed is a method of forming the optical waveguide.
    Type: Grant
    Filed: February 18, 2022
    Date of Patent: April 30, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Shesh Mani Pandey, Yusheng Bian, Francis O. Afzal
  • Patent number: 11972999
    Abstract: A structure includes an electrical device, and an active contact landed on a portion of the electrical device. The active contact includes a first body of a first material. A thermal dissipation pillar is adjacent the active contact and unlanded on but over the portion of the electrical device. The thermal dissipation pillar includes a second body of a second material having a higher thermal conductivity than the first material. The thermal dissipation pillar may be in thermal communication with a wire in a dielectric layer over the active contact and the thermal dissipation pillar. The electrical device can be any integrated circuit device that generates heat.
    Type: Grant
    Filed: December 7, 2021
    Date of Patent: April 30, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Mark D. Levy, Rajendran Krishnasamy, Michael J. Zierak, Siva P. Adusumilli
  • Patent number: 11973478
    Abstract: Apparatuses include (among other components) a first gain device connected to receive an initial voltage, a second gain device in series with the first gain device and connected to receive output of the first gain device, differential gain devices connected to receive outputs from the first gain device and the second gain device (the differential gain devices provide opposite voltage outputs from the apparatus) and high-frequency compensation feed-forward paths connected to the first gain device and the second gain device.
    Type: Grant
    Filed: September 2, 2021
    Date of Patent: April 30, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Xu Zhang, Mingming Zhang, Hanqing Zhao, Lukun Zhai, Dan Liu, Xuan Li
  • Patent number: 11966240
    Abstract: An apparatus includes an amplifier, a pass transistor connected to a load and to an input of the amplifier, and a capacitor connected between the amplifier and the pass transistor.
    Type: Grant
    Filed: November 3, 2021
    Date of Patent: April 23, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Siva K. Chinthu, Veerendranath P. Sundar
  • Patent number: 11967637
    Abstract: A disclosed structure includes a fin-based bipolar junction transistor (BJT) with reduced base resistance. The BJT includes one or more semiconductor fins. Each semiconductor fin has opposing sidewalls, a first width, and a base recess, which extends across the first width through the opposing sidewalls. The BJT includes a base region positioned laterally between collector and emitter regions. The base region includes a base semiconductor layer (e.g., an intrinsic base layer), which fills the base recess and which has a second width greater than the first width such that the base semiconductor layer extends laterally beyond the opposing sidewalls. In a BJT with multiple semiconductor fins, the base recess on each semiconductor fin is filled with a discrete base semiconductor layer. The base region further includes an additional base semiconductor layer (e.g., an extrinsic base layer) covering the base semiconductor layer(s). Also disclosed is a method of forming the structure.
    Type: Grant
    Filed: March 7, 2022
    Date of Patent: April 23, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Ali Razavieh, Jagar Singh, Haiting Wang
  • Patent number: 11967635
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. The structure includes: an extrinsic base region within a semiconductor substrate material; a shallow trench isolation structure extending into the semiconductor substrate material and bounding the extrinsic base region; an emitter region adjacent to the shallow trench isolation structure and on a side of the extrinsic base region; and a collector region adjacent to the shallow trench isolation structure and on an opposing side of the extrinsic base region.
    Type: Grant
    Filed: November 23, 2021
    Date of Patent: April 23, 2024
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Jagar Singh, Randy L. Wolf
  • Patent number: 11967664
    Abstract: The present disclosure generally relates to semiconductor devices for use in optoelectronic/photonic applications and integrated circuit (IC) chips. More particularly, the present disclosure relates to photodiodes such as avalanche photodiodes (APDs) and single photon avalanche diodes (SPADs).
    Type: Grant
    Filed: April 20, 2022
    Date of Patent: April 23, 2024
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Ping Zheng, Eng Huat Toh, Cancan Wu, Kiok Boone Elgin Quek
  • Patent number: 11961901
    Abstract: The disclosure provides a bipolar transistor structure with multiple bases, and related methods. A bipolar transistor structure includes a first emitter/collector (E/C) material above an insulator. The first E/C material has first sidewall and a second sidewall over the insulator. A first base is above the insulator adjacent the first sidewall of the first E/C material. A second base is above the insulator adjacent the second sidewall of the first E/C material. A second E/C material is above the insulator and adjacent the first base. A width of the first base between the first E/C material and the second E/C material is less than a width of the first E/C material, and the first base protrudes horizontally outward from an end of the first E/C material and an end of the second E/C material.
    Type: Grant
    Filed: April 15, 2022
    Date of Patent: April 16, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventor: Shesh Mani Pandey
  • Patent number: 11955472
    Abstract: Disclosed are embodiments of a semiconductor structure that includes a semiconductor-controlled rectifier (e.g., for electrostatic discharge (ESD) protection). The SCR can be readily integrated into advanced semiconductor-on-insulator processing technology platforms (e.g., a fully depleted silicon-on-insulator (FDSOI) processing technology platform) that employ hybrid semiconductor substrates (i.e., semiconductor substrates with both bulk semiconductor and semiconductor-on-insulator regions) and is configured with an on-Pwell semiconductor-on-insulator gate structure that is tied to an anode terminal to effectively lower the SCR trigger voltage. To further lower the trigger voltage of the SCR, the Pwell on which the gate structure sits may be made narrower than the gate structure and/or the doping profile of the Pwell on which the gate structure sits may be graded (e.g., P to P? closer to insulator layer).
    Type: Grant
    Filed: December 17, 2021
    Date of Patent: April 9, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Meng Miao, Alain Loiseau, Souvick Mitra, Wei Liang, Robert J. Gauthier, Jr., Anindya Nath
  • Patent number: 11955514
    Abstract: The embodiments herein relate to field-effect transistors (FETs) with a gate structure in a dual-depth trench isolation structure and methods of forming the same. The FET includes a substrate having an upper surface, a trench isolation structure, and a gate structure adjacent to the trench isolation structure. The trench isolation structure has a first portion having a lower surface and a second portion having a lower surface in the substrate; the lower surface of the first portion is above the lower surface of the second portion.
    Type: Grant
    Filed: June 1, 2021
    Date of Patent: April 9, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Bong Woong Mun, Jeoung Mo Koo
  • Patent number: 11949034
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a photodetector and methods of manufacture. The structure includes: a photodetector; and a semiconductor material on the photodetector, the semiconductor material comprising a first dopant type, a second dopant type and intrinsic semiconductor material separating the first dopant type from the second dopant type.
    Type: Grant
    Filed: June 24, 2022
    Date of Patent: April 2, 2024
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: John J. Ellis-Monaghan, Rajendran Krishnasamy, Siva P. Adusumilli, Ramsey Hazbun
  • Patent number: 11947168
    Abstract: A stacked edge coupler for a photonic chip is provided. The stacked edge coupler includes an insulating layer, a waveguide core, a first assisting waveguide, and a back-end-of-line stack. The first assisting waveguide is on the insulating layer. The waveguide core is over the first assisting waveguide and includes a tapered section. The back-end-of-line stack is over the waveguide core. The back-end-of-line stack includes a side edge, a dielectric layer, and a second assisting waveguide. The second assisting waveguide is on the dielectric layer and arranged adjacent to the side edge. The second assisting waveguide has an overlapping arrangement with the tapered section of the waveguide core.
    Type: Grant
    Filed: April 5, 2022
    Date of Patent: April 2, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventor: Yusheng Bian
  • Patent number: 11949004
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. The structure includes: an extrinsic base region; an emitter region on a first side of the extrinsic base region; a collector region on a second side of the extrinsic base region; and a gate structure comprising a gate oxide and a gate control in a same channel region as the extrinsic base region.
    Type: Grant
    Filed: November 23, 2021
    Date of Patent: April 2, 2024
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Judson R. Holt, Vibhor Jain, Alexander M. Derrickson
  • Patent number: 11942325
    Abstract: A transistor structure is disclosed. The transistor structure includes a dielectric layer that has a thinner portion over a first doped well and a second doped well, and a thicker portion adjacent the thinner portion and over the second doped well. The thicker portion has a height greater than the thinner portion above the doped wells. The transistor includes a first gate structure on the thinner portion and a second gate structure on the thicker portion of the dielectric layer. The transistor may include a third gate structure on the thicker portion.
    Type: Grant
    Filed: January 6, 2022
    Date of Patent: March 26, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventor: Ketankumar Harishbhai Tailor
  • Patent number: 11942472
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to high-voltage electrostatic discharge (ESD) devices and methods of manufacture. The structure includes a vertical silicon-controlled rectifier (SCR) connecting to an anode, and includes a buried layer of a first dopant type in electrical contact with an underlying buried layer a second dopant type split with an isolation region of the first dopant type within a substrate.
    Type: Grant
    Filed: September 15, 2021
    Date of Patent: March 26, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Kyong Jin Hwang, Milova Paul, Sagar Premnath Karalkar, Robert J. Gauthier, Jr.
  • Patent number: 11942534
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a bipolar transistor with thermal conductor and methods of manufacture. The structure includes: a base formed within a semiconductor substrate; a thermal conductive material under the base and extending to an underlying semiconductor material; an emitter on a first side of the base; and a collector on a second side of the base.
    Type: Grant
    Filed: May 16, 2022
    Date of Patent: March 26, 2024
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Hong Yu, Judson R. Holt, Vibhor Jain
  • Patent number: 11942423
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to series inductors and methods of manufacture. A structure includes a plurality of wiring levels each of which include a wiring structure connected in series to one another. A second wiring level being located above a first wiring level of the plurality of wiring levels. A wiring structure on the second wiring level being at least partially outside boundaries of the wiring structure of the first wiring level.
    Type: Grant
    Filed: June 9, 2021
    Date of Patent: March 26, 2024
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Venkata Narayana Rao Vanukuru, Zhong-Xiang He
  • Patent number: 11942415
    Abstract: A device may include a substrate, and an interlevel dielectric arranged over the substrate. The interlevel dielectric may include a first interlevel dielectric layer in an interconnect level i, the first interlevel dielectric layer having a first interconnect and a second interconnect therein. A nitride block insulator may be arranged over the first interlevel dielectric layer and over the first interconnect and the second interconnect. An opening may be arranged in the nitride block insulator, the opening extending through the nitride block insulator to expose a surface of the first interconnect in the first interlevel dielectric layer. A contact plug may be arranged in the opening of the nitride block insulator. The contact plug at least lines the opening and prevents out-diffusion of conductive material from the first interconnect. A thin film of a passive component may be arranged over the nitride block insulator and over the contact plug.
    Type: Grant
    Filed: August 16, 2022
    Date of Patent: March 26, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Handoko Linewih, Chor Shu Cheng, Tze Ho Simon Chan, Yudi Setiawan
  • Patent number: 11934021
    Abstract: The disclosed subject matter relates to semiconductor devices for use in optoelectronic/photonic applications and integrated circuit (IC) chips. More particularly, the present disclosure relates to photonic devices having thermally conductive layers for the removal of heat from optoelectronic components in the photonic devices.
    Type: Grant
    Filed: January 27, 2022
    Date of Patent: March 19, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Hemant Martand Dixit, William J. Taylor, Jr., Yusheng Bian, Theodore Letavic, Oscar D. Restrepo
  • Patent number: 11934008
    Abstract: Structures for an edge coupler and methods of forming a structure for an edge coupler. The structure includes a waveguide core over a dielectric layer, and a back-end-of-line stack over the waveguide core and the dielectric layer. The back-end-of-line stack includes an interlayer dielectric layer, a side edge, a first feature, a second feature, and a third feature laterally arranged between the first feature and the second feature. The first feature, the second feature, and the third feature are positioned on the interlayer dielectric layer adjacent to the side edge, and the third feature has an overlapping relationship with a tapered section of the waveguide core.
    Type: Grant
    Filed: December 19, 2022
    Date of Patent: March 19, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Yusheng Bian, Roderick A. Augur, Kenneth J. Giewont, Karen Nummy