Patents Assigned to HITACHI HIGH-TECH SCIENCE CORPORATION
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Patent number: 12072324Abstract: To enable appropriate analysis to easily be performed in accordance with an object to be analyzed, provided is an apparatus for determining a chromatograph analysis method includes: an input portion (220) configured to receive input of a sample name of a sample to be analyzed and a component name; a storage (230) configured to store an analysis method for a component corresponding to the component name in the sample corresponding to the sample name so that the analysis method is associated with the sample name and the component name; and a controller (210) configured to search the storage for the analysis method, which corresponds to the sample name and the component name input to the input portion, to read the analysis method from the storage, and present the analysis method to a user.Type: GrantFiled: September 9, 2019Date of Patent: August 27, 2024Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Masahito Ito, Yusuke Hosen, Shinichi Ozawa
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Patent number: 12038419Abstract: In order to obtain analysis conditions, there is provided a liquid chromatography data processing device which generates, based on data regarding analysis conditions of a chromatography device and data on separation performance, display data that displays a graph showing correspondence of data regarding analysis conditions of the chromatography device and separation performance, generating a first group of biaxial data regarding the above analysis conditions, second group of biaxial data obtained by calculation comprising multiplication and/or division of two data of the first group of biaxial data, and display data according to a graph showing correspondence of the data regarding separation performance, wherein at least each axis of the first group of biaxial data and the second group of biaxial data is represented as a logarithmic axis.Type: GrantFiled: September 16, 2021Date of Patent: July 16, 2024Assignee: Hitachi High-Tech Science CorporationInventors: Masahito Ito, Katsutoshi Shimizu
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Patent number: 11927527Abstract: When a measurement sample whose absorbance greatly changes depending on a wavelength range is measured, measurement with a high S/N ratio and accuracy can be efficiently performed in a short time. For a plurality of wavelength ranges in wavelength scanning measurement of a measurement sample, based on measurement conditions including one of a plurality of dimming plates (16a to 16e) to be disposed in each wavelength range and a scanning speed of a wavelength to be set in each wavelength range, when wavelength scanning measurement in which the entire measurement wavelength range including all of the plurality of wavelength ranges is scanned at once is performed, a spectrophotometer (100) changes one of the plurality of dimming plates (16a to 16e) and the scanning speed according to the measurement conditions for each wavelength range.Type: GrantFiled: June 15, 2022Date of Patent: March 12, 2024Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Kai Maruyama, Takayuki Wakui
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Patent number: 11906428Abstract: Provided is a spectrofluorophotometer acquiring both a spectrum and a sample image in measurement of fluorescence of a liquid sample. A spectrofluorophotometer includes a light source, an excitation-side spectroscope that performs spectral dispersion of light of the light source and generates excitation light, a fluorescence-side spectroscope that performs spectral dispersion of fluorescence emitted from a sample irradiated with excitation light into monochromatic light, a sample container installation portion for holding a sample container which receives a liquid sample and is formed of a transparent material, a detector that detects fluorescence emitted from the liquid sample, and an image capturing device that captures a sample image of a sample emitting fluorescence.Type: GrantFiled: December 10, 2021Date of Patent: February 20, 2024Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Kai Maruyama, Jun Horigome, Hideyuki Sakamoto
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Patent number: 11906899Abstract: Disclosed is a mask defect repair apparatus that is capable of performing defect repair with high accuracy without exposure of a mask to air while being moved between the mask defect repair apparatus and an inspection device. The mask defect repair apparatus emits charged particle beams with an amount of irradiation therewith which is corrected by a correction unit while supplying gas to a defect of the mask, thereby forming a deposition film.Type: GrantFiled: February 7, 2020Date of Patent: February 20, 2024Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Yoshitomo Nakagawa, Mitsuto Aso, Katsumi Suzuki, Mamoru Okabe, Masakatsu Hasuda
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Patent number: 11872564Abstract: A thermostatic apparatus thermostatically holds a sample container holding a sample. The thermostatic apparatus includes a sample rack which accommodates and holds a plurality of the sample containers and is attachable to and detachable from the thermostatic apparatus; and a heat conduction member which is controlled to a constant temperature and transfers heat to the sample container, in which an opening portion is formed in the sample rack, and when the sample rack is mounted on the thermostatic apparatus, a contact portion forming one part of the heat conduction member directly contacts the sample container by passing through the opening portion, or directly contacts the sample container protruding from the opening portion.Type: GrantFiled: August 21, 2018Date of Patent: January 16, 2024Assignee: Hitachi High-Tech Science CorporationInventors: Atsuki Morisaki, Koji Yamamoto, Masahito Ito
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Publication number: 20240011833Abstract: A spectroscopic analysis system includes: an operation panel configured to receive an input of at least one of an upper limit value of a measurement period of a spectroscopic analysis spectrum or a lower limit value of measurement accuracy as a user setting condition related to measurement of the spectroscopic analysis spectrum of a sample; and a control unit configured to derive a predetermined recommended measurement condition that satisfies the user setting condition and cause a display unit to display the recommended measurement condition, in which the recommended measurement condition is at least one of a wavelength range of light to be used for measurement of the spectroscopic analysis spectrum, a sampling interval of a wavelength of the light, a slit width of a diffraction grating of a spectroscope that disperses the light, or a sweep speed of the wavelength of the light.Type: ApplicationFiled: June 28, 2023Publication date: January 11, 2024Applicant: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Akihiro Nojima, Yusuke Kaga, Takuya Kambayashi, Jun Horigome, Kai Maruyama
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Patent number: 11867671Abstract: The present invention provides a highly versatile method for amino acid analysis, the method enabling separation and analysis of amino acids in a sample with high precision in a shorter time. This method is a method for amino acid analysis, the method including a step of allowing a sample containing a plurality of amino acids to flow together with an eluent 2 through a separation column 4 packed with a cation exchange resin, thereby separating the amino acids, and a step of detecting the separated amino acids, wherein the eluent 2 is an eluent containing a divalent or higher inorganic acid, a cation source, and water, and having a pH of 5.0 or lower, and the sample is allowed to flow through the separation column 4 heated by applying a temperature gradient including a temperature region of 100° C. or higher.Type: GrantFiled: December 19, 2019Date of Patent: January 9, 2024Assignees: NATIONAL UNIVERSITY CORPORATION SAITAMA UNIVERSITY, HITACHI HIGH-TECH SCIENCE CORPORATIONInventor: Masami Shibukawa
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Patent number: 11835438Abstract: An automatic sample preparation apparatus that automatically prepares a sample piece from a sample and includes a focused ion beam irradiation optical system, an electron beam irradiation optical system configured to irradiate an electron beam from a direction different from a direction of the focused ion beam, a sample piece transfer device configured to hold and transfer the sample piece separated and extracted from the sample, a detector configured to detect secondary charged particles emitted from an irradiation object, and a computer configured to recognize a position of the sample piece transfer device by image-recognition using an image data of the focused ion beam and the electron beam generated by irradiating the sample piece transfer device with the focused ion beam and the electron beam, and drive the sample piece transfer device, wherein the image data includes a reference mark.Type: GrantFiled: July 13, 2021Date of Patent: December 5, 2023Assignee: Hitachi High-Tech Science CorporationInventors: Atsushi Uemoto, Tatsuya Asahata, Makoto Sato, Yo Yamamoto
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Patent number: 11788996Abstract: To reduce an arithmetic processing load or an influence of noise at the time of virtual curve calculation processing, provided is a data processing device for a chromatograph, which is configured to execute data processing based on plot data measured by using a chromatograph, the data processing device including a virtual curve calculation data generator configured to obtain a smaller number of pieces of virtual curve calculation data than a number of pieces of the measured plot data; and an arithmetic processor (163) functioning as a virtual curve calculator configured to obtain a virtual curve based on the virtual curve calculation data.Type: GrantFiled: January 9, 2020Date of Patent: October 17, 2023Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Masahito Ito, Masato Fukuda
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Patent number: 11781998Abstract: An inspection method of a membrane electrode assembly includes a first process of acquiring an X-ray transmission image of the membrane electrode assembly, a second process of identifying a luminance-reduced region having a luminance lower than a luminance of a surrounding region in the X-ray transmission image acquired in the first process, a third process of correcting the luminance of the luminance-reduced region identified in the second process, in accordance with a planar size of the luminance-reduced region, based on a correlation between a planar size of a foreign matter in the membrane electrode assembly and change in luminance due to diffraction of X-rays, and a fourth process of finding a thickness of the foreign matter in the membrane electrode assembly based on the luminance corrected in the third process.Type: GrantFiled: February 14, 2022Date of Patent: October 10, 2023Assignees: TOYOTA JIDOSHA KABUSHIKI KAISHA, HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Shinya Takeshita, Toshiyuki Takahara
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Patent number: 11749493Abstract: A liquid metal ion source (50) includes: a reservoir (10) configured to hold an ion material (M) forming a liquid metal; a needle electrode (20); an extraction electrode (22) configured to cause an ion of the ion material to be emitted from a distal end of the needle electrode; a beam diaphragm (24), which is arranged on a downstream side of the extraction electrode, and is configured to limit a beam diameter of the ion; and a vacuum chamber (30) configured to accommodate and hold the reservoir, the needle electrode, the extraction electrode, and the beam diaphragm in vacuum, wherein the liquid metal ion source further includes an oxidizing gas introducing portion (40), and wherein the oxidizing gas introducing portion communicates to the vacuum chamber, and is configured to introduce an oxidizing gas into a periphery of the needle electrode.Type: GrantFiled: September 21, 2020Date of Patent: September 5, 2023Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Yoshihiro Koyama, Tatsuya Asahata, Masahiro Kiyohara, Tsunghan Yang
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Patent number: 11742177Abstract: Automated processing is provided. A charged particle beam apparatus includes: an image identity degree determination unit determining whether an identity degree is equal to or greater than a predetermined value, the identity degree indicating a degree of identity between a processing cross-section image that is an SEM image obtained through observation of a cross section of the sample by a scanning electron microscope, and a criterion image that is the processing cross-section image previously registered; and a post-determination processing unit performing a predetermined processing operation according to a result of the determination by the image identity degree determination unit.Type: GrantFiled: October 13, 2021Date of Patent: August 29, 2023Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Ayana Muraki, Tatsuya Asahata, Atsushi Uemoto
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Patent number: 11721517Abstract: Provided is a focused ion beam processing apparatus including: an ion source; a sample stage a condenser lens; an aperture having a slit in a straight line shape; a projection lens and the sample stage, wherein, in a transfer mode, by Köhler illumination, with an applied voltage of the condenser lens when a focused ion beam is focused on a main surface of the projection lens scaled to be 100, the applied voltage is set to be less than 100 and greater than or equal to 80; a position of the aperture is set such that the focused ion beam is masked by the aperture with the one side of the aperture at a distance greater than 0 ?m and equal to or less than 500 ?m from a center of the focused ion beam; and the shape of the slit is transferred onto the sample.Type: GrantFiled: March 19, 2021Date of Patent: August 8, 2023Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Hiroshi Oba, Yasuhiko Sugiyama, Yoshitomo Nakagawa, Koji Nagahara
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Patent number: 11680917Abstract: Provided are a controller for a thermal analysis apparatus, with which thermal characteristics of a measurement target can be grasped, and a thermal analysis apparatus. A controller (51) for a thermal analysis apparatus, which is configured to measure thermal behavior accompanying a temperature change caused by one of heating and cooling of a measurement target (X, Y), is configured to: acquire an intensity of a response signal of the measurement target to an electromagnetic wave with which the measurement target is irradiated with respect to a variable of one of a time and a temperature; differentiate the intensity with respect to the variable; and output a derivative value obtained as a result of the differentiation with respect to one of the temperature and the time, or display the derivative value with respect to one of the temperature and the time on a predetermined display (53).Type: GrantFiled: February 4, 2021Date of Patent: June 20, 2023Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Ryokuhei Yamazaki, Susumu Ito
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Patent number: 11682536Abstract: Provided is a particle beam apparatus capable of performing appropriate switching selectively between charged particle beam and neutral particle beam. A particle beam column (19) includes an ion source (41), a condenser lens (52), a charge exchange grid (55), and an objective lens (56). The ion source (41) generates ions. The condenser lens (52) changes focusing of the ion beam so that switching is performed between ion beam and neutral beam as particle beam with which a sample (S) is irradiated. The charge exchange grid (55) converts at least a part of ion beam into neutral particle beam through neutralization. The objective lens (56) is placed downstream of the charge exchange grid (55). The objective lens (56) reduces the ion beam toward the sample (S) when the sample (S) is irradiated with the neutral particle beam as the particle beam.Type: GrantFiled: March 16, 2021Date of Patent: June 20, 2023Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Koji Nagahara, Yuichi Madokoro
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Patent number: 11646188Abstract: Disclosed is an apparatus and method for analyzing an evolved gas, wherein the precision of detection of a gas component is improved without enlarging the apparatus. The apparatus includes a gas component evolving unit, a detection member for detecting the gas component, and a mixed gas channel for allowing a mixed gas containing the gas component and carrier gas to flow therethrough, and further includes a branch channel branched from the mixed gas channel, an inert gas channel for allowing an inert gas to flow therethrough, a first flow rate regulator for adjusting the flow rate of the carrier gas, a second flow rate regulator for adjusting the flow rate of the inert gas, and a flow rate control unit for controlling the second flow rate regulator such that the flow rate of the mixed gas guided to the detection member is a predetermined value.Type: GrantFiled: July 20, 2018Date of Patent: May 9, 2023Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Ryusuke Hirose, Hideyuki Akiyama, Noriaki Sakai, Masafumi Watanabe
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Patent number: 11644399Abstract: A thermal analysis apparatus includes: a cylindrical heating furnace extending in an axial direction; a weight detector arranged on a rear-end side in the axial direction of the cylindrical heating furnace and including levers extending in the axial direction to detect a weight; a connecting portion for connecting the cylindrical heating furnace and the weight detector to communicate an internal space of the cylindrical heating furnace with an internal space of the weight detector and positioning the levers from the weight detector into the cylindrical heating furnace; sample holding portions connected to tip ends of the levers and arranged inside the cylindrical heating furnace and holding a sample; resistance heaters arranged to cover the weight detector and energized by an electric current of 6 A or less; and a heater control part for controlling an energization state of the resistance heaters to maintain the weight detector at a constant temperature.Type: GrantFiled: March 6, 2020Date of Patent: May 9, 2023Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Takashi Kumazaki, Kentaro Yamada
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Patent number: 11619617Abstract: To make it easy to address the case in which a chromatograph does not appropriately operate. A chromatograph (liquid chromatograph 100) for analyzing a sample by supplying an eluent and the sample and separating a component contained in the sample to detect the component, the chromatograph including: a detection portion (controller 170) configured to detect a fault in the analysis; and an operation controller (controller 170) configured to cause a constituent element related to the analysis to perform at least one of an operation for identifying a factor of the fault and an operation for avoiding the fault.Type: GrantFiled: September 9, 2019Date of Patent: April 4, 2023Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Masahito Ito, Minling Pei, Shinichi Ozawa
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Patent number: 11600463Abstract: This cross-section observation device bombards an object with a charged particle beam to repeatedly expose cross-sections of the object, bombards at least some of the cross-sections from among the plurality of the exposed cross-sections with a charged particle beam to acquire cross-sectional image information describing each of the at least some of the cross-sections, generates for each of these cross-sections a cross-sectional image described by the cross-sectional image information acquired, and generates a three-dimensional image in which the generated cross-sectional images are stacked together.Type: GrantFiled: March 27, 2018Date of Patent: March 7, 2023Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Xin Man, Junzo Azuma