Patents Assigned to HITACHI HIGH-TECH SCIENCE CORPORATION
  • Patent number: 10600612
    Abstract: A charged particle beam apparatus includes a sample chamber; a sample stage; an electron beam column irradiating a sample S using an electron beam; and a focused ion beam column irradiating the sample S using a focused ion beam. The apparatus includes an electrode member displaceable between an insertion position between a beam emitting end portion of the electron beam column and the sample stage and a withdrawal position distant from the insertion position, the electrode member being provided with an electrode penetrating hole passing the electron beam therethrough. The apparatus includes a driving unit displacing the electrode member; a power source applying a negative voltage to the electrode member; and an insulation member electrically insulating the sample chamber the driving unit from the electrode member.
    Type: Grant
    Filed: March 26, 2018
    Date of Patent: March 24, 2020
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventor: Toshiyuki Iwahori
  • Patent number: 10585041
    Abstract: A sample analysis system includes a Fluorescence Spectrophotometer, a liquid chromatography device, a mass spectrometer, a control device, and a sample introducer. The Fluorescence Spectrophotometer obtains a three-dimensional fluorescence spectrum including an excitation wavelength, a fluorescence wavelength, and a fluorescence intensity. The liquid chromatography device obtains a three-dimensional absorption spectrum including an elution time, an absorption wavelength, and an absorbance. The mass spectrometer obtains a three-dimensional mass spectrum including an elution time, mass information, and an ion intensity. The axes of respective spectra are set on the same scale, and the mass-charge ratio in the three-dimensional mass spectrum data obtained by the mass spectrometer is determined.
    Type: Grant
    Filed: November 16, 2018
    Date of Patent: March 10, 2020
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Jun Horigome, Masaki Watanabe, Katsutoshi Shimizu, Hideyuki Sakamoto
  • Patent number: 10571440
    Abstract: A two-dimensional liquid chromatographic analyzer, in which a temperature control part changes a temperature in a single-step manner and switches the temperature at a high speed. Also, the temperature control part has a holder around a separation column so that the temperature of the separation column can be changed to a preset temperature. A first separation column thereof changes elution time(s) of the objective component(s) by temperature modulation and the mobile phase of the first separation column is an aqueous mobile phase having a constant composition.
    Type: Grant
    Filed: February 5, 2019
    Date of Patent: February 25, 2020
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Katsutoshi Shimizu, Hideko Kanazawa
  • Patent number: 10551315
    Abstract: A fluorescence spectrophotometer includes: a light source; an excitation side spectroscope configured to separate light from the light source to generate excitation light; an integrating sphere having an inner surface configured to scatter the excitation light that has entered the integrating sphere; a sample holder, which is provided at a position on the integrating sphere that is not directly irradiated with the excitation light that has entered the integrating sphere and that is capable of being irradiated with the excitation light that has been scattered by the inner surface, and which is capable of holding a sample to be measured; a detector configured to detect fluorescent light emitted from the sample irradiated with the excitation light that has been scattered by the inner surface; and an imaging device configured to take the sample image of the sample that emits the fluorescent light.
    Type: Grant
    Filed: July 20, 2018
    Date of Patent: February 4, 2020
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Jun Horigome, Rino Nakajima, Yoichi Sato
  • Patent number: 10539540
    Abstract: A minimum peak is determined from analysis results, a correction wavelength at which an S/N ratio of the minimum peak is greatest is determined, and the determined correction wavelength is used to execute correction of the minimum peak. A plurality of detector output value correction method are registered in a processor, correction method is selected from default correction method or from among a plurality of preset correction methods according to an object to perform correction.
    Type: Grant
    Filed: June 8, 2017
    Date of Patent: January 21, 2020
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Shuhei Yamamura, Daisuke Akieda, Ayumi Nakaogami, Katsutoshi Shimizu
  • Patent number: 10529533
    Abstract: A sample holder, a member mounting device, and a charged particle beam apparatus are able to secure a compatible configuration for the transfer of a sample between different-type charged particle beam apparatuses without an increase in equipment costs. The charged particle beam apparatus includes a holder unit for removably fastening a sample holder for receiving a sample, and a sample stage unit for loading the holder unit in a sample chamber. The sample holder includes a sample holding member for receiving a sample, a support section for supporting the sample holding member, and a clip disposed on the support section at a position where the sample holding member is disposed.
    Type: Grant
    Filed: March 26, 2018
    Date of Patent: January 7, 2020
    Assignee: HITACHI HIGH-TECH SCIENCE Corporation
    Inventor: Toshiyuki Iwahori
  • Patent number: 10529531
    Abstract: Provided is a tip capable of repeatedly regenerating a single-atom termination structure in which a distal end is formed of only one atom. A tip (1) having a single-atom termination structure includes: a thin line member (2) made of a first metal material; a protruding portion (4) made of a second metal material, which is formed at least in a distal end portion (2a) of the thin line member (2), and has a distal end terminated with only one atom; and a supply portion (5) made of the second metal material to be supplied to the protruding portion (4), which is formed in the vicinity of the distal end portion (2a) of the thin line member (2).
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: January 7, 2020
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Chuhei Oshima, Masahiko Tomitori, Anto Yasaka, Tatsuya Shimoda
  • Patent number: 10510508
    Abstract: A charged particle beam apparatus includes a sample chamber; a sample stage; an electron beam column for irradiating a sample with an electron beam; and a focused ion beam column for irradiating the sample with a focused ion beam. The apparatus includes a displacement member having an open/close portion displaceable between an insertion position between a beam emitting end portion of the electron beam column and the sample stage, and a withdrawal position away from the insertion position, and a contact portion provided at a contact position capable of contacting the sample before the beam emitting end portion during operation of the sample stage. A driving unit displaces the displacement member, and a conduction sensor detects whether the sample is in contact with the contact portion.
    Type: Grant
    Filed: March 26, 2018
    Date of Patent: December 17, 2019
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventor: Toshiyuki Iwahori
  • Patent number: 10485087
    Abstract: A portable information terminal is separated from a charged particle beam irradiation apparatus for performing processing of a sample by irradiating the sample with a charged particle beam. The portable information terminal performs operation of a first operation item at a desired position and includes a display controller causing a display unit to display an image containing a graphical user interface (GUI) capable of operating the first operation item based on operation by a user, the first operation item being one or more operation items among a plurality of items operable in the charged particle beam irradiation apparatus.
    Type: Grant
    Filed: March 26, 2018
    Date of Patent: November 19, 2019
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Takuma Aso, Atsushi Uemoto, Tatsuya Asahata, Masato Suzuki
  • Patent number: 10468228
    Abstract: A charged particle beam apparatus includes a charged particle beam column for irradiating a sample with a charged particle beam, and a sample stage unit for moving the sample relative to the charged particle beam column. The sample stage unit includes a rotary stage section having a base portion and a rotary mover rotatable about a rotary axis relative to the base portion. A rotary connector is disposed coaxially with and rotatable about the rotary axis and fitted between the base portion and the rotary mover for electrically connecting wirings between relatively rotating elements. A connection electrode is disposed on the sample stage unit in electrical connection with the rotary connector. In the charged particle beam apparatus, the sample is able to be rapidly placed and replaced.
    Type: Grant
    Filed: March 26, 2018
    Date of Patent: November 5, 2019
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventor: Masakatsu Hasuda
  • Patent number: 10466271
    Abstract: A scanning probe microscope includes: a cantilever; a cantilever supporting portion; a movement mechanism that moves a position of the cantilever; a light source that emits detection light; a detector that receives the detection light reflected on a reflecting surface of the cantilever; an objective lens; and a controller that controls the movement mechanism to perform a process including: detecting a spot position of a spot light of the detection light; detecting a position of the cantilever from an image captured by the imaging device; and controlling the movement mechanism based on the spot position, the position of the cantilever, an incident angle of the detection light, and the attachment angle such that the detection light is reflected on the reflecting surface when the cantilever is attached to the cantilever supporting portion.
    Type: Grant
    Filed: August 29, 2016
    Date of Patent: November 5, 2019
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Masafumi Watanabe, Toshihiro Ueno, Susumu Ito, Shoichi Hasegawa
  • Patent number: 10446370
    Abstract: A charged particle beam apparatus includes: an irradiation unit that irradiates a sample with a charged particle beam; an image formation section that detects a charged particle generated from the sample due to the irradiation with the charged particle beam and forms an image based on a signal obtained by detecting the charged particle; an input reception unit that receives an observation condition; a derivation section that derives second observation parameters proper for the observation condition based on the received observation condition and first observation parameters stored in a storage unit; and a control unit that controls the irradiation unit based on the second observation parameters.
    Type: Grant
    Filed: December 21, 2017
    Date of Patent: October 15, 2019
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventor: Hidekazu Suzuki
  • Publication number: 20190302070
    Abstract: A chromatographic data system processing apparatus performs data processing based on plot data measured by a chromatograph. The chromatographic data system processing apparatus includes a virtual curve calculation portion which obtains a virtual curve based on the measured plot data, a tentative feature point acquisition portion which obtains a tentative feature point based on the obtained virtual curve, and an actual plot data feature point extraction portion which extracts an actual plot data feature point corresponding to the tentative feature point from the measured plot data.
    Type: Application
    Filed: March 25, 2019
    Publication date: October 3, 2019
    Applicant: Hitachi High-Tech Science Corporation
    Inventors: Masahito Ito, Masato Fukuda
  • Patent number: 10401342
    Abstract: Disclosed herein are an evolved gas analyzer and a method for analyzing evolved gas, the apparatus cooling a sample holder in a short time without using excessive cooling performance and without providing the entire apparatus in an excessively large size, thereby enhancing analysis work efficiency. The apparatus 200 includes: a sample holder 20 holding a sample S; a heating unit 10 receiving the sample holder therein, and evolving a gas component G by heating the sample; a detecting means 110 detecting the gas component; a sample holder supporting unit 204L movably supporting the sample holder to move the sample holder to predetermined outer and inner positions of the heating unit; and a cooling unit 30 provided at an outside of the heating unit, and cooling the sample holder by being in direct or indirect contact with the sample holder, when the sample holder is moved to a discharging position.
    Type: Grant
    Filed: November 19, 2016
    Date of Patent: September 3, 2019
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Hideyuki Akiyama, Kentaro Yamada, Toshitada Takeuchi
  • Patent number: 10379066
    Abstract: An X-ray transmission inspection apparatus capable of easily performing the adjustment by a standard sample is provided. The apparatus is provided with an X-ray source; an X-ray detector; a standard sample moving mechanism configured to move a standard sample placed in a different position from that of a sample; and an arrangement changing mechanism configured to be in a such a manner that the X-ray source and the X-ray detector, and the sample and the standard sample are movable relative to each other, and configured to change an arrangement state from one arrangement state in which the X-ray source and the X-ray detector face the sample to the other arrangement state in which the X-ray source and the X-ray detector face the standard sample that is moved by the standard sample moving mechanism.
    Type: Grant
    Filed: August 24, 2017
    Date of Patent: August 13, 2019
    Assignee: Hitachi High-Tech Science Corporation
    Inventor: Toshiyuki Takahara
  • Patent number: 10359402
    Abstract: A two-dimensional liquid chromatographic analyzer, in which a temperature control part changes a temperature in a single-step manner and switches the temperature at a high speed. Also, the temperature control part has a holder around a separation column so that the temperature of the separation column can be changed to a preset temperature. A first separation column thereof changes elution time(s) of the objective component(s) by temperature modulation and the mobile phase of the first separation column is an aqueous mobile phase having a constant composition.
    Type: Grant
    Filed: March 25, 2016
    Date of Patent: July 23, 2019
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Katsutoshi Shimizu, Hideko Kanazawa
  • Patent number: 10345335
    Abstract: A scanning probe microscope has a cantilever having a probe at a tip of the cantilever, a driving unit that performs a separating operation for separating one of the sample and the probe from the other at a speed exceeding a response speed of the cantilever from a state where the probe is in contact with the surface of the sample, a determination unit that determines that the probe is separated from the surface of the sample when vibration of the cantilever at a predetermined amplitude is detected at a resonant frequency of the cantilever during the separating operation, and a driving control unit that stops the separating operation when the determination unit determines that the probe is separated from the surface of the sample and relatively moves the probe and the sample to a position where the probe is located on a next measuring point of the sample.
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: July 9, 2019
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Masatsugu Shigeno, Kazutoshi Watanabe, Hiroyoshi Yamamoto
  • Patent number: 10309903
    Abstract: An ICP emission spectrophotometer includes an inductively coupled plasma device, a spectroscope, and a computer. The spectroscope includes an incidence window, an incidence side slit, a diffraction grating, an emission window, an emission side slit, and a detector. Measurement conditions including diffraction condition and a measurement result are displayed on a display device. In a case where there are a plurality of diffraction conditions each including a combination of a diffraction grating and a diffraction order for measuring desired diffracted light, comparison information including at least an intensity and a resolution of emitted light in the diffraction condition is displayed on the display device. A measurer selects diffraction conditions in which resolution is higher from among the diffraction conditions, and selects a diffraction condition in which an intensity is obtained from among the selected diffraction conditions.
    Type: Grant
    Filed: March 20, 2018
    Date of Patent: June 4, 2019
    Assignee: Hitachi High-Tech Science Corporation
    Inventor: Yutaka Ikku
  • Patent number: 10312051
    Abstract: A composite charged particle beam apparatus includes a first charged particle beam column that irradiates a thin sample with a first charged particle beam, a second charged particle beam column that irradiates an irradiation position of the first charged particle beam of the thin sample with a second charged particle beam, a sample holder that fixes the thin sample, and a sample stage on which the sample holder is mounted. The sample holder is able to rotate the thin sample within a surface parallel to an observation surface of the thin sample around a first rotational axis on the sample stage.
    Type: Grant
    Filed: September 29, 2015
    Date of Patent: June 4, 2019
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Hiroyuki Suzuki, Shinya Kitayama
  • Patent number: D851151
    Type: Grant
    Filed: January 24, 2018
    Date of Patent: June 11, 2019
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Ai Masuda, Hiroyuki Noda, Hiroyuki Suzuki, Yasutaka Otsuka