Abstract: Provided is a vacuum processing method capable of preventing particles from adhering to a wafer due to a titanium (Ti)-based reaction product. The vacuum processing method is applicable to a plasma processing apparatus including: a sample stage disposed in a processing chamber inside a vacuum container, on which a wafer having a titanium (Ti)-containing film is placed; a coil supplied with a radio frequency power for forming plasma in the processing chamber; and a heating device that emits an electromagnetic wave for heating the wafer placed on an upper surface of the sample stage. The vacuum processing method includes a step of etching the titanium (Ti)-containing film, and a step of cleaning an inside of the processing chamber by using a mixed gas of nitrogen trifluoride (NF3) gas, argon gas, and a chlorine gas.

Abstract: There is provided a charged particle beam system having a computer system for controlling an acceleration voltage of a charged particle beam emitted from a charged particle source, the system including: a first diaphragm group having first and second diaphragms which are diaphragms that act on the charged particle beam and have different thicknesses; and a first diaphragm switching mechanism for switching the diaphragm in the first diaphragm group, in which the computer system controls the first diaphragm switching mechanism so as to switch from the first diaphragm to the second diaphragm according to an increase or decrease of the acceleration voltage.

Abstract: When adjusting optical axes of a multi-beam charged particle beam device, because parameters of optical systems are inter-dependent, the time required to adjust the parameters increases. Thus, the present invention provides a charged particle beam device provided with an optical parameter setting unit for setting parameters of optical systems for emitting a plurality of primary charged particle beams to a sample, detectors for individually detecting a plurality of secondary charged particle beams discharged from the sample, a plurality of memories for storing signals detected by the detectors and converted into digital pixels in the form of images, evaluation value derivation units for deriving evaluation values of the primary charged particle beams from the images, and a GUI capable of displaying the images and receiving an input from a user, wherein the GUI displays the images and evaluation results based on the evaluation values and changes various optical parameters in real-time.

Abstract: A charged particle beam device which prevents an appearance of a shading contrast due to azimuth discrimination and obtains a clear magnetic domain contrast image with a high resolution and a high throughput. The charged particle beam device includes an electron beam source; a sample stage; an objective lens configured to focus electron beams on a sample; a detector that is mounted on a charged particle beam source side with respect to the objective lens and separately detects secondary electrons emitted in azimuth angle ranges of two or more different azimuths for the same observation region; an image processing and image management device including an image processing unit configured to perform synthesis after performing shading correction and contrast adjustment on an image obtained by detecting a first emission azimuth and an image obtained by detecting a second emission azimuth; an image database; and an image display unit.

Abstract: The analysis apparatus includes a standby section which is provided between a dispensing operation of an analysis item B? prior to an analysis item C and the sample analysis channel introduction. The sample analysis channel introduction is arranged prior to a data collection section of an analysis item A. The operation is started earlier but after a sample dispensing operation section of the analysis item A. A sample dispensing operation section of the analysis item C can be started earlier and the analysis time of the analysis item C can be moved to immediately after a sample analysis operation section of the analysis item B?. The analysis item A in a second cycle can be started earlier by the early start time of the analysis item C in a first cycle. A total processing time Tc can be shorter than a total processing time Tb.

Abstract: The automatic analyzer includes: a sample dispensing unit that dispenses a sample into a reaction vessel; a reagent dispensing unit that dispenses a reagent into the reaction vessel; a control unit that controls the sample dispensing unit and the reagent dispensing unit; and a measurement unit that measures a mixed solution of the sample and the reagent mixed in the reaction vessel. The reagent includes three types of reagents of: a first reagent that specifically binds to an antigen in the sample; a second reagent that specifically binds to a site different from that to which the first reagent binds with respect to the antigen and has a label to be detected by the measurement unit; and a third reagent that specifically binds to a site different from the binding site of the first reagent and the antigen and contains insoluble carriers.

Abstract: An electron beam emitted from a photoexcited electron gun is increased in luminance. An electron gun 15 includes: a photocathode 1 including a substrate 11 and a photoelectric film 10; a light source 7 that emits pulsed excitation light; a condenser lens 2 that focuses the pulsed excitation light toward the photocathode; and an extractor electrode 3 that faces the photocathode and that accelerates an electron beam generated from the photoelectric film by focusing the pulsed excitation light by the condenser lens, transmitting the pulsed excitation light through the substrate of the photocathode, and causing the pulsed excitation light to be incident on the photocathode. The pulsed excitation light is condensed at different timings at different positions on the photoelectric film of the photocathode.

Abstract: An image diagnosis support device according to the invention executes a processing of inputting an image, a processing of extracting a feature of an object from a target image to be processed, a processing of extracting a feature of a training image and creating a feature dictionary, a processing of classifying the target image based on the feature and calculating an classification value, a processing of classifying a feature similarity of the target image using the feature dictionary and calculating a feature similarity classification value, and a processing of determining presence or absence of the object and a likelihood of the object for the target image using the classification value and the feature similarity classification value.

Abstract: An image processing device includes: an image reception unit for receiving an input image; an image generation unit for generating an image for extracting a feature from the input image; a feature extraction unit for extracting a feature from the generation image generated by the image generation unit; an identification unit for identifying an object in the image using the feature output from the feature extraction unit; an output unit for outputting an identification result output from the identification unit; and a feature map generation unit for instructing the image generation unit generating a new generation image based on the feature output from the feature extraction unit, and generating a feature map indicating a feature extraction condition for the new generation image and output the generated feature map to the feature extraction unit. With this configuration, a target object in the image is identified quickly and accurately.

Abstract: An electrode formed by molding a semiconductor device with resin. The electrode comprises: a first resin mold portion formed on a front surface of the semiconductor device and having a first thickness (t1); a second resin mold portion formed on a back surface of the semiconductor device and having a second thickness (t2) greater than the first thickness; and an exposed portion formed in a part of the first resin mold portion corresponding to an end of the semiconductor device.

Abstract: An automatic analysis device includes a processing unit 3 which performs the treatment on a specimen before analysis of the specimen, supply equipment which supplies a reagent to a reaction vessel 11 disposed in the processing unit 3, a liquid temperature adjusting unit 1 which adjusts a temperature of the reagent supplied to the reaction vessel 11 by the supply equipment, a control unit 201, and a first temperature detection unit 4 which detects at least one temperature of a temperature of the air within the processing unit 3 and a temperature of the reagent supplied to the reaction vessel 11, in which the liquid temperature adjusting unit 1 and the control unit 201 execute temperature adjustment of the reagent based on a first temperature detected by the first temperature detection unit 4.

Abstract: An automated analyzer is provided that includes a sample probe for dispensing a substance to be dispensed into a plurality of reaction vessels for causing a sample to be analyzed to react with a reagent, a measurement unit (e.g., light source, spectrophotometer, and control device) for measuring a reaction liquid produced from the sample and reagent in a reaction vessel, a cleaning tank for probe cleaning, and a control device for controlling the operation of the probe, measurement unit, and cleaning tank. The cleaning tank includes a cleaning pool for storing cleaning water for immersing and cleaning the probe and a drying tank for sucking up the cleaning water on the surface of the probe after the probe has been immersed in the cleaning water of the cleaning water pool and cleaned. As a result, it is possible to reduce the amount of cleaning water used to clean the probe.

Abstract: The automatic analyzer includes a housing unit capable of housing a plurality of reagent bottles each of which has an IC tag on one surface of short-side side surfaces thereof, an antenna used to communicate with the IC tag, a detector that detects the presence or absence of a reagent bottles, and a control unit. The housing unit includes a housing container cooled by a cooling machine, a heat insulating material, a reagent tray provided with a plurality of reagent bottle holding portions that hold the reagent bottles, a disk rotatably holding the reagent tray, and a driving unit driving the disk, and when it is unable to communicate with the IC tag of the reagent bottle installed in the reagent bottle holding portion where the reagent bottle is detected by the detector, the control unit determines that the reagent bottle is installed in a reverse direction.

Abstract: The present invention implements an ion detector with which it is possible to avoid direct collisions of negative ions with a scintillator, prevent degradation of the scintillator, prolong life of the scintillator, reduce the need for maintenance, and perform highly sensitive detection of both positive and negative ions. With respect to a reference line 65 connecting a central point 63 of a positive ion CD 52 and a central point 64 of a counter electrode 54, a central point 66 of a negative ion CD 53 is provided in a region of a side opposite to a region of a side of a central point 67 of a scintillator 56. Positive ions entering from an ion entrance 62 receive a deflection force and collide with the positive ion CD 52 to generate secondary electrons. The generated secondary electrons collide with the scintillator 56 to generate light. The generated light passes through a light guide 59 and is detected by a photomultiplier tube 58. A negative potential barrier is generated along the reference line 65.

Abstract: A Johnsen-Rahbek force type electrostatic chuck including: a metal substrate; an electrode for electrostatic attraction provided on the metal substrate with an insulating layer interposed between the metal substrate and the electrode for electrostatic attraction; and a dielectric layer constituting an electrostatic attraction surface in contact with a workpiece. The dielectric layer includes a ceramic spray coating and a sealing component with which pores of the ceramic spray coating are filled, and the sealing component contains a metal organic salt containing a rare earth element.

Abstract: The purpose of the present invention is to allow a clean airflow around a substrate to reliably move downward of the substrate in an examination device in which clean air is supplied to an inspection chamber. This examination device is provided with a rectifying plate (see FIG. 4A) which covers a part of the upper surface of a stage for mounting a substrate, and is disposed between a gas supply unit and the stage to block an airflow toward the substrate.

Abstract: Provided are a program and personal information protection method which are executed by a system which is operated by a medical practitioner, said program and method comprising: a display process of causing a monitor part 2 to display an examination result screen 3 including personal information which identifies a subject; an identification process of identifying the personal information in the examination result screen 3 which is displayed in the display process; and an invalidation process of invalidating the personal information identified in the identification process in a captured image which includes the examination result screen 3. Instances of personal information being displayed in error to outside users are thus reduced in comparison to the prior art, and sharing of examination result information is implemented smoothly.

Abstract: The automatic analysis device 100 is provided with: a specimen dispensing mechanism 101 that dispenses subject blood plasma and/or normal blood plasma to be added to correct the coagulation time of the subject blood plasma, into a plurality of specimen containers 103; reaction containers 104 that contain the subject blood plasma and/or the normal blood plasma; a reagent dispensing mechanism 106 that dispenses a reagent into the reaction containers 104; and a detecting unit 113 which applies light from a light source 115 to the subject blood plasma and/or the normal blood plasma to which the reagent is added in the reaction containers 104, and which measures the coagulation time on the basis of the obtained scattered light and/or transmitted light.

Abstract: A plasma processing apparatus adapted to reduce non-uniformity of plasma distribution in a process chamber and to adjust the plasma distribution to “centrally high density”, “circumferentially high density”, or “uniform density” in accordance with a desired etching process, a process chamber; a radio frequency power source; a rectangular waveguide; and a circular waveguide connected to the rectangular waveguide, in which the rectangular waveguide includes an upper rectangular waveguide and a lower rectangular waveguide formed by vertically dividing the rectangular waveguide; and a cutoff section which cuts off the microwave frequency power and which has a dielectric body. The circular waveguide includes an inner waveguide connected to the upper rectangular waveguide and formed inside; and an outer waveguide connected to the lower rectangular waveguide and formed on an outer side of the inner waveguide. The cutoff section has a width narrower than those of the rectangular waveguides except the cutoff section.

Abstract: Problem Provided is an electrolyte analyzer that allows reducing a load of a user in a replacement work compared with conventional one. Solution An electrolyte analyzer includes an ISE electrode 1 that includes at least one electrode, a reference electrode 2 that includes at least one electrode different from the ISE electrode 1, and a housing 200 that houses the electrodes of the ISE electrode 1 and the reference electrode 2. The housing 200 includes a pressing unit that presses the electrodes to one another, a first press switching unit 210 that switches the ISE electrode 1 between a secured state and a released state, and a second press switching unit 215 that switches the reference electrode 2 between a secured state and a released state. The ISE electrode 1 and the reference electrode 2 are each switched between the secured state and the released state. Selected Drawing: FIG.