Patents Assigned to Leybold-Heraeus GmbH
  • Patent number: 5098069
    Abstract: The invention concerns a method, equipment and a regulating means for use in recovering metal-carbide scrap by alloying. This is carried out by treating the scrap with a low melting point metal which brings the metal-carbide matrix into solution at temperature above the melting point of the alloy formed. The treatment is carried out in a container in the presence of inert gas, the pressure of which is gradually reduced following completion of the alloying process, the resultant metal vapor being condensed.To solve the problem of producing, in the resultant residue, a proportion of low melting point metal of less than 100 ppm and of preventing condensation of the metal vapors on the container, it is proposed in the invention that the metal-carbide scrap and the low melting point metal should be alloyed with each other in an inner chamber arranged within the container.
    Type: Grant
    Filed: October 31, 1988
    Date of Patent: March 24, 1992
    Assignee: Leybold-Heraeus GmbH
    Inventors: Erwin Wanetzky, Franz Hugo, Fernand Kuhlmann
  • Patent number: 4933064
    Abstract: A sputtering cathode for the coating of substrates. The cathode has a base, a target of nonmagnetic material, and a magnet system having exposed pole faces for the production of a tunnel of magnetic lines of force overarching the sputtering surface. The target is provided with at least two continuous projections lying one inside the other, which contain at least one sputtering surface between them, and have confronting wall surfaces. The pole faces are located on both sides of the projections and sputtering surface between them such that magnetic lines of force issue perpendicularly from the one wall surface and, after crossing the sputtering surface, re-enter perpendicularly the opposite wall surface.
    Type: Grant
    Filed: November 30, 1987
    Date of Patent: June 12, 1990
    Assignee: Leybold-Heraeus GmbH
    Inventors: Michael Geisler, Jorg Kieser, Reiner Kukla
  • Patent number: 4919778
    Abstract: A system of layers is built up on substrates of mineral glass in the following order: first layer: an oxide from the group, stannic oxide, silicon dioxide, aluminum oxide, tantalum oxide, zirconium oxide, or their mixed oxides; second layer: a metal from the group, tantalum, tungsten, nickel, iron; third layer: silver or a silver alloy containing at least 50 weight-percent of silver; fourth layer: a metal from the group, tantalum, tungsten, nickel, iron or their alloys; fifth layer: an oxide from the group, stannic oxide, silicon dioxide, aluminum oxide, tantalum oxide, zirconium oxide or their mixed oxides. After that, the substrate with all the coating layers is heated to the softening temperature of the glass in an oxidizing atmosphere and bent to the final shape.
    Type: Grant
    Filed: May 19, 1989
    Date of Patent: April 24, 1990
    Assignee: Leybold-Heraeus GmbH
    Inventors: Anton Dietrich, Klaus Hartig, Joachim Szczyrbowski
  • Patent number: 4919187
    Abstract: Method for the charging and controlled addition of prealloys to molten alloys of metals reactive and nonreactive at room temperature which are held in a crucible. To permit pre-alloys with a high percentage of reactive metal to be worked more easily, a casting is produced from the reactive and nonreactive metals by a casting process followed by solidification. This casting is nonreactive at its surface at room temperature and its average content of reactive metal is equal to or greater than the reactive metal content in the crucible. Such castings are added to the crucible according to the need for the reactive metal. In an especially advantageous manner, a casting produced in a casting mold in a nonreactive atmosphere has at least at its surface such a content of nonreactive metal that it is stable at room temperature.
    Type: Grant
    Filed: August 9, 1988
    Date of Patent: April 24, 1990
    Assignee: Leybold Heraeus GmbH
    Inventors: Hartwig Rupp, Otto Stenzel
  • Patent number: 4915194
    Abstract: A lubricating system for supplying oil to the bearings of a shaft having a central oil pumping passage open at one end. An oil delivery tube reaches into the oil pumping passage. To achieve a positive transfer of the oil from the oil delivery tube to the inner wall of the oil pumping passage, means are associated with the upper end of the oil delivery tube for bringing the oil onto the inner wall of the oil pumping passage.
    Type: Grant
    Filed: November 1, 1988
    Date of Patent: April 10, 1990
    Assignee: Leybold Heraeus GmbH
    Inventors: Heinrich Englander, Frank Fleischmann, Hans-Peter Kabelitz, Winfried Kaiser, Friedrich Schmaus, Gunter Schutz, Ralf Steffens, Dietrich Urban
  • Patent number: 4871434
    Abstract: Process and apparatus for coating a tool with a layer of a compound which contains at least one of carbon and nitrogen and at least one of titanium, zirconium, chromium, tungsten, tantalum, vanadium, niobium, hafnium and molybdenum. The apparatus includes a vacuum chamber and a substrate holder for accommodating at least one tool with the substrate holder at a bias of between -40 and -200 V relative to ground. The apparatus includes at least two magnetron sputtering cathodes disposed in mirror symmetry to the substrate holder. The target contains at least one metal selected from the group consisting of T, Zr, Cr, W, Ta, V, Nb, Hf and Mo. The apparatus includes at least one gas source for supplying the vacuum chamber with a noble gas and a reaction gas. The reaction gas contains at least one of nitrogen and a gaseous carbon compound. The apparatus includes at least one anode in the edge region of each target so that the anodes are positioned in mirror symmetry with respect to the target holder.
    Type: Grant
    Filed: August 15, 1986
    Date of Patent: October 3, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Wolf-Dieter Munz, Bernd Hensel, Michael Scherer, Otto Knotek
  • Patent number: 4843246
    Abstract: The invention concerns apparatus for detecting the position of incidence (2) of a beam (1) of charge carriers on a target (3) wherein X-rays (4) starting from the position of incidence (2) are detected by detector (7) connected to an analyzing circuit (9) An imaging system (5, 50; 10, 11, 12) is provided which can cover all the positions (P.sub.1 . . . P.sub.8) that the positions of incidence (2) can take up and projects them on the sensing surface of a position-sensitive detector (7), wherein the projected coordinates (x', y') are directly proportional to the coordinates (x, y) of the position of incidence (2). In addition, a filter (6) highly transparent to the X-ray radiation range emitted from the position of incidence (2) is arranged between the target surface (3) and the position-sensitive sensor (7). The position-sensitive detector (7) emits electric signals which depend from the coordinates (x, y) of the position of incidence (FIG. 1).
    Type: Grant
    Filed: December 3, 1987
    Date of Patent: June 27, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Ewald Benes, Franz Viehbock, Herbert Stori, Friedrich-Werner Thomas, Gernot Thorn
  • Patent number: 4838628
    Abstract: An apparatus and process thereof is disclosed of a partially reflecting optical element having a succession of dielectric layers of high and low refraction alternated on a substrate which is transparent to the longer wavelength of infrared radiation. The succession of layers is an anti-reflection layer for wavelengths of infrared radiation .lambda..sub.L and is a relfective layer for visible wavelengths .lambda..sub.K.
    Type: Grant
    Filed: July 3, 1986
    Date of Patent: June 13, 1989
    Assignee: Leybold Heraeus GmbH
    Inventors: Werner Lobsiger, Hans-Georg Lotz
  • Patent number: 4839904
    Abstract: An apparatus for melting metals in a vacuum chamber has a weir box (1), electron beam generators disposed above the weir box, and a crucible for the withdrawal of the melt flowing out of the weir box. A weir or sill is disposed in the trough athwart the length thereof, and it divides the trough into two basins and is situated underneath the one electron-beam source. The melt flowing from the one basin into the other runs in a thin film over the top of the weir or notch while the titanium nitrite in the melt is dissolved.
    Type: Grant
    Filed: October 30, 1987
    Date of Patent: June 13, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Aljet Harberts, Josef Heimerl, Horst Ranke
  • Patent number: 4832490
    Abstract: A photometer in which a measuring phase, a reference phase and a dark phase are produced by means of a chopper. These phases are staggered in time, so that a single detector can be provided for all phases. In the photometer the object to be measured is situated between two light conductors, the one light conductor leading to the detector and the other light conductor leading to the chopper input. The chopper output is carried by an additional light conductor to the detector.
    Type: Grant
    Filed: July 31, 1987
    Date of Patent: May 23, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Michael Boos, Werner Klug, Alfons Zoller
  • Patent number: 4832496
    Abstract: A method and apparatus for measuring the diameter of a monocrystal during crucible drawing determines the brightness profile at the melt/monocrystal change-over point. The spacial position of maxima in the brightness profile in relation to a reference point indicates the diameter. The brightness profile is obtained by optically scanning the melt/monocrystal change-over point with a mirror rotating about a horizontal axis, applying the optical beam reflected by the rotating mirror to a row of photosensitive elements in parallel with the axis, and analyzing the outputs corresponding to the brightness profile for determining the diameter.
    Type: Grant
    Filed: October 29, 1986
    Date of Patent: May 23, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventor: Friedrich W. Thomas
  • Patent number: 4830876
    Abstract: Process for the production of contact strips on substrates, especially on plates of mineral glass. These substrates are provided with an electrically conductive surface coating which is coated on the side facing away from the substrate with at least one surface layer of a dielectric material. For the production of the contact strips, a noble metal suspension in a liquid is deposited according to the invention on the surface layer in the pattern of the contact strips. Then the substrate with the pack of layers is exposed to a heat treatment at at least 100.degree. C. until a lowered total resistance occurs through the conductive surface coating between the contact strips.
    Type: Grant
    Filed: July 3, 1986
    Date of Patent: May 16, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Anton Dietrich, Klaus Hartig, Hans-Christian Schaefer, Joachim Szczyrbowski
  • Patent number: 4828872
    Abstract: A method and apparatus is disclosed for the reactive deposition of vapors of metal compounds onto substrates by the evaporation of at least one metal by means of an electron beam in an atmosphere consisting of the reaction gas, at pressures of no more than 10.sup.-1 mbar. An electrode positively biased with respect to ground and having an acceleration voltage of at least 20 kV is disposed in the area of the vapor stream flowing to the substrate. The metal vapor is produced in an internal chamber which surrounds the evaporator and has a masked orifice opposite the substrate. The reaction gas is introduced into the internal chamber and the metal vapor and reaction gas are guided by the masked orifice toward the substrate.
    Type: Grant
    Filed: September 11, 1986
    Date of Patent: May 9, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Volker Bauer, Albert Feuerstein, Klaus Hartig, Gerhard Kienel, Helmuth Lammermann, Wolfgang Zirkel
  • Patent number: 4828391
    Abstract: Test-glass changer for measuring layer properties optically in vacuum coating installations. A holding device (10) that accommodates several test glasses (12) is rotatably supported on a substrate holder (4), which serves to transport substrates (5) through a stream (22) of coating material. A control mechanism (16) serves to introduce in each case one test glass (12) into a path of rays (A-A) of a measuring device (7,8) and into the stream (22) of coating material. The control mechanism (16) is an incremental motor, by means of which in each case one test glass (12) can be changed over into a position, stationary relative to the substrate holder (4), in which position it can be passed alternately with the substrates (5) through the path of rays (A-A) of the measuring device (8,8) and through the stream (22) of coating material.
    Type: Grant
    Filed: July 3, 1986
    Date of Patent: May 9, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Walter Zultzke, Walter Lehnert
  • Patent number: 4820106
    Abstract: In an apparatus for passing a discoidal workpiece into and out of a coating chamber through a lock and for shifting the workpiece into and out of the range of a coating source, a swivelling arm is journaled for movement about a vertical axis on the top of the coating chamber. The ends of the swiveling arm have jacks bearing workpiece holding plates which transport the workpiece to an opening in the coating chamber. The workpiece holders are adapted to close off the opening from above. A turntable which can swivel about a vertical axis in the interior of the coating chamber has recesses on its top side for accommodating the workpieces. Lifting plates are journaled in these recesses and can be raised and lowered by lifting means in the bottom plate.
    Type: Grant
    Filed: September 2, 1987
    Date of Patent: April 11, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Michael Walde, Jaroslav Zejda
  • Patent number: 4818358
    Abstract: In a cathode sputtering apparatus, in order to achieve a very uniform utilization of the target and a high-quality coating on the substrate, the cathode is provided on its side of the target facing away from the substrate with a flat plate on which a plurality of magnets are disposed in rows, the magnets of the individual rows parallel to one another being at approximately equal distances apart and having the same polarity. Moreover, the magnetic of the one row are offset by a dimension g from the magnets of the adjacent row, so that, in the area of the target provided with the coating material, when the cathode is used in a chamber with suitable gas pressure and with a voltage of any desired frequency is applied, plasma tubes form which are like serpentinely curved racetracks.
    Type: Grant
    Filed: November 12, 1987
    Date of Patent: April 4, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Peter Hubert, Barbara Kussel, Peter Wirz
  • Patent number: 4818282
    Abstract: The invention concerns a method, equipment and a regulating means for use in recovering metal-carbide scrap by alloying. This is carried out by treating the scrap with a low melting point metal which brings the metal-carbride matrix into solution at temperatures above the melting point of the alloy formed. The treatment is carried out in a container in the presence of inert gas, the pressure of which is gradually reduced following completion of the alloying process, the resultant metal vapor being condensed.To solve the problem of producing, in the resultant residue, a proportion of low melting point metal of less than 100 ppm and of preventing condensation of the metal vapors on the container, it is proposed in the invention that the metal-carbide scrap and the low melting point metal should be alloyed with each other in an inner chamber arranged within the container.
    Type: Grant
    Filed: September 10, 1987
    Date of Patent: April 4, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Erwin Wanetzky, Franz Hugo, Fernand Kuhlmann
  • Patent number: 4816412
    Abstract: Method for the determination of the content of solid carbon compounds in soil samples, particularly in humus soils, by converting the solid carbon compounds with a reactant into carbon dioxide and conveying the carbon dioxide gas into an analyzer. To reach the reaction temperature, metal particles are added to a specified amount of the dry, milled soil sample and the dry matter is heated inductively in the presence of the reactant to the reaction temperature.
    Type: Grant
    Filed: August 15, 1986
    Date of Patent: March 28, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Manfred Schmidt, Horst Fechter
  • Patent number: 4815415
    Abstract: An apparatus for producing and coiling films of insulating material coated under a vacuum with electrically conductive material, comprising an electron beam vaporizer, a feed drum, a roller disposed above the electron beam vaporizer and looped by the film, a take-up drum, and deflector rolls for establishing a path for the film, at least one plasma source oriented towards the path of the film so that the plasma touches the film, said plasma source being disposed in the region of the path of the film from the electron beam vaporizer to the take-up drum, wherein the plasma source is disposed at the end of the angle of contact specified by one of the deflector rolls.
    Type: Grant
    Filed: March 28, 1988
    Date of Patent: March 28, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Albert Feuerstein, Helmut Eberhardt, Helmut Lammermann, Volker Bauer, Gerard Lobig
  • Patent number: 4813846
    Abstract: An inserter for vacuum installations has a two-part arm provided with a driving and, a single joint and an end for holding an object. The arm can turn in at least one horizontal plane about a vertical main axis disposed in the area of the driving end, and has at least one motor for moving the arm about the main axis and changing the angle between the parts of the arm at the joint.
    Type: Grant
    Filed: April 29, 1987
    Date of Patent: March 21, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventor: Dirk Helms