Abstract: A reader and/or writer apparatus, a power feeding system and a power feeding and communication transmission and/or reception system in a proximate wireless card system arranged so that power which satisfies the requirement of the Radio Law (500 &mgr;V/m at a distance of 3 m from the reader and/or writer apparatus) regarding the radiated electric field is supplied sufficiently from the reader and/or writer apparatus to the proximate wireless card (IC card). The reader and/or writer apparatus has a spirally shaped or coil-shaped antenna for generating electromagnetic fields both to supply operational power to an IC card and to perform transmission and/or reception of signals for communication to and/or from the IC card and a conductor member for forming a mirror image of the antenna on its back side.

Abstract: A method and apparatus for conveying a treatment object whereby a drive unit for driving a treatment object conveyor robot is deployed inside a vacuum chamber. The robot comprises a conveyor arm and a drive unit. The conveyor arm is accommodated outside an airtight vessel and the drive unit is accommodated inside the airtight vessel to avoid damage to the drive unit. In order to raise and lower the robot inside the chamber, an elevator mechanism, deployed outside the chamber, advances and retracts a shaft that is inserted in an airtight manner into the chamber. The airtight structure is secured by O rings provided where a bellows surrounds the shaft and connects to the chamber and the elevator mechanism. The shaft, inserted inside the chamber, is linked to the airtight vessel that accommodates the drive unit of the robot. The airtight vessel communicates to the outside via a hollow portion in the shaft and the interior thereof is always kept at atmospheric pressure.

Abstract: A selective call receiver includes a receiver circuit for receiving calling information and message information, a processor for processing the calling information to determine whether the calling information identifies the selective call receiver, a message memory for storing the message information if the processor determines that the calling information does identify the selective call receiver, a message information output circuit for outputting the message information stored in the message memory to a portable data processing apparatus, a power receiving terminal for receiving power from the portable data processing apparatus, a rechargeable battery for powering the selective call receiver, a detector for detecting a state of charge of the rechargeable battery, and a charging circuit, responsive to the detector, for charging the rechargeable battery with the power received by the power receiving terminal from the portable data processing apparatus.

Abstract: A correlating filter includes a delay circuit which outputs a plurality of tap output signals TP1 to TPn having different delays. The correlating filter further includes a weighted adder circuit which weights the tap output signals, respectively, and adds the weighted tap output signals so as to derive a correlated output signal. A timing control circuit produces a control signal based on the correlated output signal from the weighted adder circuit. The control signal is high in level when the correlated output signal has a correlation peak. A power feed to the weighted adder circuit is achieved via a switching element. The switching element is only turned on when the control signal is high in level so as to enable the power feed to the weighted adder circuit. Thus, reduction in power consumption is achieved and the filter can be used in a portable radio device.

Abstract: A substrate processing apparatus comprises a substrate transfer chamber; a substrate processing chamber disposed on a first side wall of the substrate transfer chamber; an intermediate substrate holding chamber disposed on a second side wall of the substrate transfer chamber; a first substrate holder disposed within the intermediate substrate holding chamber; a second substrate holder disposed within the substrate processing chamber; a first substrate transfer robot, disposed within the substrate transfer chamber, for transferring the substrate between the substrate processing chamber and the intermediate substrate holding chamber; a first gate valve disposed between the substrate processing chamber and the substrate transfer chamber; a second gate valve disposed between the substrate transfer chamber and the intermediate substrate holding chamber; an atmospheric pressure section located opposite to the substrate transfer chamber with respect to the intermediate substrate holding chamber; a third valve dispos

Abstract: A substrate processing apparatus comprises a semiconductor wafer processing chamber, a wafer transfer device, a wafer cassette holding unit, a wafer cassette transfer device and a wafer cassette bringing in/out section disposed in this order and a housing. The wafer cassette holding unit is movable between a wafer processing time position and a maintenance time position thereof and the wafer cassette transfer device is movable between a wafer processing time position and a maintenance time position thereof. The wafer cassette bringing in/out section is capable of rotating forward of the housing, whereby the front face of said housing is opened.

Abstract: A substrate processing apparatus and method restrains outside air and gas-phase backward flow from entering the inside of a reaction chamber during a time period that the inside of the reaction chamber is opened to the outside through a substrate carrying-in/carrying-out opening. The substrate processing apparatus can comprise, for example, a vertical CVD apparatus having a gas supply system and a bypass line. The gas supply system supplies inert gas to a space between an outer tube and an inner tube of a reaction furnace during a boat loading period and a boat unloading period. The bypass line exhausts the atmosphere from the reaction chamber by a slow exhaust operation during the boat loading period and the boat unloading period.

Abstract: A substrate processing apparatus comprises a heating member, a reaction tube body provided in the heating member and having a first gas introducing section and a gas exhausting section, a substrate holder disposed in the reaction tube body for horizontally holding a substrate within the reaction tube body between the first gas introducing section and the gas exhausting section, a gas heating tube provided in the heating member along the reaction tube body, and having a second gas introducing section and a gas discharging section which is in communication with the first gas introducing section of the reaction tube body, the gas heating tube being arranged such that a gas flowing in the gas heating tube first flows form the first gas introducing section side toward the gas exhausting section side, and then returns to flow from the gas exhausting section side toward the first gas introducing section side.

Abstract: A substrate processing apparatus comprises a substrate transfer chamber; a substrate processing chamber disposed on a first side wall of the substrate transfer chamber; an intermediate substrate holding chamber disposed on a second side wall of the substrate transfer chamber; a first substrate holder disposed within the intermediate substrate holding chamber; a second substrate holder disposed within the substrate processing chamber; a first substrate transfer robot, disposed within the substrate transfer chamber, for transferring the substrate between the substrate processing chamber and the intermediate substrate holding chamber; a first gate valve disposed between the substrate processing chamber and the substrate transfer chamber; a second gate valve disposed between the substrate transfer chamber and the intermediate substrate holding chamber; an atmospheric pressure section located opposite to the substrate transfer chamber with respect to the intermediate substrate holding chamber; a third valve dispos

Abstract: A substrate processing apparatus comprises a substrate transfer section, connection modules attached to the substrate transfer section, and a first substrate transfer robot in the substrate transfer section capable of transferring substrates to the connection modules. The connection module comprises a substrate processing chamber, first and second intermediate chambers between the substrate processing chamber and the substrate transfer section. The second intermediate chamber is provided with a first substrate holder, the substrate processing chamber is provided with a second substrate holder, and the first intermediate chamber is provided with a substrate transfer device capable of mounting a plurality of the substrates held being stacked in the vertical direction by the first substrate holder, onto the second substrate holder such that the substrates are arranged side by side in the horizontal direction.

Abstract: A method of semiconductor filming wherein a thin film is deposited on a wafer under an atmospheric pressure, which comprises the steps of simultaneously supplying a reactive gas and an inert gas to a reaction tube and maintaining a partial pressure of the reactive gas constant by adjusting the flow rates of those gases, whereby stability in film quality is improved.

Abstract: A semiconductor manufacturing apparatus including a heating device; a reaction tube disposed within the heating device, the reaction tube having a gas inlet portion and an exhaust portion parted from each other by a predetermined distance in the longitudinal direction of the reaction tube; and a plurality of gas feed pipes extending along a side wall of the reaction tube from the exhaust portion side to the gas inlet portion, the plurality of gas feed pipes being parted from each other. The reaction gas is provided through the plurality of gas feed pipes into the reaction tube, thereby providing an improved uniform temperature distribution within the reaction tube and resulting in an improved uniform film thickness of the oxide film formed on the surface of the semiconductor wafer.

Abstract: A signal characterizer for performing functional transformations such as Fast Fourier Transforms (FFTs), which converts an input serial analog signal into a plurality of parallel discrete signals using an analog-type serial-to-parallel converter. The discrete signals are then supplied to the input terminals of butterfly operation circuits to process the parallel discrete signals into a plurality of transformed signals. A switch supplies the transformed signals to a serial signal output terminal. The switch is controlled by a controller so that the input signal sequence is converted to a serial signal sequence according to a predetermined order.

Abstract: A rotary shaft is supported by a frame so as to be rotatable and movable vertically relative to the frame. A carrying arm is pivoted to the rotary shaft and a substrate receiver is attached to an end of the carrying arm and receives a substrate. A guide base is mounted on the rotary shaft on the lower side of the substrate receiver in such a manner that the guide base is approximately parallel to the substrate receiver, and a substrate alignment mechanism is attached to the rotary shaft via the guide base. The substrate alignment mechanism includes a pair of location correcting members which are coupled to air cylinders. The location correcting members are displaced by air cylinders to correct the location of substrate.

Abstract: A substrate processing apparatus includes a substrate supporting pedestal having an upper substrate supporting pedestal and a lower substrate supporting pedestal which are vertically stacked, an upper resistance heater provided above the upper substrate supporting pedestal so as to be opposite to the upper substrate supporting pedestal, and a lower resistance heater provided under the lower substrate supporting pedestal so as to be opposite to the lower substrate supporting pedestal. Each of the upper substrate supporting pedestal and the lower substrate supporting pedestal is capable of mounting a substrate or substrates in a substantially horizontal position, and the lower substrate supporting pedestal including an opening which exposes the substrate in its entirety or openings which expose the substrates in their entireties as viewed from under the lower substrate supporting pedestal.

Abstract: The autocorrelation coefficient operator 60 carries out an integration operation to determine the autocorrelation coefficient for audio signal processing or other types of signal processing at high speed with low power consumption. The input signal S is digitized in the A/D converter 30 to the digital signal SP and supplied to a delay unit 40, which delays and holds the digital signal SP sequentially. A sample holder 45 also samples and holds the analog signal S in synchronization with the delay unit 40. When the number of sampled values held by the sample holder 45 reaches a predetermined value, the sample holder 45 outputs the sampled values at the same time in accordance with a sampling clock signal CK which is supplied by a clock signal generator 35. Delayed values held in the delay unit 40 are shifted and output sequentially in accordance with a shift clock signal SCK, the frequency of which is higher than that of the sampling clock signal CK.

Abstract: A receiver receives transmitted data, and a decoder detects the number of error bits in the received data based on check data contained in the received data. If the number of error bits is 2 or less, then when an error correction is instructed by a selector switch, the decoder effects an error correction on message data, and the corrected message data are stored in a RAM. If the number of error bits is more than 2, the decoder does not effect an error correction on the message data, and the message data with error bits are stored in the RAM. When the message data stored in the RAM are displayed on a display screen, the user sees either the corrected message or the uncorrected message.

Abstract: A vertical furnace for use in a semiconductor manufacturing apparatus, which comprises a heater, an outer tube, an inner tube, all being disposed concentrically in a multi-layered fashion, a boat adapted to be introduced into the inner tube with a wafer loaded thereon, and a boat cover disposed internally of the inner tube concentrically therewith. The boat cover is comprised of a boat cover body and an auxiliary cover plate connected to said boat cover body with a given gap therebetween, the boat cover body having a predetermined number of slit apertures extending in a generator direction thereof, the auxiliary cover plate being disposed to cover the slit apertures. The introduced reactive gas flows in branched streams, one flowing through the inside of the boat cover and the other flowing in past the boat cover, whereby the film deposited on the wafer is improved in uniformity and homogeneity.

Abstract: The level of a symbol information in a symbol-sync part transmitted for the purpose of synchronizing a receiver of a digital radio communications system reflects the state of the concurrent transmission. With this factor taken in account, a symbol determining method is provided which comprises the steps of receiving a symbol information extracted from a symbol-sync part of a received signal obtained by demodulating a received wave and digitizing it; generating thresholds for use to determine the value of the received symbol based on the reception level of the symbol information; determining the value of the received symbol in the data part of the received data based on the thresholds; and reproducing the symbol. Therefore, even if a received symbol is deteriorated due to a degradation, etc. of transmission line, a symbol determination can be done with no degradation of the signal reception due to a narrowing of noise margin, etc.

Abstract: For effectively achieving remote a display at long distance by using paging system, there is provided a personal computer, coding information to be transmitted into message code, dividing it into sub-message code which can be transmitted by one time of transmission operation of the paging system, and automatically transmits them in sequence. The message code sent through the paging system is received with a page adapter and input to a display device. The display device interprets the message code and generates display data to perform the display and control thereof.