Abstract: An illumination and imaging device (2) for multiple spectral regions comprises an objective (21) that defines an optical axis (20). A beam splitter module (32) is arranged in the optical axis (20). Multiple light sources (35), from each of which an illuminating beam path (35a, 35b, 35c) proceeds, are associated with the beam splitter module (32). Also provided are multiple detectors (34), associated with each of which is an imaging beam path (34a, 34b). The illuminating beam paths (35a, 35b, 35c) and imaging beam paths (34a, 34b) have a common optical path segment in which the beam splitter module (32) is arranged. The illumination and imaging device (2) can advantageously be used in a coordinate measuring machine (1).

Abstract: An epi-illumination interference attachment according to Mirau that can be mounted onto the objective (1) of a microscope as a two-ray interference attachment module (12). The attachment has a reference mirror (6) and several beam splitters (8a-8d) which are affixed on a carrier such as turret plate (7). The beam splitters (8a-8d) show specific reflection/transmission characteristics (R/T values), especially 20/80, 35/65, 43/57, and 50/50. The reference mirror (6) shows, for instance a reflection value of 85 percent. With the installation according to this invention, objects (4) with very different reflection values can be observed and measured without any contrast problems.

Abstract: A microscope having switchable illumination in at least two spectral regions; having a common illumination beam path, proceeding from at least one light source, preferably a broad-band light source, for the at least two spectral regions; and having a narrow-band wavelength-selective filter (for example, in the IR or UV wavelength region) that can be inserted into the illumination beam path in order to achieve a wavelength-selective illumination in a first of the at least two spectral regions. A broad-band light protection filter, which can be inserted into the illumination beam path alternatively to the wavelength-selective filter, is associated with the illumination beam path. An apparatus for illumination switchover for a microscope of this kind, having switchable illumination in at least two spectral regions, comprises a mechanical positive coupling of the opposite-direction insertion motions of the wavelength-selective filter and/or of the light protection filter.

Abstract: The basis of the invention is an apparatus and a method for adjusting components (2) of an optical or mechanical system (1; 20), the components (2) comprising an adjustment device (3). An electric positioning motor (5) can be engaged onto the adjustment device (3) of the components (2). An electrical generator (8) is or becomes electrically connected to the positioning motor (5). The generator (8) can be manually operated using an operating element (9), thereby effecting an adjustment of the component (2). It is thereby possible, with simple and economical means and with no external electrical power supply, to adjust or align the components (2) quickly and conveniently.

Abstract: A method and an apparatus for regulating the brightness of a light source (2), configured as an incandescent lamp, in the illumination beam path (8) of a microscope (1), the brightness of the light source (2) being modifiable by increasing or reducing the electrical power delivered to the light source (2), are characterized in that a red shift, associated with the reduction in the delivered electrical power, of the spectrum of the light emitted by the light source (2) in the illumination beam path (8) is compensated for by way of a variable optical filter (16) that brings about a blue shift of the spectrum. A color-neutral regulation of the brightness of the illuminating light is thereby achieved.

Abstract: The present invention relates to a method and a measurement apparatus for detection of a specimen (1), a specimen (1) being illuminated with a light source (2) and imaged with the aid of an imaging optical system (3) onto a detector (4) preferably embodied as a CCD camera, and the specimen (1) being detected repeatedly with the detector (4). With the method and the measurement apparatus according to the present invention, fluctuations in the statistical analysis of detected signals or data can be minimized, the detected signals or data being subject to detection-related error sources. The method and the measurement apparatus according to the present invention are characterized in that the detection time of the detector (4) for the individual detections and/or the intensity of the light serving for specimen illumination are varied.

Abstract: A confocal microscope has an illumination beam path of a light source, a detection beam path of a detector, a scanning device, optics combining and separating the illumination beam path and detection beam path, and an objective, in which both an incident specimen illumination and a transmitted specimen illumination are possible. The confocal microscope according to the present invention is characterized in that in order to switch over from an incident specimen illumination occurring through the objective to a transmitted specimen illumination occurring toward the objective, beam deflection optics and optionally beam-shaping optics can be introduced on the side of the specimen plane facing away from the objective.

Abstract: A microscope with a viewing tube for visual observation of a specimen by an observer, with a control circuit for controlling electrical and/or electro-motor-driven microscope functions, and an illuminating device for illuminating the specimen to be observed is described. The control circuit is connected to a proximity sensor installed on the microscope, which responds to the presence of the observer to the viewing tube. The control circuit includes an adjustable time-delay logic element located in the control circuit for delaying switches of the microscope functions such that the microscope functions are switched after the observer is absent for a predetermined time period.

Abstract: The invention concerns a microscope with a capability for switching between the deep ultra-violet and the visible spectral region having a displaceable tube lens changer (16) with at least one tube lens (17a) for the IV light region and at least one tube lens (17b) for the visible light region and additionally having a reflector carrier having multiple reflectors (12) arranged shiftably in the illuminating beam path on said reflector carrier (13). The reflector carrier (13) on the one hand and the tube lens changer (16) on the other hand are mechanically coupled to one another in such a way that shifting the reflector carrier (13) in the illuminating beam path to a specific reflector (12) automatically displaces the tube lens changer (16) in such a way that the latter arranges in the optical axis (15) a tube lens (17) corresponding to the reflector (12).

Abstract: A displacement unit for at least one element to be displaced is provided comprising a drive unit, a transfer element that is caused to move by the drive unit and that comprises a thread or a tooth set, and an engagement element, which engages into the thread or tooth set of the transfer element and is thus driven by the motion of the transfer element, and by whose motion the displaced element is moved. The engagement element is configured elastically, in such a way that it deforms elastically upon contact by the displaced element against a stop or obstacle.

Abstract: The invention concerns a microscope with a capability for switching between the deep ultra-violet and the visible spectral region having a displaceable tube lens changer (16) with at least one tube lens (17a) for the UV light region and at least one tube lens (17b) for the visible light region and additionally having a reflector carrier having multiple reflectors (12) arranged shiftably in the illuminating beam path on said reflector carrier (13). The reflector carrier (13) on the one hand and the tube lens changer (16) on the other hand are mechanically coupled to one another in such a way that shifting the reflector carrier (13) in the illuminating beam path to a specific reflector (12) automatically displaces the tube lens changer (16) in such a way that the latter arranges in the optical axis (15) a tube lens (17) corresponding to the reflector (12).

Abstract: The invention concerns a compact video microscope or video tube body (6) for all usual investigative methods. The video microscope can take the form of an enclosed microscope housing (1a) which, in addition the optical and mechanical components, comprises one or a plurality of electronic image sensors (24), a computer (25) and a flat screen (8). It can further consist of an ocular-free microscope stand (1b) and a modular video tube body (6) which can be attached thereto or mounted thereon. The enlarged image of the object is not observed via a conventional microscope tube body with oculars, but is made accessible on a flat screen (8) as a digital image which can be observed directly by the eye.

Abstract: An apparatus for fine positioning of a component has a symmetrical, one-piece double parallel spring element having a movable center bar, suspended on bending points, which carries the component. The center bar is preloaded in the direction of the frame by way of an elastic element. The center bar can be adjusted in almost ideally tilt-free fashion with a fine adjustment element arranged between the center bar and frame. A high-precision coordinate measuring instrument having a measurement stage for receiving a substrate that is to be measured, an incident-light and/or transmitted-light illumination device, and an imaging optical system with a vertical optical axis, has a fine positioning apparatus of this kind with a vertically arranged double parallel spring element. Mounted on its center bar is an objective holder, and thereon the objective with an objective axis parallel to the movement direction of the center bar.

Abstract: An apparatus and method for loading substrates of various sizes into a substrate holder. The apparatus for this purpose comprises a base plate with peripheral rim and at least three support means arranged on the base plate, each of which has configured on it different support surfaces for the various substrates. The support surfaces are arranged in stepped fashion on the support means. In addition, receiving elements for the substrate holder are arranged on the base plate in such a way that the substrate holder that is set in place surrounds the support means and is aligned and oriented in terms of its position. At least one sensor element is housed in at least one of the support surfaces of a support means for one substrate size, so as thereby to detect the size of the substrate.

Abstract: A measuring instrument and a method for measuring patterns on substrates of various thicknesses are described. The measuring instrument comprises an X-Y carriage in which an opening is defined by a peripheral rim. An illumination optical system and multiple optical compensation elements serve to illuminate the measurement region. Multiple storage compartments for the optical compensation elements are shaped on the peripheral rim of the opening of the X-Y carriage. The optical compensation element needed in each case can be removed by the illumination optical system from the associated storage compartment.

Abstract: The invention discloses a contact sensor having a movably arranged impact detection element spaced away from a stationary housing part; and having a detection system that contains a light source with an emission surface as well as a receiving element, defining a receiving surface, arranged opposite the emission surface of the light source wherein the receiving surface and emission surface are of substantially the same size. Furthermore a a high-precision measurement machine and an apparatus for protecting a protruding component are disclosed.

Abstract: The invention relates to an analyzer insert (1) in which the rotation of an adjustment wheel (2) accessible from the outside is transmitted by means of two parallel adjustment levers (8, 9) of equal length onto a rotatable analyzer (3) which can be inserted into the optical path of the microscope. The one ends (10, 11) of the adjustment levers (8, 9) are rotationally mounted at the level of the adjustment wheel (2) on bearing axles (14) near the rim while the other ends (12, 13) are mounted on the axles at the level of the analyzer holder (4). At the level of the adjustment wheel (2) and the analyzer holder (4), in relation to the axes of rotation (15, 16) of same these axles generate force levers of equal length, which are situated pairwise at a 90° angle to each other. In the 0° position of the analyzer (3) all four bearing axles (14) are situated on a straight line. The analyzer (3) can be moved into any position between 0° and 180° precisely and without slip.

Abstract: The application describes a holder for attaching a component with outside dovetail carriages to a bearing surface. A pin-like bolt and, next to it, a ssion spring, which is bent away from the bolt under preloading, are attached in front of the bearing surface as interacting holder components. The cross sections, the lengths and the distance between the bolt and the compression spring are adapted to the inner profile of the dovetail carriage. To attach the component, the dovetail carriage is pressed manually by means of the bolt and the compression spring, until it comes into contact with the bearing surface, and is latched in place. The bolt and the compression spring are pressed into the inner sides of the dovetail carriage on both sides by the preloading of the bent compression spring. Advantageously, the compression spring is additionally preloaded toward the bearing surface.

Abstract: A device and method for delivering various substrates into a high-precision measuring instrument. The device comprises a magazine in which are configured several compartments in which substrate holders for different substrates can be deposited. Also provided is a loading station in which the substrate holders can be loaded with the substrate that matches the substrate holder. An automatic transfer device removes substrate holders from the magazine and introduces them into the loading station, or removes the substrate holders together with the introduced substrate from the loading station. The automatic transport device is configured as a robot arm at whose front end sits a fork.

Abstract: An illumination system (1) for a microscope, in which a first light source (2), a collector lens (3), an aperture diaphragm (4), and a condenser lens ((5) are arranged in the illumination beam path (6), is described. The illumination light is directed through the aperture diaphragm (4) via the condenser lens (5) into the object plane (9). Arranged in the illumination beam path (6) on the optical axis (20) is a second light source (8) that is imaged at infinity by the condenser lens (5).