Patents Assigned to GlobalFoundries
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Patent number: 12292596Abstract: Structures for an optical coupler and methods of forming an optical coupler. The structure comprises a first waveguide core including a first tapered section, a second waveguide core including a second tapered section overlapped with the first tapered section, and an active layer including a third tapered section overlapped with the second tapered section. The first waveguide core comprises a first passive material, the second waveguide core comprises a second passive material, and the active layer comprises an active material.Type: GrantFiled: August 22, 2022Date of Patent: May 6, 2025Assignee: GlobalFoundries U.S. Inc.Inventor: Yusheng Bian
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Patent number: 12294364Abstract: A circuit structure includes an enhancement mode transistor and a turn-off slew rate controller for automatically adding drain-source capacitance to the transistor when the transistor is transitioning to an off state. The added drain-source capacitance slows the turn-off slew rate (dV/dt_off) of the transistor without also increasing the turn-off energy loss (E_off). The slew rate controller can include: sensors connected to the drain region for sensing both the drain voltage and the slew rate, respectively; a logic circuit for generating and outputting an enable signal based on output voltages from the sensors; and a capacitance adder for adding to the drain-source capacitance only when the logic value of the enable signal indicates that the drain voltage is at or above a predetermined positive drain voltage level and the slew rate is positive.Type: GrantFiled: August 25, 2023Date of Patent: May 6, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Santosh Sharma, Mei Yu Soh
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Patent number: 12295161Abstract: An IC structure that includes a trench isolation (TI) in a substrate having three portions of different dielectric materials. The portions may also have different widths. The TI may include a lower portion including a first dielectric material and having a first width, a middle portion including the first dielectric material and an outer second dielectric material, and an upper portion including a third dielectric material and having a second width greater than the first width. The first, second and third dielectric materials are different.Type: GrantFiled: January 24, 2022Date of Patent: May 6, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Rong-Ting Liou, Man Gu, Jeffrey B. Johnson, Wang Zheng, Jagar Singh, Haiting Wang
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Patent number: 12292470Abstract: A structure provides a defect sensor for a cavity in an integrated circuit (IC). The structure includes a cavity defined in a substrate. A boundary is located where the cavity meets with a cavity-free area of the substrate. A metal line is arranged in a serpentine path in both a vertical and a horizontal direction and crosses the boundary. A controller may be provided that is configured to, in response to a change in an electrical characteristic of a signal through the metal line, generate an indication of the presence of a defect and/or change operation of at least one component of the IC. The structure may find application relative to a photonics integrated circuit (PIC) structure including an optical waveguide with a cavity under the optical waveguide.Type: GrantFiled: February 22, 2023Date of Patent: May 6, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Zhuojie Wu, Yunyao Jiang
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Patent number: 12292603Abstract: A photonic integrated circuit (PIC) structure includes a substrate, and a cavity defined in the substrate, the cavity including a shoulder at a side of the cavity. A plurality of z-stop supports for an optical device are also included. Each z-stop support of the plurality of z-stop supports is on a support portion of the shoulder. A wire extends over the side of the cavity and between at least two z-stop supports of the plurality of z-stop supports. An optical device is positioned on the plurality of z-stop supports in the cavity and electrically coupled to the wire. Electrical connections between z-stop supports allows larger sized electrical connections to the optical device to mitigate electromigration issues, and increased options for electrical connections.Type: GrantFiled: September 19, 2022Date of Patent: May 6, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Zhuojie Wu, Seungman Choi
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Patent number: 12293994Abstract: Structures including multiple semiconductor devices and methods of forming same. The structure comprises a first device structure including a first well and a second well in a semiconductor substrate, a second device structure including a doped region in the semiconductor substrate, and a first high-resistivity region in the semiconductor substrate. The first well has a first conductivity type, the second well has a second conductivity type opposite to the first conductivity type, and the first well adjoins the second well to define a p-n junction. The doped region of the second device structure has the first conductivity type or the second conductivity type. The high-resistivity region has a higher electrical resistivity than the semiconductor substrate, and the high-resistivity region is positioned between the first device structure and the second device structure.Type: GrantFiled: September 28, 2022Date of Patent: May 6, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Vvss Satyasuresh Choppalli, Anupam Dutta, Rajendran Krishnasamy, Robert Gauthier, Jr., Xiang Xiang Lu, Anindya Nath
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Patent number: 12289919Abstract: A semiconductor device includes a dielectric layer over a back end of line (BEOL) metal layer, a metallic resistive layer over the dielectric layer, a resistor comprising a metallic resistive film that is a first portion of the metallic resistive layer, and a metal-insulator-metal (MIM) capacitor. The insulator of the MIM capacitor comprises at least two layers including a first layer that is a second portion of the metallic resistive layer and a second layer that is the dielectric layer.Type: GrantFiled: April 17, 2024Date of Patent: April 29, 2025Assignee: GlobalFoundries Singapore Pte. Ltd.Inventors: Venkata Mangathayaru Bollam, Qiying Wong, Yudi Setiawan
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Patent number: 12281996Abstract: Disclosed is a semiconductor structure with a photodiode including: a well region with a first-type conductivity in a substrate, a trench in the well region, and multiple conformal semiconductor layers in the trench. The semiconductor layers include a first semiconductor layer, which is, for example, an intrinsic semiconductor layer and lines the trench, and a second semiconductor layer, which has a second-type conductivity and which is on the first semiconductor layer within (but not filling) the trench and which also extends outside the trench onto a dielectric layer. An additional dielectric layer extends over and caps a cavity that is at least partially within the trench such that surfaces of the second semiconductor layer are exposed within the cavity. Fluid inlet/outlet ports extend to the cavity and contacts extend to the well region and to the second semiconductor layer. Also disclosed are methods for forming and using the semiconductor structure.Type: GrantFiled: June 22, 2022Date of Patent: April 22, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Siva P. Adusumilli, Mark D. Levy, Ramsey M. Hazbun, John J. Ellis-Monaghan
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Patent number: 12283952Abstract: A structure includes a level shifter, first and second variable voltage generators, and a programmable voltage generator. The level shifter includes low and high supply voltage nodes and two parallel branches, including multiple transistors, connected between the nodes. The programmable voltage generator generates and applies a high supply voltage (VH) to the high supply voltage node. VH is programmable to one of multiple possible VH levels. Based on the voltage level of VH, the first variable voltage generator generates and applies a low supply voltage (VL) to the low supply voltage node and the second variable voltage generator generates and applies a gate bias voltage (VGB) to gates of some transistors. By tracking VH and adjusting VL and VGB based on thereon, the voltage level shifter operates within the SOA at high VHs, remains operable at low VHs, and maintains operating speed at mid-level VHs.Type: GrantFiled: July 11, 2023Date of Patent: April 22, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Siva Kumar Chinthu, Venkatesh Periyapatna Gopinath, Suresh Pasupula, Devesh Dwivedi
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Patent number: 12276831Abstract: Structures and methods implement an enlarged multilayer nitride waveguide. The structure may include an inter-level dielectric (ILD) layer over a substrate. A first enlarged multilayer nitride waveguide is positioned in the ILD layer in a region of the substrate. A second multilayer nitride waveguide may also be provided in the ILD layer. A lower cladding layer defines a lower surface of the nitride waveguide(s). The lower cladding layer has a lower refractive index than the nitride waveguide(s). Additional lower refractive index cladding layers can be provided on the upper surface and/or sidewalls of the nitride waveguide(s). The enlarged nitride waveguide may be implemented with other conventional silicon and nitride waveguides.Type: GrantFiled: November 28, 2022Date of Patent: April 15, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Shesh Mani Pandey, Yusheng Bian, Ravi Prakash Srivastava
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Patent number: 12278278Abstract: Structures for a bipolar junction transistor and methods of forming a structure for a bipolar junction transistor. The structure comprises a first terminal including a first raised semiconductor layer, a second terminal including a second raised semiconductor layer, and a base layer positioned in a lateral direction between the first raised semiconductor layer of the first terminal and the second raised semiconductor layer of the second terminal. The structure further comprises a modulator including a semiconductor layer in direct contact with the base layer. The base layer has a first conductivity type, and the semiconductor layer has a second conductivity type opposite to the first conductivity type.Type: GrantFiled: July 25, 2022Date of Patent: April 15, 2025Assignee: GlobalFoundries U.S. Inc.Inventor: Shesh Mani Pandey
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Patent number: 12278178Abstract: An integrated circuit (IC) structure includes a transistor in a device layer over a substrate, the transistor including a gate; and a plurality of interconnect layers over the device layer, the plurality of interconnect layers including a last metal layer. A process-induced damage (PID) protection structure includes a conductor coupling the gate to a well in the substrate but includes an open fuse element therein. A first metal interconnect extends from a first terminal of the open fuse element to a first pad in the last metal layer, and a second metal interconnect extending from a second terminal of the open fuse element to a second pad in the last metal layer. The fuse element is closed during fabrication, and the metal interconnects allow opening of the fuse element to deactivate the PID protection structure after fabrication.Type: GrantFiled: June 29, 2022Date of Patent: April 15, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Michael J. Hauser, Michael J. Zierak
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Patent number: 12278297Abstract: Disclosed are embodiments of a photonic structure with at least one tapered coupler positioned laterally adjacent and along the length of a sidewall of a layer, such as a light absorption layer (LAL), of a photodetector to facilitate mode matching. Some embodiments include a vertically oriented photodetector, which is on an insulator layer and has an LAL stacked between bottom and top semiconductor layers, and a coupler, which is on the insulator layer positioned laterally adjacent to the photodetector and has stacked cores with one of the cores being at the same level as the LAL. Other embodiments include a horizontally oriented photodetector, which is on an insulator layer and has an LAL on a recessed section of a bottom semiconductor layer between side sections, and coupler(s), which is/are above side section(s) of the bottom semiconductor layer and, thus, positioned laterally adjacent to one or both sides of the LAL.Type: GrantFiled: October 27, 2022Date of Patent: April 15, 2025Assignee: GlobalFoundries U.S. Inc.Inventor: Yusheng Bian
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Patent number: 12276835Abstract: Structures for an optical component, such as an optical reflector or an Echelle grating, and methods of forming such structures. The structure comprises a first waveguide core positioned in a vertical direction over a semiconductor substrate. The first waveguide core includes a tapered section and a plurality of segments separated by a plurality of gaps. A second waveguide core, which is positioned in the vertical direction relative to the first waveguide core, includes a portion positioned adjacent to the first waveguide core.Type: GrantFiled: December 1, 2022Date of Patent: April 15, 2025Assignee: GlobalFoundries U.S. Inc.Inventor: Yusheng Bian
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Patent number: 12271030Abstract: Structures for an optical coupler and methods of forming a structure for an optical coupler. The structure comprises a stacked waveguide core including a first waveguide core and a second waveguide core. The first waveguide core includes a first tapered section, and the second waveguide core includes a second tapered section positioned to overlap with the first tapered section. The structure further comprises a third waveguide core including a third tapered section positioned adjacent to the first tapered section of the first waveguide core and the second tapered section of the second waveguide core.Type: GrantFiled: September 26, 2022Date of Patent: April 8, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Yusheng Bian, Won Suk Lee
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Patent number: 12272758Abstract: Structures for a photodetector or light absorber and methods of forming a structure for a photodetector or light absorber. The structure includes a pad, a waveguide core adjoined to the pad, and a light-absorbing layer on the pad. The waveguide core includes a first longitudinal axis, and the light-absorbing layer includes a second longitudinal axis and an end surface intersected by the second longitudinal axis. The end surface of the light-absorbing layer is positioned adjacent to the waveguide core. The first longitudinal axis of the first waveguide core is inclined relative to the second longitudinal axis of the light-absorbing layer and/or the end surface slanted relative to the second longitudinal axis.Type: GrantFiled: April 27, 2021Date of Patent: April 8, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Asif J. Chowdhury, Yusheng Bian, Abdelsalam Aboketaf, Andreas D. Stricker
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Patent number: 12272299Abstract: Disclosed are a pixel and a compact memory-in-pixel display (e.g., implemented in a fully-depleted semiconductor-on-insulator processing technology platform). A block of electronic components for a pixel includes a memory cell array, a driving circuit for an LED, and a logic circuit connected between the memory cell array and driving circuit. The memory cell array is above a Pwell, the driving circuit is above an adjacent Nwell, and the logic circuit includes P-type transistors on the Nwell and N-type transistors on the Pwell. A pixel array is above alternating P and N wells with a single buried Nwell below. Specifically, each column of pixels is above adjacent elongated P and N wells and, within each column, adjacent pixels have mirrored layouts. Furthermore, adjacent columns of pixels are above two elongated wells of one type and a shared elongated well of the opposite type therebetween and the adjacent columns have mirrored layouts.Type: GrantFiled: October 6, 2023Date of Patent: April 8, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Juhan Kim, Sanjay Raj Parihar, Mahbub Rashed, Zahir Yilmaz Alpaslan
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Patent number: 12272740Abstract: Structures for a bipolar junction transistor and methods of fabricating a structure for a bipolar junction transistor. The structure includes a collector having a first semiconductor layer, an emitter having a second semiconductor layer, an intrinsic base including nanosheet channel layers positioned with a spaced arrangement in a layer stack, and a base contact laterally positioned between the first and second semiconductor layers. Each nanosheet channel layer extends laterally from the first semiconductor layer to the second semiconductor layer. Sections of the base contact are respectively positioned in spaces between the nanosheet channel layers. The structure further includes first spacers laterally positioned between the sections of the base contact and the first semiconductor layer, and second spacers laterally positioned between the sections of the base contact and the second semiconductor layer.Type: GrantFiled: December 15, 2021Date of Patent: April 8, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Haiting Wang, Hong Yu, Zhenyu Hu
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Patent number: 12265048Abstract: An integrated circuit (IC) structure includes a substrate; and a plurality of moisture sensors along an edge of an optical input/output (I/O) opening in the substrate. The plurality of moisture sensors are positioned between a primary guard ring and a moisture barrier. The moisture sensors may detect moisture in a sequential manner to monitor moisture ingress and predict when remedial action is necessary. The teachings of the disclosure may be applicable to any IC structure including an I/O opening, and in particular, IC structures that have elongated I/O openings such as photonic integrated structures (PICs) with optical I/O openings for photonics components, e.g., an optical fiber or an external laser. The moisture sensors provide an early and definitive alarm for moisture, with no false alarms. The system accurately predicts time to failure and allows adjustment based on real time field data input.Type: GrantFiled: November 23, 2022Date of Patent: April 1, 2025Assignee: GlobalFoundries U.S. Inc.Inventor: Zhuojie Wu
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Patent number: 12268019Abstract: Structures including a ferroelectric field-effect transistor and methods of forming a structure including a ferroelectric field-effect transistor. The structure comprises a semiconductor substrate, a semiconductor layer, a dielectric layer arranged between the semiconductor layer and the semiconductor substrate, and first and second wells in the semiconductor substrate. The first well has a first conductivity type, and the second well has a second conductivity type opposite to the first conductivity type. A ferroelectric field-effect transistor comprises a gate structure on the semiconductor layer over the first well and the second well. The gate structure includes a ferroelectric layer comprising a ferroelectric material.Type: GrantFiled: October 5, 2022Date of Patent: April 1, 2025Assignee: GlobalFoundries Dresden Module One Limited Liability Company & Co. KGInventors: Stefan Dünkel, Dominik Martin Kleimaier, Zhixing Zhao, Halid Mulaosmanovic