Abstract: Disclosed is a radiation detector assembly which can easily make a decision as to whether an energy calibration is needed. The radiation detector assembly detects radiations, creates pulse signals having pulse heights corresponding to the energies of the radiations, converts the pulse heights of the pulse signals into energies, and creates a radiation spectrum. The radiation detector assembly includes a qualitative analysis portion for assigning peaks appearing in the radiation spectrum, a conversion value calculating portion for calculating energy conversion values for converting the pulse heights into the radiation energies based on the assigned peaks, and an energy calibration decision portion for making a decision as to whether an energy calibration is needed, based on the calculated energy conversion values.

Abstract: An X-ray spectrometer (100) capable of reducing the effects of noises includes: an X-ray detector (110) outputting a staircase waveform (S110); a first differential filter (120) converting the staircase waveform (S110) into a first pulsed signal (S120); an event detection portion (140) detecting whether the first pulsed signal (S120) has exceeded a threshold value; a noise event detection portion (150) determining whether the first pulsed signal (S120) in excess of the threshold value is shorter than a given time; a second differential filter (160) converting the staircase waveform (S110) into a second pulsed signal (S160) having peaks whose heights correspond to the heights of the steps of the staircase waveform; a maximum value detection portion (170) detecting pulsed signal (S160) if the first pulsed signal (S120) exceeds a threshold value; and a decision portion (180) making a decision based on the noise event detection portion (150).

Abstract: Disclosed is a radiation detector assembly which can easily make a decision as to whether an energy calibration is needed. The radiation detector assembly detects radiations, creates pulse signals having pulse heights corresponding to the energies of the radiations, converts the pulse heights of the pulse signals into energies, and creates a radiation spectrum. The radiation detector assembly includes a qualitative analysis portion for assigning peaks appearing in the radiation spectrum, a conversion value calculating portion for calculating energy conversion values for converting the pulse heights into the radiation energies based on the assigned peaks, and an energy calibration decision portion for making a decision as to whether an energy calibration is needed, based on the calculated energy conversion values.

Abstract: An X-ray spectrometer (100) capable of reducing the effects of noises includes: an X-ray detector (110) outputting a staircase waveform (S110); a first differential filter (120) converting the staircase waveform (S110) into a first pulsed signal (S120); an event detection portion (140) detecting whether the first pulsed signal (S120) has exceeded a threshold value; a noise event detection portion (150) determining whether the first pulsed signal (S120) in excess of the threshold value is shorter than a given time; a second differential filter (160) converting the staircase waveform (S110) into a second pulsed signal (S160) having peaks whose heights correspond to the heights of the steps of the staircase waveform; a maximum value detection portion (170) detecting pulsed signal (S160) if the first pulsed signal (S120) exceeds a threshold value; and a decision portion (180) making a decision based on the noise event detection portion (150).

Abstract: An imaging mass spectrometer capable of reducing the dependence of the resolution of a projection image on mass is offered. Also, a method of controlling this spectrometer is offered. The imaging mass spectrometer includes: a plate on which a sample is placed; a lens system through which ions generated by irradiating the sample with laser light pass; an ion optical system for separating the ions according to flight time corresponding to mass-to-charge ratio; a detection system for measuring arrival positions and flight times of the ions passed through the ion optical system and generating an image of the sample when it is ionized; and a voltage control portion for sweeping the voltage applied to an electrode included in the lens system such that the lens effect of the lens system increases with time during a given period synchronized with the laser irradiation.

Abstract: A method of axially aligning a charged particle beam implemented by a charged particle beam system equipped with an astigmatic correction lens including a first pair of coils and a second pair of coils. The method starts with obtaining first to sixth sets of image data while varying currents flowing through the first to fourth coils according to first to sixth sets of conditions. Then, the values of the currents through the first to fourth coils for correcting the position of the axis of the beam are calculated based on the first to sixth sets of image data.

Abstract: A detector (100) is used to detect a charged particle beam (EB), and includes a first light emission portion (10) for converting the charged particle beam into light, a second light emission portion (20) for converting the charged particle beam transmitted through the first light emission portion (10) into light, and a light detector (30) for detecting the light produced by the first light emission portion (10) and the light produced by the second light emission portion (20). The first light emission portion (10) is a powdered scintillator. The second light emission portion (20) is a single crystal scintillator.

Abstract: A transmission electron microscope (100) includes an electron beam source (2), an illumination lens (10), an objective lens (20), an intermediate lens system (30), a pair of transfer lenses (40) located behind the intermediate lens system (30), and an energy filter (60) for separating the electrons of the beam L transmitted through the specimen (S) according to energy. The transfer lenses (40) transfer the first image to the entrance crossover plane (S1) of the energy filter (60) and to transfer the second image to the entrance image plane (A1) of the filter (60). An image plane (A3) is formed between the first transfer lens (40a) and the second transfer lens (40b).

Abstract: A mass spectrometer and control method which achieves high-speed scanning while maintaining relatively high sensitivity. The mass spectrometer (1) has: an ion source (2); a collisional cell (40) for performing a storing operation for storing at least some of the ions (2) and then performing an ejecting operation for ejecting the stored ions; a second mass analyzer (50) for selecting desired ions; a detector (60) for detecting the desired ions; analog signal processing circuitry (80) for converting a signal from the detector (60) into a voltage; and an A/D converter (90) for sampling and converting the output voltage into a digital signal. Signals delivered from the analog signal processing circuitry (80) in response to two pulsed ions produced by two successive ejecting operations of the collisional cell (40) are at least partially overlapped temporally.

Abstract: A specimen positioning device (100) is for use in or with a charged particle beam system having a specimen chamber (1) and has: a base (10) provided with a hole (12) in operative communication with the specimen chamber (1); a specimen holder (20) movably mounted in the hole (12) and having a first portion (22) and a second portion (24); and a first portion support portion (40) supporting the first portion (22) in the specimen chamber (1). The second portion (24) supports the first portion (22) via a resilient member (34).

Abstract: To cover a wide wavelength bandwidth, a spectroscopic apparatus uses three varied line spacing concave diffraction gratings G1 to G3, the corresponding energy ranges for G1, G2, and G3 being 50 to 200, 155 to 350, and 300 to 2200 eV, respectively. In the respective wavelength ranges, the diffraction conditions are satisfied. To provide a high throughput and a high resolution in the respective wavelength regions, the incident angles ?1 to ?3 for G1 to G3 measured from the normal line of the diffraction grating are specified to be ?1<?2<?3. Presupposing the normal lines of all diffraction gratings are superposed upon a common normal line, in order to meet ?1<?2<?3, the center positions ?1 to ?3 for G1 to G3 are set on the normal line (as ?1<?2<?3). From G1 to G3, one diffraction grating can be selected.

Abstract: A connector device for coupling a turbomolecular pump to an apparatus to be pumped. The connector device can suppress transmission of vibrations of relatively low frequencies. The pump has a rotor, a casing accommodating the rotor therein, and an intake port and an outlet port formed in the casing. The pump operates to suck gas from the intake port and to expel the gas from the outlet port by rotating the rotor within the casing at high speed. The connecting device has a connecting exhaust tube for connecting the intake port of the turbomolecular pump with the outlet port of the apparatus (such as a vacuum vessel) to be pumped. An annular weight is disposed around the outer periphery of the connecting exhaust tube. A viscoelastic member is interposed between the connecting exhaust tube and the weight to form a vibration absorber.

Abstract: A scanning electron microscope has a first condenser lens (121) having a lens gap (121a) facing toward an electron source (50) and a second condenser lens (122) having a lens gap (122a) facing toward an objective lens (13). The first and second condenser lenses are disposed between the electron source (50) and the objective lens (13). First deflecting means (133) is disposed in a beam passage opening formed in the first condenser lens (121). Second deflecting means (136) is disposed in a beam passage opening formed in the second condenser lens (122). An aperture plate (113) having a plurality of apertures (113a) of different diameters is mounted between the first deflecting means (133) and the second deflecting means (136). An electron detector (102) having a beam passage aperture (102a) is mounted between the second deflecting means (136) and the objective lens (13).

Abstract: A chromatic aberration corrector and method of controlling this chromatic aberration corrector is offered. The corrector has first and second multipole lenses for producing quadrupole fields and first and second transfer lenses each having a focal length of f. The first and second multipole lenses are arranged on opposite sides of the first and second transfer lenses. The distance between the first multipole lens and the first transfer lens is f. The distance between the first transfer lens and the second transfer lens is 2f. The distance between the second transfer lens and the second multipole lens is f??. The corrector is so designed that the relationship, f>?>0, holds.

Abstract: A scanning charged particle microscope is offered which can selectively detect and image electrons. The scanning charged particle microscope (100) has: a source (1) of a charged particle beam (E1); an objective lens (6) for bringing the charged particle beam (E1) emitted from the source (1) into focus at a sample (S); a scanning deflector (4) for scanning the focused charged particle beam (E1) over the sample (S); a sorting portion (10) for sorting out electrons emitted at given emission angles from electrons released from the sample (S) in response to irradiation of the sample (S) by the charged particle beam (E1); an electron deflector (20) for producing a deflecting field to deflect the electrons (E2) sorted out according to their energy; a detection portion (30) for detecting the electrons (E2) deflected by the electron deflector (20); and an image creating portion (44) for creating an image, based on the results of the detection performed by the detection portion (30).

Abstract: A method for axial alignment of a charged particle beam relative to at least three stages of multipole elements and a charged particle beam system capable of making the axial alignment. Some parts of the orbit of the beam or the distributions of three astigmatic fields, or both, are simultaneously translated in a direction perpendicular to the optical axis such that astigmatisms of the same order and same type due to axial deviations between successive ones of the astigmatic fields cancel.

Abstract: A sample analyzer is offered which creates a ternary scatter diagram representing a concentration ratio distribution of three elements out of several elements to be analyzed. This three-dimensional graph is created by adding an axis to the ternary scatter diagram and representing concentration information about the two additional elements on the added axis. The sample analyzer performs elemental analysis of a sample by scanning a primary beam over the sample and detecting a signal emanating from the sample. The added axis intersects the plane of the ternary scatter diagram.

Abstract: A method of image processing is offered which can control the degree of application of histogram equalization. The method involves: creating a brightness histogram indicating the frequency values of brightness levels of image data having brightness information (S12); obtaining a parameter value (S14); raising the frequency values of the brightness levels of the brightness histogram to an exponential power of the parameter value (S16); generating a tone curve, based on the frequency values raised to the exponential power of the parameter value (S18); and correcting the image data using the tone curve to thereby produce output image data (S20).

Abstract: Method and apparatus to measure electrolytes. The apparatus has a measuring portion for measuring electromotive forces generated by a reference fluid and the sample fluid, respectively, by the use of an electrode portion. A dilution vessel for preparing the sample solution by diluting a sample fluid with a diluting fluid. A control portion for providing control such that the reference fluid and the sample solution are alternately supplied to the electrode portion from the dilution vessel and that a given amount of the diluting fluid is supplied to and wasted from the dilution vessel prior to the preparation of the sample solution.

Abstract: Image signal processing method and apparatus having a first filter storage portion in which first filters are correlatively stored; a second filter storage portion in which second filters are correlatively stored; a first filter selection portion for selecting a first filter based on the power spectrum of the input image; a second filter selection portion for selecting a second filter based on the SIN (signal-to-noise ratio) of the input image; a third filter creation portion for creating a third filter by summing up the first and second filters; and a convolutional processing portion for convolving the input image using the created third filter.