Patents Assigned to Leybold-Heraeus GmbH
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Patent number: 4808373Abstract: A multiple-substance alloy used as a target in a cathode sputtering apparatus, and having a gold content most preferably in the range of 94-98 percent by weight, is disclosed. The alloy further contains non-gold alloys of aluminum, copper and preferably an element of the group of Co, Ni, Ga, Ti, In, Cd, Sn, Fe and Pd.Type: GrantFiled: October 20, 1986Date of Patent: February 28, 1989Assignee: Leybold-Heraeus GmbHInventors: Dieter Hoffman, Wolf-Dieter Munz, G. A. Hoist Siewert, Horst Dietrich
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Patent number: 4806765Abstract: The disclosure relates to a method and apparatus for checking the signal path in a measuring system of the type having a collector for charged particles and an amplifier connected to its output to form a voltage or current signal. To permit sensitivity tests with currents on the order of 10.sup.-12 A and less, it is proposed that a capacitive current, produced by means of a influencing electrode situated in the vicinity of the charge collector, be fed into the charge collector. An electrode already present in the measuring system can be used as the influencing electrode.Type: GrantFiled: October 9, 1986Date of Patent: February 21, 1989Assignee: Leybold-Heraeus GmbHInventor: Raymond Heinen
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Patent number: 4803398Abstract: An electron gun with one directly heatable initial cathode (2), one indirectly heatable second blocking cathode (3) and one focusing electrode (17). The focusing electrode (17) presents an initial centering region (18) and, by means of supporting braces, the blocking cathode (3) is fixed concentrically in a carrier ring (19) presenting a second centering region complementary to the first centering region (18). This permits the blocking cathode (3) to be introduced into the focusing electrode from the back by means of the carrier ring (19), and the carrier ring (19) is secured by means of a locking ring (24).Type: GrantFiled: July 3, 1986Date of Patent: February 7, 1989Assignee: Leybold-Heraeus GmbHInventors: Reinhardt Kraft, Horst Ranke
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Patent number: 4798663Abstract: Sputtering apparatus for the reactive coating of substrates with hard substances, which has a housing (1) with a feed line (3, 4) for a reaction gas a nobble gas, a magnetron (6) as well as at least one mounting (9) for the substrates, the mounting (9) being positionable in front of the sputtering surface and between an ionization system with at least two electrodes (7, 8), of which the one electrode (8) is operable as an electron emitter and the other electrode (7) is at a positive potential with respect to the emitter electrode, and the substrate mounting (9) itself is at a negative voltage in relation to the ground.Type: GrantFiled: September 30, 1986Date of Patent: January 17, 1989Assignee: Leybold-Heraeus GmbHInventors: Gunther Herklotz, Hans Eligehausen
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Patent number: 4799046Abstract: To monitor the winding temperature of a coil, preferably the magnet coil of a magnetic valve, it is proposed to use as the monitored magnitude the resistance related to the temperature of the winding. For this purpose the winding is supplied during the measurement time with a constant or predeterminable voltage or current and the voltage or current related to the temperature of the winding is used as the magnitude to be measured.Type: GrantFiled: January 30, 1987Date of Patent: January 17, 1989Assignee: Leybold-heraeus GmbHInventor: Raymond Heinen
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Patent number: 4798521Abstract: A system for regulating pressure in a container. The system includes a membrane pressure regulator with a reference pressure chamber containing a reference pressure, and a vacuum pump connected to the container via the membrane pressure regulator. The system further includes a gas inlet valve connected to the reference pressure chamber for increasing the reference pressure; a gas outlet valve connected to the reference pressure chamber for decreasing the reference pressure; and a regulator connected to the gas inlet valve and the gas outlet valve for actuating the valves. The regulator includes a device for generating a desired pressure value for the container and a measuring member connected for providing an indication of the pressure in at least one of the reference pressure chamber and the container.Type: GrantFiled: May 4, 1987Date of Patent: January 17, 1989Assignee: Leybold-Heraeus GmbHInventors: Lothar Schmidt, Hans-Joachim Schumbert
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Patent number: 4797062Abstract: A device for moving a gas at a subatmospheric pressure with a screwthread-like device on at least one of the facing surfaces of a rotor spacedly surrounded axially by a relatively-rotatable stator insulates the stator from a housing for the device to prevent thermal variation of the space between the rotor and stator and, thus, keeping the gas-moving action constant.Type: GrantFiled: October 20, 1987Date of Patent: January 10, 1989Assignee: Leybold-Heraeus GmbHInventors: Ludger Deters, Heinrich Englander, Hans-Peter Kabelitz, Gunter Schutz
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Patent number: 4794784Abstract: A leak detecting apparatus includes a detector arranged for sensing a gas emanating through a specimen to be tested for leaks; a leak simulator having an outlet emitting a gas of a known flow rate; and a valve for selectively connecting the outlet to the detector during a calibration thereof and disconnecting the outlet from the detector during a leak detecting operation thereof. The valve comprises a fast-switching 3/2-way valve including a movable valve member having first and second positions. In the first position the movable valve member allows communication through the valve solely between the outlet of the leak simulator and an input of the detector and in the second position allows communication through the valve solely between the outlet of the leak simulator and the atmosphere.Type: GrantFiled: April 23, 1987Date of Patent: January 3, 1989Assignee: Leybold-Heraeus GmbHInventor: Werner G. Bley
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Patent number: 4793911Abstract: In an apparatus for the production of coatings with a uniform thickness profile on substrates by cathode sputtering, a substrate carriage held and guided between wheels is provided, which can be moved through the coating chamber, and which has on its side facing the cathode rotatably mounted substrate disks whose axes of rotation are each disposed transversely of the plane of movement of the substrate carriage. On the side of the substrate carriage facing away from the cathode, motor-driven shafts equipped with permanent magnets are journaled in the coating chamber with their longitudinal axes extending in a plane parallel to the plane of movement of the substrate carriage, and they produce a disk current in rotor disks which are affixed co-rotationally to the substrate disks. As a result of the disk current, the rotor disks, and with them the substrate disks, are set in rotation as they pass by the shafts.Type: GrantFiled: November 12, 1987Date of Patent: December 27, 1988Assignee: Leybold-Heraeus GmbHInventors: Guenther Kemmerer, Hans Wolf
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Patent number: 4794330Abstract: A method and circuit for measuring and displaying a parameter, in which the parameter is sensed by means of a sensor which supplies an output voltage representative of the value of the parameter, the output voltage is compared with a comparison voltage associated with the sensor response characteristic, and a display is produced on the basis of the result of the comparing step. The comparison is effected by supplying the output voltage from the sensor to a first input of a comparator, supplying the comparison voltage to a second input of the comparator, and varying the comparison voltage between successive values extending over the output voltage range of the sensor.Type: GrantFiled: February 3, 1987Date of Patent: December 27, 1988Assignee: Leybold-Heraeus GmbHInventors: Hans-Hermann Klein, Zoltan Szocs
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Patent number: 4791017Abstract: An underlayer of at least one a carbonitride of titanium, zirconium, hafnium or vanadium or hafnium nitride may be under a surface layer at least containing gold or on a still-undermore decorative article, and preferably both. It has a brilliance approximating that of gold so that, when appropriately color matched to the surface layer, it disguises spots of the surface layer worn away in use of the article. The underlayer and surface layer may be deposited in a cathode vaporization process from corresponding metallic cathode targets in appropriate neutral or reactive atmospheres.Type: GrantFiled: December 31, 1986Date of Patent: December 13, 1988Assignee: Leybold-Heraeus GmbHInventors: Dieter Hofmann, Klaus-Jurgen Heimbach, Helmut Petersein, Wolf-Dieter Munz
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Patent number: 4787023Abstract: A power supply apparatus, in which the three phases of an alternating-current main are connected each through rectifier elements connected in antiparallel to the primary winding of a three-phase transformer. The secondary windings of this transformer are connected through rectifiers to a load device, such as an electron beam gun or other such device which produces short-circuits while in operation. Measuring sensors are provided on the primary AC side which, in the presence of an excess current on the primary AC side, block controlled rectifier elements. The blocking takes place very rapidly because GTO thyristors are used as rectifier elements. The decay of the magnetic energy in the transformer is achieved by the fact that the primary side of this transformer is connected in delta.Type: GrantFiled: June 8, 1987Date of Patent: November 22, 1988Assignee: Leybold-Heraeus GmbHInventor: Friedrich-Werner Thomas
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Patent number: 4779449Abstract: Leak detector operating according to the countercurrent principle is used in a leak detection method and includes a first high vacuum pump having an inlet which is connected to an inlet of the leak detector, a second high vacuum pump having an inlet which is connected to a mass spectrometer, and a first roughing pump having an inlet which is connected to the outlets of the first and second high vacuum pump respectively. In order, on the one hand, to detect particularly large leaks and, on the other hand, avoid overloads due to high test gas concentrations, a second roughing pump is provided having an inlet which may be selectably connected to one of the inlet of the leak detector via a conduit equipped with a control valve and to the inlet of the first roughing pump by way of a conduit equipped with a choke.Type: GrantFiled: October 15, 1987Date of Patent: October 25, 1988Assignee: Leybold-Heraeus GmbHInventors: Werner G. Bley, Gunter Reich
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Patent number: 4780042Abstract: A tilting mechanism for precisely controlling the pouring of metal from a melting crucible is disclosed. The mechanism utilizes a pressure roller journalled in an adjustable bearing mount to clearance-free urge a rack against a pinion to tilt the crucible. At least one boom is disposed on the adjustable bearing mount to pivot the hydraulic cylinder in a parallel direction relative to the tilting shaft.Type: GrantFiled: June 2, 1987Date of Patent: October 25, 1988Assignee: Leybold-Heraeus GmbHInventors: Wolfgang Reuter, Oskar Tippmann
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Patent number: 4777062Abstract: A method and apparatus are disclosed for the reactive vapor deposition of metal compounds onto a substrate. At least one metal is evaporated from an elongated evaporation crucible in an atmosphere consisting of a reaction gas at a pressure of no more than 10.sup.-1 mbar. The metal is evaporated by means of an electron beam having an acceleration voltage of at least 20 kv. The invention solves the problem of providing stable an repeatable operating conditions, even with an evaporation crucible of considerable length.Type: GrantFiled: November 21, 1986Date of Patent: October 11, 1988Assignee: Leybold-Heraeus GmbHInventor: Albert Feuerstein
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Patent number: 4775981Abstract: In a melting furnace with weight-related control of the consumable electrode, the electrode mounting is disposed in a separate pressure chamber which has an inverted bottle-shaped configuration. The downwardly extending neck-like portion is passed sealingly through an opening in the cover plate of the melting chamber. The pressure chamber is suspended from a crossbeam which can be driven vertically by means of spindles. On the upper end of the pressure chamber there is provided a bellows whose upper edge is joined to the upper, tubular portion of the electrode holding rod, while a solid rod holding a current-carrying tube extends coaxially through the tubular portion and is hung from a frame which suspends the electrode holding rod and which is supported on the crossbeam by a sensor.Type: GrantFiled: November 2, 1987Date of Patent: October 4, 1988Assignee: Leybold-Heraeus GmbHInventors: Heinz Kohnert, Rudolf Randa, Otto W. Stenzel
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Patent number: 4773079Abstract: Process for melting down and degassing lumpy material by means of inductive heating and under subatmospheric pressure in a melting crucible. For the purpose of shortening the duration of the process, scavenging gas and/or reaction gas is introduced into the bottom region of the melting crucible during at least 50% of the duration of the process until the material is melted down completely.Type: GrantFiled: August 15, 1986Date of Patent: September 20, 1988Assignee: Leybold-Heraeus GmbHInventors: Gerhard Bruckmann, Johann Kemmer, Felix Muller, Detley Schlebusch, Ulrich Hensgen
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Patent number: 4772848Abstract: A paramagnetic measuring instrument comprises a magnetic circuit, formed from ferromagnetic material and having pole ends defining a discontinuity, and a gas measuring chamber disposed in the discontinuity between the pole ends. The measuring chamber includes a frame shaped outer part formed from nonmagnetic material and having a central opening extending between the pole ends; two ferromagnetic pole shoes each respectively disposed adjacent a separate one of the pole ends and extending into the opening of the outer part; two distribution channels disposed in the outer part on opposite sides of the measuring gap for supplying a measuring gas and a comparison gas, respectively, to the measuring gap; and inlet and outlet gas lines for supplying the measuring gas and the comparison gas, respectively, and removing the mixture formed from the measuring and comparison gases.Type: GrantFiled: February 5, 1987Date of Patent: September 20, 1988Assignee: Leybold-Heraeus GmbHInventor: Heinz Hummel
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Patent number: 4769533Abstract: The invention relates to a circuit arrangement for a position sensitive radiation detector which produces a current or voltage signal (U.sub.Y) that depends exclusively on the coordinates x and y of the point of incidence of electromagnetic radiation on the EMR sensitive surface of a lateral diode (1). For this purpose, the circuit arrangement has integrators (4, 5), in which the voltages (U.sub.1, U.sub.2) are formed, which are proportional to the integral over time of the output currents (I.sub.1, I.sub.2) of the lateral diode (1). The difference between the voltages (U.sub.1, U.sub.2) is used as a signal, which depends exclusively on the coordinates at that particular time, at which the arithmetic mean of these voltages (U.sub.1, U.sub.2) has reached a preselected, constant value.Type: GrantFiled: August 17, 1987Date of Patent: September 6, 1988Assignee: Leybold-Heraeus GmbHInventors: Martin Groschl, Gerd Pfersmann
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Patent number: 4767641Abstract: Device for the plasma treatment of substrates (7) in a high frequency-excited plasma discharge between two electrodes (3, 8), supplied by a high-frequency source (6). The first electrode is constructed as a hollow anode (3) and the second electrode (8), which carries the substrate (7), is deposited in front of the hollow space (10) of the hollow anode or can be passed by this. Moreover, the hollow anode (3) has an edge (9), which is drawn out in the direction of the second electrode (8) and which, relative to the second electrode, forms a gap s.sub.1 all around that does not exceed 10 mm in width. In order to form the electrode so that the gap width is not a critical feature, projections (12) are disposed in the hollow space (10) of the hollow anode (3), said projections increasing the internal surface area (11) of the hollow anode (3). Preferably, these projections (12) are constructed as rib structures, which may also assume a honeycomb form.Type: GrantFiled: July 3, 1986Date of Patent: August 30, 1988Assignee: Leybold-Heraeus GmbHInventors: Jorg Kieser, Michael Sellschopp, Michael Geisler