Abstract: An illumination and imaging device (2) for multiple spectral regions comprises an objective (21) that defines an optical axis (20). A beam splitter module (32) is arranged in the optical axis (20). Multiple light sources (35), from each of which an illuminating beam path (35a, 35b, 35c) proceeds, are associated with the beam splitter module (32). Also provided are multiple detectors (34), associated with each of which is an imaging beam path (34a, 34b). The illuminating beam paths (35a, 35b, 35c) and imaging beam paths (34a, 34b) have a common optical path segment in which the beam splitter module (32) is arranged. The illumination and imaging device (2) can advantageously be used in a coordinate measuring machine (1).

Abstract: A displaceable X/Y coordinate measurement table having two orthogonally arranged measurement mirrors for interferometric position determination is described. The displaceable measurement table, a mirror body carrying the measurement mirrors, and the receptacle for the substrate are embodied as separate components. The mirror body has a number of support points on its upper side and lower side for supporting a substrate or a receptacle above the upper side and for supporting the mirror body on the lower points above the measurement table. The mirror geometry is therefore unaffected by the weight of various substrates. The two measurement mirrors are integrated into a one-piece mirror body made of a material having an extremely low coefficient of thermal expansion. The described embodiments have frame-shaped openings in the X/Y coordinate measurement table and mirror body, which makes the measurement table suitable for both reflected and transmitted applications.

Abstract: The automated microscope system (30) comprises a box in which at least one control and power supply unit (34) is installed. The box is arranged physically separately from the microscope stand (32) and is connected to the microscope stand (32) with a cable (38). In one exemplary embodiment, a computer unit (36) is connected to the box that contains at least one control and power supply unit (34).

Abstract: The method for adapting the lateral and temporal resolution of a microscope image allows the detection of temporal changes in the image content, and switches over to another transmission mode on the basis of the result of the determination.

Abstract: An illumination device according to the present invention comprises a light source (1), an optical fiber bundle (4), a coupling-in optical system (3) before and a coupling-out optical system (5) after the fiber bundle (4), and an illuminating optical system (17; 20). A homogenizing optical system (6) between the coupling-out optical system (5) and illuminating optical system (17; 20) brings about a homogenization of the intensity distribution in the image field. The homogenizing optical system (6) advantageously comprises a micro-honeycomb condenser (7) and a lens member (8) which superimpose the exit opening of the fiber bundle (4) in an intermediate image plane (10) to form a homogeneous intermediate image.

Abstract: The invention relates to a microscope eyepiece with theoretically reduced astigmatism in a compensating optical system. The inventive eyepiece has 10× magnification, a sight field (SFZ)≦25 and a Petzval sum (SP) of 0.014≦SP≦0.021. Said eyepiece comprises a special field lens placed in front of a field stop and a negative lens in the eye lens section placed behind said field stop. The inventive field lens is embodied in the form of a simple, thick, positively diffracting meniscus which is convex in relation to the field stop and provided with the following field lens factor: 0.95≦beta′≦1.05. The eye lens section can be displaced in relation to the field stop to enable diotropic adjustment. Special, advantageous embodiments of the field lens and examples of embodiments of the microscope eyepiece, complete with structural data, are described.

Abstract: The method for coding live images in microscopy makes possible the recording of a first complete image (251) that depicts a portion of a microscopic preparation (14a). A first coded complete image (200) is generated therefrom and is stored in a buffer memory (27). The first coded complete image (251) can moreover be output, for example, on a monitor. When a second complete image (252) is recorded, only a part is processed and transmitted. That part corresponds to the offset of an X-Y stage (12). The coordinates of the portion of the second complete image (252), and further control data, are transferred to a control data decoder (26). A correspondingly assembled and coded complete image (210) is generated in an image assembler (32), the at least one coded partial image (220) and the preceding coded complete image located in the buffer memory (27) being used.

Abstract: A measuring device for measuring structures on a transparent substrate includes an incident-light illuminating device, an imaging device, and a detector device for the imaged structures and a measuring stage for receiving the substrate. The stage is displaceable in an interferometrically measurable fashion perpendicularly to and relative to an optical axis of the imaging device. The measuring stage is designed as an open frame with a receiving edge for the substrate. A transmitted-light illuminating device is provided beneath the measuring stage. The optical axis of the transmitted light illuminating device is aligned with that of the incident-light illuminating device.

Abstract: The invention describes a method for selfcalibration of a coordinate-measuring machine, in which the coordinates of structures on an uncalibrated reference object are measured in a plurality of rotary positions on the object table of the coordinate-measuring machine, the measured coordinates are rotated back into the initial position by means of rotation functions, and a correction function is determined such that the rotated-back coordinates agree in an optimum fashion with the coordinates of the initial orientation. Each reference object is rotated about only one axis in this process. Rotationally symmetrical linear combinations of the fit functions used to approximate the correction function are determined and left out of account in the approximation. The correction functions generated are systematically complete and include no undetermined or defective terms.

Abstract: The invention relates to an inspection microscope for the semiconductor industry. The microscope stand consists of a foot (1), a pillar (4) and a crosshead (5). In order to facilitate unobstructed feeding of samples from the back part of the microscope stand, the pillar (4) is mounted laterally next to the back end of the foot (1) and the crosshead (5) arranged thereon when seen from the front. This makes it possible to save space and avoid adaptations when integrating the microscope stand into the clusters in the test area of the semiconductor industry and to feed test objects directly from the back of the microscope stage (3). In an especially advantageous construction of the stand, the inspection microscope is particularly suitable for examining large-surface objects (e.g. flat screens or 400 nm wafers).

Abstract: A method is provided for measuring structures on a mask surface in which the mask is supported on a measuring stage that is interferometrically measurably displaceable perpendicularly to an optical axis of an image-measuring system. A mask coordinate system associated with the mask is aligned using alignment marks relative to a measuring device coordinate system. With set positions of the structures in the mask coordinate system being specified in advance, the positions of at least two external edges of the mask in the mask coordinate system that are perpendicular to one another are measured in addition to the actual positions of the structures in the mask coordinate system.

Abstract: The invention relates to a phase annulus consisting of a phase shifting thin-film system, which, in the case of a cemented system, has the following structure: (first) substrate-Ag-nH-cement-(second) substrate, or a structure: (first) substrate-n1-Ag-n2-cement-(second) substrate. In the case of an uncemented structure, the thin-film system has the following structure: substrate-Ag-nH-air, wherein nH, n1 or n2 represent the respective refractive index of a dielectric film. Phase shifting of the positive phase contrast can be regulated in a targeted manner.

Abstract: A method and an apparatus for driving a stepping motor is provided. Digital desired current values are stored in the form of a sine table and are read from the sine table at a constant sampling frequency. The intervals between the read-out table values can be varied equally and unequally. The digital desired current values are converted into discrete analog signals. A sinusoidal signal is reconstructed from the analog signals. A motor current for exciting a phase of the stepping motor is derived from the sinusoidal signal.

Abstract: A microscope condenser with a condenser head, with the condenser being fastened to a microscope stand in a manner which allows it to move. A holding device for a glass container filled with a liquid is arranged above the condenser head. A living sample or cell for examination is arranged in the glass container. The microscope condenser in this case has a catch pan for liquid that has overflowed.

Abstract: The invention is directed to a method and an arrangement for the response analysis of semiconductor materials with optical excitation. The object of the invention, to find a new type of response analysis of semiconductor materials with optical excitation which also allows a sufficiently precise detection of the charge carrier wave with a higher excitation output and a shorter charge carrier lifetime, is met according to the invention in that an exciting laser beam is intensity-modulated with two discrete modulation frequencies (.OMEGA..sub.1 ; .OMEGA..sub.2), the luminescent light exiting from the object is measured on the difference frequency (.OMEGA..sub.1 -.OMEGA..sub.2), and the luminescent light is analyzed as a function of the arithmetic mean (.OMEGA.) of the modulation frequencies (.OMEGA..sub.1 ; .OMEGA..sub.2). The invention is applied in the semiconductor industry for determining different electrical parameters of semiconductor materials.

Abstract: A method and device for enabling determination of periodic errors of a heterodyne interferometer. According to the method, repeated calibration measurement occurs for a constant calibration distance divided up into two distance segments. One of the distance segments is measured with the interferometer and the other is measured by an additional measuring system and does not present a periodical error with regard to the distance measured. Before each calibration measurement the distance segment measured by the interferometer is modified slightly. The second distance segment is modified accordingly in the opposite direction. The sum of the distance segment modifications must correspond to at least one optical wave length of the interferometer around the measuring wave length. Using the various calibration measurement results for the constant calibration distance, the periodic error components are separated and a wavelength dependent error curve is determined in order to correct all interferometer measurements.

Abstract: A modular microscope system includes a plurality of stackable housing modules each having a plurality of inwardly pointing protuberances provided with one or more precision stop surfaces thereon for removably mounting and positioning a plurality of prealigned functional element carriers having corresponding precision stop surfaces thereon for engagement with the precision stop surfaces of the housing module protuberances.