Abstract: We claim a hammer driven actuator that uses the fast-motion, low-force characteristics of an electro-magnetic or similar prime mover to develop kinetic energy that can be transformed via a friction interface to produce a higher-force, lower-speed linear or rotary actuator by using a hammering process to produce a series of individual steps. Such a system can be implemented using a voice-coil, electro-mechanical solenoid or similar prime mover. Where a typical actuator provides limited range of motion or low force, the range of motion of a linear or rotary impact driven motor can be configured to provide large displacements which are not limited by the characteristic dimensions of the prime mover.
Type:
Grant
Filed:
May 8, 2015
Date of Patent:
April 10, 2018
Assignee:
Dynamic Structures and Materials, LLC
Inventors:
Jeffrey S. N. Paine, Byron F. Smith, Joshua J. Sesler, Matthew T. Paine, Bert K. McMahan, Mark C. McMahan
Abstract: Electroplating methods enable the plating of photoresist defined features which have substantially uniform morphology. The electroplating methods include copper electroplating baths with reaction products of ?-amino acids and bisepoxides to electroplate the photoresist defined features. Such features include pillars, bond pads and line space features.
Type:
Grant
Filed:
July 27, 2016
Date of Patent:
April 3, 2018
Assignees:
Rohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
Inventors:
Matthew Thorseth, Zuhra Niazimbetova, Yi Qin, Julia Woertink, Joanna Dziewiszek, Erik Reddington, Mark Lefebvre
Abstract: In one aspect, structures are provided that comprise (a) a one-dimensional periodic plurality of layers, wherein at least two of the layers have a refractive index differential sufficient to provide effective contrast; and (b) one or more light-emitting nanostructure materials effectively positioned with respect to the refractive index differential interface, wherein the structure provides a polarized output emission.
Type:
Grant
Filed:
March 10, 2016
Date of Patent:
March 27, 2018
Assignees:
The Board of Trustees of the University of Illinois, Rohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
Inventors:
Brian Cunningham, Gloria G. See, Peter Trefonas, III, Jieqian Zhang, Jong Keun Park, Kevin Howard, Kishori Deshpande, Trevor Ewers
Abstract: Tin or tin alloy plating liquid with a sufficient plated deposit can be formed in the opening without causing burns on the plated film surface or abnormal deposits, and which has a good via filling effect. When a specific ?, ?-unsaturated carbonyl compound is added into the tin or tin alloy plating liquid, the plating liquid with good via filling performance can be obtained, and the deposit which is substantially free of voids and burns or abnormal deposits on the deposit surface are reduced.
Abstract: Catalysts include five-membered nitrogen containing heterocyclic compounds as ligands for metal ions which have catalytic activity. The catalysts are used to electrolessly plate metal on metal clad and un-clad substrates.
Type:
Grant
Filed:
October 23, 2015
Date of Patent:
March 13, 2018
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
Kristen M. Milum, Donald E. Cleary, Maria A. Rzeznik
Abstract: A composition containing a cationic polymer obtained from a reaction product of nitrogen-containing heterocyclic compound and epihalohydrin; and a phosphorus compound. The composition can be used as a surface treatment for gold or gold alloy. The composition can seal pinholes on the surface of the gold or gold alloy.
Abstract: A method and system for linking sensor data to metrology data and metrology data to sensor data is described herein. In one embodiment, a user selection of metrology data for a product is received, related process tool fault detection summary for the selected metrology data for the product is presented, a user selection of a process tool from the process tool fault detection summary is received, and related fault detection details for the selected process tool are presented.
Abstract: The hardness of zinc sulfide is increased by adding selective elements within a specified range to the crystal lattice of the zinc sulfide. The increased hardness over conventional zinc sulfide does not substantially compromise the optical properties of the zinc sulfide. The zinc sulfide may be used as a protective coating for windows and domes.
Type:
Grant
Filed:
October 6, 2016
Date of Patent:
March 13, 2018
Assignees:
Rohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
Inventors:
Jitendra S. Goela, Hangyao Wang, Hua Bai, Michael A. Pickering
Abstract: Pyrazine derivatives which contain one or more electron donating groups on the ring are used as catalytic metal complexing agents in aqueous alkaline environments to catalyze electroless metal plating on metal clad and un-clad substrates. The catalysts are monomers and free of tin and antioxidants.
Abstract: Compositions containing an adhesive material, a release additive and a compatibilizer are suitable for temporarily bonding two surfaces, such as a wafer active side and a substrate. These compositions are useful in the manufacture of electronic devices where a temporary bonding of a component to a substrate is desired.
Type:
Grant
Filed:
January 11, 2016
Date of Patent:
March 6, 2018
Assignees:
Rohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
Inventors:
Zhifeng Bai, Mark S. Oliver, Michael K. Gallagher, Christopher J. Tucker, Karen R. Brantl, Elissei Iagodkine, Zidong Wang
Abstract: A pattern treatment method, comprising: (a) providing a semiconductor substrate comprising a patterned feature on a surface thereof; (b) applying a pattern treatment composition to the patterned feature, wherein the pattern treatment composition comprises: a block copolymer and an organic solvent, wherein the block copolymer comprises: (i) a first block comprising a first unit formed from 4-vinyl-pyridine, and (ii) a second block comprising a first unit formed from a vinyl aromatic monomer; and (c) removing residual pattern shrink composition from the substrate, leaving a coating of the block copolymer over the surface of the patterned feature, thereby providing a reduced pattern spacing as compared with a pattern spacing of the patterned feature prior to coating the pattern treatment composition. The methods find particular applicability in the manufacture of semiconductor devices for providing high resolution patterns.
Type:
Application
Filed:
July 29, 2016
Publication date:
February 1, 2018
Applicants:
Rohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
Inventors:
Jin Wuk Sung, Mingqi Li, Jong Keun Park, Joshua A. Kaitz, Vipul Jain, Chunyi Wu, Phillip D. Hustad
Abstract: Polymeric reaction products of certain substituted tetraarylmethane monomers are useful as underlayers in semiconductor manufacturing processes.
Type:
Grant
Filed:
July 7, 2015
Date of Patent:
January 30, 2018
Assignees:
Rohm and Haas Electronic Materials LLC, Rohm and Haas Electronic Materials Korea Ltd
Inventors:
Emad Aqad, Mingqi Li, Shintaro Yamada, Sung Wook Cho
Abstract: Electroless copper plating baths include alternative reducing agents to the conventional reducing agents currently used in the electroless plating industry. The electroless copper baths are stable and deposit a salmon bright copper deposit on substrates. Exclusion of many environmentally unfriendly conventional reducing agents enables environmentally friendly electroless copper plating baths.
Type:
Grant
Filed:
July 15, 2014
Date of Patent:
January 16, 2018
Assignees:
Rohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
Inventors:
David S. Laitar, Crystal P. L. Li, Andy Lok-Fung Chow
Abstract: Methods of trimming a photoresist pattern comprise: (a) providing a semiconductor substrate; (b) forming a photoresist pattern over the semiconductor substrate, wherein the photoresist pattern is formed from a photoresist composition comprising: a first polymer comprising acid labile groups; and a photoacid generator; (c) coating a pattern trimming composition over the photoresist pattern, wherein the pattern trimming composition comprises a second polymer and a solvent system, wherein the solvent system comprises one or more monoether solvents in a combined amount of 50 wt % or more based on the solvent system; (d) heating the coated semiconductor substrate, thereby causing a change in solubility of a surface region of the photoresist pattern in a rinsing agent to be applied; and (e) contacting the photoresist pattern with a rinsing agent to remove the surface region of the photoresist pattern, thereby forming a trimmed photoresist pattern.
Type:
Grant
Filed:
March 7, 2016
Date of Patent:
January 16, 2018
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
Kevin Rowell, Cong Liu, Cheng Bai Xu, Irvinder Kaur, Jong Keun Park
Abstract: A method for forming a polymerized film on a surface of a non-conductive material and subsequently forming an electroless metal plating film on the surface is described. The method includes the step of contacting the surface of the material with a solution including (A) an amine compound having at least two functional groups, where at least one of the functional groups is an amino group, and (B) an aromatic compound having at least one hydroxyl group on the aromatic ring.
Type:
Grant
Filed:
September 30, 2013
Date of Patent:
January 9, 2018
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
Maria Anna Rzeznik, Philip D. Knudsen, Xuesong Wang, Martin W. Bayes, Yuhsin Tsai
Abstract: A method is directed to increasing the hardness of zinc sulfide. The hardness of zinc sulfide is increased by adding selective elements within a specified range to the crystal lattice of the zinc sulfide. The increased hardness over conventional zinc sulfide does not substantially compromise the optical properties of the zinc sulfide. The zinc sulfide may be used as a protective coating for windows and domes.
Type:
Grant
Filed:
June 10, 2016
Date of Patent:
January 9, 2018
Assignees:
Dow Global Technologies LLC, Rohm and Haas Electronic Materials LLC
Inventors:
Jitendra S. Goela, Hangyao Wang, Hua Bai, Michael A. Pickering
Abstract: Acid bismuth electroplating baths are stable and have high current efficiency over the life of the baths. The bismuth baths are easy to control because of the reduced number of bath components.