Patents Assigned to Inficon
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Patent number: 7980117Abstract: A sniffer leak detector comprising a detector with a quartz window, the window being selectively permeable to a tracer gas. The quartz window is located in a suction chamber that is connected to a vacuum pump. To reduce the response time, a gas guidance plate is situated in the suction chamber, the guidance plate and quartz window together delimiting a narrow gas guidance chamber.Type: GrantFiled: April 27, 2006Date of Patent: July 19, 2011Assignee: Inficon GmbHInventors: Daniel Wetzig, Werner Grosse Bley, Peter Lang, Stefan Mebus
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Patent number: 7971471Abstract: The gas sensor has a selectively permeable membrane which is composed of silicon material and is provided with a heating device on the outside. The membrane closes an evacuated housing which contains a pressure sensor. When evacuating the area surrounding the housing, the heat dissipation is changed as a result of the quick change in the total pressure of the surrounding air, with the result that signal drift arises despite temperature regulation of the membrane. The disclosure provides at least one second heating device whose temperature is regulated independently of the first heating device. As a result, the membrane temperature is highly constant even in the case of severely changing total pressure in the housing.Type: GrantFiled: May 4, 2007Date of Patent: July 5, 2011Assignee: Inficon GmbHInventors: Werner Grosse Bley, Daniel Wetzig
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Patent number: 7946178Abstract: The invention relates to a vacuum measuring cell device comprising a vacuum membrane measuring cell (8) having a connecting means (5, 6) arranged thereon for a communicating connection to the medium to be measured, an electronic system (34), which is electrically connected to the vacuum membrane measuring cell (8), and also comprising a heating arrangement (20, 21) for heating the vacuum membrane measuring cell (8) to a predefinable temperature value, wherein the heating arrangement (20, 21) substantially encloses the entire vacuum membrane measuring cell (8) such that said cell forms a thermal container (20). Said container constitutes a thermal body (20a) in the area of the connecting means (5, 6) and connecting means (6) are guided through it, the connecting means thereby being thermally contacted at least in some areas by the thermal body. The thermal container (20a) comprises a heating source (21) for the heating thereof.Type: GrantFiled: June 9, 2008Date of Patent: May 24, 2011Assignee: Inficon GmbHInventors: Hansjakob Hanselmann, Claudio Christoffel, Stanislav Duris
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Patent number: 7914053Abstract: A flange connection has two pipe ends (1?, 2?, 51?, 52?) on each of which one flange (1, 2, 51, 52) is disposed and which have flange faces (11, 11?, 61, 61?) and a centering ring (33, 34) with an elastomer sealing ring (14) in contact with the ring. Both flanges include a mechanism for the detachable clamping against one another such that the flange faces (11, 11?, 61, 61?) are in contact on the centering ring and thereby are held at a predetermined flange distance (10, 60, D). The elastomer sealing ring (14) is pressed on the flange faces (11, 11?, 61, 61?) in the direction of the pipe axes (15) forming a seal, wherein the centering ring (33, 34) is positioned such that it is at least partially in contact on the periphery of the flanges (1, 2, 51, 52).Type: GrantFiled: August 6, 2009Date of Patent: March 29, 2011Assignee: Inficon GmbHInventors: Pierino Keller, Pascal Good
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Publication number: 20110018545Abstract: The helium sensor comprises a housing that encloses a detection chamber. A side of the housing is closed by a permeable wall that is selective for helium. In the detection chamber, there is located an ion getter pump comprising an anode, a cathode and a magnetic field. The cathode, or a cathode leg is made of beryllium. Beryllium has a low atomic mass, whereby the likewise light-weight helium ions can be better incorporated into the cathode material.Type: ApplicationFiled: February 25, 2009Publication date: January 27, 2011Applicant: INFICON GMBHInventors: Werner Grosse Bley, Daniel Wetzig
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Patent number: 7874201Abstract: The leakage search assembly has a main device which contains a vacuum pump and a test gas sensor, and a hand-held sniffing probe. Capillary lines which connect the sniffing probe to the basic assembly contain valves by means of which these lines can be selectively opened. In a leakage search mode, the capillary line having the larger cross section is open. This results in leaks also being found from a greater distance. The dead time before response of the test gas sensor is shortened. Once a leak has been located, the assembly is switched to the leakage rate measurement mode, in which only the capillary line with the smaller cross section is open. This results in quantitative determination of the leakage rate with high accuracy and high stability.Type: GrantFiled: August 17, 2006Date of Patent: January 25, 2011Assignee: INFICON GmbHInventors: Werner Grosse Bley, Sandra Seitz
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Patent number: 7845546Abstract: Method for producing a vacuum measuring cell having a pressure transducer diaphragm with housing plates sealed on opposite sides to form reference and measuring vacuum chambers. An opening in one plate communicates with the measuring vacuum chamber and has a sealed connection for joining to medium to be measured. The diaphragm and plates are aluminum oxide ceramic and at least one of the seals is aluminum with a thickness of 0.5 ?m to 30 ?m. The ceramic parts are pressed together at increased temperature of 600° C. to 680° C. in a process gas atmosphere including a reducing gas, during a time of 30 to 90 minutes, and subsequently a tempering step is carried out in a second process gas atmosphere including oxygen, tempering taking place at a temperature of 450° C. to 575° C. such that the metallic aluminum is oxidized into aluminum oxide.Type: GrantFiled: March 25, 2008Date of Patent: December 7, 2010Assignee: Inficon GmbHInventors: Dietmar Bertsch, Klaus Dietrich, Nico Onda, Martin Wüest
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Publication number: 20100294026Abstract: A sniffing leak detector which comprises a first suction line in a sniffing probe, the line leading to a main device, is provided with a larger second suction line through which gas is sucked in from the sniffing tip by a gas delivery pump. By connecting the second suction line, the distance sensitivity is increased. By disconnecting the second suction line, on the other hand, the sensitivity is increased. Thus, it is possible to first search for leaks by use of a high gas throughput and subsequently exactly determine the leaks under the quantitative aspect by use of a reduced flow.Type: ApplicationFiled: September 1, 2008Publication date: November 25, 2010Applicant: INFICON GMBHInventors: Daniel Wetzig, Stefan Mebus, Norbert Rolff
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Patent number: 7821250Abstract: A clamp assembly for bringing an RF sensor into electrical contact with an RF current carrier is provided herein. The clamp assembly (101) comprises a first wedge-shaped element (103), and a second wedge-shaped element (105) which is slidingly engaged with said first wedge-shaped element. Preferably, the clamp assembly also comprises a collar (113) within which the first and second wedge-shaped elements are disposed. The clamp assembly preferably further comprises a fastener (111), such as a screw, which adjoins the first and second elements, in which case the clamp assembly is adapted such that, as the screw is rotated in a first direction, at least one of the first and second elements expands against the collar and/or the RF current carrier.Type: GrantFiled: July 31, 2006Date of Patent: October 26, 2010Assignee: Inficon, Inc.Inventors: Terry A. Turner, Rodney A. Herman, Duane T. Smith, James D. Spain
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Patent number: 7802461Abstract: In leak detection, the signal generated by a test gas is superposed by interferences which fade as the vacuum generation in a container proceeds. Depending on the negative slope of the volume signal (MS), a lower indication limit (AG) is calculated. Upon activation of a zero function, the volume signal (MS) is not reduced to zero but only to the level of the indication limit (AG). Any exceeding of the indication limit is identified as a leak. Thus, the maximum sensitivity of the leak detection is guaranteed at any time.Type: GrantFiled: August 24, 2005Date of Patent: September 28, 2010Assignee: Inficon GmbHInventors: Jörn Liebich, Randolf Rolff, Ralf Kilian
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Patent number: 7793534Abstract: A selective gas sensor is for determining the presence of a test gas, for example, helium includes an evacuated housing, sealed by a selectively gas-permeable membrane. The membrane is part of a sight glass, whereby the glass pane is provided with a hole, sealed by the membrane made from a silicon material. The frame of the membrane wall is connected to the housing by means of a high-vacuum soft-metal seal. The housing can also form one of the electrodes of the gas pressure sensor.Type: GrantFiled: November 29, 2005Date of Patent: September 14, 2010Assignee: Inficon GmbHInventor: Werner Grosse Bley
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Patent number: 7795876Abstract: A cold cathode pressure sensor has gastight housing, an anode and a cathode arranged in the housing, and a radiation source directed to the cathode for igniting a cold cathode discharge. The housing has a test gas inlet and is at least partly made of glass. The radiation source is arranged outside the housing and irradiates the cathode through the housing glass. The radiation source substantially emits a radiation of a wavelength of more than 400 nm and less than 1,400 nm.Type: GrantFiled: March 2, 2006Date of Patent: September 14, 2010Assignee: Inficon GmbHInventors: Daniel Wetzig, Ludolf Gerdau
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Patent number: 7779675Abstract: The leak detector includes a basic device which includes a vacuum pump, a test gas sensor, and a hand-held sniffing probe. The sniffing probe is connected with the basic device via a flexible hose line which includes capillary tubes. At least two capillary tubes are provided, which are adapted to be opened via valves. Thus different capillary cross sections can be rendered operative. The dead time between the entry of the test gas into the sniffing probe and the detection by the test gas sensor can be changed and/or selected. Thus, even the smallest detectable leak rate can be changed and/or selected. The leak detector can be adapted to different requirements by the user without the need for exchanging the hose line. Further, it is possible to equip different leak detectors of the same device family with the same hose lines.Type: GrantFiled: February 2, 2006Date of Patent: August 24, 2010Assignee: Inficon GmbHInventors: Daniel Wetzig, Stefan Mebus
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Patent number: 7765874Abstract: A vacuum measuring cell with a membrane between two planar housing parts has a first housing part forming a reference vacuum volume and the second housing part forming a measuring vacuum volume with a connection for the medium to be measured and a mechanism for measuring the membrane deflection. The membrane surface exposed to the medium to be measured is a structured surface.Type: GrantFiled: November 23, 2006Date of Patent: August 3, 2010Assignee: Inficon GmbHInventor: Martin Wüest
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Patent number: 7728984Abstract: For evaluation of a measured parameter with a measuring cell having a cavity which generates for light an optical path length difference changing corresponding to the variation of the measured parameter, the method includes: introducing light from a white light source with the aid of an optical waveguide via a coupler (3) disposed in the path of the optical waveguide into the cavity, coupling out at least a portion of the light reflected back into the optical waveguide from the cavity with the aid of the coupler and conducting this reflected light to an optical spectrometer, determining the optical spectrum of the reflected light in the spectrometer and generating a spectrometer signal, conducting the spectrometer signal to a computing unit, wherein the spectrometer signal is directly converted through the computing unit to an interferogram and from its intensity progression the location of the particular extremal amplitude value is determined and this particular location represents directly the particular vaType: GrantFiled: March 24, 2008Date of Patent: June 1, 2010Assignee: Inficon GmbHInventors: Peter Waegli, Felix Mullis
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Patent number: 7728250Abstract: A clamp assembly for bringing an RF sensor into electrical contact with an RF current carrier is provided herein. The clamp assembly (101) comprises a first wedge-shaped element (103), and a second wedge-shaped element (105) which is slidingly engaged with said first wedge-shaped element. Preferably, the clamp assembly also comprises a collar (113) within which the first and second wedge-shaped elements are disposed. The clamp assembly preferably further comprises a fastener (111), such as a screw, which adjoins the first and second elements, in which case the clamp assembly is adapted such that, as the screw is rotated in a first direction, at least one of the first and second elements expands against the collar and/or the RF current carrier.Type: GrantFiled: May 21, 2004Date of Patent: June 1, 2010Assignee: Inficon, Inc.Inventors: Terry R. Turner, Rodney A. Herman, Duane T. Smith, James D. Spain
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Patent number: 7719681Abstract: A two-chamber electron impact emission sensor effective for monitoring vapor flux of materials in the presence of interfering species is described. The sensor includes two independent electron excitation regions and one photodetector for monitoring emission from excited species from both chambers. Copper vapor flux from an evaporation source was accurately measured in the presence of interfering H2O vapor, and Ga vapor flux from an evaporation source was accurately monitored in the presence of interfering CO2 gas. The invention permits deposition rates to be monitored using electron-impact emission spectroscopy with significantly improved accuracy in the presence of interfering gases at high partial pressures.Type: GrantFiled: October 12, 2007Date of Patent: May 18, 2010Assignee: InficonInventor: Chih-shun Lu
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Patent number: 7717681Abstract: A leak detector operating according to the counterflow principle comprises a first high vacuum pump that operates in series with a primary pump. A second high vacuum pump is branched at a connecting point and an entry side thereof is connected to a mass spectrometer. A light test gas in the form of helium flows through the second high vacuum pump in a direction opposite to a transport direction. A conduit connecting an inlet to the entry side of the first high vacuum pump is devoid of restricted flow zones and valves in such a way that the pumping capacity of the leak detector is high for helium, thereby reducing the response time thereof. A valve for blocking the conduit leading via the first high vacuum pump is arranged between the exit side thereof and the entry side of the primary pump.Type: GrantFiled: April 8, 2004Date of Patent: May 18, 2010Assignee: Inficon GmbHInventors: Thomas Böhm, Ulrich Doebler, Ralf Hirche, Werner Grosse Bley
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Patent number: 7707891Abstract: A pressure measuring cell has a first housing body and a membrane arranged proximate the housing body, both of ceramic. The membrane has a peripheral edge joined to the first housing body to create a reference pressure chamber. A second housing body made of ceramic material is opposite the membrane and is joined to the peripheral edge of the membrane, the second housing body together with the membrane forming a measurement pressure chamber. The second housing body has a port for connecting the pressure measuring cell to a medium to be measured. The first housing body, the second housing body and the membrane are tightly connected along the peripheral edge of the membrane in a central area of the first housing body a hole is formed, reaching through the first housing body and at least in the central region of the membrane and opposite the hole a surface of the membrane is formed as a first optically reflective area.Type: GrantFiled: June 27, 2008Date of Patent: May 4, 2010Assignee: Inficon GmbHInventors: Jarkko Antila, Dietmar Bertsch, Felix Mullis, Martin Wüest
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Publication number: 20100072359Abstract: An apparatus for heating a surface to liberate at least one analyte for detection thereof includes a source of energy to irradiate the surface and a collector to collect at least one gas from the surface, the at least one gas being capable of including the a least one liberated analyte. The apparatus further includes a detector linked to the collector to detect the presence of the at least one liberated analyte wherein the detection is used to control the power of the energy source by utilizing feedback relating to at least one condition of the surface.Type: ApplicationFiled: March 17, 2008Publication date: March 25, 2010Applicant: Inficon, IncInventors: Shawn Briglin, Carl Gogol