Patents Assigned to GSI
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Patent number: 6956491Abstract: Techniques for qualifying and monitoring bearing performance and condition in a rotary servo systems (e.g., galvanometer scanner) are disclosed. A position error signal is analyzed for signal anomalies that can signify bearing damage. A DC offset ramp is applied to the position error signal to test whether the anomaly is angular position dependent. The anomaly is associated with the corresponding command signal value and range of values to calculate the angular position and range of the apparent bearing damage. The amplitude of the anomaly is measured and associated with a relative degree of bearing damage.Type: GrantFiled: June 13, 2003Date of Patent: October 18, 2005Assignee: GSI Lumonics CorporationInventor: David C. Bown
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Patent number: 6951995Abstract: A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measurement cuts, using non-sequential collinear cutting, using spot fan-out parallel cutting, and using a retrograde scanning technique for faster collinear cuts. Non-sequential cutting is also used to manage thermal effects and calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid resistor damage.Type: GrantFiled: March 26, 2003Date of Patent: October 4, 2005Assignee: GSI Lumonics Corp.Inventors: Bruce L. Couch, Jonathan S. Ehrmann, Yun Fee Chu, Joseph V. Lento, Shepard D. Johnson
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Publication number: 20050212906Abstract: A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.Type: ApplicationFiled: May 9, 2005Publication date: September 29, 2005Applicant: GSI Lumonics CorporationInventors: James Cordingley, Roger Dowd, Jonathan Ehrmann, Joseph Griffiths, Joohan Lee, Donald Smart, Donald Svetkoff
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Patent number: 6949844Abstract: A high-speed precision positioning apparatus has a stage supported by a platen. The stage is driven by a plurality of drive motors that are co-planar with the stage and arranged symmetrically around the stage. The drive motors apply drive forces directly to the stage without any mechanical contact to the stage. The drive forces impart planar motion to the stage in at least three degrees of freedom of motion. In the remaining three degrees of freedom the motion is constrained by a plurality of fluid bearings that operate between the stage and the platen. The drive motors are configured as magnets, attached to the stage, moving in a gap formed in-between top and bottom stationary coils. Integral force cancellation is implemented by a force cancellation system that applies cancellation forces to the stage. The cancellation forces, which are co-planar with a center of gravity of the stage and any components that move with the stage, cancel forces generated by planar motion of the stage.Type: GrantFiled: December 29, 2003Date of Patent: September 27, 2005Assignee: GSI Group CorporationInventors: Steven P. Cahill, Bradley L. Hunter
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Publication number: 20050205778Abstract: A system for probing circuit elements, includes a panel fixture, probe holder and stage. The fixture has a platen surface to support a work piece having work piece surface. The work piece surface is substantially parallel to the platen surface and has a target element thereon. The probe holder is configured to support a probe for detecting a characteristic of the target element. A stage rotates the probe holder about an axis substantially orthogonal to the platen surface, to align the probe with probe locations associated with the circuit element, so that the characteristic of the circuit element can detected by the probe. Fixturing motion can be optimized for efficient work piece manufacturing. Calibration and vision subassemblies are also provided.Type: ApplicationFiled: October 18, 2004Publication date: September 22, 2005Applicant: GSI LUMONICS CORPORATIONInventors: Anton Kitai, Andreas Mank, Paul Labelle, Andrei Naumov, Ian Miller, Robert Parker
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Publication number: 20050199598Abstract: A high-speed method and system for precisely positioning a waist of a material-processing laser beam to dynamically compensate for local variations in height of microstructures located on a plurality of objects spaced apart within a laser-processing site are provided. In the preferred embodiment, the microstructures are a plurality of conductive lines formed on a plurality of memory dice of a semiconductor wafer. The system includes a focusing lens subsystem for focusing a laser beam along an optical axis substantially orthogonal to a plane, an x-y stage for moving the wafer in the plane, and a first air bearing sled for moving the focusing lens subsystem along the optical axis.Type: ApplicationFiled: May 10, 2005Publication date: September 15, 2005Applicant: GSI Lumonics CorporationInventors: Bradley Hunter, Steven Cahill, Jonathan Ehrmann, Michael Plotkin
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Publication number: 20050184036Abstract: A high-speed method and system for precisely positioning a waist of a material-processing laser beam to dynamically compensate for local variations in height of microstructures located on a plurality of objects spaced apart within a laser-processing site are provided. In the preferred embodiment, the microstructures are a plurality of conductive lines formed on a plurality of memory dice of a semiconductor wafer. The system includes a focusing lens subsystem for focusing a laser beam along an optical axis substantially orthogonal to a plane, an x-y stage for moving the wafer in the plane, and a first air bearing sled for moving the focusing lens subsystem along the optical axis.Type: ApplicationFiled: April 26, 2005Publication date: August 25, 2005Applicant: GSI Lumonics CorporationInventors: Bradley Hunter, Steven Cahill, Jonathan Ehrmann, Michael Plotkin
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Publication number: 20050174580Abstract: A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors.Type: ApplicationFiled: April 8, 2005Publication date: August 11, 2005Applicant: GSI Lumonics CorporationInventors: Donald Svetkoff, Donald Kilgus, Warren Lin, Jonathan Ehrmann
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Publication number: 20050161444Abstract: An energy beam machining system includes an emitter for emitting an energy beam and beam adjusting optics, such as a zoom telescope, for adjusting the pupil size of the system to multiple values. The adjusting of the pupil size can be carried out automatically, semi-automatically, or manually. In manual modes, instructions can be presented to the operator (e.g., via a monitor or pre-programmed audio instruction) indicating how to adjust pupil size. A focus lens focuses the adjusted beam directed along each path at a different focal point within a scan field encompassed in the field of view of the focus lens. Beam directing optics are configured to enable multiple scan fields within the field of view of the focus lens.Type: ApplicationFiled: October 18, 2004Publication date: July 28, 2005Applicant: GSI LUMONICS CORPORATIONInventors: Anton Kitai, Jonathan Ehrmann
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Publication number: 20050150880Abstract: A laser-based method of removing a target link structure of a circuit fabricated on a substrate includes generating a pulsed laser output at a pre-determined wavelength less than an absorption edge of the substrate. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target structure to reduce the reflectivity of the target structure and efficiently couple the focused laser output into the target structure to remove the link without damaging the substrate.Type: ApplicationFiled: December 3, 2004Publication date: July 14, 2005Applicant: GSI Lumonics CorporationInventors: Bo Gu, Donald Smart, James Cordingley, Joohan Lee, Donald Svetkoff, Shepard Johnson, Jonathan Ehrmann
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Publication number: 20050150879Abstract: A laser-based method of removing a target link structure of a circuit fabricated on a substrate includes generating a pulsed laser output at a pre-determined wavelength less than an absorption edge of the substrate. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target structure to reduce the reflectivity of the target structure and efficiently couple the focused laser output into the target structure to remove the link without damaging the substrate.Type: ApplicationFiled: December 3, 2004Publication date: July 14, 2005Applicant: GSI Lumonics CorporationInventors: Bo Gu, Donald Smart, James Cordingley, Joohan Lee, Donald Svetkoff, Shepard Johnson, Jonathan Ehrmann
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Patent number: 6901881Abstract: A drinker for a watering system of a poultry house comprising a housing having a side wall, a top, and a bottom defining a valve chamber having an inner surface and a floor. A valve seat is formed in the chamber above the outlet port; and a valve member received within the chamber to be movable between a first closed position and a second position opened position. A trigger pin passes through the outlet and has a head with a cavity in the top surface. The cavity has a shape different from the shape of the valve member. The drinker elements are sized such that the distance between the valve seat and the chamber floor is greater than the height of the pin head. Additionally, the valve member is sized such that when the valve member is in its closed position, the valve member is does not contact the pin head.Type: GrantFiled: September 29, 2003Date of Patent: June 7, 2005Assignee: The GSI Group, Inc.Inventors: Eugene B. Pollock, James M Adermann
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Publication number: 20050115937Abstract: A laser-based method of removing a target link structure of a circuit fabricated on a substrate includes generating a pulsed laser output at a pre-determined wavelength less than an absorption edge of the substrate. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target structure to reduce the reflectivity of the target structure and efficiently couple the focused laser output into the target structure to remove the link without damaging the substrate.Type: ApplicationFiled: December 3, 2004Publication date: June 2, 2005Applicant: GSI Lumonics CorporationInventors: Bo Gu, Donald Smart, James Cordingley, Joohan Lee, Donald Svetkoff, Shepard Johnson, Jonathan Ehrmann
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Publication number: 20050115936Abstract: A laser-based method of removing a target link structure of a circuit fabricated on a substrate includes generating a pulsed laser output at a pre-determined wavelength less than an absorption edge of the substrate. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target structure to reduce the reflectivity of the target structure and efficiently couple the focused laser output into the target structure to remove the link without damaging the substrate.Type: ApplicationFiled: December 3, 2004Publication date: June 2, 2005Applicant: GSI Lumonics CorporationInventors: Bo Gu, Donald Smart, James Cordingley, Joohan Lee, Donald Svetkoff, Shepard Johnson, Jonathan Ehrmann
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Patent number: 6897644Abstract: An apparatus and a method for monitoring a signal are proposed. The apparatus comprises: a first detector (10) to which the signal is supplied and which, when the signal exceeds the predetermined first threshold value, emits a trigger signal, a second detector (20) to which the signal is also supplied and which, when the signal exceeds the predetermined second threshold value, emits an exceed signal, a signal generator (30) to which the output of the first detector (10) is supplied and which starts to emit a window signal of a predetermined duration as soon as the trigger signal appears at its input side, an AND gate (40) to which the output of the first detector (10) and the output of the signal generator (30) are supplied at its input side and which generates a peak-detection signal when the window signal and the exceed signal are present at its input side.Type: GrantFiled: September 10, 1999Date of Patent: May 24, 2005Assignee: GSI Gesellschaft fuer Schwerionenforschung mbHInventor: Eugen Badura
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Patent number: 6897435Abstract: The disclosed electronic processing apparatus calculates and applies calibrations to sensors that produce quasi-sinusoidal, quadrature signals. The apparatus includes either or both of fixed and programmable electronic circuits. The apparatus includes a circuit to calculate the phase and magnitude corresponding to the two input (quadrature) signals. The apparatus also includes a circuit for accumulating the number of cycles of the input signals. The apparatus also includes a circuit to generate Gain, Offset, and Phase calibration coefficients, wherein the circuit compares the phase space position of the measured phasor with the position of an idealized phasor, the locus of the idealized phasor in phase space being a circle of predetermined radius with no offset. The calculation of the coefficients occurs without user intervention, according to a pre-programmed rule or rules.Type: GrantFiled: October 31, 2002Date of Patent: May 24, 2005Assignee: GSI Lumonics CorporationInventors: Paul Remillard, Stuart Schechter, Douglas A. Klingbeil
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Publication number: 20050092720Abstract: A laser-based method of removing a target link structure of a circuit fabricated on a substrate includes generating a pulsed laser output at a pre-determined wavelength less than an absorption edge of the substrate. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target structure to reduce the reflectivity of the target structure and efficiently couple the focused laser output into the target structure to remove the link without damaging the substrate.Type: ApplicationFiled: December 3, 2004Publication date: May 5, 2005Applicant: GSI Lumonics CorporationInventors: Bo Gu, Donald Smart, James Cordingley, Joohan Lee, Donald Svetkoff, Shepard Johnson, Jonathan Ehrmann
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Patent number: 6883881Abstract: A portable kitchen is described and which includes a kitchen surface having a food preparation area and first and second sink areas defined by the kitchen surface; and a heat resistant surface which can be releasably mounted in a plurality of operable orientations relative to the kitchen surface.Type: GrantFiled: January 17, 2003Date of Patent: April 26, 2005Assignee: GSI Sports Products, Inc.Inventor: Kurt F. Gauss
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Patent number: D505294Type: GrantFiled: October 19, 2004Date of Patent: May 24, 2005Assignee: GSI Sports Products, Inc.Inventor: Kurt F. Gauss
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Patent number: D508185Type: GrantFiled: October 19, 2004Date of Patent: August 9, 2005Assignee: GSI Sports Products, Inc.Inventor: Kurt F. Gauss