Abstract: In order to provide a piezo valve in which it is possible to accurately predict the remaining lifespan of a piezo actuator, there are provided a valve seat, a valve body that is able to move between a fully closed position in contact with the valve seat and a fully open position, a piezo actuator that drives the valve body, a drive circuit that receives an input signal, and outputs to the piezo actuator a corresponding drive voltage, and a leakage current detector that, when the drive circuit outputs a voltage equal to or greater than a maximum rated voltage that drives the valve body to the fully closed/open position, detects leakage current from the piezo actuator. When the leakage current is detected or in a state immediately prior to detection, a fluid is flowing between the valve seat and the valve body.

Abstract: In order to accurately judge whether or not there is a seat leakage in the first valve and the second valve in a short period of time, a fluid control apparatus comprises a fluid resistor arranged in a flow channel, a first valve arranged upstream of the fluid resistor, a first pressure sensor that measures a pressure in a first volume between the first valve and the fluid resistor in the flow channel, a second valve arranged downstream of the fluid resistor, a second pressure sensor that measures a pressure in a second volume between the fluid resistor and the second valve, a valve controller that controls the first or second valve, and a seat leakage judging part that judges whether or not there is a seat leakage in the valve valves based on the pressure sensors in a state where the valves are fully closed.

Abstract: A gas delivery apparatus is provided, comprising a system controller configured to collect valve position information and sensor information from at least a plurality of the sensors and valves, store the valve position information and sensor information into the monitored gas delivery process data, and execute the discriminative classifier including a first artificial intelligence (AI) model configured to extract features in a first input image of the monitored gas delivery process; a second AI model configured to extract features in a second input image of a golden gas delivery process; and a contrastive loss function configured to calculate a similarity between the first input image and the second input image based on outputs of the first AI model and the second AI model, and output a repeatability confidence value based on a similarity index between the first input image and the second input image.

Abstract: A fluid control apparatus includes a block elongated in a longitudinal direction and having a predetermined width, an internal flow channel formed inside the block so as to extend in the longitudinal direction, a first control valve mounted on the block, a second control valve mounted on the block at a position downstream of the first control valve. In the fluid control apparatus, the internal flow channel has a first outflow channel connected to a first outlet of the first control valve through which a fluid flows out thereof and also has a second inflow channel connected to a second inlet of the second control valve through which the fluid flows thereinto. In addition, the first outflow channel and the second inflow channel are disposed so as to overlap each other at one point as viewed in the width direction through the block.

Abstract: Provided is a fluid control apparatus capable of setting, to a value as close as possible to an opening start voltage, an initial applied voltage applied when controlling a control valve so that a measured amount becomes a set amount from a fully closed state and capable of preventing occurrence of large overshoot while increasing a response speed. A valve controller inputs a voltage command for setting an initial driving voltage to be applied to a control valve to a voltage generation circuit in a case where the control valve is changed from a fully closed state to a predetermined opening degree, and includes a drive history storage unit that stores therein drive history information of the control valve. The controller is configured to change a value of the initial driving voltage in accordance with the drive history information.

Abstract: In a vacuum gauge that controls a temperature of a sensor section to a high temperature, a circuit board can be sufficiently cooled without applying air to the vacuum gauge from outside. The vacuum gauge includes a sensor section that communicates with a measurement space via a connection port and outputs an output signal according to a pressure in the measurement space, a heater provided around the sensor section to heat the sensor section, a circuit board arranged on a side opposite to the connection port with respect to the sensor section, a first inner case that accommodates the sensor section and the heater, a second inner case that accommodates the circuit board, and an outer case that surrounds the first inner case and the second inner case and forms a flow path, through which outside air flows, together with the first inner case and the second inner case.

Abstract: In order to inhibit overshoot in the concentration of a source gas immediately after a gas supply period starts, there is provided a vaporization device that is equipped with a vaporization tank that holds a liquid or a solid source, a carrier gas supply path that supplies carrier gas to the vaporization tank, a source gas extraction path along which flows a source gas which is obtained by vaporizing the source and which is extracted from the vaporization tank, a concentration monitor that is provided on the source gas extraction path, and a concentration control mechanism that is provided with a fluid controller which controls a concentration of the source gas extracted from the source gas extraction path. This vaporization device alternates between supplying the source gas and stopping the supply of the source gas.

Abstract: In order to provide an absorption analyzer capable of directly measuring an analysis target gas flowing into or produced in a vessel such as a chamber and preventing a measurement error due to moisture condensation, the absorption analyzer is adapted to include: a light emission module that is attached covering a first opening of the vessel into which the analysis target gas flows or in which the analysis target gas is produced and emits light into the vessel; and a light detection module that detects the light emitted from the light emission module and passing through the vessel. In addition, the light emission module is adapted to include: a base flange that is attached around the first opening on an outer surface of the vessel; a window material whose outer surface is tilted at a predetermined angle; a seal member; and a pressing body.

Abstract: In order to make it possible to conduct a zero calibration even though an interference gas exists in a measurement area of a detector, a light absorbance analysis apparatus includes a detector that detects an intensity of light that transmits a gas, a total pressure sensor that measures a total pressure of the gas, an absorbance calculating part that calculates an absorbance based on an output value of the detector and a previously set zero reference value, a partial pressure—absorbance relation storing part that stores a partial pressure—absorbance relational data that indicates a relationship between a partial pressure of an interference gas that exists in a measurement area of the detector and an absorbance calculated by the absorbance calculating part, and a partial pressure calculating part that calculates an interference gas partial pressure as a partial pressure of the interference gas.

Abstract: In order to provide an absorbance analysis apparatus for DCR gas that can measure a concentration of a DCR gas by separating absorbance of the DCR gas alone even in a mixed gas consisting of the DCR gas and CO gas whose absorption spectrum overlaps each other, the absorbance analysis apparatus for DCR gas comprises a DCR filter 31 that is configured to transmit a light in a first wavenumber domain including an absorbance peak of the DCR gas, a CO filter 32 that is configured to transmit a light in a second wavenumber domain that is different from the first wavenumber domain, and a DCR gas volume calculator 4 that is configured to calculate volume of the DCR gas based on a first absorbance measured by the light transmitted through the DCR filter 31 and a second absorbance measured by the light transmitted through the CO filter 32.

Abstract: A flow rate control apparatus calculates a resistance flow rate, which is a flow rate of a fluid flowing through the fluid resistor, based on a first pressure measured by a first pressure sensor and a second pressure measured by a second pressure sensor, converts the resistance flow rate to a first valve flow rate, which is the flow rate of the fluid passing through a first valve, based on the first pressure, converts the resistance flow rate to a second valve flow rate, which is the flow rate of the fluid passing through a second valve, based on the second pressure, controls the first valve so that the deviation between a first set flow rate and the first valve flow rate becomes small, and controls the second valve so that the deviation between a second set flow rate and the second valve flow rate becomes small.

Abstract: In order to accurately calculate an estimated flow rate by a dynamic constant volume method, a flow rate calculation system including a tank into which fluid flows, an inflow line through which the fluid flows into the tank, and a pressure sensor that detects the pressure inside the tank is adapted to include: a pressure change data storage part that stores pressure change data indicating a temporal change in the pressure detected by the pressure sensor during an inflow period; a flow rate calculation part that calculates the estimated flow rate during the inflow period based on a pressure change rate; and a flow rate correction part that, on the basis of first pressure detected by the pressure sensor after a predetermined time has elapsed after the inflow period and second pressure included in the pressure change data and higher than the first pressure, corrects the estimated flow rate.

Abstract: A concentration control apparatus capable of appropriately making a zero adjustment of a concentration measurement mechanism without interrupting a semiconductor manufacturing process includes: a control valve that controls gas flowing through a lead-out flow path; a concentration measurement mechanism that measures the concentration of source gas contained in gas flowing through the lead-out flow path; a concentration controller that controls the control valve so that the deviation between measured concentration measured by the concentration measurement mechanism and preset set concentration decreases; a judgement time point determination part that determines a judgement time point that is the time point when the gas present in a measurement part where the concentration measurement mechanism performs the concentration measurement has been replaced with other gas; and a zero adjustment part that makes a zero adjustment of the concentration measurement mechanism at or after the judgement time point.

Abstract: In order to provide a flow rate control apparatus capable of reducing pressure loss due to a downstream valve while enhancing responsiveness in flow rate control, a controller is designed to control the downstream valve on the basis of a flow rate deviation when a valve opening of the downstream valve is smaller than a predetermined valve opening. The controller is designed to control an upstream valve on the basis of the flow rate deviation when the valve opening of the downstream valve is the predetermined valve opening or more.

Abstract: The present invention is a storage tank including: a tank; a tank main body that stores a liquid material; a cover body that covers an opening of the tank main body; a support body that is positioned opposite to the cover body; a seal body that is sandwiched by a flange provided at the opening end of the tank main body and the cover body; and tightening members that tighten the cover body and the support body, and is capable of, even when the thickness of the flange provided at the opening end of the tank main body is thin, attaching the cover body on the flange while maintaining a contact property.

Abstract: A mixer is adapted to include: a flow path forming member formed with an internal flow path; and an insertion member inserted into the internal flow path, in which: the inner circumferential surface forming the internal flow path in the flow path forming member or the outer circumferential surface of the insertion member is formed with a first groove and a second groove merging with the first groove and branching from the first groove, and the inner circumferential surface and the outer circumferential surface are fitted to each other; and the first groove and the second groove are formed as a mixing flow path for, between the flow path forming member and the insertion member, branching and merging fluid flowing from one side of the internal flow path and guiding the fluid to the other side of the internal flow path.

Abstract: A quadrupole mass spectrometer includes an ion source that ionizes a sample, a filter unit that includes a quadrupole and separates ions generated from the ion source according to mass, a detector that detects ions passing through the filter unit, a filter voltage controller that controls a filter voltage applied to the quadrupole to switch between a blocking mode in which ions entering the filter unit are not allowed to impinge on the detector and a passing mode in which ions entering the filter unit are allowed to impinge on the detector, the filter voltage including a radio-frequency voltage and a direct-current voltage, a baseline computing unit that computes a baseline based on outputs of the detector in the blocking mode, and an analyzing unit that outputs an analysis result of the sample based on outputs of the detector in the passing mode and the computed baseline.

Abstract: Provided is a concentration control module that improve responsiveness of concentration control of a vaporization system, and is used in a vaporization system. The concentration control module includes a concentration measuring part configured to measure a concentration of a source gas; a valve provided in a lead-out pipe configured to lead out the source gas from the tank; a pressure target value calculating part configured to calculate a pressure target value inside the tank by using a concentration target value of the source gas, and a concentration measured value of the concentration measuring part; a delay filter configured to generate a pressure control value by applying a predetermined time delay to the pressure target value obtained by the pressure target value calculating part; and a valve control part configured to feedback-control the valve by using a deviation between the pressure control value obtained by the delay filter, and a pressure inside the tank.

Abstract: In order to provide a fluid device that makes it possible for operation command signals other than existing operation command signals to be received without a software modification having to be implemented in an already constructed system, in a fluid device that measures or controls physical quantities of a fluid, there are provided a command signal receiving unit that receives a predetermined plurality of types of operation command signals, and also command signal modes, which are values thereof or time series variations of the values thereof, and a command signal recognition unit that, when the command signal mode of a predetermined operation command signal received by the command signal receiving unit falls outside predetermined conditions that have been set in advance, recognizes the predetermined operation command signal that contains the command signal mode as being a different type of operation command signal.

Abstract: In order to make it possible to obtain information on the movement of a fluid control valve when a fluid control device operates normal, a diagnostic device for a fluid control valve that displaces a valve body to control fluid is adapted to include: a valve body related value reception part that receives a valve body related value inputted/outputted in association with the displacement of the valve body; a displacement sensing part that senses the displacement of the valve body on the basis of the valve body related value; and a displacement count storage part that stores a displacement count sensed by the displacement sensing part.