Abstract: A laser system for processing conductive link structures includes a seed laser generating a seed laser beam. The seed laser is sliced by a modulator into a user configurable series of pulses and the pulses are optically amplified and applied to a conductive link structure. Preferably, the bandwidth of the seed laser is less than 1 nm with an IR center frequency, and the frequency of the laser light of the pulses is doubled or quadrupled prior to application to the conductive structure. Preferably, the pulses are about 1-18 second pulsewidth and are separated by 100-400 ns.
Abstract: A laser-based method and system for processing targeted surface material and article produced thereby are provided. The system processes the targeted surface material within a region of a workpiece while avoiding undesirable changes to adjacent non-targeted material. The system includes a primary laser subsystem including a primary laser source for generating a pulsed laser output including at least one pulse having a wavelength and a pulse width less than 1 ns. A delivery subsystem irradiates the targeted surface material of the workpiece with the pulsed laser output including the at least one pulse to texture the targeted surface material. The pulsed laser output has sufficient total fluence to initiate ablation within at least a portion of the targeted surface material and the pulse width is short enough such that the region and the non-targeted material surrounding the material are substantially free of slag.
Type:
Grant
Filed:
October 27, 2006
Date of Patent:
December 30, 2008
Assignee:
GSI Group Corporation
Inventors:
Bo Gu, Jonathan S. Ehrmann, Donald J. Svetkoff, Steven P. Cahill, Kevin E. Sullivan
Abstract: A scanning assembly is disclosed for providing controlled movement of a mirror. The scanning assembly includes a motor shaft of a limited rotation motor, a scanning device, and a scanning device mounting unit. The mirror mounting unit includes a tapered base for coupling the scanning device mounting unit to the output shaft of the limited rotation motor. One of the tapered base and the output shaft includes a cylindrical tapered male plug having a decreasing inner diameter that decreases along a direction of coupling of the tapered base and the output shaft for engaging the tapered base to the output shaft. The tapered base includes an overall taper angle of at most about 4.0 degrees from the rotational axis of the output shaft.
Abstract: A precision laser based method of marking semiconductor wafers, packages, substrates or similar workpieces is provided. The workpieces have articles which may include die, chip scale packages, circuit patterns and the like. The marking occurs in a workpiece marking system and within a designated region relative to an article position. The method includes determining at least one location from which reference data is to be obtained using (a) information from which a location of an article is defined, and (b) a vision model of at least a portion of at least one article. Reference data is obtained to locate a feature on a first side of (a second) workpiece using at least one signal from a first sensor. The method further includes positioning a marking field relative to the workpiece so as to position a laser beam at a marking location on a second side of the workpiece. The positioning is based on the feature location.
Abstract: An optical scanning method and system and method for correcting optical aberrations introduced into the system by a beam deflector are provided. The optical scanning method and system utilize a tilt-corrected, off-axis beam deflector. The scanning system includes an off-axis acousto-optic beam deflector with a walk-off angle operated at high speed and post-scan optics used to focus the scanned beam. A tilted in-scan focus plane resulting from beam width variation through the scan and the cylindrical lens effect is corrected with one or more tilted lens elements within the post-scan optical train.
Type:
Grant
Filed:
April 25, 2006
Date of Patent:
December 16, 2008
Assignee:
GSI Group Corporation
Inventors:
Jonathan S. Ehrmann, Donald B. T. Kilgus
Abstract: A control system is disclosed for controlling the movement of a limited rotation motor. The control system includes a computer system and a closed-loop motor controller. The computer system is for generating command digital data including digital input commands for controlling the movement of the limited rotation motor. The closed-loop motor controller includes an input circuit for receiving the command digital data synchronous with a data input signal, a digital control system for processing the command digital data, an output circuit for providing a motor drive signal to the limited rotation motor, and a feedback circuit for providing digital feedback data to said digital control processing circuit. The digital control processing circuit providing closed-loop motor control calculations on a computation cycle that is synchronous with the data input signal.
Abstract: A sheathing of elastically deformable waterproofing sheet material (11) is applied and sealingly secured to a surface area of a hydraulic structure (10; 31; 36, 39) to be protected. The seeped water, which collects behind the waterproof sheathing (11), is discharged by gravity through one-way drainage valves (13), provided in pre-established drainage positions of the waterproof sheathing (11); the drainage valves (13) are automatically opened and closed by the differential pressure of the water acting on opposite faces of a flexible sheet like flat valving member (M) of the drainage valve (13).
Abstract: A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.
Type:
Application
Filed:
July 1, 2008
Publication date:
November 20, 2008
Applicant:
GSI Group Corporation
Inventors:
James J. Cordingley, Jonathan S. Ehrmann, David M. Filgas, Shepard D. Johnson, Joohan Lee, Donald V. Smart, Donald J. Svetkoff
Abstract: A fibre laser is disclosed comprising a single mode or low-order-mode cladding pumped fibre laser oscillator or preamplifier, a cladding pumped fibre laser power amplifier to guide multiple transverse modes, wherein an output from the oscillator or preamplifier is applied through a mode mixing means to the power amplifier. The laser power amplifier is of greater core and cladding diameter than the oscillator or preamplifier, thus enabling lower brightness pump sources to be employed.
Abstract: An optical fibre coupling structure comprising an optical fibre having an elongate input surface and shaped so that the diameter of the core of the fibre reduces in one dimension away from the input while increasing in the other dimension away from the input to form respective convergent and divergent surfaces, towards an output which is more circular than the input.
Abstract: A limited rotation motor optical scanning system is disclosed that includes a limited rotation motor scanner, a digital controller servo system, a position feedback unit, a wide angle compensation unit, a digital processor, and an adjustment unit. The limited rotation motor scanner element is adapted for directing an energy beam to at least one location within a field of view. The digital controlled servo system is adapted for controlling motion of the limited rotation motor scanner element in accordance with a servo command waveform. The position feedback unit is for providing a position feedback signal indicative of a rotational position of the limited rotation motor scanner element. The wide angle compensation unit is for receiving the position feedback signal and for providing a boost signal that is representative of a boost factor that compensates for torque constant variation with the rotational position of said limited rotation motor scanner element.
Type:
Grant
Filed:
January 26, 2007
Date of Patent:
September 2, 2008
Assignee:
GSI Group Corporation
Inventors:
Michael B. Nussbaum, Michael R. Shannon, Frederick A. Stewart
Abstract: Carbon nanotubes, which carry surface functional groups on side walls thereof relative to lengths thereof, and a dispersant are added to a base liquid to provide a heat transport medium capable of achieving high heat conductivity while suppressing an increase in kinetic viscosity.
Type:
Application
Filed:
February 15, 2008
Publication date:
August 21, 2008
Applicants:
HONDA MOTOR CO., LTD., GSI CREOS CORPORATION
Abstract: A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measurement cuts, using non-sequential collinear cutting, using spot fan-out parallel cutting, and using a retrograde scanning technique for faster collinear cuts. Non-sequential cutting is also used to manage thermal effects and calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid resistor damage.
Type:
Grant
Filed:
May 18, 2005
Date of Patent:
August 5, 2008
Assignee:
GSI Group Corporation
Inventors:
Bruce L. Couch, Jonathan S. Ehrmann, Yun Fee Chu, Joseph V. Lento, Shepard D. Johnson
Abstract: A mirror is disclosed for use in motor system. The mirror includes a composite with at least one of silicon carbide, boron, and boron carbide and an alloying agent that increases the electrical conductivity of the composite sufficient for the composite to be processed by electrical discharge machining.
Abstract: An energy beam machining system includes an emitter for emitting an energy beam and beam adjusting optics, such as a zoom telescope, for adjusting the pupil size of the system to multiple values. The adjusting of the pupil size can be carried out automatically, semi-automatically, or manually. In manual modes, instructions can be presented to the operator (e.g., via a monitor or pre-programmed audio instruction) indicating how to adjust pupil size. A focus lens focuses the adjusted beam directed along each path at a different focal point within a scan field encompassed in the field of view of the focus lens. Beam directing optics are configured to enable multiple scan fields within the field of view of the focus lens.
Abstract: Laser pulses are selected from a group of closely spaced laser pulses with an optical modulator by adjusting pulse timing relative to an impingement interval. An adjusted pulse is moved from an impingement interval to a non-impingement interval and is blocked. The blocked laser source is stabilized by running nearly continuously. Pulse selection with multiple laser sources is achieved with a single acousto-optic modulator.
Type:
Application
Filed:
January 3, 2008
Publication date:
July 10, 2008
Applicant:
GSI GROUP CORPORATION
Inventors:
James Cordingley, Dimitry Maltsev, Michael Plotkin
Abstract: A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.
Type:
Grant
Filed:
May 2, 2006
Date of Patent:
July 1, 2008
Assignee:
GSI Group Corporation
Inventors:
James J. Cordingley, Jonathan S. Ehrmann, Joseph J. Griffiths, Shepard D. Johnson, Joohan Lee, Donald V. Smart, Donald J. Svetkoff
Abstract: A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.
Type:
Grant
Filed:
November 7, 2006
Date of Patent:
June 3, 2008
Assignee:
GSI Lumonics Corporation
Inventors:
James J. Cordingley, Jonathan S. Ehrmann, David M. Filgas, Shepard D. Johnson, Joohan Lee, Donald V. Smart, Donald J. Svetkoff