Abstract: An electron-emitting cathode consists of an electrically conducting emitter layer attached to a side wall which consists of stainless steel and a gate which is fixed at a mall distance inside a concave emitter surface of the emitter layer. The cathode surrounds a reaction area containing a cylindrical grid-like anode and a central ion collector which consists of a straight axial filament. An ion collector current reflecting the density of the gas in the reaction region is measured by a current meter while a gate voltage is kept between the ground voltage of the emitter layer and a higher anode voltage and is regulated in such a way that an anode current is kept constant. The emitter layer may consists of carbon nanotubes, diamond-like carbon, a metal or a mixture of metals or a semiconductor material, e.g., silicon which may be coated, e.g., with carbide or molybdenum. The emitter surface can, however, also be a portion of the inside surface of the side wall roughened by, e.g., chemical etching.

Abstract: A test gas leakage detector includes an inlet for gases to be analyzed for the presence of a test gas, a test gas detector and a first high vacuum pump connected to the test gas detector. An intermediate inlet is arranged on the first high vacuum pump that is used to supply the gases to be analyzed for the presence of a test gas. A fore-vacuum pump is connected to the first high vacuum pump and a line section fitted with a valve is located between the inlet and the fore-vacuum pump. In order to provide greater sensitivity and a quicker result time, a second high vacuum pump is provided between the inlet and the intermediate inlet. The second high vacuum pump has an outlet which is connected to the inlet of the fore-vacuum pump by means of a line section fitted with a valve.

Abstract: A releasable anode liner that is fitted within the interior of the anode of an ion source. The cover permits electrons to be projected into the anode wherein any insulating deposits adhere to the interior of the anode liner, thereby increasing the effective life of the anode without premature replacement or repair.

Abstract: A method for detecting a test gas present at a measuring location, using an infrared gas analyzer having a cuvette, an infrared light source, an infrared detector, and two gas lines. A first gas line is adapted to take up a measuring gas at a measuring location that may contain a test gas to the cuvette. The second gas line is adapted to take up gas from the surroundings of the measuring location (i.e., reference gas), that may contain a test gas background that is to be taken into consideration when detecting the test gas taken up at the measuring location. To improve the sensitivity of the analyzer, only one cuvette and the measuring gas is taken up at the measuring location and the reference gas is fed to the cuvette such that each gas is alternately present therein.

Abstract: A leak detector includes an inlet, a high-vacuum pump, and a test gas detector, which is connected to the entry of the high-vacuum pump. A backing pump is connected to an outlet area of the high-vacuum pump, and a test gas line extends between the inlet of the leak detector and the backing pump, the test gas line being connected to the outlet area of the high-vacuum pump via a line section. In order to shorten the response time of the leak detector, the line and the backing pump are connected via separate connections to the outlet area of the high-vacuum pump.

Abstract: A package for retaining at least one crystal for use with vacuum deposition processing apparatus includes a tray portion having at least one vertically disposed supporting slot sized for retaining a crystal and a cover portion overlaying the tray portion. The cover portion is rotated until a slotted opening of the cover portion is aligned with a vertical supporting slot, permitting removal of the crystal that is supported within the vertical slot only along its peripheral edges.

Abstract: A releasable anode liner that is fitted within the interior of the anode of an ion source. The cover permits electrons to be projected into the anode wherein any insulating deposits adhere to the interior of the anode liner, thereby increasing the effective life of the anode without premature replacement or repair.

Abstract: A method of monitoring a microelectronic manufacturing process includes the implementation of a process monitor that is configured to operate in an inter-process mode.

Abstract: The invention relates to a gas transmitter (1) with selective gas permeable surfaces (4), comprising a support disc (3), provided with a number of through openings (2), made from a semiconductor material, a membrane (5), covering the openings (2) in the support disc (3) which forms the selective gas permeable surfaces (4) and means for controlling the temperature of the membrane (5). According to the invention, the temperature control means may be simplified whereby the support disc (3) itself serves as a means for controlling the temperature of the membrane (5).

Abstract: The invention relates to a method for operating a film leak indicator (1) comprising two films (5, 6), which are each tensioned inside a frame (3, 4) and which delimit a testing space (80) when a test piece (79) is introduced. In addition, said film leak indicator is equipped with two vacuum pumps (13, 20). According to the invention, the testing space (80) is firstly evacuated and the film leak indicator is switched over to a leak search mode after the evacuation is completed. In order to prevent the search for leaks from being impaired by fluctuating helium concentrations in the ambient air, the invention provides that, before starting the leak search process, the helium concentration of the ambient air is measured and this measurement is taken into account during subsequent leakage measurements.

Abstract: Systems and methods for controlling at least one reticle-induced error in a process system, the systems and methods including adjusting measurement data associated with the process system, where the adjustment can be based on at least one reticle identifier (ID) associated with the measurement data, and reticle-induced error data associated with the at least one reticle ID. The methods and systems also include combining the adjusted measurement data to compute at least one control for the process system.

Abstract: A novel method for analyzing the pulse train resulting from a scanned beam particle monitor is described. The method enhances signal-to-noise ratio and significantly reduces particle false alarm rate. Performed in the time domain, the method filters noise pulses that do not occur at the scanner frequency. The analysis further identifies particle-pulse-envelopes (PPE's) by performing a forward-looking and backward-looking autocorrelation. Gaussian fits are subsequently applied to identified particle-pulse envelopes, to determine particle characteristics, such as size and speed.

Abstract: A method of manufacturing a device includes activating a gas containing at least one of hydrogen and of nitrogen by a hollow cathode discharge and exposing a first surface of a first material to the activated gas, thereby generating at the first surface an enrichment of at least one of hydrogen and of nitrogen and applying a further treatment to the enriched surface.

Abstract: Disclosed are methods, systems, and processor program products for filtering overlay measurements, including generating a residual between a measured overlay displacement and an overlay displacement based on a model of reticle errors relative to an exposure field, grouping the residuals based on location, normalizing residuals within a group based on at least one normalization factor, and, filtering the overlay measurements by comparing the normalized residuals to a threshold.

Abstract: A sensor, such as a mass spectrometer, capable of detecting the presence of materials in a sampled gas is interconnected with a processing chamber of a vacuum manufacturing tool. The sensor includes a timing circuit which is activated only if certain levels of specific materials are detected. Furthermore, the timer is set to run a predetermined time interval after activation so as to discriminate between known transient processing conditions and the presence of impurities which can greatly influence the manufacturing process. When the timer exceeds the predetermined time duration, an output signal can alert the process operator or automatically shutdown the manufacturing tool.

Abstract: The invention relates to a film leak detector with two films (5, 6) each stretched in a frame (3, 4); in order to attain a simple and stable structuring, it is proposed that each of the frames (3, 4) is comprised of two synthetic material subframes between which the particular film (5, 6) is fastened.

Abstract: Methods and systems for controlling critical dimension (CD) in a process system, including computing an exposure dose error based on at least one output of the process system, normalizing the computed exposure dose error based on a target exposure dose, and providing an exposure dose to the process system based on at least one normalized exposure dose error. The target exposure dose can be associated with a process system characteristic(s) and can be updated based on normalized computed exposure dose errors.

Abstract: A capacitive vacuum measuring cell includes first and second ceramic housing bodies (1, 4) joined by an edge seal (3). A thin ceramic membrane (2) is supported between first and second housing bodies (1, 4) by the edge seal (3) at a small distance from the first housing body (1) creating a reference vacuum chamber (25) therebetween. An electrically conductive material (7) coats opposing surfaces of the first housing body (1) and the membrane (2) to form a capacitor. A measurement vacuum chamber (26) is provided between the membrane (2) and the second housing body (4). A port (5) communicates with the second housing body (4) to connect the measurement vacuum chamber (26) of the measuring cell to the medium to be measured. The membrane (2) is made from an Al2O3 slurry that is sintered in a first heating step, cooled, and then reheated to smooth the membrane.

Abstract: The invention relates to a method for operating a film leak indicator (1) comprising two films (5, 6), which are each tensioned inside a frame (3, 4) and which delimit a testing space (80) when a test piece (79) is introduced. In addition, said film leak indicator is equipped with two vacuum pumps (13, 20). According to the invention, the testing space (80) is firstly evacuated and the film leak indicator is switched over to a leak search mode after the evacuation is completed. In order to prevent the search for leaks from being impaired by fluctuating helium concentrations in the ambient air, the invention provides that, before starting the leak search process, the helium concentration of the ambient air is measured and this measurement is taken into account during subsequent leakage measurements.

Abstract: An apparatus for determining both total and partial pressures of a gas using one common electron beam includes a partial pressure ionization region and a total pressure ionization region separated by a grid or aperture. A filament produces a plurality of electrons which are focused into an electron beam by a repeller and an aperture or an anode. The interaction between the electron beam and molecules of the gas within the partial pressure and total pressure regions produces first and second ion streams. A focus plate is biased such that the first ion stream is directed to an analyzer which calculates the partial pressure of the gas. An ion collector collects the ions from the second ion stream, where the resulting reference current is used to determine the total pressure of the gas.