Abstract: New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprises one or more materials that have hetero-substituted carbocyclic aryl groups. Particularly preferred photoresists of the invention can exhibit reduced leaching of resist materials into an immersion fluid contacting the resist layer during immersion lithography processing.
Type:
Application
Filed:
July 22, 2019
Publication date:
November 14, 2019
Applicant:
Rohm and Haas Electronic Materials LLC
Inventors:
Deyan Wang, Cheng-Bai Xu, George G. Barclay
Abstract: In one aspect, coating compositions are provided that comprise a component a component that comprises one or more silicon, antimony, aluminum, yttrium, cerium, lanthanum, tin, titanium, zirconium, hafnium, indium or zinc compounds. In another aspect, coating compositions are provided that comprise a plurality of discrete particles. Preferred coating compositions of the invention are useful for antireflective purposes, particularly with an underlaying photoresist coating layer, as well as for a barrier layer in immersion lithography.
Type:
Grant
Filed:
November 17, 2014
Date of Patent:
November 12, 2019
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
Gregory P. Prokopowicz, Michael K. Gallagher
Abstract: The present invention provides methods for making polymerizable monomer compositions comprising purifying a (b) monomer mixture of (i) one or more monomers having at least two polymerizable vinyl groups and (ii) one or more monomers having a single polymerizable vinyl group as part of a (meth)acrylate ester group by any one or more of treating the monomer mixture in an activated porous alumina or silica column, sieve drying the monomer mixture in a vacuum followed by drying over dried molecular sieves having average pore sizes of from 2 to 20 Angstroms, freeze-pump-thaw (FPT) treating by freezing the monomer mixture in a vessel or container to a temperature below ?75° C., degassing the monomer mixture by application of vacuum in the range of 102 to 10?2 Pa, sealing the vessel or container under vacuum, and thawing the composition to room temperature; and, combining in an inert gas atmosphere the resulting monomer mixture (b) with a composition (a) of quantum dots in dry form or organic solvent solution.
Type:
Grant
Filed:
January 26, 2018
Date of Patent:
November 12, 2019
Assignees:
Rohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
Abstract: New bis(sulfonyl)imide and tri(sulfonyl)methide photoacid generator compounds (“PAGs”) are provided as well as photoresist compositions that comprise such PAG compounds.
Abstract: Environmentally friendly nickel electroplating compositions enable the electroplating of nickel deposits which are bright and uniform and inhibit corrosion of gold layers deposited on the bright and uniform nickel deposits. The environmentally friendly nickel electroplating compositions can be used to electroplate bright and uniform nickel deposits on various substrates over a wide current density range.
Abstract: A brickmold window trim can include a single-piece body that can be installed by hand on a window frame without tools. The brickmold window trim resiliently couples to the window frame, is self-retaining on the window frame, and self-centering relative to the window frame. The brickmold window trim can have a flange that contact a top surface of a ledge portion of a window frame, a support wall that contacts a side surface of the ledge portion and an angled wall portion that contacts an underside of the ledge portion. One or more of the flange wall, support wall and angled wall snaps or clips onto the ledge portion to couple the brickmold window trim to the window frame.
Abstract: The present invention relates to a polymeric charge transfer layer comprising a polymer and a p-dopant. The polymer comprises as polymerized units, Monomer A, Monomer B, and Monomer C crosslinking agent. The present invention further relates to an organic electronic device, especially an organic light emitting device containing the polymeric charge transfer layer.
Type:
Grant
Filed:
January 8, 2015
Date of Patent:
October 22, 2019
Assignees:
Dow Global Technologies LLC, Rohm and Haas Electronic Materials Korea Ltd., Rohm and Haas Electronic Materials LLC
Inventors:
Liam P. Spencer, Hong-Yeop Na, Yoo-Jin Doh, Chun Liu, Minrong Zhu, Jichang Feng, Zhengming Tang, Shaoguang Feng, Kenneth L. Kearns, Jr., Timothy De Vries, Sukrit Mukhopadhyay, John W. Kramer, Peter Trefonas, III, David D. Devore, William H. H. Woodward
Abstract: Reaction products of primary and secondary diamines and bisanhydrides are included as additives in metal electroplating baths. The metal electroplating baths have good throwing power and deposit metal layers having substantially planar surfaces. The metal plating baths may be used to deposit metal on substrates with surface features such as through-holes and vias.
Type:
Grant
Filed:
October 11, 2018
Date of Patent:
October 8, 2019
Assignees:
Rohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
Inventors:
Lingli Duan, Chen Chen, Shaoguang Feng, Zukhra I. Niazimbetova, Maria Anna Rzeznik
Abstract: Indium electroplating compositions containing amine compounds in trace amounts to electroplate substantially defect-free uniform indium which has a smooth surface morphology. The indium electroplating compositions can be used to electroplate indium metal on metal layers of various substrates such as semiconductor wafers and as thermal interface materials.
Type:
Grant
Filed:
May 12, 2017
Date of Patent:
October 1, 2019
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
Yi Qin, Kristen Flajslik, Mark Lefebvre
Abstract: A coated glass substrate. The coated glass substrate comprises a glass sheet having a thickness from 0.1 to 0.7 mm and coated on a first side with a first optical layer having a positive photo-elastic constant and coated on a second side with a second optical layer having a negative photo-elastic constant.
Type:
Grant
Filed:
December 8, 2015
Date of Patent:
September 3, 2019
Assignees:
Rohm and Haas Electronic Materials LLC, Rohm and Haas Company, Dow Global Technologies LLC
Inventors:
Shih-Wei Chang, Lanfang Li, Kathleen M. O'Connell, Weijun Zhou
Abstract: Polymeric reaction products of certain aromatic alcohols with certain diaryl-substituted aliphatic alcohols are useful as underlayers in semiconductor manufacturing processes.
Type:
Grant
Filed:
April 7, 2016
Date of Patent:
August 13, 2019
Assignees:
Rohm and Haas Electronic Materials LLC, Rohm and Haas Electronic Materials Korea Ltd.
Abstract: Provided are purification methods, comprising: (a) providing an organic solvent and a phenolic peroxide formation inhibitor, wherein the organic solvent has a first boiling point at standard atmospheric pressure (bp1) and the phenolic peroxide formation inhibitor has a second boiling point at standard atmospheric pressure (bp2) that satisfy the following inequality (I): bp2?(1.10)(bp1)??(I); and (b) heating the organic solvent and the phenolic peroxide formation inhibitor to a temperature causing the organic solvent and phenolic peroxide formation inhibitor to vaporize, and (ii) condensing the vaporized organic solvent and peroxide formation inhibitor to provide a purified mixture of the organic solvent and peroxide formation inhibitor. The methods find particular use in the purification of solvents that are useful in process chemicals for the manufacture of semiconductor devices.
Abstract: Organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a component that comprises one or more uracil moieties. Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
Type:
Grant
Filed:
December 30, 2011
Date of Patent:
July 30, 2019
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
Owendi Ongayi, Vipul Jain, Suzanne Coley, Anthony Zampini
Abstract: A battery comprises an anode, a cathode, a first reference electrode, and a second reference electrode. The battery also include an electrolyte between each of the anode, cathode, first reference electrode, and second reference electrode.
Abstract: New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprises one or more materials that have hetero-substituted carbocyclic aryl groups. Particularly preferred photoresists of the invention can exhibit reduced leaching of resist materials into an immersion fluid contacting the resist layer during immersion lithography processing.
Type:
Grant
Filed:
November 19, 2009
Date of Patent:
July 23, 2019
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
Deyan Wang, Cheng-Bai Xu, George G. Barclay
Abstract: The present invention relates to nanostructured materials for use in rechargeable energy storage devices such as lithium batteries, particularly rechargeable secondary lithium batteries, or lithium-ion batteries (LIBs). The present invention includes materials, components, and devices, including nanostructured materials for use as battery active materials, and lithium ion battery (LIB) electrodes comprising such nanostructured materials, as well as manufacturing methods related thereto. Exemplary nanostructured materials include silicon-based nanostructures such as silicon nanowires and coated silicon nanowires, nanostructures disposed on substrates comprising active materials or current collectors such as silicon nanowires disposed on graphite particles or copper electrode plates, and LIB anode composites comprising high-capacity active material nanostructures formed on a porous copper and/or graphite powder substrate.
Abstract: The present development is a reactor system for the production of nanostructures. The reactor system comprises a conical reactor body designed to maintain an upwardly directed vertical plasma flame and hydrocarbon flame. The reactor system further includes a metal powder feed that feeds into the plasma flame, a cyclone and a dust removal unit. The system is designed to produce up to 100 grams of metal oxide nanomaterials per minute.
Type:
Application
Filed:
August 15, 2017
Publication date:
June 27, 2019
Applicant:
Advanced Energy Materials, LLC
Inventors:
Mahendra Sunkara, Tu Quang Nguyen, Lukus Guhy, William Paxton