Abstract: In a business system that provides information about a report to a mobile communication terminal, a processing load required for a data search is reduced, and valid information is rapidly output. A mobile terminal management server run by enterprise resource planning receives and accepts a designated search condition from the mobile terminal, searches for process data including an item related to inventory management of a product represented by the accepted search condition with reference to process flow data stored in a process flow data table, generates quantity data representing a quantity related to an inventory of a product based on the searched process data, generates inventory-related data including the generated quantity data, generates inventory management information including inventory transition of the product represented by the designated search condition based on the inventory-related data, and provides the generated inventory management information to the mobile terminal.

Abstract: In a business system that provides information about a report to a mobile communication terminal, a processing load required for a data search is reduced, and valid information is rapidly output.

Abstract: Provided are methods and apparatuses for manufacturing a multilayer metal thin film without additional heat treatment processes. The method of manufacturing a multilayer metal thin film including steps of: (a) forming a first metal layer on a substrate by flowing a first metal precursor into a first reaction container; and (b) forming a second metal layer on the first metal layer by flowing a second metal precursor into a second reaction container, wherein the step (b) is performed in a range of a heat treatment temperature of the first metal layer so that the second metal layer is formed as the first metal layer is heat-treated.

Abstract: In a business system that provides information about a report to a mobile communication terminal, a processing load required for a data search is reduced, and valid information is rapidly output. A mobile terminal management server run by enterprise resource planning provides a project designation screen for designating a business project (project) according to a request from a mobile terminal, receives and accepts a project number representing the designated business project from the mobile terminal, searches for process data related to a plurality of business processes belonging to the business project represented by the accepted project number with reference to a process flow data stored in a process flow table, generates project management information representing a progress status of the designated business project based on the found process data, and provides the project management information to the mobile terminal.

Abstract: The present invention reduces a load required for ERP system maintenance and for data update, in a business system that provides a user with information relating to a report. A mobile terminal management server, on which ERP software runs, includes a process flow DB, and a process flow control definition matrix DB that stores matrix data, which are information relating to the business processes, and which represent the process flow including the business processes, and a processing type allowed for process data generated in each of the business processes. The mobile terminal management server receives processing target identification information by which the process flow and the business processes can be identified, identifies a processing type corresponding to the processing target identification information, receives input data entered by the user, and updates the process flow data stored in the process flow DB based on the processing type and the input data.

Abstract: In a business system that provides information about a report to a mobile communication terminal, a processing load required for a data search is reduced, and valid information is rapidly output. A mobile terminal management server run by enterprise resource planning receives and accepts a designated search condition from a mobile terminal, extracts inventory-related data including an item related to inventory management of a product represented by the accepted search condition from process flow data stored in a process flow data table, generates inventory management information including inventory transition of the product represented by the designated search condition based on the inventory-related data, and provides the generated inventory management information to the mobile terminal.

Abstract: A processing load required for updating and searching data is to be reduced in an ERP system. A database is configured so as to include: a process flow table PT in which process flow data containing various kinds of data regarding a process flow including a plurality of business processes are registered; and an update condition table UT in which update condition data indicating an update condition of the process flow data are registered, wherein the process flow data contain status data indicating a progress situation of each of a plurality of business processes included in the process flow, common data common among business processes included in the same process flow, and process unique data unique to each of the business processes included in the same process flow; wherein the status data are updated in the case where the process unique data are updated; and the update condition data are data indicating a state of the status data.

Abstract: Disclosed are a method for manufacturing a solar cell by processing a surface of a silicon substrate for a solar cell, a solar cell manufactured by the method, and a substrate processing system for performing the method. The method for manufacturing a solar cell comprises protrusion forming step including wet-etching process and for forming a plurality of minute protrusions on a light receiving surface of a crystalline silicon substrate, and planarization step of planarizing the bottom surface, the opposite surface to the light receiving surface of the substrate during or after the protrusion forming step.

Abstract: An apparatus for semiconductor processing capable of performing semiconductor processing such as etching, depositing, etc. on a surface of a substrate such as a wafer. The apparatus for semiconductor processing, comprises: a reaction chamber having a gate through which a substrate to be processed is transferred; one or more shower heads disposed at an upper side of the reaction chamber, for spraying gas so as to perform semiconductor processing; one or more wafer supporting units disposed at an inner lower side of the reaction chamber in correspondence to each of the shower heads, for supporting the substrate; a processing space forming unit disposed in the reaction chamber, for forming a processing space for semiconductor processing by sealing the shower heads and the wafer supporting units; and an exhausting system connected to the processing space forming unit for controlling a pressure and air exhaustion inside the reaction chamber and the processing space formed by the processing space forming unit.

Abstract: In a business system providing information relating to a form for a portable communication terminal, the security is further improved, and the processing load required for updating data or searching for data in an ERP system is reduced. A portable terminal managing server operated by ERP includes a process flow DB storing process flow data that is various kinds of data relating to a process flow including a plurality of business processes and is a data including status data, common data, and process specific data and provides the process flow data stored in the process flow DB for a portable terminal in accordance with a reading request for the process flow data from the portable terminal that is in a login state.

Abstract: Disclosed is a surface processing method of a crystalline silicon substrate for a solar cell, and a method for manufacturing a solar cell. The surface processing method of a substrate for a solar cell comprises first surface processing step for forming a plurality of first protrusions on surfaces of a substrate by etching the crystalline silicon substrate by using an aqueous solution, second surface processing step for forming a plurality of second protrusions smaller than the first protrusions by adhering etching residues onto an upper surface, a light receiving surface among the surfaces of the substrate, by using first etching gas, and residue removing step for removing etching residues adhered onto the upper surface of the substrate having undergone the second surface processing step.

Abstract: The present invention relates to a semiconductor manufacturing device, which can be applied in a semiconductor metal interconnection process, and a manufacturing method thereof. The semiconductor manufacturing device includes a loadlock chamber, at least one process chamber, a transfer chamber, and an oxidation preventing gas supply unit. The process chamber processes an annealing process by receiving a substrate. The transfer chamber transfers the substrate between the loadlock chamber and the process chamber. The oxidation preventing gas supply unit supplies oxidation preventing gas into either the transfer chamber or the loadlock chamber.

Abstract: A mobile terminal management server in which ERP runs provides a search condition designation screen (for example, a slip search screen) used to designate a search condition in response to the request from mobile terminals; receives a search condition designated through the search condition designation screen on which selection item arrangement circle display regions to display selection item arrangement circles, in each of which a plurality of selection items selectable to designate the search condition are arranged substantially on a circumference, are provided from the mobile terminals; searches for report data satisfying the received search condition by referring to a process flow table; and provides search result data (a search result list display screen) representing the searched report data to the mobile terminals as a search result.

Abstract: A mobile terminal management server in which ERP runs provides a search condition designation screen (for example, a slip search screen) used to designate a search condition, including a search condition representing code information taken in the mobile terminal, in response to the request from mobile terminals; receives a search condition designated through the search condition designation screen on which selection item arrangement circle display regions to display selection item arrangement circles, in each of which a plurality of selection items selectable to designate the search condition are arranged substantially on a circumference, are provided from the mobile terminals; searches for report data satisfying the received search condition by referring to a process flow table; and provides search result data (a search result list display screen) representing the searched report data to the mobile terminals as a search result.

Abstract: A mobile terminal management server in which ERP runs provides a search condition designation screen (for example, a slip search screen) used to designate a search condition in response to the request from mobile terminals; receives a search condition designated through the search condition designation screen on which selection item arrangement circle display regions to display selection item arrangement circles, in each of which a plurality of selection items are arranged substantially on a circumference, are provided; searches for report data satisfying the search condition by referring to a process flow table in which process flow data containing status data, common data and process unique data are stored; and provides search result data (a search result list display screen) representing the searched report data to the mobile terminals as a search result.

Abstract: Provided is a thin film deposition apparatus which comprises a chamber, a susceptor, a source gas supply part, and a susceptor support. The chamber has an inner space in which a deposition process is performed. The susceptor is disposed within the chamber to directly support a plurality of substrates along a circumference of a center of a top surface or support a substrate holder on which at least one substrate is disposed. The source gas supply part supplies first and second source gases into a central portion of an upper side of the susceptor in a state where the first and second gases are separated from each other. Also, the source gas supply part respectively injects the first and second source gases separated from each other toward a circumference of the susceptor through vertically arranged source gas injection holes to supply the first and second source gases onto the substrates disposed on the susceptor.

Abstract: A solar cell and a fabricating method thereof are provided. In the method of fabricating the solar cell, a p-type semiconductor substrate on whose light-receiving surface an anti-reflection coating is formed is loaded into a processing chamber. In this case, the p-type semiconductor substrate may be loaded on a substrate support of an apparatus of processing a plurality of substrates along the circumference of the substrate support, in the state where the back surface of the p-type semiconductor substrate faces upward. Then, a back surface field (BSF) layer having the characteristic of Negative Fixed Charge (NFC) is formed with AlO, AN or ALON on the back surface of the p-type semiconductor substrate.

Abstract: Provided is a method of manufacturing a semiconductor device. In the method, after a thin liner is formed on a substrate on which a lower interconnection is formed, a silicon source is supplied to form a silicide layer under the liner by a reaction between the silicon source and the lower interconnection, and the silicide layer is nitrided and an etch stop layer is formed. Therefore, the lower interconnection is prevented from making contact with the silicon source, variations of the surface resistance of the lower interconnection can be prevented, and thus high-speed devices can be fabricated.

Abstract: It is allowed to establish a system by which it is possible to make an inquiry into a variety of reports at a low cost without requiring a complex report program. A database (for example, a cube group memory 100) for storing business content data (for example, report data) representing the content of business in a business process includes: a one-dimensional cube for storing unit business content data for each business unit as one-dimensional data among the business content data, the unit business content data represents the content of each business for the business unit in the business process; and a two-dimensional cube for storing related business content data for each related business as two-dimensional data in the content of each business represented by the one-dimensional data stored in the one-dimensional cube, the related business content data integratively representing the content of predetermined related business performed over a plurality of business units.

Abstract: A mobile terminal management server includes a business information temporary storage for storing slip data to be provided to the mobile terminal; acquires the latest slip data from a slip data management server; updates the slip data stored in the business information temporary storage by storing the acquired slip data in the business information temporary storage; determines whether to permit log-in of mobile terminals or not when there is a log-in request from the mobile terminals; carries out a log-in process in the case where it is determined to permit the log-in; receives a view request (provision request, search request) of slip data from the mobile terminals of a log-in state for which the log-in process is carried out; and provides the slip data stored in the business information temporary storage to the mobile terminals in accordance with the received view request.