Patents Assigned to GlobalFoundries
  • Patent number: 12336220
    Abstract: Structures for an extended-drain metal-oxide-semiconductor device and methods of forming a structure for an extended-drain metal-oxide-semiconductor device. The structure includes a semiconductor substrate, a body well in the semiconductor substrate, a source region in the body well, a drain well in the semiconductor substrate, a drain region in the drain well, and a gate electrode laterally positioned between the source region and the drain region. The drain well includes an edge adjacent to the body well, and the edge of the drain well has a spaced relationship with the body well.
    Type: Grant
    Filed: February 24, 2022
    Date of Patent: June 17, 2025
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Bong Woong Mun, Upinder Singh, Jeoung Mo Koo, Huihua Jiang
  • Patent number: 12334430
    Abstract: A structure including a first chip and a second chip stacked over the first chip is provided. The first chip includes a first dielectric over a substrate. The second chip includes a second dielectric over the first dielectric. An inductor is arranged at least in part in the first dielectric of the first chip. An electromagnetic shield structure is arranged around the inductor. The electromagnetic shield structure includes a lower shield portion extending at least partially through the first dielectric of the first chip and an upper shield portion extending at least partially through the second dielectric of the second chip. The electromagnetic shield structure is formed in part in the BEOL metallization structure in each of the first chip and the second chip in a heterogenous integration process.
    Type: Grant
    Filed: April 11, 2024
    Date of Patent: June 17, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Muhammed Shafi Kunnathodi, Varuna Ananthapadmanabha Baipadi, Venkata Narayana Rao Vanukuru
  • Patent number: 12336230
    Abstract: An IC structure includes an MFMIS memory cell on a semiconductor substrate, and a CMOS transistor adjacent the MFMIS memory cell on the same semiconductor substrate. A method provides co-integration of the MFMIS memory cell with the CMOS transistor. The method may optionally co-integrate an MFIS memory cell. The IC structure and method provide a lower cost approach to forming MFMIS memory cells, which provide a number of advantages over MFIS memory cells.
    Type: Grant
    Filed: August 13, 2024
    Date of Patent: June 17, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Stefan Dünkel, Dominik Martin Kleimaier, Halid Mulaosmanovic, Johannes Müller, Sven Beyer
  • Patent number: 12332483
    Abstract: Structures including a ring resonator and methods of fabricating a structure including a ring resonator. The structure comprises an optical component, a first ring resonator positioned adjacent to the optical component, and a second ring resonator spaced in a vertical direction from the first ring resonator. The first ring resonator and the second ring resonator have an overlapping relationship.
    Type: Grant
    Filed: June 2, 2022
    Date of Patent: June 17, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventor: Yusheng Bian
  • Patent number: 12327776
    Abstract: A semiconductor device includes a first substrate, a second substrate bonded to the first substrate, and at least one thermally conductive structure that extends through a portion of the first substrate and a portion of the second substrate and is vertically aligned with an active region of the first substrate. The at least one thermally conductive structure is electrically insulated from electrically active structures in the semiconductor device. The thermally conductive structure acts as a heat sink to transfer heat from the active region.
    Type: Grant
    Filed: March 27, 2024
    Date of Patent: June 10, 2025
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Rui Tze Toh, Anupam Dutta, Oscar D. Restrepo, Vibhor Jain, Vvss Satyasuresh Choppalli, John J. Pekarik, Alexander Derrickson
  • Patent number: 12324252
    Abstract: Structures including a photodetector, such as a single-photon avalanche diode, and related methods. The structure comprises a semiconductor layer having a device region and a top surface, and a photodetector including a first well in the device region and a second well. The first well is disposed between the second well and the top surface. The structure further comprises a deep trench isolation region that extends from the top surface into the semiconductor layer. The deep trench isolation region surrounds a perimeter of the device region, and the deep trench isolation region comprises a dielectric material. The structure further comprises a contact including a conductor layer that extends from the top surface of the semiconductor layer to the second well. The contact has a first discrete position about the perimeter of the device region.
    Type: Grant
    Filed: April 29, 2024
    Date of Patent: June 3, 2025
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Francesco Gramuglia, Eng Huat Toh
  • Patent number: 12321010
    Abstract: Structures including a photodetector and methods of forming a structure including a photodetector. The structure comprises a photodetector including a pad having a side edge and a light-absorbing layer disposed on the pad. The structure further comprises a waveguide core including a tapered section positioned adjacent to the side edge of the pad and the light-absorbing layer. The tapered section has a width dimension that decreases with decreasing distance from the side edge of the pad.
    Type: Grant
    Filed: December 20, 2022
    Date of Patent: June 3, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventor: Yusheng Bian
  • Patent number: 12323143
    Abstract: A GaN logic circuit may include an input node receiving an input voltage, a first pull up transistor pulling up an output voltage in response to the input voltage, and a first depletion mode transistor having a first gate to which a first gate voltage is applied and a second gate to which a second gate voltage is applied. The first depletion mode transistor may control the first pull up transistor in response to a gate voltage difference between the first gate voltage and the second gate voltage. The logic device may further include a capacitor having a first end coupled to the first depletion mode transistor and a second end coupled to the first pull up transistor.
    Type: Grant
    Filed: February 10, 2023
    Date of Patent: June 3, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Santosh Sharma, Mei Yu Soh
  • Patent number: 12321009
    Abstract: Structures for a photonic chip that include a photodetector and methods of forming such structures. The structure comprises a photodetector including a pad, a first semiconductor layer on the pad, and a second semiconductor layer on the pad. The second semiconductor layer is laterally spaced from the first semiconductor layer. The structure further comprises a first waveguide core connected to the pad adjacent to the first semiconductor layer, and a second waveguide core connected to the pad adjacent to the second semiconductor layer.
    Type: Grant
    Filed: August 16, 2024
    Date of Patent: June 3, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Abdelsalam Aboketaf, Yusheng Bian, Won Suk Lee
  • Patent number: 12317562
    Abstract: A transistor structure is provided, the structure may be for a high electron mobility transistor (HEMT). The HEMT comprises a channel layer arranged over a substrate, the channel layer may have a top surface. A barrier layer may be arranged over the channel layer. A first opening may be in the barrier layer and extend partially into the channel layer. A first barrier liner may be arranged in the first opening and over the channel layer, the first barrier liner may have a bottom surface. The bottom surface of the first barrier liner may be lower than the top surface of the channel layer.
    Type: Grant
    Filed: November 16, 2021
    Date of Patent: May 27, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Ramsey Hazbun, Anthony Stamper, Zhong-Xiang He, Pernell Dongmo
  • Patent number: 12317557
    Abstract: Structures for a high-voltage field-effect transistor that include a deep trench isolation region and methods of forming such structures. The structure comprises a semiconductor substrate, a semiconductor layer on the semiconductor substrate, and a doped layer between the semiconductor layer and the semiconductor substrate. The structure further comprises a trench isolation region including a metal layer that extends through the semiconductor layer and the doped layer into the semiconductor substrate.
    Type: Grant
    Filed: October 8, 2024
    Date of Patent: May 27, 2025
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventor: Kyong Jin Hwang
  • Patent number: 12300627
    Abstract: Structures for an integrated circuit having a watermark and related methods. The structure comprises a first semiconductor structure including at least one feature with a variation relative to a second semiconductor structure including the at least one feature without the variation. The variation provides a watermark for identifying a Process Design Kit used to form the first semiconductor structure.
    Type: Grant
    Filed: June 21, 2024
    Date of Patent: May 13, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Alain Loiseau, Peter Coutu, Romain Feuillette
  • Patent number: 12294364
    Abstract: A circuit structure includes an enhancement mode transistor and a turn-off slew rate controller for automatically adding drain-source capacitance to the transistor when the transistor is transitioning to an off state. The added drain-source capacitance slows the turn-off slew rate (dV/dt_off) of the transistor without also increasing the turn-off energy loss (E_off). The slew rate controller can include: sensors connected to the drain region for sensing both the drain voltage and the slew rate, respectively; a logic circuit for generating and outputting an enable signal based on output voltages from the sensors; and a capacitance adder for adding to the drain-source capacitance only when the logic value of the enable signal indicates that the drain voltage is at or above a predetermined positive drain voltage level and the slew rate is positive.
    Type: Grant
    Filed: August 25, 2023
    Date of Patent: May 6, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Santosh Sharma, Mei Yu Soh
  • Patent number: 12295161
    Abstract: An IC structure that includes a trench isolation (TI) in a substrate having three portions of different dielectric materials. The portions may also have different widths. The TI may include a lower portion including a first dielectric material and having a first width, a middle portion including the first dielectric material and an outer second dielectric material, and an upper portion including a third dielectric material and having a second width greater than the first width. The first, second and third dielectric materials are different.
    Type: Grant
    Filed: January 24, 2022
    Date of Patent: May 6, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Rong-Ting Liou, Man Gu, Jeffrey B. Johnson, Wang Zheng, Jagar Singh, Haiting Wang
  • Patent number: 12292603
    Abstract: A photonic integrated circuit (PIC) structure includes a substrate, and a cavity defined in the substrate, the cavity including a shoulder at a side of the cavity. A plurality of z-stop supports for an optical device are also included. Each z-stop support of the plurality of z-stop supports is on a support portion of the shoulder. A wire extends over the side of the cavity and between at least two z-stop supports of the plurality of z-stop supports. An optical device is positioned on the plurality of z-stop supports in the cavity and electrically coupled to the wire. Electrical connections between z-stop supports allows larger sized electrical connections to the optical device to mitigate electromigration issues, and increased options for electrical connections.
    Type: Grant
    Filed: September 19, 2022
    Date of Patent: May 6, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Zhuojie Wu, Seungman Choi
  • Patent number: 12293994
    Abstract: Structures including multiple semiconductor devices and methods of forming same. The structure comprises a first device structure including a first well and a second well in a semiconductor substrate, a second device structure including a doped region in the semiconductor substrate, and a first high-resistivity region in the semiconductor substrate. The first well has a first conductivity type, the second well has a second conductivity type opposite to the first conductivity type, and the first well adjoins the second well to define a p-n junction. The doped region of the second device structure has the first conductivity type or the second conductivity type. The high-resistivity region has a higher electrical resistivity than the semiconductor substrate, and the high-resistivity region is positioned between the first device structure and the second device structure.
    Type: Grant
    Filed: September 28, 2022
    Date of Patent: May 6, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Vvss Satyasuresh Choppalli, Anupam Dutta, Rajendran Krishnasamy, Robert Gauthier, Jr., Xiang Xiang Lu, Anindya Nath
  • Patent number: 12292470
    Abstract: A structure provides a defect sensor for a cavity in an integrated circuit (IC). The structure includes a cavity defined in a substrate. A boundary is located where the cavity meets with a cavity-free area of the substrate. A metal line is arranged in a serpentine path in both a vertical and a horizontal direction and crosses the boundary. A controller may be provided that is configured to, in response to a change in an electrical characteristic of a signal through the metal line, generate an indication of the presence of a defect and/or change operation of at least one component of the IC. The structure may find application relative to a photonics integrated circuit (PIC) structure including an optical waveguide with a cavity under the optical waveguide.
    Type: Grant
    Filed: February 22, 2023
    Date of Patent: May 6, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Zhuojie Wu, Yunyao Jiang
  • Patent number: 12292596
    Abstract: Structures for an optical coupler and methods of forming an optical coupler. The structure comprises a first waveguide core including a first tapered section, a second waveguide core including a second tapered section overlapped with the first tapered section, and an active layer including a third tapered section overlapped with the second tapered section. The first waveguide core comprises a first passive material, the second waveguide core comprises a second passive material, and the active layer comprises an active material.
    Type: Grant
    Filed: August 22, 2022
    Date of Patent: May 6, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventor: Yusheng Bian
  • Patent number: 12289919
    Abstract: A semiconductor device includes a dielectric layer over a back end of line (BEOL) metal layer, a metallic resistive layer over the dielectric layer, a resistor comprising a metallic resistive film that is a first portion of the metallic resistive layer, and a metal-insulator-metal (MIM) capacitor. The insulator of the MIM capacitor comprises at least two layers including a first layer that is a second portion of the metallic resistive layer and a second layer that is the dielectric layer.
    Type: Grant
    Filed: April 17, 2024
    Date of Patent: April 29, 2025
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Venkata Mangathayaru Bollam, Qiying Wong, Yudi Setiawan
  • Patent number: 12281996
    Abstract: Disclosed is a semiconductor structure with a photodiode including: a well region with a first-type conductivity in a substrate, a trench in the well region, and multiple conformal semiconductor layers in the trench. The semiconductor layers include a first semiconductor layer, which is, for example, an intrinsic semiconductor layer and lines the trench, and a second semiconductor layer, which has a second-type conductivity and which is on the first semiconductor layer within (but not filling) the trench and which also extends outside the trench onto a dielectric layer. An additional dielectric layer extends over and caps a cavity that is at least partially within the trench such that surfaces of the second semiconductor layer are exposed within the cavity. Fluid inlet/outlet ports extend to the cavity and contacts extend to the well region and to the second semiconductor layer. Also disclosed are methods for forming and using the semiconductor structure.
    Type: Grant
    Filed: June 22, 2022
    Date of Patent: April 22, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Siva P. Adusumilli, Mark D. Levy, Ramsey M. Hazbun, John J. Ellis-Monaghan