Abstract: The present invention is intended to simplify the configuration of the baffle and prevent deposition on the diaphragm, and includes: a housing surrounding a pressure receiving surface of the diaphragm to form a measurement chamber, the housing having a gas introduction port for introducing a gas into the measurement chamber; and a baffle member provided in the measurement chamber, in which the baffle member includes: a facing surface portion facing the gas introduction port; and an surrounding surface portion provided closer to a side of the gas introduction port than the facing surface portion and surrounding a periphery of the gas introduction port, and the surrounding surface portion includes a flow passage portion that allows a gas introduced from the gas introduction port to flow from an end portion on the side of the gas introduction port side toward a side of the diaphragm.

Abstract: The present invention is a liquid material vaporizing device that heats a liquid material supplying pipe without providing a heating mechanism, the liquid material vaporizing device including: a gas-liquid mixer unit configured to mix a liquid material and a gas to generate a gas-liquid mixture; a liquid material supplying pipe configured to supply the liquid material to the gas-liquid mixer unit; a vaporizer unit configured to heat the gas-liquid mixture to vaporize the liquid material; and a casing configured to house the gas-liquid mixer unit, the vaporizer unit, and the liquid material supplying pipe, in which a channel configured to guide convection of heat from the vaporizer unit to the liquid material supplying pipe is provided inside the casing.

Abstract: A flow restrictor is provided, comprising a first sheet including a flow passage, and a second sheet stacked on the first sheet. A hole is provided in a center of the second sheet. The flow passage includes a groove cut into a surface of the first sheet that communicates with an expansion zone at a peripheral area of the first sheet. A peripheral edge of the second sheet contacts the first sheet in the expansion zone between an inner diameter and an outer diameter of the expansion zone.

Abstract: A flow measurement system is provided, which is configured to receive multiple flow rates; retrieve multiple physical properties for multiple pure gases; estimate multiple physical properties for a gas mixture; estimate multiple flow parameters for multiple channels of a flow splitter using a mathematical model, multiple physical properties for the gas mixture, and multiple pressure values from pressure sensors of multiple channels; and estimate multiple flow splits using multiple flow parameters for the multiple channels of the flow splitter.

Abstract: The present invention provides a thermal flow meter that includes a sensor flow path along which flows a fluid being measured, an upstream-side electrical resistance element provided on the sensor flow path, a downstream-side electrical resistance element provided downstream of the upstream-side electrical resistance element, a sensor output generator that, based on respective voltages that are output in accordance with changes in the upstream-side and downstream-side electrical resistance elements, generates a sensor output in accordance with the flow rate of the fluid being measured, a slope effect estimator that, based on at least a Prandtl number of the fluid being measured, estimates a slope effect that is generated in the sensor output in accordance with an attitude of the sensor flow path, and a flow rate calculator that corrects the slope effect from the sensor output, and calculates the flow rate of the fluid being measured.

Abstract: A rapid rise in the temperature of a liquid level sensor is prevented even at close to a vacuum atmosphere. In a material supply system that is equipped with a tank containing a liquid material and with the liquid level sensor that is provided inside the tank, and in which the liquid level sensor is a self-heating type of sensor that, when the liquid level sensor is generating heat as a result of being supplied with a predetermined normal energy, detects a liquid surface, there are provided a monitoring portion that monitors a detection value from an output signal from the liquid level sensor, and an energy control portion that, when the monitored detection value reaches a predetermined upper limit value, performs control in such a way that the energy supplied to the liquid level sensor is low-level energy that is lower than the normal energy.

Abstract: A flow rate ratio control device smoothly switches branches without generating abrupt changes in the flow rates of a fluid flowing therethrough. The device includes at least two branches from a main flow path, first and second fluid control valves each including a position sensor for a valve body, a storage unit that stores reference positions of the valve bodies in order to divide the fluid flowing into the branches at predetermined ratios, and a control unit that controls the ratios of the branches by performing position control to place the valve body of the first valve in the reference position, and by performing flow rate control to set the flow rate of the second valve to a target flow rate. When the valve body of the second valve reaches the reference position, the control unit switches the position control and flow rate control between the valves.

Abstract: The present invention controls convergent pressure of a closed space provided with a fluid resistance at high speed while an upstream valve provided on the upstream of the fluid resistance prevents overshooting. A pressure control system is provided with a fluid resistance in a channel forming a closed space and is configured to control pressure of the closed space by controlling an upstream valve provided on the upstream of the fluid resistance. The pressure control system includes a convergent pressure arithmetic unit and a valve controller. The convergent pressure arithmetic unit calculates convergent pressure of the closed space when the upstream valve is fully closed using at least one of upstream pressure and downstream pressure on the fluid resistance in the channel. The valve controller compares the calculated convergent pressure with a predetermined target convergent pressure and fully close the upstream valve based on the result of the comparison.

Abstract: In order to make it possible to obtain information on the movement of a fluid control valve when a fluid control device operates normal, a diagnostic device for a fluid control valve that displaces a valve body to control fluid is adapted to include: a valve body related value reception part that receives a valve body related value inputted/outputted in association with the displacement of the valve body; a displacement sensing part that senses the displacement of the valve body on the basis of the valve body related value; and a displacement count storage part that stores a displacement count sensed by the displacement sensing part.

Abstract: To provide a flow rate control valve that can improve responsiveness of flow rate control of a pressure differential type of a flow rate control device. The flow rate control valve is so configured to comprise a pair of valve members each of which has a seat surface being in contact with each other, to provide an internal flow channel that opens toward the seat surfaces and that passes through the inside of at least one of the valve members, and to control a flow rate of a fluid flowing out through the internal flow channel to the outside by adjusting a separation distance between the seat surfaces. And a restricted flow channel is formed in the internal flow channel so that a differential pressure is generated between an upstream side and a downstream side of the restricted flow channel.

Abstract: A gas analysis device for analyzing a compound gas and H2O gas produced in a main reaction in which an aqueous solution including a compound and water is vaporized, includes a first concentration calculating unit that calculates a concentration of the compound gas, a second concentration calculating unit that calculates a concentration of the H2O gas, an analysis unit that compares a first actual concentration which is the concentration of the compound gas calculated by the first concentration calculating unit with a first ideal concentration which is the concentration of the compound gas in case that the main reaction proceeds ideally, and that compares a second actual concentration which is the concentration of the H2O gas calculated by the second concentration calculating unit with a second ideal concentration which is the concentration of the H2O gas in case that the main reaction proceeds ideally and an output unit.

Abstract: In order to provide a more practical gas analysis device than that having conventionally been, while keeping the laser source and the photodetector separated from the gas cell, thereby preventing exposure to a high temperature, the gas analysis device includes: a gas cell; a laser source or a photodetector separated from the gas cell; and a laser light transmission mechanism provided between the gas cell and the laser source or the photodetector. The laser light transmission mechanism includes one or a plurality of tubular members, and an inner space of the one or the plurality of tubular members provides a light path for the laser light.

Abstract: The present invention is intended to improve the responsiveness while increasing a flow rate, and is an orifice having a valve seat surface, the orifice includes: a vertical channel that opens to valve seat surface and a facing surface that faces the valve seat surface; and a horizontal channel that opens to an outer circumferential surface between the valve seat surface and the facing surface, and that intersects with the vertical channel. The vertical channel is split into a plurality of channel branches from an intersection with the horizontal channel, with a space therebetween, on a side of the facing surface.

Abstract: In order to prevent unnatural behavior of a calculated flow rate, provided is a fluid control device in which a fluid control valve and upstream and downstream pressure sensors are provided on a flow path. The device includes a calculation unit configured to calculate a flow rate based on measured pressures; and an output unit configured to output the calculated flow rate, and exhibit a zero output function of outputting a zero value regardless of the calculated flow rate when the valve is in a closed state. The device is further configured to switch between execution and stop of the zero output function, and when the valve is in an open state and a difference between the measured pressures of the pressure sensors is larger than a threshold, stop the zero output function and cause the flow rate output unit to output the calculated flow rate.

Abstract: The present invention brings an actual concentration of a process gas closer to an ideal concentration, and a gas analysis device that is used in a fluid control system that controls a process gas obtained by vaporizing a liquid material or a solid material, the gas analysis device including: a first concentration calculation unit that calculates a concentration of the process gas; a second concentration calculation unit that calculates a concentration of a by-product gas at least generated in a side reaction that is a reaction different from a main reaction for generating the process gas; a comparison unit that compares a first actual concentration that is the concentration of the process gas calculated by the first concentration calculation unit with a first ideal concentration, and compares a second actual concentration that is the concentration of the by-product gas calculated by the second concentration calculation unit with a second ideal concentration.

Abstract: A gas analyzing device that irradiates a gas with a laser beam and detects the laser beam having penetrated the gas to analyze a component to be measured contained in the gas is configured so as to reduce a moment in a gravity direction generated about a fulcrum of an attachment location or the like is reduced to suppress optical deviation as much as possible. The gas analyzing device includes a gas cell attached to a piping through which the gas flows and into which the gas is introduced, and an elongated optical cell connected to the gas cell from a predetermined connection direction. The optical cell accommodates an optical system supported by a surface plate in a state of being disposed on an optical path of the laser beam. The optical cell stands up with respect to the connection direction.

Abstract: Provided is a concentration control system that has only a small time delay, obtains accurate estimated values, and also enables partial pressure control having improved responsiveness and accuracy. The system includes a flow rate control device provided on a supply flow path that supplies gas to a chamber, and controls a flow rate of a gas in the supply flow path to match a set flow rate, a partial pressure measurement device for a gas inside the chamber, an observer having a model which estimates a state of the gas inside the chamber, where a flow rate of the gas flowing into the chamber and measured partial pressures are input into the model, and an estimated partial pressure of the gas within the chamber is output, and a controller that, based on a set partial pressure and on the estimated partial pressure, sets the set flow rate.

Abstract: In order to achieve an enlargement of a seating surface, and to additionally achieve an improvement in productivity while forming this seating surface using a resin layer, without having to sacrifice any of the drive range of the valve body, there is provided a fluid control valve that is formed such that drive force from an actuator is transmitted to a valve body via a plunger, and that controls a flow of a fluid by causing a seating surface of the valve body to move towards or away from a valve seat surface of a valve seat, wherein the valve body is a separate body from the plunger, and the seating surface is formed by a resin layer.

Abstract: A polymerization apparatus for performing anionic polymerization includes: a raw material container that contains a raw material; a reaction container that is connected to the raw material container via a raw material supply pipe and causes anionic polymerization of the raw material supplied; and a switching valve that is provided in the raw material supply pipe and opens and closes the raw material supply pipe, and the raw material supply pipe includes a joint portion sealed by using a metal gasket, and the switching valve is a gas valve.

Abstract: The present invention reduces thermal stress that is generated in a join portion of a window material in an optical measurement cell, and is an optical measurement cell having translucent windows through which light is transmitted and into an interior of which is introduced a test sample. This optical measurement cell has a planar window material that forms the translucent windows, a join supporting portion that is joined to an outer edge portion of a main surface of the window material and supports the window material, and a low thermal expansion component that is provided on an outer-side circumferential surface of the join supporting portion and whose coefficient of thermal expansion is lower than a coefficient of thermal expansion of the join supporting portion.